[labnetwork] Conformal electron beam resist coating over 3D structures

[Hathaway, Malcolm R]

Hi Adam,

Do you mean conformal, or planarizing?  I would expect most resists/liquids to cover the surface in a level film (i.e. planarizing), with the tips extending out of the resist layer, perhaps getting some coating.  Or do you want a truly conformal coating, like you would expect from ALD deposition?

What is your ultimate goal, and your next step in the process?


Mac
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Adam Legacy <dradamlegacy at gmail.com>
Sent: Tuesday, August 18, 2020 5:11 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Conformal electron beam resist coating over 3D structures

Hi,
We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2.
Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service for this application. What will be suitable for this?
Please advise.
Best regards,
Adam.

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