[labnetwork] Adding TEOS to LPCVD furnace

[Carsen Kline]

Hi Nava: I'll echo Rick's maintenance experience for ours at Stanford. We did a conversion a number of years back and on top of what Rick mentions, our MFC has had trouble stabilizing and suffers clogs every so often. The whole line plus MFC need to be heated. We have a plasma trap at the tube outlet to try and react out some of the TEOS before it gets to the pump. It's effective, but that in itself needs to be cleaned out periodically, and it's messy.

We haven't gotten smart enough to buy our own TEOS ampoules, so we're paying a hefty rental fee for the one in service plus one spare. If you buy your own, you'll need to arrange fills with your friendly supplier and make sure that the heater was made for it.

Happy Friday,
Carsen


Carsen Kline
Lab Operations Manager
Stanford Nanofabrication Facility
(650)724-8214
http://snf.stanford.edu<http://snf.stanford.edu/>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr
Sent: Friday, August 28, 2020 12:03 PM
To: Nava Ariel-Sternberg <na2661 at columbia.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Adding TEOS to LPCVD furnace

When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure you have a trap on the pump line before you hit the pumps, needs to be cleaned often and it is a sickly sweet smell, like ethanol. Make sure you use a tube liner to protect the tube. Lots of flakes on the vacuum side and pay attention to the tube output it likes to clog there. We used a roots blower and every year it needed to be rebuilt due to TEOS deposition.

One the updide TEOS is a great material, we used to densify it with a long anneal at say 1000c.

Hopes this helps

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>




From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg
Sent: Friday, August 28, 2020 11:04 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Adding TEOS to LPCVD furnace

Happy Friday everyone,
I hope you and your families are doing well in these weird times.
We were asked to look into adding a TEOS capability to our LPCVD furnace.
Has any of you done it? Could you advise on the main steps and things to look out for?
Thanks and stay healthy (and happy as much as possible),
Nava


Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Labs
Columbia University
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600


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