From schweig at umich.edu Tue Dec 1 15:46:30 2020 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 1 Dec 2020 15:46:30 -0500 Subject: [labnetwork] C4F8 being hard to find? In-Reply-To: References: <07A37D0A-1815-401D-AEA0-5403469EA0F8@caltech.edu> Message-ID: Guy, our vendor has been using Electronic Fluorocarbons in Pennsylvania. Dennis 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Wed, Nov 25, 2020 at 4:55 PM Dennis Schweiger wrote: > Guy, > > We used to purchase C4F8 from Concord Specialty Gases (1-800-818-5109). > However back in 2013 we switched and now use our local specialty gas vendor > (Cryogenic Gases (313)835-5513) for sourcing this material as it was > less hassle to return the empties. I am not sure who they're using as the > supplier, but will check with them. > > Dennis Schweiger > University of Michigan/LNF > > 734.647.2055 Ofc > > "People can be divided into 3 groups - those that make things happen, > those that watch things happen, and those that wonder what happened." > Within which group do you belong? > > > On Wed, Nov 25, 2020 at 8:30 AM DeRose, Guy A. wrote: > >> Hello community, >> >> >> >> From the time we re-opened our cleanroom back in June through now, we >> have had challenges sourcing C4F8 (Halocarbon C318) gas for our plasma etch >> tools. We have tried three different vendors, and the lead times have been >> unusually long. Are there any gas suppliers that any of you have had good >> luck sourcing this gas within a couple of weeks? I have been waiting for >> one cylinder to be shipped since October 5 and am still waiting. We have >> been trying to get enough to have a spare on hand, but sourcing has been an >> issue to the point of running empty while waiting for a replacement. >> >> >> >> Thanks, >> >> Guy >> >> >> >> Guy DeRose, PhD, Member of the Professional Staff >> >> Associate Director of Technical Operations, Kavli Nanoscience Institute >> >> California Institute of Technology, Pasadena, CA USA >> >> (O) 1-626-395-3423 (M) 1-626-676-8529 >> >> http://kni.caltech.edu >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Thu Dec 3 12:36:36 2020 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S) Date: Thu, 3 Dec 2020 17:36:36 +0000 Subject: [labnetwork] Porous Silicon Etch Wet Bench Message-ID: Colleagues, Does anyone have a "Porous Silicon Wet Bench Station"? for either foundry or self-use? I have a customer that wanted to place a "Porous Silicon Etching" wet bench in my clean room. I don't have the room and the engineering cost alone for the install makes in prohibitive. Please let me know if you know any availability of such a system. Best Regards Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Porous Silicon Etcher pictures.pdf Type: application/pdf Size: 485912 bytes Desc: Porous Silicon Etcher pictures.pdf URL: From RobertVandusen at cunet.carleton.ca Thu Dec 3 13:05:11 2020 From: RobertVandusen at cunet.carleton.ca (Robert Vandusen) Date: Thu, 3 Dec 2020 18:05:11 +0000 Subject: [labnetwork] Lookjng for manual for ULVAC CRTM 9000 deposition controller Message-ID: Hi everyone. I am looking for a manual for an Ulvac CRTM-9000 (or possibly a 9100) deposition controller. If anyone has or knows where I could get a copy that would appreciated. Thanks Robert Vandusen Microfabrication Cleanlab Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Dec 3 16:27:54 2020 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 3 Dec 2020 21:27:54 +0000 Subject: [labnetwork] Porous Silicon Etch Wet Bench In-Reply-To: References: Message-ID: I've made porous silicon at our electroplating bench. No need to install a new bench. Just make sure it can handle 49% HF. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Ferraguto, Thomas S Sent: Thursday, December 3, 2020 12:36 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Porous Silicon Etch Wet Bench CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Colleagues, Does anyone have a ?Porous Silicon Wet Bench Station?? for either foundry or self-use? I have a customer that wanted to place a ?Porous Silicon Etching? wet bench in my clean room. I don?t have the room and the engineering cost alone for the install makes in prohibitive. Please let me know if you know any availability of such a system. Best Regards Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From info at fabsurplus.com Fri Dec 4 05:28:49 2020 From: info at fabsurplus.com (Stephen Howe) Date: Fri, 04 Dec 2020 11:28:49 +0100 Subject: [labnetwork] Porous Silicon Etch Wet Bench In-Reply-To: References: Message-ID: <45e345702081e8cc25321e8b0563e956210b1b6e.camel@fabsurplus.com> Dear Thomas, I am not sure, but I guess you asked the OEM for the quote you obtained ?I sell used equipment, and we can typically supply it at a much lower cost than new equipment, especially if we sell it "as is". The problem with used equipment is that re-engineering is difficult and expensive , so costs only remain low if an item of equipment with the exact configuration you need is available.For items like wet benches, this becomes difficult, due to there is a very wide range of possible configurations. However, In this particular case, there is one production wet bench for porous silicon available for sale.So, it could be provided for a reasonable cost.It is pretty big though. So, let me know if interested ? Here are the system details:- https://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=93378 On Thu, 2020-12-03 at 17:36 +0000, Ferraguto, Thomas S wrote: > Colleagues, > > Does anyone have a ?Porous Silicon Wet Bench Station?? for either > foundry or self-use? > > I have a customer that wanted to place a ?Porous Silicon Etching? wet > bench in my clean room. > > I don?t have the room and the engineering cost alone for the install > makes in prohibitive. > > > Please let me know if you know any availability of such a system. > > Best Regards > > > Thomas S. Ferraguto > Saab ETIC Nanofabrication Laboratory Director > Saab ETIC Building Director > 1 University Avenue > Lowell MA 01854 > Mobile 617-755-0910 > Land 978-934-1809 > Fax 978-934-1014 > > > > > > > > > _______________________________________________labnetwork mailing > listlabnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Yours Sincerely, SDI Fabsurplus LLC Stephen Howe Company Owner email: info at fabsurplus.com Mobile: +1 830-388-1071 Skype: stephencshowe WWW.FABSURPLUS.COM Linkedin: https://www.linkedin.com/company/sdi-fabsurplus Twitter: https://twitter.com/fabsurplus Instagram: www.instagram.com/fabsurplus Facebook:www.facebook.com/fabsurplus Featured Sales Items:- Video of Complete Gan-on-Sapphire 4 inch LED manufacturing pilot line for immediate bid sale:- http://fabsurplus.com/graphics/GaN-Sapphire-LED-Facility-For-Sale.mp4 Mini-Lot of Semiconductor Test Equipment for sale by Fabsurplus.com - Advantest, Nextest, Verigy:- https://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=100994 Partial 8 inch wafer fab line (290 items) for sale by Fabsurplus.com:-https://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=101332 Important Notice The information contained in this email is confidential. If you are not the intended recipient,you must not disclose or use the information in this email in any way.If you received it in error, please tell us immediately by return email and delete this message.SDI-Fabsurplus, LLC does not guarantee the integrity of any emails or attached files. It is also not responsible for any changes made to them by any other person. Fraud Alert - The strategically important semiconductor equipment sector is currently under attack by fraudsters.Many false and mis-spelled versions of common websites are being registered for use in"Business E-mail Compromise" schemes. False companies have been set up in all parts of the world, including the USA, to do wire fraud. Avoid e-mail fraud by defining an I.T. security policy and carefully monitoring any bank transfers for false information.Check any e-mails sent to you are legitimate by looking at the e-mail headers, and scan any attachments for viruses before opening them. -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.call at maine.edu Fri Dec 4 09:31:27 2020 From: michael.call at maine.edu (Michael Call) Date: Fri, 4 Dec 2020 09:31:27 -0500 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support Message-ID: We have an issue with "Focus Signal lost" and "time out" errors on our pattern generator. Sometimes the column will attempt to focus off of the glass plate(laser system losing counts?). I've cleaned and oiled the stages, changed plates and all of the usual, but with no luck. I know that Bob Scruton passed away a few years ago. Has anyone taken over the service of these machines? Thanks, -- Mike Call Research Engineer University of Maine Frontier Institute for Research in Sensor Technologies (FIRST) Coordinated Research entities Cleanroom ESRB Barrows Hall room 294 207-581-3382 [image: image.png] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From gregmullins at berkeley.edu Fri Dec 4 13:12:03 2020 From: gregmullins at berkeley.edu (Greg Mullins) Date: Fri, 4 Dec 2020 10:12:03 -0800 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: References: Message-ID: Hi Mike, I used to work with RZ Enterprises, and we did service all GCA tools, including pattern generators?In fact I still have one that I take care of here at Berkeley. Let me put together some information later today to see if I can help you through this, and also I will put out feelers on who is still servicing them. Best, G~ On Fri, Dec 4, 2020 at 8:54 AM Michael Call wrote: > We have an issue with "Focus Signal lost" and "time out" errors on our > pattern generator. Sometimes the column will attempt to focus off of the > glass plate(laser system losing counts?). I've cleaned and oiled the > stages, changed plates and all of the usual, but with no luck. I know that > Bob Scruton passed away a few years ago. Has anyone taken over the service > of these machines? > > Thanks, > > -- > Mike Call > Research Engineer > University of Maine > Frontier Institute for Research in Sensor Technologies (FIRST) > Coordinated Research entities Cleanroom > ESRB Barrows Hall room 294 > 207-581-3382 > [image: image.png] > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Greg Mullins R&D Engineer 4 Marvell Nanofabrication Laboratory University of California at Berkeley 520 Sutardja Dai Hall, MS 1754 Berkeley, CA 94720-1754 Office: (510) 809-8625 Email: gregmullins at berkeley.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From manish.keswani01 at gmail.com Fri Dec 4 17:11:30 2020 From: manish.keswani01 at gmail.com (Manish Keswani) Date: Fri, 4 Dec 2020 14:11:30 -0800 Subject: [labnetwork] Toxic gases Message-ID: Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. ?Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it.? Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory -------------- next part -------------- An HTML attachment was scrubbed... URL: From matt at 3ctechnical.com Fri Dec 4 18:15:47 2020 From: matt at 3ctechnical.com (Matt Pace) Date: Fri, 04 Dec 2020 23:15:47 +0000 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: References: Message-ID: <5fcac1391a66e1703e000003@polymail.io> Hi Mike, I used to work for Bob Scruton (as did one of my employees, Mike Arnold), many moons ago. Bob was definitely the expert when it came to these older GCA pattern generators, but the 3600F is very similar to a GCA 4800 or even 6300 - especially in regards to the stages, Both Mike and I have worked on the 3600s here and there, so we may be able to help you out a bit. Unfortunately we don't have many PG parts because the demand for servicing them mostly dried up and we focused in on taking care of the new GCA tools instead. Regardless, if you can provide more details on the errors (maybe send some pictures of the actual errors printed on the screen) and describe what you are running when you get the particular errors, we'll put our heads together and see what you may be up against. All the best, Matt --- Matt Pace 3c Technical matt at 3ctechnical.com ( matt at 3ctechnical.com ) www.3ctechnical.com ( http://www.3ctechnical.com/ ) 480-963-4559?voice On Fri, Dec 4th, 2020 at 11:12 AM, Greg Mullins wrote: > > Hi Mike, > I used to work with RZ Enterprises, and we did service all GCA tools, > including pattern generators?In fact I still have one that I take care of > here at Berkeley. Let me put together some information later today to see > if I can help you through this, and also I will put out feelers on who is > still servicing them. > Best, > G~ > > > On Fri, Dec 4, 2020 at 8:54 AM Michael Call < michael.call at maine.edu > > wrote: > > >> We have an issue with "Focus Signal lost" and "time out" errors on our >> pattern generator.? Sometimes the column will attempt to focus off of the >> glass plate(laser system losing counts?).? I've cleaned and oiled the >> stages, changed plates and all of the usual, but with no luck.? I know >> that Bob Scruton passed away a few years ago.? Has anyone taken over the >> service of these machines? >> >> >> Thanks, >> >> >> -- >> Mike Call >> Research Engineer >> University of Maine >> >> Frontier Institute for Research in Sensor Technologies (FIRST) >> Coordinated Research entities Cleanroom? >> ESRB Barrows Hall room 294 >> >> 207-581-3382 >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > -- > Greg Mullins > R&D Engineer 4 > ? > Marvell Nanofabrication Laboratory > University of California at Berkeley > 520 Sutardja Dai Hall, MS 1754 > Berkeley, CA 94720-1754 > Office: (510) 809-8625 > > Email:?gregmullins at berkeley.edu > -------------- next part -------------- An HTML attachment was scrubbed... URL: From gregmullins at berkeley.edu Fri Dec 4 18:56:59 2020 From: gregmullins at berkeley.edu (Greg Mullins) Date: Fri, 4 Dec 2020 15:56:59 -0800 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: <5fcac1391a66e1703e000003@polymail.io> References: <5fcac1391a66e1703e000003@polymail.io> Message-ID: Yeah Mike...I was going to recommend Matt...as he?s still servicing many of these early tools. There are some minor differences on the early systems like the PG, but usually if you don?t start tweaking the stage servo pots, you can get the stage mechanics back in shape and it should play nice. An important pm service is an annual stage pull... where are you remove the stages from the system and clean them all up...the undersides have some bearings and Rulon shoes, as well as rack and pinion gearing that need to be cleaned up and lubricated, as well as cleaning and re-lubricating the surfaces that these shoes slide on. We call them keys and ways. If the stage doesn?t move freely by its design, because of gunked up oil underneath the stage where you can?t reach for cleaning, it definitely slows them down and that?s when you start getting into timing issues on a pattern generator as it?s trying to originate...hence Auto Focus failure (which tends to be the first error message in the software that it likes to toss out). I?ve also found that if the speed of the stage during OG is too slow to reach the load position, autofocus failure...so it?s a balance game. Check in with Matt and see how that goes!! Best, G~ On Fri, Dec 4, 2020 at 3:15 PM Matt Pace wrote: > Hi Mike, > > I used to work for Bob Scruton (as did one of my employees, Mike Arnold), > many moons ago. Bob was definitely the expert when it came to these older > GCA pattern generators, but the 3600F is very similar to a GCA 4800 or even > 6300 - especially in regards to the stages, Both Mike and I have worked on > the 3600s here and there, so we may be able to help you out a bit. > > Unfortunately we don't have many PG parts because the demand for servicing > them mostly dried up and we focused in on taking care of the new GCA tools > instead. Regardless, if you can provide more details on the errors (maybe > send some pictures of the actual errors printed on the screen) and describe > what you are running when you get the particular errors, we'll put our > heads together and see what you may be up against. > > All the best, > Matt > > --- > > Matt Pace > > 3c Technical > > matt at 3ctechnical.com > > www.3ctechnical.com > > 480-963-4559 voice > > On Fri, Dec 4th, 2020 at 11:12 AM, Greg Mullins > wrote: > >> Hi Mike, >> I used to work with RZ Enterprises, and we did service all GCA tools, >> including pattern generators?In fact I still have one that I take care of >> here at Berkeley. Let me put together some information later today to see >> if I can help you through this, and also I will put out feelers on who is >> still servicing them. >> Best, >> G~ >> >> On Fri, Dec 4, 2020 at 8:54 AM Michael Call >> wrote: >> >> We have an issue with "Focus Signal lost" and "time out" errors on our >> pattern generator. Sometimes the column will attempt to focus off of the >> glass plate(laser system losing counts?). I've cleaned and oiled the >> stages, changed plates and all of the usual, but with no luck. I know that >> Bob Scruton passed away a few years ago. Has anyone taken over the service >> of these machines? >> >> Thanks, >> >> -- >> Mike Call >> Research Engineer >> University of Maine >> Frontier Institute for Research in Sensor Technologies (FIRST) >> Coordinated Research entities Cleanroom >> ESRB Barrows Hall room 294 >> 207-581-3382 >> [image: image.png] >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> -- >> Greg Mullins >> R&D Engineer 4 >> >> Marvell Nanofabrication Laboratory >> University of California at Berkeley >> 520 Sutardja Dai Hall, MS 1754 >> Berkeley, CA 94720-1754 >> Office: (510) 809-8625 >> Email: gregmullins at berkeley.edu >> > > -- Greg Mullins R&D Engineer 4 Marvell Nanofabrication Laboratory University of California at Berkeley 520 Sutardja Dai Hall, MS 1754 Berkeley, CA 94720-1754 Office: (510) 809-8625 Email: gregmullins at berkeley.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From hbtusainc at yahoo.com Fri Dec 4 19:37:01 2020 From: hbtusainc at yahoo.com (Mario Portillo) Date: Sat, 5 Dec 2020 00:37:01 +0000 (UTC) Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: References: Message-ID: <877477312.2967341.1607128621866@mail.yahoo.com> Mike, if anybody can help you is Greg Mullins, he worked for me as a field service engineer at Electromask Corp. then under one of the best GCAs guys Richard Ziegra for many years..... My two cents...... Mario A. Portillo Sr. HIGH'born Technology USA Inc.. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 470-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com On Saturday, December 5, 2020, 04:48:28 AM GMT+8, Greg Mullins wrote: Hi Mike,I used to work with RZ Enterprises, and we did service all GCA tools, including pattern generators?In fact I still have one that I take care of here at Berkeley. Let me put together some information later today to see if I can help you through this, and also I will put out feelers on who is still servicing them.Best,G~ On Fri, Dec 4, 2020 at 8:54 AM Michael Call wrote: We have an issue with "Focus Signal lost" and "time out" errors on our pattern generator.? Sometimes the column will attempt to focus off of the glass plate(laser system losing counts?).? I've cleaned and oiled the stages, changed plates and all of the usual, but with no luck.? I know that Bob Scruton passed away a few years ago.? Has anyone taken over the service of these machines? Thanks, -- Mike Call Research Engineer University of Maine Frontier Institute for Research in Sensor Technologies (FIRST)Coordinated Research entities Cleanroom?ESRB Barrows Hall room 294 207-581-3382_______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Greg MullinsR&D Engineer 4?Marvell Nanofabrication Laboratory University of California at Berkeley520 Sutardja Dai Hall, MS 1754 Berkeley, CA 94720-1754 Office: (510) 809-8625 Email:?gregmullins at berkeley.edu_______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From carsen at stanford.edu Fri Dec 4 23:03:56 2020 From: carsen at stanford.edu (Carsen Kline) Date: Sat, 5 Dec 2020 04:03:56 +0000 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Hi Manish, Stanford is governed by the Santa Clara County Toxic Gas Ordinance, which exceeds or embellishes California building and fire code. (For reference: https://www.sccgov.org/sites/hazmat/programs/tgo/Pages/home.aspx) With automated gas cabinets and the required gas detection, we can keep our cylinders always open and available. The built-in engineering controls on the cabinets (normally closed valves, flame detectors for silane, pneumatic cylinder valves in many cases) both satisfy County code and let us sleep at night. Best, Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility 650-724-8214 snfexfab.stanford.edu ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Manish Keswani Sent: Friday, December 4, 2020 2:11 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Toxic gases Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. ?Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it.? Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory -------------- next part -------------- An HTML attachment was scrubbed... URL: From shimonel at savion.huji.ac.il Fri Dec 4 23:35:48 2020 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Sat, 5 Dec 2020 04:35:48 +0000 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: <1CAAE951-5CF2-42AB-A4F9-8DCC4DBAB417@savion.huji.ac.il> Hi Manish, Our clean room is small and our Gas Pad is very close, so the gas lines are relatively short by design. Every cylinder is equipped with a pneumatic valve. We control those valves from the clean room. No need to someone to come to the Gas Pad to close/open valves. Our protocol is to close all the valves by the end of the day. For the toxic/corrosive gases we evacuate the lines after use and perform a leak test before open the valve, using a built-in routine at our Oxford machines. The cylinders for corrosive/toxic gases are small (some 5 liters volume, 1kg gas content). Our use is small, so the last for years. It is a simple protocol and reasonable: the idea is to limit the damage in case of leak, although leak sensors are installed. For those can?t evacuate the lines, at least to close them by the end of the day is a good practice. Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Israel Sent from my iPhone On 5 Dec 2020, at 2:49, Manish Keswani wrote: ? Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. ?Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it.? Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From sieb at 4dlabs.ca Fri Dec 4 23:54:20 2020 From: sieb at 4dlabs.ca (Nathanael Sieb) Date: Fri, 4 Dec 2020 20:54:20 -0800 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Hi Manish, I tend to concur with that statement.? We leave all of our gases on 24/7 and we have automatic shut-offs on the toxics if there are issues (gas leak, power loss, excess flow, etc.).? We only close the valve when we are changing cylinders, and that is followed by leak checks in case there is a valve failure.? Constant use of the valves is a potential failure point, though I'm sure the cylinders are built for it. Thanks, Nathanael On 2020-12-04 2:11 p.m., Manish Keswani wrote: > > Happy Friday everyone, > > > I have a question related to toxic gases in our nano fabrication center. > > We typically shut off our toxic gases at the source when not in use, > using the in line valves on the Safety Manifolds, the ESO valves, and > the cylinder valve. This is to comply with the administrative control > stated in our gas safety notes. The following question came up for > toxic gases. I would like to understand how this is being done at > other facilities and the reasoning behind it. > > ?Is there a good reason we turn off the toxic gases at the end of the > day instead of just leaving them on? It seems like if there is a risk, > it would be wear and tear on the valves etc, plus someone going in > vault often to do it.? > > Thanks in advance, > > Manish Keswani > > Lawrence Livermore National Laboratory > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Sat Dec 5 05:56:15 2020 From: schweig at umich.edu (Dennis Schweiger) Date: Sat, 5 Dec 2020 05:56:15 -0500 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Manish, good morning. Here at the University of Michigan Lurie Nanofrabrication Facility, we rarely turn our HPM gases off. We have turned them off when we've had service work done on our exhaust system, just in case, but for the most part, they're on 24/7/365. We've been running this way forever, and have experienced excellent results. I will say that we also have about 160 points of gas detection scattered throughout the fab, monitored by our TGMS, so we're doing an extensive sampling for leaks. Our TGMS can turn off the specific gas cabinet if a leak is detected. Thanks, Dennis Schweiger Facilities Manager University of Michigan/LNF 734.647.2055 Ofc On Fri, Dec 4, 2020 at 7:45 PM Manish Keswani wrote: > Happy Friday everyone, > > > I have a question related to toxic gases in our nano fabrication center. > > > > We typically shut off our toxic gases at the source when not in use, using > the in line valves on the Safety Manifolds, the ESO valves, and the > cylinder valve. This is to comply with the administrative control stated in > our gas safety notes. The following question came up for toxic gases. I > would like to understand how this is being done at other facilities and the > reasoning behind it. > > > > ?Is there a good reason we turn off the toxic gases at the end of the day > instead of just leaving them on? It seems like if there is a risk, it would > be wear and tear on the valves etc, plus someone going in vault often to do > it.? > > > > > > Thanks in advance, > > Manish Keswani > > Lawrence Livermore National Laboratory > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From manish.keswani01 at gmail.com Sun Dec 6 15:26:29 2020 From: manish.keswani01 at gmail.com (Manish Keswani) Date: Sun, 6 Dec 2020 12:26:29 -0800 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Thank you so much everyone for such an enthusiastic response. It seems clear that at most facilities (if not all), the gas cylinders are always kept open. We also have TGMS in our cleanroom which allows monitoring of the toxic gases at multiple locations (source and delivery point) and will shut off the ESO valve in the event of a leak. We will work with our safety and ES&H teams to change our current practice of turning off the gases when not in use. Regards, Manish [image: image.png] On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani wrote: > Happy Friday everyone, > > > I have a question related to toxic gases in our nano fabrication center. > > > > We typically shut off our toxic gases at the source when not in use, using > the in line valves on the Safety Manifolds, the ESO valves, and the > cylinder valve. This is to comply with the administrative control stated in > our gas safety notes. The following question came up for toxic gases. I > would like to understand how this is being done at other facilities and the > reasoning behind it. > > > > ?Is there a good reason we turn off the toxic gases at the end of the day > instead of just leaving them on? It seems like if there is a risk, it would > be wear and tear on the valves etc, plus someone going in vault often to do > it.? > > > > > > Thanks in advance, > > Manish Keswani > > Lawrence Livermore National Laboratory > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 105149 bytes Desc: not available URL: From sreevyas at gmail.com Mon Dec 7 01:17:45 2020 From: sreevyas at gmail.com (Srinivasa Reddy) Date: Mon, 7 Dec 2020 11:47:45 +0530 Subject: [labnetwork] Toxic gases- Great conclusion by Manish In-Reply-To: References: Message-ID: Dear Manish, Your table making and summing is nice and easy to understand Thanks & Regards Srinivasa Reddy Kuppireddi Project Manager Center for NEMS & Nano Photonics (CNNP) ESB 225, Dept. of Electrical Engineering Indian Institute of Technology(IIT) Madras Chennai-600036, Indian +91 44 2257 5493 (O) +91 789 326 8010(M) On Mon, Dec 7, 2020 at 2:13 AM Manish Keswani wrote: > Thank you so much everyone for such an enthusiastic response. It seems > clear that at most facilities (if not all), the gas cylinders are always > kept open. We also have TGMS in our cleanroom which allows monitoring of > the toxic gases at multiple locations (source and delivery point) and will > shut off the ESO valve in the event of a leak. > > We will work with our safety and ES&H teams to change our current practice > of turning off the gases when not in use. > > > > Regards, > > Manish > > > [image: image.png] > > > On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani > wrote: > >> Happy Friday everyone, >> >> >> I have a question related to toxic gases in our nano fabrication center. >> >> >> >> We typically shut off our toxic gases at the source when not in use, >> using the in line valves on the Safety Manifolds, the ESO valves, and the >> cylinder valve. This is to comply with the administrative control stated in >> our gas safety notes. The following question came up for toxic gases. I >> would like to understand how this is being done at other facilities and the >> reasoning behind it. >> >> >> >> ?Is there a good reason we turn off the toxic gases at the end of the day >> instead of just leaving them on? It seems like if there is a risk, it would >> be wear and tear on the valves etc, plus someone going in vault often to do >> it.? >> >> >> >> >> >> Thanks in advance, >> >> Manish Keswani >> >> Lawrence Livermore National Laboratory >> > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 105149 bytes Desc: not available URL: From julia.aebersold at louisville.edu Mon Dec 7 11:01:02 2020 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Mon, 7 Dec 2020 16:01:02 +0000 Subject: [labnetwork] Toxic gases In-Reply-To: References: , Message-ID: The Micro/Nano Technology Center at the University of Louisville has the same protocol. We do not turn off our cylinders, but they controlled by our gas cabinets and TGMS system. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Manish Keswani Sent: Sunday, December 6, 2020 3:26 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Toxic gases CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Thank you so much everyone for such an enthusiastic response. It seems clear that at most facilities (if not all), the gas cylinders are always kept open. We also have TGMS in our cleanroom which allows monitoring of the toxic gases at multiple locations (source and delivery point) and will shut off the ESO valve in the event of a leak. We will work with our safety and ES&H teams to change our current practice of turning off the gases when not in use. Regards, Manish [image.png] On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani > wrote: Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. ?Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it.? Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 105149 bytes Desc: image.png URL: From wrightsh at lnf.umich.edu Mon Dec 7 11:10:13 2020 From: wrightsh at lnf.umich.edu (Shawn Wright) Date: Mon, 7 Dec 2020 11:10:13 -0500 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: References: Message-ID: <94A284D6-EDDD-4D04-98DA-AA086F34957B@lnf.umich.edu> Hi Mike, You could contact Randy Ellsworth with Stepper Care Services. We have a service contract with them for our AutoStep 200 and they have a lot of experience with these tools, and have parts. They even got us back in tip-top shape after a pretty serious flood that filled up the environmental chambers HEPA filter and rained over the whole system. Thanks, Shawn Wright Lead Research Engineer Lurie Nanofabrication Facility University of Michigan > On Dec 4, 2020, at 9:31 AM, Michael Call wrote: > > We have an issue with "Focus Signal lost" and "time out" errors on our pattern generator. Sometimes the column will attempt to focus off of the glass plate(laser system losing counts?). I've cleaned and oiled the stages, changed plates and all of the usual, but with no luck. I know that Bob Scruton passed away a few years ago. Has anyone taken over the service of these machines? > > Thanks, > > -- > Mike Call > Research Engineer > University of Maine > Frontier Institute for Research in Sensor Technologies (FIRST) > Coordinated Research entities Cleanroom > ESRB Barrows Hall room 294 > 207-581-3382 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.call at maine.edu Mon Dec 7 11:19:48 2020 From: michael.call at maine.edu (Michael Call) Date: Mon, 7 Dec 2020 11:19:48 -0500 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: <94A284D6-EDDD-4D04-98DA-AA086F34957B@lnf.umich.edu> References: <94A284D6-EDDD-4D04-98DA-AA086F34957B@lnf.umich.edu> Message-ID: Thank you for all of the information. I'm in contact with Matt Pace. Thanks, Mike On Mon, Dec 7, 2020, 11:10 AM Shawn Wright wrote: > Hi Mike, > > You could contact Randy Ellsworth with Stepper > Care Services. We have a service contract with them for our AutoStep 200 > and they have a lot of experience with these tools, and have parts. They > even got us back in tip-top shape after a pretty serious flood that filled > up the environmental chambers HEPA filter and rained over the whole system. > > Thanks, > Shawn Wright > Lead Research Engineer > Lurie Nanofabrication Facility > University of Michigan > > > > On Dec 4, 2020, at 9:31 AM, Michael Call wrote: > > We have an issue with "Focus Signal lost" and "time out" errors on our > pattern generator. Sometimes the column will attempt to focus off of the > glass plate(laser system losing counts?). I've cleaned and oiled the > stages, changed plates and all of the usual, but with no luck. I know that > Bob Scruton passed away a few years ago. Has anyone taken over the service > of these machines? > > Thanks, > > -- > Mike Call > Research Engineer > University of Maine > Frontier Institute for Research in Sensor Technologies (FIRST) > Coordinated Research entities Cleanroom > ESRB Barrows Hall room 294 > 207-581-3382 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Mon Dec 7 12:17:40 2020 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Mon, 7 Dec 2020 12:17:40 -0500 Subject: [labnetwork] Toxic gases In-Reply-To: References: , Message-ID: <01d101d6ccbc$deb218e0$9c164aa0$@columbia.edu> Same for Columbia. -Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Aebersold,Julia W. Sent: Monday, December 7, 2020 11:01 AM To: Manish Keswani ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Toxic gases The Micro/Nano Technology Center at the University of Louisville has the same protocol. We do not turn off our cylinders, but they controlled by our gas cabinets and TGMS system. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ _____ From: labnetwork-bounces at mtl.mit.edu > on behalf of Manish Keswani > Sent: Sunday, December 6, 2020 3:26 PM To: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Toxic gases CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Thank you so much everyone for such an enthusiastic response. It seems clear that at most facilities (if not all), the gas cylinders are always kept open. We also have TGMS in our cleanroom which allows monitoring of the toxic gases at multiple locations (source and delivery point) and will shut off the ESO valve in the event of a leak. We will work with our safety and ES&H teams to change our current practice of turning off the gases when not in use. Regards, Manish On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani > wrote: Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. "Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it." Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 105149 bytes Desc: not available URL: From kurt.kupcho at wisc.edu Mon Dec 7 12:49:35 2020 From: kurt.kupcho at wisc.edu (Kurt Kupcho) Date: Mon, 7 Dec 2020 17:49:35 +0000 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Same with the University of Wisconsin. Kurt Kupcho Materials Science Engineer Nanoscale Fabrication Center (NFC) University of Wisconsin 1550 Engineering Dr. ECB 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 [cid:image003.jpg at 01D6CC8F.07AB3A20] From: labnetwork-bounces at mtl.mit.edu On Behalf Of julia.aebersold at louisville.edu Sent: Monday, December 7, 2020 10:01 AM To: Manish Keswani ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Toxic gases The Micro/Nano Technology Center at the University of Louisville has the same protocol. We do not turn off our cylinders, but they controlled by our gas cabinets and TGMS system. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork-bounces at mtl.mit.edu > on behalf of Manish Keswani > Sent: Sunday, December 6, 2020 3:26 PM To: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Toxic gases CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Thank you so much everyone for such an enthusiastic response. It seems clear that at most facilities (if not all), the gas cylinders are always kept open. We also have TGMS in our cleanroom which allows monitoring of the toxic gases at multiple locations (source and delivery point) and will shut off the ESO valve in the event of a leak. We will work with our safety and ES&H teams to change our current practice of turning off the gases when not in use. Regards, Manish [cid:image002.png at 01D6CC8F.07A67F30] On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani > wrote: Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. "Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it." Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 105149 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.jpg Type: image/jpeg Size: 4018 bytes Desc: image003.jpg URL: From randyellsworth18 at gmail.com Mon Dec 7 13:29:44 2020 From: randyellsworth18 at gmail.com (Randy Ellsworth) Date: Mon, 7 Dec 2020 13:29:44 -0500 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: <94A284D6-EDDD-4D04-98DA-AA086F34957B@lnf.umich.edu> References: <94A284D6-EDDD-4D04-98DA-AA086F34957B@lnf.umich.edu> Message-ID: ? ?Hi Mike, Nice to meet you! Like Shawn says we?ve very familiar with the GCA steppers, but have very limited experience with PG?s. Some things like stages and the laser are the same and we could potentially help you out. It would be helpful if you can measure the laser power to see if that confirms your suspicions about losing laser counts. A weak laser could definitely cause trouble like you?ve described. Do you have a meter to measure the power output of the He-Ne laser? We can lend you our meter and send it to you quickly if you provide a FedEx number. Reseating the interface and servo chassis PCB?s can sometimes resolve laser count issues. Take Care, Randy Ellsworth CEO/Owner Stepper Care Services, Inc (512)913-2781 On Mon, Dec 7, 2020 at 11:10 AM Shawn Wright wrote: > Hi Mike, > > You could contact Randy Ellsworth with Stepper > Care Services. We have a service contract with them for our AutoStep 200 > and they have a lot of experience with these tools, and have parts. They > even got us back in tip-top shape after a pretty serious flood that filled > up the environmental chambers HEPA filter and rained over the whole system. > > Thanks, > Shawn Wright > Lead Research Engineer > Lurie Nanofabrication Facility > University of Michigan > > > > On Dec 4, 2020, at 9:31 AM, Michael Call wrote: > > We have an issue with "Focus Signal lost" and "time out" errors on our > pattern generator. Sometimes the column will attempt to focus off of the > glass plate(laser system losing counts?). I've cleaned and oiled the > stages, changed plates and all of the usual, but with no luck. I know that > Bob Scruton passed away a few years ago. Has anyone taken over the service > of these machines? > > Thanks, > > -- > Mike Call > Research Engineer > University of Maine > Frontier Institute for Research in Sensor Technologies (FIRST) > Coordinated Research entities Cleanroom > ESRB Barrows Hall room 294 > 207-581-3382 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From gregmullins at berkeley.edu Mon Dec 7 20:00:42 2020 From: gregmullins at berkeley.edu (Greg Mullins) Date: Mon, 7 Dec 2020 17:00:42 -0800 Subject: [labnetwork] GCA/MANN 3600F Pattern Generator support In-Reply-To: References: <94A284D6-EDDD-4D04-98DA-AA086F34957B@lnf.umich.edu> Message-ID: Hi Mike and Randy, I?d also like to toss in my two cents regarding the age of these systems and the condition of the power supplies in each chassis. When you check them, check for voltage level and condition. Aging power supplies can begin to show drop offs in linear supplies, becoming unable to sustain a consistent voltage due to dry capacitors. Check the voltage with an oscilloscope in AC mode for your best visual on this. G~ On Mon, Dec 7, 2020 at 4:21 PM Randy Ellsworth wrote: > ? > ?Hi Mike, > > Nice to meet you! > > Like Shawn says we?ve very familiar with the GCA steppers, but have very > limited experience with PG?s. Some things like stages and the laser are the > same and we could potentially help you out. > > It would be helpful if you can measure the laser power to see if that > confirms your suspicions about losing laser counts. A weak laser could > definitely cause trouble like you?ve described. > > Do you have a meter to measure the power output of the He-Ne laser? > > We can lend you our meter and send it to you quickly if you provide a > FedEx number. > > Reseating the interface and servo chassis PCB?s can sometimes resolve > laser count issues. > > > Take Care, > > Randy Ellsworth > CEO/Owner > Stepper Care Services, Inc > (512)913-2781 > > On Mon, Dec 7, 2020 at 11:10 AM Shawn Wright > wrote: > >> Hi Mike, >> >> You could contact Randy Ellsworth with >> Stepper Care Services. We have a service contract with them for our >> AutoStep 200 and they have a lot of experience with these tools, and have >> parts. They even got us back in tip-top shape after a pretty serious flood >> that filled up the environmental chambers HEPA filter and rained over the >> whole system. >> >> Thanks, >> Shawn Wright >> Lead Research Engineer >> Lurie Nanofabrication Facility >> University of Michigan >> >> >> >> On Dec 4, 2020, at 9:31 AM, Michael Call wrote: >> >> We have an issue with "Focus Signal lost" and "time out" errors on our >> pattern generator. Sometimes the column will attempt to focus off of the >> glass plate(laser system losing counts?). I've cleaned and oiled the >> stages, changed plates and all of the usual, but with no luck. I know that >> Bob Scruton passed away a few years ago. Has anyone taken over the service >> of these machines? >> >> Thanks, >> >> -- >> Mike Call >> Research Engineer >> University of Maine >> Frontier Institute for Research in Sensor Technologies (FIRST) >> Coordinated Research entities Cleanroom >> ESRB Barrows Hall room 294 >> 207-581-3382 >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Greg Mullins R&D Engineer 4 Marvell Nanofabrication Laboratory University of California at Berkeley 520 Sutardja Dai Hall, MS 1754 Berkeley, CA 94720-1754 Office: (510) 809-8625 Email: gregmullins at berkeley.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From paul_waltz at brown.edu Tue Dec 8 13:29:03 2020 From: paul_waltz at brown.edu (Waltz, Paul) Date: Tue, 8 Dec 2020 13:29:03 -0500 Subject: [labnetwork] Air shower service Message-ID: Dear All, We recently have had an airshower installed in a lab fit out and are having trouble finding a service company to offer PM's. Does anyone in the NE region have a lead on a service provider for routine maintenance? Best Paul Paul Waltz He/Him/His Manager of Facilities and Operations Brown University School of Engineering Box D / 184 Hope Street Providence, RI 02912 401 - 863-1461 *Please note:* Brown University has implemented telecommuting work arrangements due to COVID-19. I am working remotely and will be responding to emails, google chat and returning voicemails, however my response may be delayed. Thank you for your consideration during these uncertain times. -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Fri Dec 11 11:24:31 2020 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S) Date: Fri, 11 Dec 2020 16:24:31 +0000 Subject: [labnetwork] Niobium Oxide Ald Message-ID: Colleagues, I have a customer in need of ALD Niobium Oxide. I don't have the capital to have the bubble installed in my FIJI. Does anyone have the material and could provide the service. Please advise. Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From lino.eugene at uwaterloo.ca Mon Dec 14 15:25:42 2020 From: lino.eugene at uwaterloo.ca (Lino Eugene) Date: Mon, 14 Dec 2020 20:25:42 +0000 Subject: [labnetwork] Cutting Lanthanum aluminate substrate Message-ID: Dear all, We have a request for cutting Lanthanum aluminate (LAO) single crystal substrate with a dicing saw. Some SDS for this materials mention that it has low aquatic toxicity and it must not enter a regular drain. I have some concerns as our dicing saw is connected to regular drain. I thought that the substrate could be scribed/cleaved but it did not work. Does anyone have a experience with this material? Best, Lino Eugene, P.Eng., Ph.D., Micro/nanofabrication process engineer Quantum Nano-Fabrication and Characterization Facility QNC 1611 University of Waterloo 200 University Avenue West Waterloo, ON, Canada N2L 3G1 Ph: +1 519-888-4567 #37788 Cell: +1 226-929-1685 Website: https://qnfcf.uwaterloo.ca/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From RobertVandusen at cunet.carleton.ca Tue Dec 15 12:28:41 2020 From: RobertVandusen at cunet.carleton.ca (Robert Vandusen) Date: Tue, 15 Dec 2020 17:28:41 +0000 Subject: [labnetwork] Question about cleanroom mask policies Message-ID: Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From sieb at 4dlabs.ca Tue Dec 15 16:03:10 2020 From: sieb at 4dlabs.ca (Nathanael Sieb) Date: Tue, 15 Dec 2020 13:03:10 -0800 Subject: [labnetwork] setting up NEMO In-Reply-To: References: <02e5277d-0142-d0a4-f926-7de7a4d55fe0@4dlabs.ca> Message-ID: <4741cb03-63d6-2453-8440-6276ec7c7c8e@4dlabs.ca> Hi all, We are moving forward on the implementation of NEMO, but I have a question for the community out there.? Has anyone developed an invoicing module for it that they would be willing to share?? And if not, is anyone interested in sharing the costs to develop one? Figured I would check before going on our own. Thanks, Nathanael On 2020-11-06 6:31 a.m., Ilic, Robert (Fed) wrote: > > Hi Nathanael, > > We have quite a bit getting started info on GitHub wiki > (https://github.com/usnistgov/NEMO/wiki > ). Please contact me, we can > setup a conference call to discuss details. > > Also, we currently have contractors from Prometheus developing NEMO > for us.? You could also contact them at nemo at prometheuscomputing.com > . > > Regards, > > rob > > B. Robert Ilic, PhD > > National Institute of Standards and Technology, Physical Measurement > Laboratory > > Physicist ? Microsystems and Nanotechnology Division > > Acting Group Leader and Manager ? Center for Nanoscale Science and > Technology NanoFab > > 100 Bureau Drive, Mail Stop 6201, building 216 > > Gaithersburg, MD 20899 > > (301)975-3712 > > robert.ilic at nist.gov > > https://www.nist.gov/cnst > > http://scholar.google.com/citations?user=FxzEsBQAAAAJ&hl=en > > > *From:* labnetwork-bounces at mtl.mit.edu > *On Behalf Of *Nathanael Sieb > *Sent:* Thursday, November 5, 2020 3:31 PM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] setting up NEMO > > Hi all, > > I hope that everyone is doing well.? We have been looking at > implementing a new user and facility management software in our > facility since our current system is starting to have difficulty > scaling as we grow.? We have been looking at NEMO since it is open > source and appears to be highly configurable.? However, our IT team is > looking for some assistance from anyone that may have experience > setting up and configuring this system.? Is there anyone out there in > the lab network universe that might be able to help? > > Thanks in advance! > > Nathanael > > *Nathanael Sieb*** > Director of Operations and Administration ?| 4D LABS > > Simon Fraser University > 8888 University Dr., Burnaby, B.C. V5A 1S6 > T: 778.782.8084?| F: 778.782.3765 | www.4dlabs.ca > > Facebook > ?| > Twitter > ?| > LinkedIn > > *Nathanael Sieb * Director of Operations and Administration ?| 4D LABS Simon Fraser University 8888 University Dr., Burnaby, B.C. V5A 1S6 T: 778.782.8084?| F: 778.782.3765 | www.4dlabs.ca Facebook ?| Twitter ?| LinkedIn -------------- next part -------------- An HTML attachment was scrubbed... URL: From saba.sadeghi at uwaterloo.ca Tue Dec 15 19:23:44 2020 From: saba.sadeghi at uwaterloo.ca (Saba Sadeghi) Date: Wed, 16 Dec 2020 00:23:44 +0000 Subject: [labnetwork] using carbon-tapes for XPS samples Message-ID: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca> Dear all, We have an ultra-high vacuum XPS system. We need to load smaller samples that wouldn't fit into the substrate holder of the system. Would you recommend double-coated carbon tapes for loading samples? Is there a chance of contaminating the system with the carbon tape usage? In case the samples need to be heated, do you have any recommendation? I do appreciate your input on the matter. Best regards, Saba Sadeghi, PhD Quantum Devices Fabrication Scientist Institute for Quantum Computing, University of Waterloo Phone: 519-888-4567 ext. 31111 Email: saba.sadeghi at uwaterloo.ca From jerry.hunter at wisc.edu Tue Dec 15 20:31:22 2020 From: jerry.hunter at wisc.edu (Jerry Hunter) Date: Wed, 16 Dec 2020 01:31:22 +0000 Subject: [labnetwork] using carbon-tapes for XPS samples In-Reply-To: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca> References: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca> Message-ID: I?ve used carbon tape many times in XPS. Stick the tape to a glass slide then samples to the tape and put the glass slide on the holder with clips. That avoids getting carbon tape on your holder. If you need the best vacuum then the carbon tape is not a good idea. Jerry Hunter > On Dec 15, 2020, at 7:23 PM, Saba Sadeghi wrote: > > ?Dear all, > > We have an ultra-high vacuum XPS system. We need to load smaller samples that wouldn't fit into the substrate holder of the system. > Would you recommend double-coated carbon tapes for loading samples? Is there a chance of contaminating the system with the carbon tape usage? > > In case the samples need to be heated, do you have any recommendation? I do appreciate your input on the matter. > > Best regards, > Saba Sadeghi, PhD > Quantum Devices Fabrication Scientist > Institute for Quantum Computing, University of Waterloo > Phone: 519-888-4567 ext. 31111 > Email: saba.sadeghi at uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From shimonel at savion.huji.ac.il Wed Dec 16 03:07:24 2020 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Wed, 16 Dec 2020 08:07:24 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Face Cover Efficiency.pdf Type: application/pdf Size: 987111 bytes Desc: Face Cover Efficiency.pdf URL: From shimonel at savion.huji.ac.il Wed Dec 16 03:55:26 2020 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Wed, 16 Dec 2020 08:55:26 +0000 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Hi Manish, From time it is nice to hear what others are doing related to safety issues. The summary table you sent us about toxic gases lines made me think: perhaps am I exaggerating on my protocol? A legitimate question after being the only one closing the gas lines in the end of the day. This question remained ?in the corner of my mind? since then. We periodically check our leak sensors. Yesterday we received the results of the last check: two sensors need to be replaced. They were not responsive at all. Once I received those results I got the answer to that question in my mind: our protocol is solid! It builds one more layer of protection over the one depending on the leak sensors. When the clean room is closed, the poison/corrosive gas lines are empty. When those lines is under use, we have portable sensors near the user(s), in case of leak and the building leak sensors fail, the user will shut down all the gas lines using the emergency shutdown button nearby. I can soundly sleep in the night ?. I take this opportunity to wish everybody Merry Christmas and Happy New Year!!! Regards, Shimon From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Manish Keswani Sent: Sunday, 6 December 2020 22:26 To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Toxic gases Thank you so much everyone for such an enthusiastic response. It seems clear that at most facilities (if not all), the gas cylinders are always kept open. We also have TGMS in our cleanroom which allows monitoring of the toxic gases at multiple locations (source and delivery point) and will shut off the ESO valve in the event of a leak. We will work with our safety and ES&H teams to change our current practice of turning off the gases when not in use. Regards, Manish [image.png] On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani > wrote: Happy Friday everyone, I have a question related to toxic gases in our nano fabrication center. We typically shut off our toxic gases at the source when not in use, using the in line valves on the Safety Manifolds, the ESO valves, and the cylinder valve. This is to comply with the administrative control stated in our gas safety notes. The following question came up for toxic gases. I would like to understand how this is being done at other facilities and the reasoning behind it. ?Is there a good reason we turn off the toxic gases at the end of the day instead of just leaving them on? It seems like if there is a risk, it would be wear and tear on the valves etc, plus someone going in vault often to do it.? Thanks in advance, Manish Keswani Lawrence Livermore National Laboratory -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 469098 bytes Desc: image002.png URL: From odc1n08 at soton.ac.uk Wed Dec 16 08:25:24 2020 From: odc1n08 at soton.ac.uk (Owain Clark) Date: Wed, 16 Dec 2020 13:25:24 +0000 Subject: [labnetwork] using carbon-tapes for XPS samples In-Reply-To: References: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca> Message-ID: In the past we have also used steel or Al foil to shape small trays with which are then clipped to the XPS sample stage and samples placed inside them. Less UHV issues compared to tape, no residue, good electrical contact to stage if needed, and smaller samples are securely contained. Can even use powders if need be. Our XPS stage is a flat topped 50mm square with various screw mounts for clips so is quite versatile. Owain. -----Original Message----- From: labnetwork-bounces at mtl.mit.edu On Behalf Of Jerry Hunter Sent: 16 December 2020 01:31 To: Saba Sadeghi Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] using carbon-tapes for XPS samples CAUTION: This e-mail originated outside the University of Southampton. I?ve used carbon tape many times in XPS. Stick the tape to a glass slide then samples to the tape and put the glass slide on the holder with clips. That avoids getting carbon tape on your holder. If you need the best vacuum then the carbon tape is not a good idea. Jerry Hunter > On Dec 15, 2020, at 7:23 PM, Saba Sadeghi wrote: > > ?Dear all, > > We have an ultra-high vacuum XPS system. We need to load smaller samples that wouldn't fit into the substrate holder of the system. > Would you recommend double-coated carbon tapes for loading samples? Is there a chance of contaminating the system with the carbon tape usage? > > In case the samples need to be heated, do you have any recommendation? I do appreciate your input on the matter. > > Best regards, > Saba Sadeghi, PhD > Quantum Devices Fabrication Scientist > Institute for Quantum Computing, University of Waterloo > Phone: 519-888-4567 ext. 31111 > Email: saba.sadeghi at uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=04%7C01%7Codc1n08%40soton.ac.uk%7C984827f8d1f84d0d0a0708d8a1c4fae5%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637437214689876490%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=%2F9xgSTpyRBwyguX3QUPLd5dp9VO0PE5YQqR4uzVRH0U%3D&reserved=0 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=04%7C01%7Codc1n08%40soton.ac.uk%7C984827f8d1f84d0d0a0708d8a1c4fae5%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637437214689876490%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=%2F9xgSTpyRBwyguX3QUPLd5dp9VO0PE5YQqR4uzVRH0U%3D&reserved=0 From pilarhf at umich.edu Wed Dec 16 08:37:44 2020 From: pilarhf at umich.edu (Pilar Herrera-Fierro) Date: Wed, 16 Dec 2020 08:37:44 -0500 Subject: [labnetwork] using carbon-tapes for XPS samples In-Reply-To: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca> References: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca> Message-ID: We used In (indium) foil, which is reusable and doesn't degas, best of all you can remove the samples if you need to do another test. It's not easy to remove samples from carbon tape. Pilar On Tue, Dec 15, 2020 at 8:25 PM Saba Sadeghi wrote: > Dear all, > > We have an ultra-high vacuum XPS system. We need to load smaller samples > that wouldn't fit into the substrate holder of the system. > Would you recommend double-coated carbon tapes for loading samples? Is > there a chance of contaminating the system with the carbon tape usage? > > In case the samples need to be heated, do you have any recommendation? I > do appreciate your input on the matter. > > Best regards, > Saba Sadeghi, PhD > Quantum Devices Fabrication Scientist > Institute for Quantum Computing, University of Waterloo > Phone: 519-888-4567 ext. 31111 > Email: saba.sadeghi at uwaterloo.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Pilar Herrera-Fierro, Ph.D. LNF User Services Director Lurie Nanofabrication Facility University of Michigan RM 1239 EECS Building 1301 Beal Ave. Ann Arbor, MI 48109-2122 *Cell* 734 646 1399 (734) 646 1399 www.lnf.umich.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerry.hunter at wisc.edu Wed Dec 16 08:36:06 2020 From: jerry.hunter at wisc.edu (Jerry Hunter) Date: Wed, 16 Dec 2020 13:36:06 +0000 Subject: [labnetwork] using carbon-tapes for XPS samples In-Reply-To: References: <3dbfa89851ef4c15ba6c07ccbba97f3c@uwaterloo.ca>, Message-ID: You can also use Indium foil. It?s more sticky and vacuum compatible. The melt temp is ~150C, so be careful heating. Jerry Hunter > On Dec 16, 2020, at 7:33 AM, Jerry Hunter wrote: > > ?I?ve used carbon tape many times in XPS. Stick the tape to a glass slide then samples to the tape and put the glass slide on the holder with clips. That avoids getting carbon tape on your holder. > > If you need the best vacuum then the carbon tape is not a good idea. > > Jerry Hunter > >> On Dec 15, 2020, at 7:23 PM, Saba Sadeghi wrote: >> >> ?Dear all, >> >> We have an ultra-high vacuum XPS system. We need to load smaller samples that wouldn't fit into the substrate holder of the system. >> Would you recommend double-coated carbon tapes for loading samples? Is there a chance of contaminating the system with the carbon tape usage? >> >> In case the samples need to be heated, do you have any recommendation? I do appreciate your input on the matter. >> >> Best regards, >> Saba Sadeghi, PhD >> Quantum Devices Fabrication Scientist >> Institute for Quantum Computing, University of Waterloo >> Phone: 519-888-4567 ext. 31111 >> Email: saba.sadeghi at uwaterloo.ca >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From tony.olsen at utah.edu Wed Dec 16 09:46:55 2020 From: tony.olsen at utah.edu (Tony L Olsen) Date: Wed, 16 Dec 2020 14:46:55 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: <5c6e0118beb048fca5d871a3ca0dbbc5@utah.edu> Robert Early this summer, when the university began allowing folks back on campus, face masks were required. In fact, the university even provided a multi-layer cloth mask to ALL students, faculty, and staff. Most people use that mask, while some have found other styles. I did not want anyone removing or replacing that mask to enter the cleanroom, so they continue to wear their own mask for the cleanroom. Frankly, I recognized that any user-provided mask (cloth or paper) may not be very effective at particle filtering, but there are worse regular practices that compromise the cleanroom. We only double-mask (add a standard cleanroom snood) when the user's mask does not cover all facial hair. I have no data to support our approach, but it seemed to be a reasonable compromise to the current situation. The biggest problem has been the increased fogging of safety glasses. Social/physical distancing is still promoted, but poorly practiced. I may be na?ve, but I believe standard cleanroom protocols, frequent wipe downs of workstations, occupancy limits, and the high air exchange rate significantly reduce the risk of spread even when social distancing is problematic. Our cleanroom reopened for limited use in May, including several lab courses during Fall Semester. To date, I am unaware of any lab member infected while using the cleanroom - although a few have been elsewhere. tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Drive, Suite 2500 Salt Lake City, UT 84112 801-587-0651 www.nanofab.utah.edu From: Robert Vandusen Sent: Tuesday, December 15, 2020 10:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Wed Dec 16 10:26:13 2020 From: codreanu at udel.edu (Iulian Codreanu) Date: Wed, 16 Dec 2020 10:26:13 -0500 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hi Robert, At Delaware we ask the users to bring their personal face mask (they have to wear it to enter the building anyway) to the gowning room and cover it with a beard cover. This has worked well since we re-opened in the middle of June; the face mask is meant to help with the virus and the beard cover with the lab cleanliness. During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Happy Holidays to Everyone! Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 12/16/2020 3:07 AM, Shimon Eliav wrote: > > Hi Robert, > > When we returned to work after the first lock-down, we asked ourselves > what to do regarding masks/face covers. > > Then I did a very simple experiment to check by myself how effective > is a face-cover to contain the particles we generate during normal > respiration or talking. See attached summary. > > Today our policy is: every user comes with his/her own mask and must > put the face cover over it. This ?two layers? solution is more than > enough inside the clean room (plus as much distancing is possible). > > Regards, > > Shimon > > The Hebrew University of Jerusalem > > The Unit for Nano Fabrication > > Jerusalem - Israel > > *From:* labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Robert Vandusen > *Sent:* Tuesday, 15 December 2020 19:29 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Question about cleanroom mask policies > > Hi all. > > Hope this finds everyone safe. > > Now that N95s are starting to become a bit more accessible, there has > been some recent discussion within our labs about whether to adopt an > N95 mask policy for new users and when distancing is a challenge. > > So far we have just been wearing the standard cleanroom style masks. > > Just wondering what other labs have been using. > > Thanks > > Robert Vandusen > Technical Officer, Microfabrication Lab > Electronics Department > Carleton University > room: 4184 Mackenzie Building > 613-520-2600 ?ext 5761 > Robert_vandusen at cunet.carleton.ca > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbritton at criticalsystemsinc.com Wed Dec 16 10:45:59 2020 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Wed, 16 Dec 2020 15:45:59 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hello Shimon, Thank you for putting this together. It is most helpful in times of mask wearing and social distancing with respect to COVID both in and out of the cleanroom. Two questions, if I can ask: 1. Did you start with a sample of measurements speaking without a mask from the same distances to see how much the mask helped against the baseline? 2. Since the virus ranges in size from 50 to 200 nanometers (0.05 to 0.2 micron), how do you think the numbers would fare under your test with particles of this size? I wish all my UGIM friends and acquaintances a lovely and safe holiday season! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208.890.1417 Office: 877.572.5515 Skype: tombrittoncsi www.CriticalSystemsInc.com [logo for email signature png] Note: 7 days per week Technical Support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork-bounces at mtl.mit.edu On Behalf Of Shimon Eliav Sent: Wednesday, December 16, 2020 1:07 AM To: Robert Vandusen ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From hollingshead.19 at osu.edu Wed Dec 16 10:53:42 2020 From: hollingshead.19 at osu.edu (Hollingshead, David) Date: Wed, 16 Dec 2020 15:53:42 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hi Robert, We follow the same protocol as Shimon. Users wear their personal cloth/disposable mask into the gowning room and then must cover that with a face cover/beard cover. We still have a stock of cleanroom masks available, but prefer users use their own to 1) limit the time a user is unmasked in the gowning room and 2) prevent the clutter of needing a storage solution for those personal masks in the gowning room. -Dave Dave Hollingshead Senior Research Associate - Nanotech West Lab The Ohio State University Suite 100, 1381 Kinnear Road, Columbus, OH 43212 614.292.1355 Office hollingshead.19 at osu.edu osu.edu From: labnetwork-bounces at mtl.mit.edu On Behalf Of Shimon Eliav Sent: Wednesday, December 16, 2020 03:07 To: Robert Vandusen ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From orad at reshef.ca Wed Dec 16 11:13:50 2020 From: orad at reshef.ca (Orad Reshef) Date: Wed, 16 Dec 2020 11:13:50 -0500 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hey Shimon, Pretty cool that you studied that yourselves! I had to look this up to get the context ? coronaviruses are 80-220 nm in diameter , so in the smallest category from your tests. Regards, Orad Reshef, PhD D?partement de physique | Department of Physics Universit? d?Ottawa | University of Ottawa boydnlo.ca | reshef.ca On Wed, Dec 16, 2020 at 8:21 AM Shimon Eliav wrote: > Hi Robert, > > > > When we returned to work after the first lock-down, we asked ourselves > what to do regarding masks/face covers. > > Then I did a very simple experiment to check by myself how effective is a > face-cover to contain the particles we generate during normal respiration > or talking. See attached summary. > > > > Today our policy is: every user comes with his/her own mask and must put > the face cover over it. This ?two layers? solution is more than enough > inside the clean room (plus as much distancing is possible). > > > > Regards, > > > > Shimon > > The Hebrew University of Jerusalem > > The Unit for Nano Fabrication > > Jerusalem - Israel > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Robert Vandusen > *Sent:* Tuesday, 15 December 2020 19:29 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Question about cleanroom mask policies > > > > Hi all. > > Hope this finds everyone safe. > > Now that N95s are starting to become a bit more accessible, there has been > some recent discussion within our labs about whether to adopt an N95 mask > policy for new users and when distancing is a challenge. > > So far we have just been wearing the standard cleanroom style masks. > > Just wondering what other labs have been using. > > > > Thanks > > Robert Vandusen > Technical Officer, Microfabrication Lab > Electronics Department > Carleton University > room: 4184 Mackenzie Building > 613-520-2600 ext 5761 > Robert_vandusen at cunet.carleton.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Wed Dec 16 13:24:38 2020 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S) Date: Wed, 16 Dec 2020 18:24:38 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: We user our standard masks clean room 2 piece. Staff gets tested weekly. We Socially distance even in the clean room and wipe down eyes pieces after every use. With over 240 air changes a minute , the virus wouldn't get very far. We tested our clean room mask as flat fabric on our Mask tester and they filtered 85% of particle 1 micron or greater. They don't FIT like a respirator though. There is definitely blow by around the top of the nose. It's the safest place on campus. Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Tom Britton Sent: Wednesday, December 16, 2020 10:46 AM To: Shimon Eliav ; Robert Vandusen ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies This e-mail originated from outside the UMass Lowell network. ________________________________ Hello Shimon, Thank you for putting this together. It is most helpful in times of mask wearing and social distancing with respect to COVID both in and out of the cleanroom. Two questions, if I can ask: 1. Did you start with a sample of measurements speaking without a mask from the same distances to see how much the mask helped against the baseline? 2. Since the virus ranges in size from 50 to 200 nanometers (0.05 to 0.2 micron), how do you think the numbers would fare under your test with particles of this size? I wish all my UGIM friends and acquaintances a lovely and safe holiday season! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208.890.1417 Office: 877.572.5515 Skype: tombrittoncsi www.CriticalSystemsInc.com [logo for email signature png] Note: 7 days per week Technical Support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Shimon Eliav Sent: Wednesday, December 16, 2020 1:07 AM To: Robert Vandusen >; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From James.Vlahakis at tufts.edu Wed Dec 16 14:10:10 2020 From: James.Vlahakis at tufts.edu (Vlahakis, James) Date: Wed, 16 Dec 2020 19:10:10 +0000 Subject: [labnetwork] Cleanroom training policies + COVID guidelines Message-ID: This conversation has been very helpful, thank you to those who have posted their thoughts/experiences. Iulian's comment was particularly interesting - During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Here at Tufts we are unable to train new users - adhering to our COVID guidelines while training users is not possible. It would be useful to understand what others are doing so a few questions for the group - Are you providing in-lab training? If so, what accommodations are in place? Do you have defined metrics for tightening or loosening restrictions? If I can present plan(s) that other universities have successfully employed perhaps I can convince our OVPR to permit certain training functions jim From: labnetwork-bounces at mtl.mit.edu On Behalf Of Iulian Codreanu Sent: Wednesday, December 16, 2020 10:26 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, At Delaware we ask the users to bring their personal face mask (they have to wear it to enter the building anyway) to the gowning room and cover it with a beard cover. This has worked well since we re-opened in the middle of June; the face mask is meant to help with the virus and the beard cover with the lab cleanliness. During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Happy Holidays to Everyone! Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 12/16/2020 3:07 AM, Shimon Eliav wrote: Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From derose at caltech.edu Wed Dec 16 14:22:54 2020 From: derose at caltech.edu (DeRose, Guy A.) Date: Wed, 16 Dec 2020 19:22:54 +0000 Subject: [labnetwork] Question about cleanroom mask policies Message-ID: <79C492C3-FA3B-4B09-96A3-DEA64BCCEE66@caltech.edu> Hello group, In our lab at Caltech, which has been open for limited research in various phases since mid-June, we provide surgical-style masks for our users to wear. They also have the option to wear their own face cover from outside, with a beard cover over top to maintain cleanliness. Our gowning room is single occupancy, so that if someone is changing his/her mask, there will not be another person in that area. We have N95 respirators for our cleanroom technical staff to wear, and some of the research groups have been buying their own, which work with the beard cover option. Face coverings of some type are required everywhere on campus at all times. In the cleanroom, we also have strict occupancy limits by room, with maximum density of 1 person per 200 square feet. Since the first week of December, all employees (including staff, grad students, postdocs, and faculty) who access the campus are getting tested twice per week. Thank you, Shimon, for the article. Best regards, Guy Guy DeRose, PhD, Member of the Professional Staff Associate Director of Technical Operations, Kavli Nanoscience Institute California Institute of Technology, Pasadena, CA USA (O) 1-626-395-3423 (M) 1-626-676-8529 http://kni.caltech.edu From: on behalf of "Ferraguto, Thomas S" Date: Wednesday, December 16, 2020 at 10:36 AM To: Tom Britton , Shimon Eliav , Robert Vandusen , "labnetwork at mtl.mit.edu" Subject: Re: [labnetwork] Question about cleanroom mask policies We user our standard masks clean room 2 piece. Staff gets tested weekly. We Socially distance even in the clean room and wipe down eyes pieces after every use. With over 240 air changes a minute , the virus wouldn?t get very far. We tested our clean room mask as flat fabric on our Mask tester and they filtered 85% of particle 1 micron or greater. They don?t FIT like a respirator though. There is definitely blow by around the top of the nose. It?s the safest place on campus. Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Tom Britton Sent: Wednesday, December 16, 2020 10:46 AM To: Shimon Eliav ; Robert Vandusen ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies This e-mail originated from outside the UMass Lowell network. ________________________________ Hello Shimon, Thank you for putting this together. It is most helpful in times of mask wearing and social distancing with respect to COVID both in and out of the cleanroom. Two questions, if I can ask: 1. Did you start with a sample of measurements speaking without a mask from the same distances to see how much the mask helped against the baseline? 2. Since the virus ranges in size from 50 to 200 nanometers (0.05 to 0.2 micron), how do you think the numbers would fare under your test with particles of this size? I wish all my UGIM friends and acquaintances a lovely and safe holiday season! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208.890.1417 Office: 877.572.5515 Skype: tombrittoncsi www.CriticalSystemsInc.com [logo for email signature png] Note: 7 days per week Technical Support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Shimon Eliav Sent: Wednesday, December 16, 2020 1:07 AM To: Robert Vandusen >; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This ?two layers? solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9502 bytes Desc: image001.png URL: From hollingshead.19 at osu.edu Wed Dec 16 16:52:24 2020 From: hollingshead.19 at osu.edu (Hollingshead, David) Date: Wed, 16 Dec 2020 21:52:24 +0000 Subject: [labnetwork] Cleanroom training policies + COVID guidelines In-Reply-To: References: Message-ID: Hi Jim, We have started to do training on some pieces of equipment and been mostly successful so far. Our previous protocol usually involved an initial training session (sometimes grouped with 1-2 others trainees) to see the equipment use through a typical run. This was followed by a check-off session supervised by the tool owner with the user running one of their own samples through the system. This required a lot of close contact of course and was sometimes unnecessarily complex. Our new training guidelines mostly follow the model below, although there are slight variations based on the specific tool: 1. Viewing a video recording of a typical run. This is most often scripted right off of the initial trainings sessions we originally provided in person. The users are also asked to read-through our op specs for the tool during this time. 2. The next step is most often a 30 minute video chat with the tool owner. This is a combination of a knowledge check, a Q&A session, and a brief process review to see if there is anything specific to their process that the video or op spec may not have covered. 3. A socially distanced check off session. The goal here is to limit any close contact, although realistically this rule gets bent sometimes depending on the comfort levels of the staff and users. * For the check off we have had the users run a "standard" process rather than their own sample. They are given a rough checklist to follow with break points on any steps where the staff member would need to physically check any positioning, parameters, etc. While the user is running the staff is usually within sight distance and available if needed, but is otherwise hands-off. Whenever a break point is reached the user calls over the staff member for a check and then the process continues. For the most part this has worked well. It is obviously much more conducive to some processes than others. Training on our maskless aligner, evaporators, PECVD, and etchers, have all worked out well. Things like photolithography, wet chemical work, SEM, etc. have been slower to turn on because they often require much more interaction and are more difficult while remaining distanced. We have considered doing live zoom/phone calls to enable remote communication live during a training or checkoff but have not implemented it to a large degree yet. By far the biggest challenge is communication in the cleanroom. It is quite loud and we have found that even routine conversations end up being shouted from a close distance in order to effectively be heard. That is why we have moved as much as we can remotely and also tried to even limit interactions or question & answer during the in-person checkoff. The beneficial (in my opinion) side effect of this is that it forces the users to be much more self-reliant during the checkoff. Instead of simply turning to the staff member and being guided through the process they must know or be able to find the information they need themselves. In my opinion this will make them much more effective lab users overall since the vast majority of their processing time is going to be independent of staff intervention. -Dave From: labnetwork-bounces at mtl.mit.edu On Behalf Of Vlahakis, James Sent: Wednesday, December 16, 2020 14:10 To: Iulian Codreanu ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Cleanroom training policies + COVID guidelines This conversation has been very helpful, thank you to those who have posted their thoughts/experiences. Iulian's comment was particularly interesting - During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Here at Tufts we are unable to train new users - adhering to our COVID guidelines while training users is not possible. It would be useful to understand what others are doing so a few questions for the group - Are you providing in-lab training? If so, what accommodations are in place? Do you have defined metrics for tightening or loosening restrictions? If I can present plan(s) that other universities have successfully employed perhaps I can convince our OVPR to permit certain training functions jim From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Iulian Codreanu Sent: Wednesday, December 16, 2020 10:26 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, At Delaware we ask the users to bring their personal face mask (they have to wear it to enter the building anyway) to the gowning room and cover it with a beard cover. This has worked well since we re-opened in the middle of June; the face mask is meant to help with the virus and the beard cover with the lab cleanliness. During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Happy Holidays to Everyone! Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 12/16/2020 3:07 AM, Shimon Eliav wrote: Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From RobertVandusen at cunet.carleton.ca Wed Dec 16 16:02:52 2020 From: RobertVandusen at cunet.carleton.ca (Robert Vandusen) Date: Wed, 16 Dec 2020 21:02:52 +0000 Subject: [labnetwork] Cleanroom training policies + COVID guidelines In-Reply-To: References: Message-ID: Thanks to everyone who has been able to provide feedback on this topic. It has been very useful. Here at Carleton University in Ottawa we have been able to limit to only a handful of previously trained users. Whenever possible the lab staff have been running processes for users. No new user training has been done since March, but we have been starting to get more requests though. I also like the idea of the face shields for close work. Thanks Rob Robert Vandusen Microfabrication Cleanlab Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca From: labnetwork-bounces at mtl.mit.edu On Behalf Of Vlahakis, James Sent: December 16, 2020 2:10 PM To: Iulian Codreanu ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Cleanroom training policies + COVID guidelines [External Email] This conversation has been very helpful, thank you to those who have posted their thoughts/experiences. Iulian's comment was particularly interesting - During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Here at Tufts we are unable to train new users - adhering to our COVID guidelines while training users is not possible. It would be useful to understand what others are doing so a few questions for the group - Are you providing in-lab training? If so, what accommodations are in place? Do you have defined metrics for tightening or loosening restrictions? If I can present plan(s) that other universities have successfully employed perhaps I can convince our OVPR to permit certain training functions jim From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Iulian Codreanu Sent: Wednesday, December 16, 2020 10:26 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, At Delaware we ask the users to bring their personal face mask (they have to wear it to enter the building anyway) to the gowning room and cover it with a beard cover. This has worked well since we re-opened in the middle of June; the face mask is meant to help with the virus and the beard cover with the lab cleanliness. During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). Happy Holidays to Everyone! Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 12/16/2020 3:07 AM, Shimon Eliav wrote: Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork This email contains links to content or websites. Always be cautious when clicking on external links or attachments. If in doubt, please forward suspicious emails to phishing at carleton.ca. -----End of Disclaimer----- -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Wed Dec 16 18:06:05 2020 From: cekendri at mtu.edu (Chito Kendrick) Date: Thu, 17 Dec 2020 12:06:05 +1300 Subject: [labnetwork] Cleanroom training policies + COVID guidelines In-Reply-To: References: Message-ID: For all training at MTU I started generating complete training videos the user could study and be quizzed on. The students could also use this while using the system and zooming with me if required. I know this does not work for all systems, but helped get some users trained with complete isolation. Also might not work for complete novices. Chito Kendrick Sent from my iPhone > On 17/12/2020, at 11:47 AM, Hollingshead, David wrote: > > ? > Hi Jim, > > We have started to do training on some pieces of equipment and been mostly successful so far. Our previous protocol usually involved an initial training session (sometimes grouped with 1-2 others trainees) to see the equipment use through a typical run. This was followed by a check-off session supervised by the tool owner with the user running one of their own samples through the system. This required a lot of close contact of course and was sometimes unnecessarily complex. > > Our new training guidelines mostly follow the model below, although there are slight variations based on the specific tool: > Viewing a video recording of a typical run. This is most often scripted right off of the initial trainings sessions we originally provided in person. The users are also asked to read-through our op specs for the tool during this time. > The next step is most often a 30 minute video chat with the tool owner. This is a combination of a knowledge check, a Q&A session, and a brief process review to see if there is anything specific to their process that the video or op spec may not have covered. > A socially distanced check off session. The goal here is to limit any close contact, although realistically this rule gets bent sometimes depending on the comfort levels of the staff and users. > For the check off we have had the users run a ?standard? process rather than their own sample. They are given a rough checklist to follow with break points on any steps where the staff member would need to physically check any positioning, parameters, etc. While the user is running the staff is usually within sight distance and available if needed, but is otherwise hands-off. Whenever a break point is reached the user calls over the staff member for a check and then the process continues. > > For the most part this has worked well. It is obviously much more conducive to some processes than others. Training on our maskless aligner, evaporators, PECVD, and etchers, have all worked out well. Things like photolithography, wet chemical work, SEM, etc. have been slower to turn on because they often require much more interaction and are more difficult while remaining distanced. We have considered doing live zoom/phone calls to enable remote communication live during a training or checkoff but have not implemented it to a large degree yet. > > By far the biggest challenge is communication in the cleanroom. It is quite loud and we have found that even routine conversations end up being shouted from a close distance in order to effectively be heard. That is why we have moved as much as we can remotely and also tried to even limit interactions or question & answer during the in-person checkoff. The beneficial (in my opinion) side effect of this is that it forces the users to be much more self-reliant during the checkoff. Instead of simply turning to the staff member and being guided through the process they must know or be able to find the information they need themselves. In my opinion this will make them much more effective lab users overall since the vast majority of their processing time is going to be independent of staff intervention. > > -Dave > > From: labnetwork-bounces at mtl.mit.edu On Behalf Of Vlahakis, James > Sent: Wednesday, December 16, 2020 14:10 > To: Iulian Codreanu ; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Cleanroom training policies + COVID guidelines > > This conversation has been very helpful, thank you to those who have posted their thoughts/experiences. > > Iulian?s comment was particularly interesting - > During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). > > Here at Tufts we are unable to train new users ? adhering to our COVID guidelines while training users is not possible. It would be useful to understand what others are doing so a few questions for the group ? Are you providing in-lab training? If so, what accommodations are in place? Do you have defined metrics for tightening or loosening restrictions? > > If I can present plan(s) that other universities have successfully employed perhaps I can convince our OVPR to permit certain training functions > > jim > > From: labnetwork-bounces at mtl.mit.edu On Behalf Of Iulian Codreanu > Sent: Wednesday, December 16, 2020 10:26 AM > To: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Question about cleanroom mask policies > > Hi Robert, > > At Delaware we ask the users to bring their personal face mask (they have to wear it to enter the building anyway) to the gowning room and cover it with a beard cover. This has worked well since we re-opened in the middle of June; the face mask is meant to help with the virus and the beard cover with the lab cleanliness. During training both the trainer and the trainee also wear face shields (the type we use for acid work at the fume hoods). > > Happy Holidays to Everyone! > > Iulian > > iulian Codreanu, Ph.D. > Director, Nanofabrication Facility > University of Delaware > Harker ISE Lab, Room 163 > 221 Academy Street > Newark, DE 19716 > 302-831-2784 > http://udnf.udel.edu > On 12/16/2020 3:07 AM, Shimon Eliav wrote: > Hi Robert, > > When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. > Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. > > Today our policy is: every user comes with his/her own mask and must put the face cover over it. This ?two layers? solution is more than enough inside the clean room (plus as much distancing is possible). > > Regards, > > Shimon > The Hebrew University of Jerusalem > The Unit for Nano Fabrication > Jerusalem - Israel > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen > Sent: Tuesday, 15 December 2020 19:29 > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Question about cleanroom mask policies > > Hi all. > Hope this finds everyone safe. > Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. > So far we have just been wearing the standard cleanroom style masks. > Just wondering what other labs have been using. > > Thanks > Robert Vandusen > Technical Officer, Microfabrication Lab > Electronics Department > Carleton University > room: 4184 Mackenzie Building > 613-520-2600 ext 5761 > Robert_vandusen at cunet.carleton.ca > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From shimonel at savion.huji.ac.il Thu Dec 17 03:59:16 2020 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Thu, 17 Dec 2020 08:59:16 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hi Tom, Answering your questions: 1. I didn't make those tests without the face cover, because to wear face cover was the rule for our clean room before the COVID crisis. So, I took this as the starting point. 2. Regarding the virus size, I take into account that the virus is contained on drops that are much bigger than them. So, the particle size range used in the test should be OK. Regards, Shimon From: Tom Britton [mailto:tbritton at criticalsystemsinc.com] Sent: Wednesday, 16 December 2020 17:46 To: Shimon Eliav ; Robert Vandusen ; labnetwork at mtl.mit.edu Subject: RE: Question about cleanroom mask policies Hello Shimon, Thank you for putting this together. It is most helpful in times of mask wearing and social distancing with respect to COVID both in and out of the cleanroom. Two questions, if I can ask: 1. Did you start with a sample of measurements speaking without a mask from the same distances to see how much the mask helped against the baseline? 2. Since the virus ranges in size from 50 to 200 nanometers (0.05 to 0.2 micron), how do you think the numbers would fare under your test with particles of this size? I wish all my UGIM friends and acquaintances a lovely and safe holiday season! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208.890.1417 Office: 877.572.5515 Skype: tombrittoncsi www.CriticalSystemsInc.com [logo for email signature png] Note: 7 days per week Technical Support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Shimon Eliav Sent: Wednesday, December 16, 2020 1:07 AM To: Robert Vandusen >; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From cibuzar at umn.edu Thu Dec 17 09:16:12 2020 From: cibuzar at umn.edu (Gregory Cibuzar) Date: Thu, 17 Dec 2020 08:16:12 -0600 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: Hi Shimon, Thanks for the insightful study. A couple of clarification questions that would help me understand how this data might apply to our cleanroom. 1. What is the height of your ceiling in the cleanroom? 2. What is the air velocity leaving the filters? 3. What is the level of filter coverage? 4. Air exchange rate (fresh vs. recirculated) 5. What is the air recirculation path from the bay (raised floor, sidewall return, etc.) Thanks. Regards, Greg Greg Cibuzar Manager, Minnesota Nano Center www.mnc.umn.edu University of Minnesota 612-625-8079 On Wed, Dec 16, 2020 at 7:19 AM Shimon Eliav wrote: > Hi Robert, > > > > When we returned to work after the first lock-down, we asked ourselves > what to do regarding masks/face covers. > > Then I did a very simple experiment to check by myself how effective is a > face-cover to contain the particles we generate during normal respiration > or talking. See attached summary. > > > > Today our policy is: every user comes with his/her own mask and must put > the face cover over it. This ?two layers? solution is more than enough > inside the clean room (plus as much distancing is possible). > > > > Regards, > > > > Shimon > > The Hebrew University of Jerusalem > > The Unit for Nano Fabrication > > Jerusalem - Israel > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Robert Vandusen > *Sent:* Tuesday, 15 December 2020 19:29 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Question about cleanroom mask policies > > > > Hi all. > > Hope this finds everyone safe. > > Now that N95s are starting to become a bit more accessible, there has been > some recent discussion within our labs about whether to adopt an N95 mask > policy for new users and when distancing is a challenge. > > So far we have just been wearing the standard cleanroom style masks. > > Just wondering what other labs have been using. > > > > Thanks > > Robert Vandusen > Technical Officer, Microfabrication Lab > Electronics Department > Carleton University > room: 4184 Mackenzie Building > 613-520-2600 ext 5761 > Robert_vandusen at cunet.carleton.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From saad_m_hassan at hotmail.com Thu Dec 17 11:07:45 2020 From: saad_m_hassan at hotmail.com (Sa'ad H) Date: Thu, 17 Dec 2020 16:07:45 +0000 Subject: [labnetwork] Sloped Sidewalls for Photoresist Message-ID: Good Morning Everyone, I trust everyone is well. I have been working on defining lithographic features that are lines separated by trenches both of which are 800nm wide. I am getting adequate resolution, i.e, the lines are very close to spec. But the sidewalls slope significantly as can be seen in the attached picture. My wafer is fabricated as follows: 1. Bare Silicon Wafer 2. HMDS 3. Backside Antireflective Coating (XHiRC-16) 4. SPR-955 - 6000 rpm spin - PR thickness - 800nm 5. Bake 90 Celsius for 90 seconds 6. Exposure - 125 mJ/cm2 in a contact aligner 7. Development 1 minute with ultrasonic [cid:f7fd4dca-63e7-4b8e-a0d8-a8e0e7b58cd5] Does anyone know how I can achieve nice vertical sidewalls? Cheers, Sa'ad -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 175793 bytes Desc: image.png URL: From jhub at dtu.dk Thu Dec 17 11:21:32 2020 From: jhub at dtu.dk (=?utf-8?B?SsO2cmcgSMO8Ym5lcg==?=) Date: Thu, 17 Dec 2020 16:21:32 +0000 Subject: [labnetwork] Question about cleanroom mask policies Message-ID: Hi At DTU Nanolab we do not allow user provided masks in the cleanroom due to the fear of particle contamination. Users have to wear a provided mask preferably before entering the corridor leading to gowning. Inside gowning a max of two persons is allowed. The combination of masks, high airflow and efficient HEPA filtering (quasi laminar air velocity is around 0.5 m/s downward) reduces the risk of infection to very unlikely. We have also studied the literature and have also found that single viruses do not survive ( i.e. dry out immediately) if not adsorbed to a particle or droplet. Hence HEPA filters are extremely efficient and I fully agree that the cleanroom is probably one of the safest places to be regarding infection. No regular tests of staff or users are carried out. We have been running the cleanroom with a maximum of 50 persons inside (around 1300m2 of cleanroom) since May without infection event. We have had one staff member, who was subsequently tested positive, working inside the cleanroom (the staff member worked possibly several days in the cleanroom while infected until he went home with syptoms and got tested). All rules and regulations were followed (mask, distancing), nobody else got infected. This is one data point and doesn?t allow any conclusions but still it is worth mentioning (the staff member had relatively mild symptoms and was back at work after two weeks). Distancing is a problem especially in training situations but here the high air velocity in combination with masks is helping us enormously. We are currently introducing headset intercoms (inspired by Nanolab NL in Twente, NL) for training situations. This allows training situations without raising the voice in noisy environments thereby preventing unnecessary possible emission of viruses as well as proper distance. Of course proper hygiene regarding the headsets is a must. Best J?rg J?rg H?bner, Ph.D. Director DTU Nanolab National Centre for Nano Fabrication and Characterization Technical University of Denmark DTU Nanolab National Centre for Nano Fabrication and Characterization ?rsteds Place Building 347, Room 178 2800 Kgs. Lyngby Denmark Direct +45 45255762 Mobile +45 22785157 jhub at dtu.dk www.nanolab.dtu.dk/english [signature_1477035095] From: on behalf of Tony L Olsen Date: Wednesday, 16 December 2020 at 19.16 To: Robert Vandusen , "labnetwork at mtl.mit.edu" Subject: Re: [labnetwork] Question about cleanroom mask policies Robert Early this summer, when the university began allowing folks back on campus, face masks were required. In fact, the university even provided a multi-layer cloth mask to ALL students, faculty, and staff. Most people use that mask, while some have found other styles. I did not want anyone removing or replacing that mask to enter the cleanroom, so they continue to wear their own mask for the cleanroom. Frankly, I recognized that any user-provided mask (cloth or paper) may not be very effective at particle filtering, but there are worse regular practices that compromise the cleanroom. We only double-mask (add a standard cleanroom snood) when the user?s mask does not cover all facial hair. I have no data to support our approach, but it seemed to be a reasonable compromise to the current situation. The biggest problem has been the increased fogging of safety glasses. Social/physical distancing is still promoted, but poorly practiced. I may be na?ve, but I believe standard cleanroom protocols, frequent wipe downs of workstations, occupancy limits, and the high air exchange rate significantly reduce the risk of spread even when social distancing is problematic. Our cleanroom reopened for limited use in May, including several lab courses during Fall Semester. To date, I am unaware of any lab member infected while using the cleanroom ? although a few have been elsewhere. tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Drive, Suite 2500 Salt Lake City, UT 84112 801-587-0651 www.nanofab.utah.edu From: Robert Vandusen Sent: Tuesday, December 15, 2020 10:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1920 bytes Desc: image001.png URL: From wrowe at purdue.edu Thu Dec 17 12:35:42 2020 From: wrowe at purdue.edu (Rowe, William J) Date: Thu, 17 Dec 2020 17:35:42 +0000 Subject: [labnetwork] Question about cleanroom mask policies In-Reply-To: References: Message-ID: All, Colorado State has done some extensive studies on the bioaerosol emmissions. They have done a couple of rounds and also have a white paper. It is very informative. Here is the link. https://smtd.colostate.edu/reducing-bioaerosol-emissions-and-exposures-in-the-performing-arts/ Best Regards, Bill Bill Rowe Research Engineer Purdue University Birck Nanotechnology Center 1205 W. State Street West Lafayette, Indiana 47907 Office: (765)496-8389 Cell: (765)427-3587 wrowe at purdue.edu From: labnetwork-bounces at mtl.mit.edu On Behalf Of Shimon Eliav Sent: Thursday, December 17, 2020 3:59 AM To: Tom Britton Cc: labnetwork at mtl.mit.edu; Robert Vandusen Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Tom, Answering your questions: 1. I didn't make those tests without the face cover, because to wear face cover was the rule for our clean room before the COVID crisis. So, I took this as the starting point. 2. Regarding the virus size, I take into account that the virus is contained on drops that are much bigger than them. So, the particle size range used in the test should be OK. Regards, Shimon From: Tom Britton [mailto:tbritton at criticalsystemsinc.com] Sent: Wednesday, 16 December 2020 17:46 To: Shimon Eliav >; Robert Vandusen >; labnetwork at mtl.mit.edu Subject: RE: Question about cleanroom mask policies Hello Shimon, Thank you for putting this together. It is most helpful in times of mask wearing and social distancing with respect to COVID both in and out of the cleanroom. Two questions, if I can ask: 1. Did you start with a sample of measurements speaking without a mask from the same distances to see how much the mask helped against the baseline? 2. Since the virus ranges in size from 50 to 200 nanometers (0.05 to 0.2 micron), how do you think the numbers would fare under your test with particles of this size? I wish all my UGIM friends and acquaintances a lovely and safe holiday season! Tom Tom Britton Director of Sales Critical Systems, Inc. Direct: 208.890.1417 Office: 877.572.5515 Skype: tombrittoncsi www.CriticalSystemsInc.com [logo for email signature png] Note: 7 days per week Technical Support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork-bounces at mtl.mit.edu > On Behalf Of Shimon Eliav Sent: Wednesday, December 16, 2020 1:07 AM To: Robert Vandusen >; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about cleanroom mask policies Hi Robert, When we returned to work after the first lock-down, we asked ourselves what to do regarding masks/face covers. Then I did a very simple experiment to check by myself how effective is a face-cover to contain the particles we generate during normal respiration or talking. See attached summary. Today our policy is: every user comes with his/her own mask and must put the face cover over it. This "two layers" solution is more than enough inside the clean room (plus as much distancing is possible). Regards, Shimon The Hebrew University of Jerusalem The Unit for Nano Fabrication Jerusalem - Israel From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert Vandusen Sent: Tuesday, 15 December 2020 19:29 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about cleanroom mask policies Hi all. Hope this finds everyone safe. Now that N95s are starting to become a bit more accessible, there has been some recent discussion within our labs about whether to adopt an N95 mask policy for new users and when distancing is a challenge. So far we have just been wearing the standard cleanroom style masks. Just wondering what other labs have been using. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9501 bytes Desc: image001.png URL: From Aju.Jugessur at Colorado.EDU Thu Dec 17 13:24:33 2020 From: Aju.Jugessur at Colorado.EDU (Aju Jugessur) Date: Thu, 17 Dec 2020 18:24:33 +0000 Subject: [labnetwork] Information request: 3D Nanoscribe Message-ID: Dear Colleagues, I am reaching to obtain some information on managing a 3D Nanoscribe instrument, Photonic Professional GT2. In particular, I would like to know the following from facilities that have this model or equivalent: 1. Your current # of users and the diversity of the userbase 2. Your internal and/or academic user fee rate 3. Service contracts and estimate costs of annual service contracts (if any) 4. Estimate of annual maintenance costs 5. Any other comments: positive or negative We are considering housing this instrument in our facility and the above information will help us with our decision. Thanks so much, Regards Aju Aju Jugessur Ph.D. IEEE Sr. Member Director, Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) Member of Engineering Staff Council (ESC) Discovery Learning Center University of Colorado Boulder | College of Engineering & Applied Science 1111 Engineering Drive ? 1B09 DLC | Boulder, CO 80309-0422 | P: 303.735.5019| F: 303.492.2199 E-mail: aju.jugessur at colorado.edu Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur www.colorado.edu/facility/cosinc [signature_551035494] Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever (CliftonStrengths) -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 6291 bytes Desc: image001.png URL: From sandrine at umich.edu Thu Dec 17 16:38:56 2020 From: sandrine at umich.edu (Sandrine Martin) Date: Thu, 17 Dec 2020 16:38:56 -0500 Subject: [labnetwork] Cleanroom training policies + COVID guidelines In-Reply-To: References: Message-ID: Hello all, Another update, from our experience at UMichigan LNF. - we have recently resumed in-person training (first staff-user only, and more recently user-user), in addition to enhanced documentation/virtual efforts (wiki pages, SOPs, online webinars, virtual training modules, zoom sessions etc). Face shields are worn in addition to the face masks for these sessions. We've used voice amplifiers to help with volume of conversations when needed (for now only used by staff). - our University Office of Research has a process in place to request "proximity exemption for in-person training" which we applied for (and received). As part of that, we require our users to "announce" these in-person user-user sessions - we have a ticket system that we can use for tracking - and we currently see about 40 per week. - with this in place, we (slowly) resumed intake and training of new users - face coverings / face masks are required on University campus (even outside). - only our face masks are allowed in the lab, users have to change from their personal face mask to the ones that we provide as part of the gowning process. We have a maximum of 2 people in the gowning area but have also introduced a minimum 2 min interval between entries to avoid people being too close. - distancing inside the cleanroom is done by requiring users to reserve single-occupancy areas: we have about 40 such areas for our 13,500sq.ft. of lab space accessible by users, but the typical max occupancy for the lab is rarely above 20 people or so - there is no mandatory testing program at the University for the researchers or staff. We've had positive cases on campus but haven't really seen any significant in-lab transmission, from what I am aware of. Thanks! Sandrine On Wed, Dec 16, 2020 at 9:36 PM Chito Kendrick wrote: > For all training at MTU I started generating complete training videos the > user could study and be quizzed on. The students could also use this while > using the system and zooming with me if required. I know this does not work > for all systems, but helped get some users trained with complete isolation. > Also might not work for complete novices. > > Chito Kendrick > > Sent from my iPhone > > On 17/12/2020, at 11:47 AM, Hollingshead, David > wrote: > > ? > > Hi Jim, > > > > We have started to do training on some pieces of equipment and been mostly > successful so far. Our previous protocol usually involved an initial > training session (sometimes grouped with 1-2 others trainees) to see the > equipment use through a typical run. This was followed by a check-off > session supervised by the tool owner with the user running one of their own > samples through the system. This required a lot of close contact of course > and was sometimes unnecessarily complex. > > > > Our new training guidelines mostly follow the model below, although there > are slight variations based on the specific tool: > > 1. Viewing a video recording of a typical run. This is most often > scripted right off of the initial trainings sessions we originally provided > in person. The users are also asked to read-through our op specs for the > tool during this time. > 2. The next step is most often a 30 minute video chat with the tool > owner. This is a combination of a knowledge check, a Q&A session, and a > brief process review to see if there is anything specific to their process > that the video or op spec may not have covered. > 3. A socially distanced check off session. The goal here is to limit > any close contact, although realistically this rule gets bent sometimes > depending on the comfort levels of the staff and users. > 1. For the check off we have had the users run a ?standard? process > rather than their own sample. They are given a rough checklist to follow > with break points on any steps where the staff member would need to > physically check any positioning, parameters, etc. While the user is > running the staff is usually within sight distance and available if needed, > but is otherwise hands-off. Whenever a break point is reached the user > calls over the staff member for a check and then the process continues. > > > > For the most part this has worked well. It is obviously much more > conducive to some processes than others. Training on our maskless aligner, > evaporators, PECVD, and etchers, have all worked out well. Things like > photolithography, wet chemical work, SEM, etc. have been slower to turn on > because they often require much more interaction and are more difficult > while remaining distanced. We have considered doing live zoom/phone calls > to enable remote communication live during a training or checkoff but have > not implemented it to a large degree yet. > > > > By far the biggest challenge is communication in the cleanroom. It is > quite loud and we have found that even routine conversations end up being > shouted from a close distance in order to effectively be heard. That is why > we have moved as much as we can remotely and also tried to even limit > interactions or question & answer during the in-person checkoff. The > beneficial (in my opinion) side effect of this is that it forces the users > to be much more self-reliant during the checkoff. Instead of simply turning > to the staff member and being guided through the process they must know or > be able to find the information they need themselves. In my opinion this > will make them much more effective lab users overall since the vast > majority of their processing time is going to be independent of staff > intervention. > > > > -Dave > > > > *From:* labnetwork-bounces at mtl.mit.edu *On > Behalf Of *Vlahakis, James > *Sent:* Wednesday, December 16, 2020 14:10 > *To:* Iulian Codreanu ; labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Cleanroom training policies + COVID guidelines > > > > This conversation has been very helpful, thank you to those who have > posted their thoughts/experiences. > > > > Iulian?s comment was particularly interesting - > > *During training both the trainer and the trainee also wear face shields > (the type we use for acid work at the fume hoods).* > > > > Here at Tufts we are unable to train new users ? adhering to our COVID > guidelines while training users is not possible. It would be useful to > understand what others are doing so a few questions for the group ? Are you > providing in-lab training? If so, what accommodations are in place? Do you > have defined metrics for tightening or loosening restrictions? > > > > If I can present plan(s) that other universities have successfully > employed perhaps I can convince our OVPR to permit certain training > functions > > > > jim > > > > *From:* labnetwork-bounces at mtl.mit.edu *On > Behalf Of *Iulian Codreanu > *Sent:* Wednesday, December 16, 2020 10:26 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Question about cleanroom mask policies > > > > Hi Robert, > > At Delaware we ask the users to bring their personal face mask (they have > to wear it to enter the building anyway) to the gowning room and cover it > with a beard cover. This has worked well since we re-opened in the middle > of June; the face mask is meant to help with the virus and the beard cover > with the lab cleanliness. During training both the trainer and the trainee > also wear face shields (the type we use for acid work at the fume hoods). > > Happy Holidays to Everyone! > > Iulian > > iulian Codreanu, Ph.D. > > Director, Nanofabrication Facility > > University of Delaware > > Harker ISE Lab, Room 163 > > 221 Academy Street > > Newark, DE 19716 > > 302-831-2784 > > http://udnf.udel.edu > > On 12/16/2020 3:07 AM, Shimon Eliav wrote: > > Hi Robert, > > > > When we returned to work after the first lock-down, we asked ourselves > what to do regarding masks/face covers. > > Then I did a very simple experiment to check by myself how effective is a > face-cover to contain the particles we generate during normal respiration > or talking. See attached summary. > > > > Today our policy is: every user comes with his/her own mask and must put > the face cover over it. This ?two layers? solution is more than enough > inside the clean room (plus as much distancing is possible). > > > > Regards, > > > > Shimon > > The Hebrew University of Jerusalem > > The Unit for Nano Fabrication > > Jerusalem - Israel > > > > *From:* labnetwork-bounces at mtl.mit.edu [ > mailto:labnetwork-bounces at mtl.mit.edu ] *On > Behalf Of *Robert Vandusen > *Sent:* Tuesday, 15 December 2020 19:29 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Question about cleanroom mask policies > > > > Hi all. > > Hope this finds everyone safe. > > Now that N95s are starting to become a bit more accessible, there has been > some recent discussion within our labs about whether to adopt an N95 mask > policy for new users and when distancing is a challenge. > > So far we have just been wearing the standard cleanroom style masks. > > Just wondering what other labs have been using. > > > > Thanks > > Robert Vandusen > Technical Officer, Microfabrication Lab > Electronics Department > Carleton University > room: 4184 Mackenzie Building > 613-520-2600 ext 5761 > Robert_vandusen at cunet.carleton.ca > > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Sandrine Martin, Ph.D. University of Michigan LNF Managing Director 1246D EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu @LurieNanofab -------------- next part -------------- An HTML attachment was scrubbed... URL: From aamermahmood at gmail.com Fri Dec 18 11:47:06 2020 From: aamermahmood at gmail.com (Aamer Mahmood) Date: Fri, 18 Dec 2020 11:47:06 -0500 Subject: [labnetwork] Suitable negative photoresist for use with BOE Message-ID: Hello all, We are looking for a suitable negative photoresist to use during BOE etch. We are looking for a resolution of ~ 5 microns. Please share your recommendations of stable and easy-to-work-with products, Thanks. -- Aamer Mahmood -------------- next part -------------- An HTML attachment was scrubbed... URL: From robert.j.macdon at gmail.com Sun Dec 20 12:19:17 2020 From: robert.j.macdon at gmail.com (Robert MacDonald) Date: Sun, 20 Dec 2020 12:19:17 -0500 Subject: [labnetwork] Sloped Sidewalls for Photoresist In-Reply-To: References: Message-ID: <7048E112-74A9-4601-8F21-128545901B1D@gmail.com> In a stepper I would say run a focus expose matrix. In your case start by changing the dose. In the image it looked like you had not reveled the Si. So a higher dose would be a start. But I do not know your resist. In general, it will be hard to make sub micron line space features with your contact aligner. Can you access a stepper? Thanks, Rob Sent from my iDidntspellcheckit > On Dec 17, 2020, at 11:07 AM, Sa'ad H wrote: > > Good Morning Everyone, > > I trust everyone is well. I have been working on defining lithographic features that are lines separated by trenches both of which are 800nm wide. > > I am getting adequate resolution, i.e, the lines are very close to spec. But the sidewalls slope significantly as can be seen in the attached picture. > > My wafer is fabricated as follows: > Bare Silicon Wafer > HMDS > Backside Antireflective Coating (XHiRC-16) > SPR-955 - 6000 rpm spin - PR thickness - 800nm > Bake 90 Celsius for 90 seconds > Exposure - 125 mJ/cm2 in a contact aligner > Development 1 minute with ultrasonic > > > > > > > Does anyone know how I can achieve nice vertical sidewalls? > > > Cheers, > Sa'ad > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From whipp003 at umn.edu Sun Dec 20 18:19:34 2020 From: whipp003 at umn.edu (Tony Whipple) Date: Sun, 20 Dec 2020 17:19:34 -0600 Subject: [labnetwork] Sloped Sidewalls for Photoresist In-Reply-To: References: Message-ID: Hello Sa'ad; As Robert said, using a stepper would be a large help. We have used SPR-955 before and was able to have nice vertical sidewalls at half micron lines, but was with a stepper. One other item that we did was a post exposure bake, which was done between your steps 6 and 7. If limited to a contact aligner, then hard or vacuum contact are worth trying if you have not already done that. Good luck, Tony W. Virus-free. www.avast.com <#m_311964083070025090_DAB4FAD8-2DD7-40BB-A1B8-4E2AA1F9FDF2> On Thu, Dec 17, 2020 at 12:56 PM Sa'ad H wrote: > Good Morning Everyone, > > I trust everyone is well. I have been working on defining lithographic > features that are lines separated by trenches both of which are 800nm wide. > > I am getting adequate resolution, i.e, the lines are very close to spec. > But the sidewalls slope significantly as can be seen in the attached > picture. > > My wafer is fabricated as follows: > > 1. Bare Silicon Wafer > 2. HMDS > 3. Backside Antireflective Coating (XHiRC-16) > 4. SPR-955 - 6000 rpm spin - PR thickness - 800nm > 5. Bake 90 Celsius for 90 seconds > 6. Exposure - 125 mJ/cm2 in a contact aligner > 7. Development 1 minute with ultrasonic > > > > > > > > Does anyone know how I can achieve nice vertical sidewalls? > > > Cheers, > Sa'ad > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > Virus-free. www.avast.com <#DAB4FAD8-2DD7-40BB-A1B8-4E2AA1F9FDF2> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 175793 bytes Desc: not available URL: From hbtusainc at yahoo.com Sun Dec 20 22:01:07 2020 From: hbtusainc at yahoo.com (Mario Portillo) Date: Mon, 21 Dec 2020 03:01:07 +0000 (UTC) Subject: [labnetwork] Sloped Sidewalls for Photoresist In-Reply-To: References: Message-ID: <1051630340.1843062.1608519667665@mail.yahoo.com> Sa'ad,...... here is my two cents......SPR-955 is a high thruput I-line photo resist (365nm) for optimum results you want to a match a lithography tool that has I-line exposing light source, G-line 436nm or H-line 405 nm do not give you optimum results in many cases if used with a none matched resist,, also the SPR is tailored to be processed with wet chemistry. Photo resists are usually tailored for best results to be processed with wet or dry chemistry. I hope this helps, Regards. Mario A. Portillo Sr. HIGH'born Technology USA Inc.. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 470-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com On Monday, December 21, 2020, 09:13:53 AM GMT+8, Tony Whipple wrote: Hello Sa'ad; As Robert said, using a stepper would be a large help. We have used SPR-955 before and was able to have nice vertical sidewalls at half micron lines, but was with a stepper. One other item that we did was a post exposure bake, which was done between your steps 6 and 7.? If limited to a contact aligner, then hard or vacuum contact are worth trying if you have not already done that. Good luck, Tony W. | | Virus-free. www.avast.com | On Thu, Dec 17, 2020 at 12:56 PM Sa'ad H wrote: Good Morning Everyone, I trust everyone is well. I have been working on defining lithographic features that are lines separated by trenches both of which are 800nm wide. I am getting adequate resolution, i.e, the lines are very close to spec. But the sidewalls slope significantly as can be seen in the attached picture. My wafer is fabricated as follows: - ?Bare Silicon Wafer - HMDS - Backside Antireflective Coating (XHiRC-16) - SPR-955 - 6000 rpm spin - PR thickness - 800nm - Bake 90 Celsius for 90 seconds - Exposure - 125 mJ/cm2 in a contact aligner - Development 1 minute with ultrasonic Does anyone know how I can achieve nice vertical sidewalls? Cheers,Sa'ad _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork | | Virus-free. www.avast.com | _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 175793 bytes Desc: not available URL: From manish.keswani01 at gmail.com Mon Dec 21 02:57:16 2020 From: manish.keswani01 at gmail.com (Manish Keswani) Date: Sun, 20 Dec 2020 23:57:16 -0800 Subject: [labnetwork] Toxic gases In-Reply-To: References: Message-ID: Thanks Shimon for your response. We have sensors at multiple locations (for the same gas) in the cleanroom so if one sensor fails, other sensors would be able to detect the leak. However, if there is only one sensor for a gas, I understand the risk if that sensor fails. We have annual maintenance of the TGM system during which time the sensors are tested. I may have to reach out to Hoenywell to understand how this testing is done and what happens if one or more sensors stop working. Happy holidays to everyone! Manish On Wed, Dec 16, 2020 at 12:55 AM Shimon Eliav wrote: > Hi Manish, > > > > From time it is nice to hear what others are doing related to safety > issues. > > > > The summary table you sent us about toxic gases lines made me think: > perhaps am I exaggerating on my protocol? A legitimate question after being > the only one closing the gas lines in the end of the day. This question > remained ?in the corner of my mind? since then. > > > > We periodically check our leak sensors. Yesterday we received the results > of the last check: two sensors need to be replaced. They were not > responsive at all. Once I received those results I got the answer to that > question in my mind: our protocol is solid! It builds one more layer of > protection over the one depending on the leak sensors. > > > > When the clean room is closed, the poison/corrosive gas lines are empty. > When those lines is under use, we have portable sensors near the user(s), > in case of leak and the building leak sensors fail, the user will shut down > all the gas lines using the emergency shutdown button nearby. > > > > I can soundly sleep in the night J. > > > > I take this opportunity to wish everybody Merry Christmas and Happy New > Year!!! > > > > Regards, > > > > Shimon > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Manish Keswani > *Sent:* Sunday, 6 December 2020 22:26 > *To:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Toxic gases > > > > Thank you so much everyone for such an enthusiastic response. It seems > clear that at most facilities (if not all), the gas cylinders are always > kept open. We also have TGMS in our cleanroom which allows monitoring of > the toxic gases at multiple locations (source and delivery point) and will > shut off the ESO valve in the event of a leak. > > We will work with our safety and ES&H teams to change our current practice > of turning off the gases when not in use. > > > > Regards, > > Manish > > > > [image: image.png] > > > > On Fri, Dec 4, 2020 at 2:11 PM Manish Keswani > wrote: > > Happy Friday everyone, > > > > I have a question related to toxic gases in our nano fabrication center. > > > > We typically shut off our toxic gases at the source when not in use, using > the in line valves on the Safety Manifolds, the ESO valves, and the > cylinder valve. This is to comply with the administrative control stated in > our gas safety notes. The following question came up for toxic gases. I > would like to understand how this is being done at other facilities and the > reasoning behind it. > > > > ?Is there a good reason we turn off the toxic gases at the end of the day > instead of just leaving them on? It seems like if there is a risk, it would > be wear and tear on the valves etc, plus someone going in vault often to do > it.? > > > > > > Thanks in advance, > > Manish Keswani > > Lawrence Livermore National Laboratory > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 469098 bytes Desc: not available URL: