From julia.aebersold at louisville.edu Thu Jan 2 10:41:18 2020 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 2 Jan 2020 15:41:18 +0000 Subject: [labnetwork] Flood Cleanup In-Reply-To: <334FC05B-BF7C-42CF-A92A-E4DCF6C72A13@verizon.net> References: <273272b205834c4db395632d6881ea8b@engr.ucr.edu> <334FC05B-BF7C-42CF-A92A-E4DCF6C72A13@verizon.net> Message-ID: Servpro is the same outfit our University has used for major flooding, too. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jeff Hawks Sent: Friday, December 27, 2019 7:56 PM To: Mark Heiden Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flood Cleanup Hi Mark Happy new year You might want to try Servpro. Best regards, Jeff Hawks Sent from my iPhone On Dec 27, 2019, at 1:14 PM, Mark Heiden > wrote: Happy Holidays, Does anyone have experience with cleaning up a flood of water and mud in their Cleanroom? We had a major event from a water line up the street that flooded water and mud throughout our Cleanbays. Once the water is removed and dried, the mud will become dirt and ultimately dust which is of course disastrous. Is there a company that is experienced at de-contaminating this level of mess that can be hired? We are in Southern California. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager University of California, Riverside 951-827-2551 https://nanofabucr.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From mheiden at engr.ucr.edu Thu Jan 2 12:49:37 2020 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Thu, 2 Jan 2020 17:49:37 +0000 Subject: [labnetwork] Flood Cleanup In-Reply-To: References: <273272b205834c4db395632d6881ea8b@engr.ucr.edu> <334FC05B-BF7C-42CF-A92A-E4DCF6C72A13@verizon.net> Message-ID: <9e8702ea5b4648d494f4ba8df214f461@engr.ucr.edu> Thanks to all that have provided input and suggestions. The campus has contracted Belfor property restoration who has Cleanroom and surgical suite expertise. They have begun the process with good progress already. Best Regards, Mark Heiden NanoFab Cleanroom Manager University of California, Riverside 951-827-2551 https://nanofab.ucr.edu/ From: Aebersold,Julia W. Sent: Thursday, January 02, 2020 7:41 AM To: labnetwork at mtl.mit.edu Cc: Mark Heiden ; Jeff Hawks Subject: RE: [labnetwork] Flood Cleanup Servpro is the same outfit our University has used for major flooding, too. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jeff Hawks Sent: Friday, December 27, 2019 7:56 PM To: Mark Heiden > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Flood Cleanup Hi Mark Happy new year You might want to try Servpro. Best regards, Jeff Hawks Sent from my iPhone On Dec 27, 2019, at 1:14 PM, Mark Heiden > wrote: Happy Holidays, Does anyone have experience with cleaning up a flood of water and mud in their Cleanroom? We had a major event from a water line up the street that flooded water and mud throughout our Cleanbays. Once the water is removed and dried, the mud will become dirt and ultimately dust which is of course disastrous. Is there a company that is experienced at de-contaminating this level of mess that can be hired? We are in Southern California. Thanks in advance, Mark Heiden NanoFab Cleanroom Manager University of California, Riverside 951-827-2551 https://nanofabucr.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From cschnitzer at stonehill.edu Fri Jan 3 16:46:30 2020 From: cschnitzer at stonehill.edu (Schnitzer, Cheryl) Date: Fri, 3 Jan 2020 21:46:30 +0000 Subject: [labnetwork] Post for the lab network, please Message-ID: Opening: Photonics Lab Manager Position, Stonehill College Please help increase our applicant pool by inviting and circulating the following information for anyone who may be interested in this position. The deadline for the first round of applications is Wednesday, January 15th. This information is available at Indeed.com as well. Working at Stonehill College offers an opportunity to work in a brand new, state-of-the-art Lab for Education and Application Prototypes (LEAP) photonics lab with faculty, students, staff, and industry partners. This LEAP focuses on photonics materials testing and characterization and high-speed testing for photonics devices and systems, complementing the other LEAPs in Massachusetts at MIT, WPI/QCC, and BSU. The LEAP network is funded by the Commonwealth of Massachusetts to support AIM Photonics. The applicant will join an interdisciplinary program housed in the Physics and Astronomy Department. We have a wide range of disciplinary expertise, ranging from astrophysics to geophysics, quantum field theory, theoretical and experimental optics, engineering photonics and physical chemistry. We value independence and self-reliance, teamwork and collegiality. We are looking for an energetic person who can bring their contribution to further academic growth of the department and the photonics program. The Photonics program at Stonehill College invites applicants for a lab manager position, applications will close on January 15, or as soon as the position is filled. Essential Duties and Responsibilities The Lab Manager will report to the Program Director in Photonics. The job responsibilities include * Setting up equipment in the new Photonics lab. * Providing equipment operation training for students, researchers or industry partners. * Providing technical support for researchers and their projects. * Practicing safe working conditions and communicating in written and oral forms. * Maintaining laboratory equipment performance by establishing quality standards; developing operations, quality, and troubleshooting procedures; ensuring workers? compliance; certifying instrument performance; arranging equipment replacement, service, and repair. * Developing new tests, methods, instrumental programs, and procedures * Investigating alternative methods and new projects; developing and performing parallel testing; monitoring progress. * Maintaining professional and technical knowledge by attending educational workshops; reviewing professional publications; establishing personal networks; participating in professional societies. * Collaborating with photonics team in the development of grant proposals. Education and/or Experience * Earned Master?s degrees in Physics/Optics/Photonics, or closely related disciplines, and required to have a record of quality scholarship. * Possess organizational skills, attention to detail, and the personality to train others. * Have laser and optics/photonics lab experience and motivation to learn new skills and techniques Preferred Qualifications Knowledge, Skills, and Abilities A working knowledge of some instruments such as FTIR, Raman, XRD, OSA, LCA, AWG, Oscilloscope, etc, will be a plus. Physical Demands Work Environment Licenses/Certifications Competencies Posting Detail Information Special Instructions to Applicants Please apply electronically, including a cover letter, a research statement, a resume and three references. You can additionally contact us directly at the following address: Dr. Ruby Gu, Chair of the search committee. 320 Washington St, N. Easton, MA, 02357 ggu at stonehill.edu Stonehill College embraces diversity and inclusion in its teaching, learning, living, and working. Stonehill values a diversity of persons, opinions, and cultural and religious perspectives. Women and minorities are strongly encouraged to apply to this position. -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcchrist at wisc.edu Mon Jan 6 08:23:38 2020 From: dcchrist at wisc.edu (Daniel Christensen) Date: Mon, 6 Jan 2020 13:23:38 +0000 Subject: [labnetwork] Cleanroom Staff Position open at Univ of Wisconsin Message-ID: Cleanroom Staff Position open at Univ of Wisconsin Only 10 days left to apply! Job Opening: University of Wisconsin-Madison The Wisconsin Centers for Nanoscale Technology supports a broad range of research by students, staff, and faculty and industrial clients with interests in micro and nano fabrication, device development including CMOS and a variety of experimental devices and characterization using a wide range of methods. This position's responsibilities will include, but are not limited to: Position Summary: The Wisconsin Centers for Nanoscale Technology supports a broad range of research by students, staff, and faculty and industrial clients with interests in micro and nano fabrication, device development including CMOS and a variety of experimental devices and characterization using a wide range of methods. This position's responsibilities will include, but are not limited to: -Maintenance, repair, and operation of fabrication and characterization equipment in the research labs. Maintenance of fabrication or characterization instruments will be performed independently by the candidate and in close collaboration with field service engineers assigned to particular instruments, as the case requires. For additional information, please visit our web site at: https://wcnt.wisc.edu/ Principal duties: The position responsibilities will include, but are not limited to: - Interaction with users of the Center. The position will be responsible for developing documentation and training materials for the proper use of instrumentation in the centers. The position will teach proper protocols including safety and laboratory etiquette. The candidate will write standard operating procedures and train students in the use of center instrumentation. The candidate will be expected to assist students and other researchers in all areas of tool use and process development for common WCNT applications. (50%) -Maintenance, repair, and construction of laboratory instrumentation. Maintenance of center instrumentation will be performed independently by the candidate and in close collaboration with field service engineers assigned to particular instruments, as the case requires. (40%) -Interaction with the lead PI groups and the lab manager to identify research trends and new instrumentation. The candidate will advise researchers, industrial and academic scientists, and faculty in developing or acquiring instruments and may participate in the preparation of grant and contract proposals. (10%) Required Qualifications: Minimum of 5 years in semiconductor/device fabrication or materials characterization. A minimum of seven years' experience required for appointment at the senior level. The candidate must have a strong background in the use of micro- and nanofabrication techniques, characterization techniques, equipment, and clean room protocols. Experience and expertise in electrical and electronic, mechanical, pneumatic, and vacuum components as related to semiconductor/device fabrication or characterization equipment is essential. Experience in student instruction or development of instructional materials will be critical to the success of the candidate. Strong interpersonal and communications skills and the ability to work well in a team are essential requirements. The candidate must have experience and expertise in safety procedures in a research laboratory environment. Desired Qualifications Experience with optical lithography, electron beam lithography or experience in characterization techniques (SEM, TEM, FTIR, Raman, XPS, SIMS, optical microscopy, AFM, etc.) are a plus. For additional information, please visit our web site at: https://wcnt.wisc.edu/ Link to job posting; https://jobs.hr.wisc.edu/en-us/job/503885/core-facility-engineer Daniel C. Christensen Nanoscale Fabrication Center University of Wisconsin-Madison 1550 Engineering Dr Madison, WI 53706 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Mon Jan 6 14:20:01 2020 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Mon, 6 Jan 2020 19:20:01 +0000 Subject: [labnetwork] Parylene Coater Concerns In-Reply-To: References: <8560e0aa534d44b1acbc3b903cc59436@andrew.cmu.edu> Message-ID: Happy New Year all! Thanks to everyone who responded. Your input has been very helpful. -- Matthew T. Moneck, Ph.D Executive Manager, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu From: Albert William (Bill) Flounders Sent: Friday, December 13, 2019 7:54 PM To: Matthew Moneck Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Parylene Coater Concerns Matt, Building a whole separate enclosure for just this tool seems overkill. Our parylene tool is in a Class100 cleanroom. We installed a hepa vac next to the tool and instruct staff and researchers to use it as needed Scraping the cold finger or other messy jobs are done in a hood or in the chase area. I think the tool deserves to be in the cleanroom and recommend controls/protocols to address the debris issue. Good luck keeping all parties satisfied. Bill Bill Flounders UC Berkeley On Fri, Dec 13, 2019 at 4:34 PM Matthew Moneck > wrote: Dear Colleagues, Happy Holidays! I would like to poll this community for some feedback. We have an SCS Labcoter 2 parylene system in our old cleanroom facility. That facility will soon shut down, and we are planning to relocate the tool. Due to the particulate and debris this tool generates, especially during maintenance cycles, we prefer not to move it into our new class 10, class 100 cleanroom facility. At the same time, we have faculty using the tool for applications where particulate contamination during sample loading is a concern. They would like to have it in the cleanroom. It is my understanding that many labs have either moved their parylene systems out of their cleanroom or they have installed the system in a lower class environment (class 10,000 for example). Our plan to satisfy all parties is move the system to a lab not currently operated as a cleanroom (i.e we are less worried about debris generated from the tool) and to build a relatively inexpensive softwall cleanroom around the tool to mitigate the particulate concerns during sample handling/loading. We have used these mini environments before for other equipment we could not put in our cleanroom, and they have served us well. However, there are still concerns from the researchers using the tool. My questions to this community are as follows: 1. Where to do you have your parylene system installed (e.g. class 100, 1000, or 10,000 cleanroom or in a standard lab environment)? 2. Do you have any comments or feedback on the benefits or pitfalls of using a softwall cleanroom for similar applications? 3. Do you have any other feedback or options we should consider? As always, we appreciate the input from this group. Best Regards, Matt -- Matthew T. Moneck, Ph.D Executive Manager, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From hayes186 at purdue.edu Tue Jan 7 09:24:19 2020 From: hayes186 at purdue.edu (Hayes, Matthew David) Date: Tue, 7 Jan 2020 14:24:19 +0000 Subject: [labnetwork] SCS Labcoater 2 parylene system Message-ID: Hello all! I'm interested in hearing how others are cleaning the chambers in these systems. Including: 1. Cleaning after every run or at some interval? 2. Procedures used to clean? 3. Using Micro 90 on chamber surfaces to promote removal of parylene film? Also, some users will get a cloudy film. Could this be from too thick of coating of Micro 90? Usually, I'll check vacuum then run a deposition of my own and the film looks better than the users. Matthew D Hayes Engineering Technician Birck Nanotechnology Center Purdue University 765-494-6522 hayes186 at purdue.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Tue Jan 7 13:28:20 2020 From: cekendri at mtu.edu (Chito Kendrick) Date: Tue, 7 Jan 2020 13:28:20 -0500 Subject: [labnetwork] SCS Labcoater 2 parylene system In-Reply-To: References: Message-ID: I follow the process outlined in the manual pretty closely for our system. 1. Treating the chamber with Micro90 to help release the parylene, spray all parts and then wipe off excess pooling of Micro90 2. Peeling off any parylene that is bubbling or may come off during pump down. For the thickness we normally do this is after every run. Mainly using plastic tweezers to help peel off the film in one sheet and then rubbing with a cleanroom wipe soaked with the Micro90 solution to help remove anything still stuck, if it does not come off then we assume it will not peel off layer during pumping. 3. We also do regular pump oil changes and removal of the flex line from the chamber to the cold finger to peel out any build up that can not be accessed with it on the system 4. Recently we had to drill out the baffle to clear a blockage in baffle tubing, it caused a build up of parylene in the vaporizer as the vapor flow was restricted 5. We are getting to the point where I will have to replace the stage as the coating is too rough to peel off. Several screws on our rotating plate are so bound up with parylene I am going to have to drill out the screws and retap them to completely clean some parts. The only cloudy films we have had I have associated to a bad base pressure or the micro90 has not completely dried. Chito Kendrick On Tue, Jan 7, 2020 at 12:47 PM Hayes, Matthew David wrote: > Hello all! > > > > I?m interested in hearing how others are cleaning the chambers in these > systems. Including: > > > > 1. Cleaning after every run or at some interval? > 2. Procedures used to clean? > 3. Using Micro 90 on chamber surfaces to promote removal of parylene > film? > > > > Also, some users will get a cloudy film. Could this be from too thick of > coating of Micro 90? Usually, I?ll check vacuum then run a deposition of my > own and the film looks better than the users. > > > > *Matthew D Hayes* > > Engineering Technician > > Birck Nanotechnology Center > > Purdue University > > 765-494-6522 > > hayes186 at purdue.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hayes186 at purdue.edu Tue Jan 7 15:25:37 2020 From: hayes186 at purdue.edu (Hayes, Matthew David) Date: Tue, 7 Jan 2020 20:25:37 +0000 Subject: [labnetwork] SCS Labcoater 2 parylene system In-Reply-To: References: Message-ID: Very good information! After your input, I?m thinking the difference in some of our users films (cloudy) and when I do a run (clearer) is that they may be starting run with too much or wet Micro 90 in the chamber. Thanks for your input! Matthew D Hayes Engineering Technician Birck Nanotechnology Center Purdue University 765-494-6522 hayes186 at purdue.edu From: Chito Kendrick Sent: Tuesday, January 7, 2020 1:28 PM To: Hayes, Matthew David Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] SCS Labcoater 2 parylene system I follow the process outlined in the manual pretty closely for our system. 1. Treating the chamber with Micro90 to help release the parylene, spray all parts and then wipe off excess pooling of Micro90 2. Peeling off any parylene that is bubbling or may come off during pump down. For the thickness we normally do this is after every run. Mainly using plastic tweezers to help peel off the film in one sheet and then rubbing with a cleanroom wipe soaked with the Micro90 solution to help remove anything still stuck, if it does not come off then we assume it will not peel off layer during pumping. 3. We also do regular pump oil changes and removal of the flex line from the chamber to the cold finger to peel out any build up that can not be accessed with it on the system 4. Recently we had to drill out the baffle to clear a blockage in baffle tubing, it caused a build up of parylene in the vaporizer as the vapor flow was restricted 5. We are getting to the point where I will have to replace the stage as the coating is too rough to peel off. Several screws on our rotating plate are so bound up with parylene I am going to have to drill out the screws and retap them to completely clean some parts. The only cloudy films we have had I have associated to a bad base pressure or the micro90 has not completely dried. Chito Kendrick On Tue, Jan 7, 2020 at 12:47 PM Hayes, Matthew David > wrote: Hello all! I?m interested in hearing how others are cleaning the chambers in these systems. Including: 1. Cleaning after every run or at some interval? 2. Procedures used to clean? 3. Using Micro 90 on chamber surfaces to promote removal of parylene film? Also, some users will get a cloudy film. Could this be from too thick of coating of Micro 90? Usually, I?ll check vacuum then run a deposition of my own and the film looks better than the users. Matthew D Hayes Engineering Technician Birck Nanotechnology Center Purdue University 765-494-6522 hayes186 at purdue.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Tue Jan 7 15:31:13 2020 From: cekendri at mtu.edu (Chito Kendrick) Date: Tue, 7 Jan 2020 15:31:13 -0500 Subject: [labnetwork] SCS Labcoater 2 parylene system In-Reply-To: References: Message-ID: In the manual I looked at there is several pieces of information on cloudy coatings: 1 - The vacuum controller set point value is factory-set at 15 units above base pressure. By changing this setting up or down, the process will speed up or slow down respectively. Take care not to set this value too high, as it will result in cloudy coatings 2 - Generally, the slower the deposition, the more uniform and clear the Parylene will be. From the standpoint of coating quality, you cannot coat too slowly, but coating too quickly can cause cloudy or whitish Parylene and uneven coating thickness. For Parylene C, the deposition rate will typically be about .0002" per hour 3 - It is best to distribute the substrate evenly within the Deposition Chamber. Relatively large spaces with little or no surface area will tend to result in Parylene coating that is cloudy. On Tue, Jan 7, 2020 at 3:25 PM Hayes, Matthew David wrote: > Very good information! > > After your input, I?m thinking the difference in some of our users films > (cloudy) and when I do a run (clearer) is that they may be starting run > with too much or wet Micro 90 in the chamber. > > > > Thanks for your input! > > > > > > *Matthew D Hayes* > > Engineering Technician > > Birck Nanotechnology Center > > Purdue University > > 765-494-6522 > > hayes186 at purdue.edu > > > > > > > > *From:* Chito Kendrick > *Sent:* Tuesday, January 7, 2020 1:28 PM > *To:* Hayes, Matthew David > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] SCS Labcoater 2 parylene system > > > > I follow the process outlined in the manual pretty closely for our system. > > > > 1. Treating the chamber with Micro90 to help release the parylene, spray > all parts and then wipe off excess pooling of Micro90 > > 2. Peeling off any parylene that is bubbling or may come off during pump > down. For the thickness we normally do this is after every run. Mainly > using plastic tweezers to help peel off the film in one sheet and then > rubbing with a cleanroom wipe soaked with the Micro90 solution to help > remove anything still stuck, if it does not come off then we assume it will > not peel off layer during pumping. > > 3. We also do regular pump oil changes and removal of the flex line from > the chamber to the cold finger to peel out any build up that can not be > accessed with it on the system > > 4. Recently we had to drill out the baffle to clear a blockage in baffle > tubing, it caused a build up of parylene in the vaporizer as the vapor flow > was restricted > > 5. We are getting to the point where I will have to replace the stage as > the coating is too rough to peel off. Several screws on our rotating plate > are so bound up with parylene I am going to have to drill out the screws > and retap them to completely clean some parts. > > > > The only cloudy films we have had I have associated to a bad base pressure > or the micro90 has not completely dried. > > > > Chito Kendrick > > > > > > On Tue, Jan 7, 2020 at 12:47 PM Hayes, Matthew David > wrote: > > Hello all! > > > > I?m interested in hearing how others are cleaning the chambers in these > systems. Including: > > > > 1. Cleaning after every run or at some interval? > 2. Procedures used to clean? > 3. Using Micro 90 on chamber surfaces to promote removal of parylene > film? > > > > Also, some users will get a cloudy film. Could this be from too thick of > coating of Micro 90? Usually, I?ll check vacuum then run a deposition of my > own and the film looks better than the users. > > > > *Matthew D Hayes* > > Engineering Technician > > Birck Nanotechnology Center > > Purdue University > > 765-494-6522 > > hayes186 at purdue.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > -- > > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcwilliamss at mail.smu.edu Tue Jan 7 15:31:51 2020 From: mcwilliamss at mail.smu.edu (McWilliams, Scott) Date: Tue, 7 Jan 2020 20:31:51 +0000 Subject: [labnetwork] wet etching InGaAlAs Message-ID: Hello All, I'm processing some wafers and need to wet etch layers of InGaAlAs of various compositions (Alx values of x = 0.48 to 0.27). I pulled a reference from the A.W. Clawson III-V etch reference guide that H3PO4/H202/H20 1:1:10 should etch this material, but it is not etching. The referenced paper does not provide the etchant temperature. I suspect that I need to perform a surface etch of some type before etching the InGaAlAs. We do have the limitation that our current mask is 600 angstroms of silicon nitride, so we may be prohibited from performing HF containing surface etches. Does anyone have experience with this material and a recommended surface clean? Is there a better etchant to use? Has anyone attempted to dry etch this material with a CH4/H2 process? Thank you, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From patricns at uw.edu Tue Jan 7 16:06:10 2020 From: patricns at uw.edu (N Shane Patrick) Date: Tue, 7 Jan 2020 13:06:10 -0800 Subject: [labnetwork] SCS Labcoater 2 parylene system In-Reply-To: References: Message-ID: <62AC5D7F-69E3-4C0D-A5A0-B06EC8453401@uw.edu> Just a quick chime in - we place tape (scotch or polyimide both work depending on what you have/allow) over the stage screws to protect them from build up. Obviously the tape gets covered but a gentle (or not) application of a razor blade easilly solves that we find. Everything else we pretty much do by the book. N. Shane Patrick Direct Write and Stepper Lithography Research Engineer, Washington Nanofabrication Facility (WNF) National Nanotechnology Coordinated Infrastructure (NNCI) University of Washington Fluke Hall 129, Box 352143 (206) 221-1045 patricns at uw.edu http://www.wnf.washington.edu/ >> On Jan 7, 2020, at 12:59 PM, Hayes, Matthew David wrote: > ? > Very good information! > After your input, I?m thinking the difference in some of our users films (cloudy) and when I do a run (clearer) is that they may be starting run with too much or wet Micro 90 in the chamber. > > Thanks for your input! > > > Matthew D Hayes > Engineering Technician > Birck Nanotechnology Center > Purdue University > 765-494-6522 > hayes186 at purdue.edu > > > > From: Chito Kendrick > Sent: Tuesday, January 7, 2020 1:28 PM > To: Hayes, Matthew David > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] SCS Labcoater 2 parylene system > > I follow the process outlined in the manual pretty closely for our system. > > 1. Treating the chamber with Micro90 to help release the parylene, spray all parts and then wipe off excess pooling of Micro90 > 2. Peeling off any parylene that is bubbling or may come off during pump down. For the thickness we normally do this is after every run. Mainly using plastic tweezers to help peel off the film in one sheet and then rubbing with a cleanroom wipe soaked with the Micro90 solution to help remove anything still stuck, if it does not come off then we assume it will not peel off layer during pumping. > 3. We also do regular pump oil changes and removal of the flex line from the chamber to the cold finger to peel out any build up that can not be accessed with it on the system > 4. Recently we had to drill out the baffle to clear a blockage in baffle tubing, it caused a build up of parylene in the vaporizer as the vapor flow was restricted > 5. We are getting to the point where I will have to replace the stage as the coating is too rough to peel off. Several screws on our rotating plate are so bound up with parylene I am going to have to drill out the screws and retap them to completely clean some parts. > > The only cloudy films we have had I have associated to a bad base pressure or the micro90 has not completely dried. > > Chito Kendrick > > > On Tue, Jan 7, 2020 at 12:47 PM Hayes, Matthew David wrote: > Hello all! > > I?m interested in hearing how others are cleaning the chambers in these systems. Including: > > Cleaning after every run or at some interval? > Procedures used to clean? > Using Micro 90 on chamber surfaces to promote removal of parylene film? > > Also, some users will get a cloudy film. Could this be from too thick of coating of Micro 90? Usually, I?ll check vacuum then run a deposition of my own and the film looks better than the users. > > Matthew D Hayes > Engineering Technician > Birck Nanotechnology Center > Purdue University > 765-494-6522 > hayes186 at purdue.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -- > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From km at highrioptics.com Tue Jan 7 17:37:13 2020 From: km at highrioptics.com (Keiko Munechika) Date: Tue, 7 Jan 2020 22:37:13 +0000 Subject: [labnetwork] Nanophotonics Engineer position available immediately in Berkeley, CA. Message-ID: Nanophotonics Engineer position available immediately in Berkeley, CA. Dear All, Happy 2020! We have an immediate opening for a Nanophotonics Engineer position in Berkeley CA. This position is suitable for a recent PhD graduate with a strong background in nano/micro fabrication and optics. I'd appreciate it if you can help spread the word. Job description is attached. Many thank for your help in advance! With warm regards, Keiko Munechika, Ph.D. Chief Executive Officer HighRI Optics, Inc. https://highrioptics.com/ [logo_white_background] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 1849 bytes Desc: image002.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Job Description for Nanophotonics Engineer HighRI Optics 01-2020.pdf Type: application/pdf Size: 174897 bytes Desc: Job Description for Nanophotonics Engineer HighRI Optics 01-2020.pdf URL: From fouad.karouta at anu.edu.au Tue Jan 7 17:38:08 2020 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Tue, 7 Jan 2020 22:38:08 +0000 Subject: [labnetwork] wet etching InGaAlAs In-Reply-To: References: Message-ID: Hi Scott, Usually the solution you mentioned should be able to etch the material. You may consider using smaller amount of water. Do you have any other layers on top of the InGaAlAs layer? Note H2O2 solutions should be made fresh every time of usage. I used a same solution to etch GaAs/AlAs at RT. Also we did sometime at 0?C. CH4/H2 process will etch very slowly Al containing materials. Hope this helps, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ From: labnetwork-bounces at mtl.mit.edu On Behalf Of McWilliams, Scott Sent: Wednesday, 8 January 2020 7:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] wet etching InGaAlAs Hello All, I'm processing some wafers and need to wet etch layers of InGaAlAs of various compositions (Alx values of x = 0.48 to 0.27). I pulled a reference from the A.W. Clawson III-V etch reference guide that H3PO4/H202/H20 1:1:10 should etch this material, but it is not etching. The referenced paper does not provide the etchant temperature. I suspect that I need to perform a surface etch of some type before etching the InGaAlAs. We do have the limitation that our current mask is 600 angstroms of silicon nitride, so we may be prohibited from performing HF containing surface etches. Does anyone have experience with this material and a recommended surface clean? Is there a better etchant to use? Has anyone attempted to dry etch this material with a CH4/H2 process? Thank you, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcwilliamss at mail.smu.edu Tue Jan 7 18:56:04 2020 From: mcwilliamss at mail.smu.edu (McWilliams, Scott) Date: Tue, 7 Jan 2020 23:56:04 +0000 Subject: [labnetwork] wet etching InGaAlAs In-Reply-To: References: , Message-ID: <46FF502D-F43C-4E41-BF5D-27ABF3A129A1@mail.smu.edu> Thank you all for your replies, I will check to see if the peroxide is the issue. I did etch the nitride with BOE, so didn?t dry etch it. After the BOE etch I stripped off the photoresist with solvents. For these wafers, I need to remove an InP layer and then an InGaAsP layer before etching the InGaAlAs. Regards, Scott Sent from my iPhone On Jan 7, 2020, at 4:38 PM, Fouad Karouta wrote: ? Hi Scott, Usually the solution you mentioned should be able to etch the material. You may consider using smaller amount of water. Do you have any other layers on top of the InGaAlAs layer? Note H2O2 solutions should be made fresh every time of usage. I used a same solution to etch GaAs/AlAs at RT. Also we did sometime at 0?C. CH4/H2 process will etch very slowly Al containing materials. Hope this helps, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ From: labnetwork-bounces at mtl.mit.edu On Behalf Of McWilliams, Scott Sent: Wednesday, 8 January 2020 7:32 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] wet etching InGaAlAs Hello All, I?m processing some wafers and need to wet etch layers of InGaAlAs of various compositions (Alx values of x = 0.48 to 0.27). I pulled a reference from the A.W. Clawson III-V etch reference guide that H3PO4/H202/H20 1:1:10 should etch this material, but it is not etching. The referenced paper does not provide the etchant temperature. I suspect that I need to perform a surface etch of some type before etching the InGaAlAs. We do have the limitation that our current mask is 600 angstroms of silicon nitride, so we may be prohibited from performing HF containing surface etches. Does anyone have experience with this material and a recommended surface clean? Is there a better etchant to use? Has anyone attempted to dry etch this material with a CH4/H2 process? Thank you, Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From scholvin at mit.edu Thu Jan 9 15:58:26 2020 From: scholvin at mit.edu (Jorg Scholvin) Date: Thu, 9 Jan 2020 20:58:26 +0000 Subject: [labnetwork] Job opening, Technician A, MIT.nano Message-ID: We have a job opening for "Technician A" at MIT.nano, details and links below: TECHNICIAN A, ELECTRO-MECHANICAL, MIT.nano to assist with laboratory, research or analytical work under the direction/supervision of scientific personnel. Will operate and maintain highly technical experimental apparatus in semiconductor processing facility. Will operate and maintain chemical and wafer cleaning stations, wet benches and fume hoods, vacuum systems (e.g., RF plasma etchers, oxygen-plasma asher), metrology systems, CMP, e-beam, sputter and chemical vapor deposition, and back-end/packaging tools; process wafers for lab and research purposes; interface with vendors for equipment service, repair, and troubleshooting; support all areas of the facilities, including all building infrastructure systems; clean and stock laboratory supplies; help with the moving and installation of tools; and assist with training students in the proper use of equipment. Job Requirements graduation from a two-year technical school or its equivalent; at least two years' applicable experience; experience with leak detectors, plumbing, and wiring of vacuum systems; strong mechanical and electrical aptitudes; ability to troubleshoot control electronics at board and component levels; basic computer skills for the purpose of data collection and maintenance of equipment logs and records; lab experience in semiconductor device fabrication and practices; basic knowledge of safety procedures in the handling of chemicals and toxic gases; experience with the repair and maintenance of electronic and mechanical equipment; ability to work on multiple tasks simultaneously and remain organized; good interpersonal skills; and ability to work independently with minimal day-to-day supervision and as part of a team with other technicians, staff, and students. Experience operating and maintaining high temperature oxidation and diffusion furnaces highly desirable. Job #18311 Normal work hours will be 7:30 A.M. to 3:30 P.M., Monday through Friday. Link to posting: https://careers.peopleclick.com/careerscp/client_mit/external/jobDetails/jobDetail.html?jobPostId=17689&localeCode=en-us https://hr.mit.edu/careers -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Fri Jan 10 16:41:57 2020 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Fri, 10 Jan 2020 16:41:57 -0500 Subject: [labnetwork] Job opening, Equipment Engineer - Columbia University Message-ID: <039601d5c7fe$c8a93290$59fb97b0$@columbia.edu> Greetings and happy new year to all, We are hiring! Looking for a lab equipment engineer that would work in our clean room and support our materials characterization and electron microscopy labs as well. Candidates must have a bachelor degree at Engineering or a related degree and must be able to work independently. For more information and in order to apply please see this link (and feel free to pass it on): http://pa334.peopleadmin.com/postings/5030 Come and join us to work in the greatest city in the world! Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mhofheins at unm.edu Thu Jan 16 16:52:03 2020 From: mhofheins at unm.edu (Mark Hofheins) Date: Thu, 16 Jan 2020 21:52:03 +0000 Subject: [labnetwork] HMDS Vapor dispense system Message-ID: Good Afternoon All, At the University of New Mexico we have a small clean room facility. We are in the process of bringing up another Lithography bay. We are looking for another HMDS Vapor dispense system that will fit on a table top. Please respond if you might know of any systems like this that is available. Best regards, Mark Hofheins mhofheins at unm.edu Cell 505-710-3527 Office 505-272-7155 Micro Electronics Technician Manufacturing Engineering Program University of New Mexico MTTC 800 Bradbury S.E. Suit 169 Albuquerque, New Mexico 87106-4346 -------------- next part -------------- An HTML attachment was scrubbed... URL: From scholvin at mit.edu Fri Jan 17 23:54:57 2020 From: scholvin at mit.edu (Jorg Scholvin) Date: Sat, 18 Jan 2020 04:54:57 +0000 Subject: [labnetwork] Job opening, Technician B, MIT.nano Message-ID: <3ae4fc854cdc4c36b99a7b4f0e44b31d@oc11expo12.exchange.mit.edu> We have another job opening, this one for "Technician B" at MIT.nano, details and links below: TECHNICIAN B, ELECTRO-MECHANICAL, MIT.nano to assist with laboratory maintenance and operations, as well as research and/or analytical work, under the direct supervision of scientific and technical personnel. Will operate and maintain highly technical experimental tools in semiconductor processing facility; interface with vendors for equipment service, repairs, and troubleshooting; support all areas of the laboratories, including facilities; and clean and stock supplies and order replacement parts for equipment. May process wafers for lab control and research purposes and assist with training students in the proper use of equipment. Responsibilities include routine lab upkeep functions, including lab cleaning; responding to user requests for chemicals and lab supplies; monitoring and maintaining specified inventory levels of chemicals and lab supplies; interacting with vendors; assisting with the installation of new and removal of old equipment; keeping storage and chase areas in a clean and orderly state; working with technical research staff to maintain and operate equipment used in device processing and fabrication; assisting with user training as requested; helping to establish and refine laboratory monitoring practices; and providing support in all areas of the facilities. Job Requirements graduation from two-year technical school or its equivalent, knowledge of safety procedures for handling chemicals and toxic gases, ability to troubleshoot control electronics at board level, basic computer skills and experience repairing and maintaining electronic equipment, and ability to lift weights of up to 40 lbs. PREFERRED: two years' applicable experience and lab experience in cleanroom fabrication and practices. Job #18412 Normal work hours will be 7:30 A.M. to 3:30 P.M., Monday through Friday. Link to posting: https://careers.peopleclick.com/careerscp/client_mit/external/jobDetails/jobDetail.html?jobPostId=17866&localeCode=en-us https://hr.mit.edu/careers From John.Watson at microsoft.com Sat Jan 18 03:17:03 2020 From: John.Watson at microsoft.com (John Watson) Date: Sat, 18 Jan 2020 08:17:03 +0000 Subject: [labnetwork] Microsoft Quantum Lab site manager positions Message-ID: Dear Colleagues, The Microsoft Quantum program has a number of positions open for site managers at our global lab sites. See links below for more information. Delft Quantum Site Manager Redmond Quantum Site Director Copenhagen Quantum Site Manager Sydney Quantum Site Manager Best, John -- John Watson Senior Research Manager Microsoft Quantum Lab Delft Lorentzweg 1 2628CJ Delft The Netherlands -------------- next part -------------- An HTML attachment was scrubbed... URL: From demis at ece.ucsb.edu Sun Jan 19 17:43:24 2020 From: demis at ece.ucsb.edu (Demis D. John) Date: Sun, 19 Jan 2020 14:43:24 -0800 Subject: [labnetwork] Fwd: U. Oregon Cleanroom director job In-Reply-To: References: Message-ID: FYI see this link. https://careers.uoregon.edu/en-us/job/524959/clean-room-manager -- Demis ---------------------------------------- demis at ucsb.edu * Process Scientist Manager* UCSB Nanofabrication Facility ---------------------------------------- ---------- Forwarded message --------- From: Benjam?n J. Alem?n Date: Thu, Jan 9, 2020 at 1:07 PM Subject: Clean room director job To: Demis D. John , Brian Thibeault Dear Brian and Demis, We are building a new $1B campus with a sweet clean room and we are looking for excellent candidates to run the clean room. Please pass this posting to anyone you think might be interested: https://careers.uoregon.edu/en-us/job/524959/clean-room-manager Best, Benjam?n -------------------------------------- Benjam?n J. Alem?n (he, him, his) Assistant Professor Department of Physics Material Science Institute, Oregon Center for Optical, Molecular, and Quantum Science & Phil and Penny Knight Campus for Accelerating Scientific Impact University of Oregon Eugene, Oregon 97403 Willamette Hall 178 http://alemanlab.uoregon.edu/ 541.346.3321 -------------------------------------- -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Thu Jan 23 08:42:15 2020 From: kmcpeak at lsu.edu (Kevin M McPeak) Date: Thu, 23 Jan 2020 13:42:15 +0000 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod Message-ID: Dear Colleagues, Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing. When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice. NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995. Regards, Kevin -- Kevin M. McPeak Assistant Professor | LSU Dept. of Chemical Engineering 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication -------------- next part -------------- A non-text attachment was scrubbed... Name: LSU_CAMD_Oxford_GasPod.jpg Type: image/jpeg Size: 5590884 bytes Desc: LSU_CAMD_Oxford_GasPod.jpg URL: From rmorrison at draper.com Thu Jan 23 12:04:34 2020 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Thu, 23 Jan 2020 17:04:34 +0000 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod In-Reply-To: References: Message-ID: Rick Morrison here from Draper, seems very curious that the CF4 and SF6 lines have a bypass and an input valve. Looks like this is a bypass to maybe vacuum pump the lines during gas bottle hookup or some other function. If that is what those are used for then I would plumb the new gas the same way. What part of the manifold are you tying the new gases into looks like you have 2 slots open where the SF6 and CF4 lines are. Rick -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin M McPeak Sent: Thursday, January 23, 2020 8:42 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod Dear Colleagues, Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing. When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice. NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995. Regards, Kevin -- Kevin M. McPeak Assistant Professor | LSU Dept. of Chemical Engineering 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ From spaolini at cns.fas.harvard.edu Thu Jan 23 13:09:02 2020 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Thu, 23 Jan 2020 18:09:02 +0000 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod In-Reply-To: References: Message-ID: Kevin, What you have is an early version of a gas pod that is capable of handling two flammable/toxic/pyrophoric gases. On the SF6 and CF4 channels, you have pneumatic two way shut offs that are upstream and downstream of the MFC. The manual toggle valve is there as a bypass to purge the circuit should the MFC fail and you lose your means of evacuating and purging for replacement. This is overkill for the gases you intend to run. The output lines are separate with O2 and N2 going to one line to the machine and the other one is for the reactive gases which, I presume, were toxic when the machine was commissioned. This arrangement was most likely set up to keep the nasty gas separated from the O2 as far away and remix as close to the chamber as possible. Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems. Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu On Behalf Of Kevin M McPeak Sent: Thursday, January 23, 2020 8:42 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod Dear Colleagues, Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing. When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice. NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995. Regards, Kevin -- Kevin M. McPeak Assistant Professor | LSU Dept. of Chemical Engineering 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication From beaudoin at physics.ubc.ca Thu Jan 23 13:23:51 2020 From: beaudoin at physics.ubc.ca (Beaudoin, Mario) Date: Thu, 23 Jan 2020 10:23:51 -0800 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod In-Reply-To: References: Message-ID: If it helps, we've just received our new COBRA system with a similar gas pod.? All lines are plumbed like the O2, N2, including CF4, SF6 and C4F8. Mario On 2020-01-23 5:42 a.m., Kevin M McPeak wrote: > Dear Colleagues, > > Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing. > > When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice. > > NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995. > > Regards, > Kevin > > -- > Kevin M. McPeak > Assistant Professor | LSU Dept. of Chemical Engineering > 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mario Beaudoin SBQMI sig 2.jpg Type: image/jpeg Size: 21446 bytes Desc: not available URL: From schweig at umich.edu Thu Jan 23 14:47:09 2020 From: schweig at umich.edu (Dennis Schweiger) Date: Thu, 23 Jan 2020 14:47:09 -0500 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod In-Reply-To: References: Message-ID: Kevin, good afternoon. You have an interesting assortment of technologies in your gas box, micro-fit, and the older TB7 weld hardware. Since your two "new" gases are relatively inert, I would pick the simplest install to make them active. Typically the bypass arrangement you see on a couple of the channels is for when you need to remove the MFC, and it's plugged. If you were using a reactive gas, the bypass gives you a way to evacuate both ends of the MFC, making it "safe" to remove. Dennis Schweiger University of Michigan/LNF Facilities 734.647.2055 Ofc On Thu, Jan 23, 2020 at 11:52 AM Kevin M McPeak wrote: > Dear Colleagues, > > Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 > system. The gas pod (see attached photo) currently has the following gases > plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 > and SF6 lines have additional valves and plumbing. > > When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and > N2 gases (filter -> MFC -> valve) are or do I need to add the additional > valves and plumbing like the SF6 and CF8 lines are? We can do either but > the SF6/CF4 method is a lot more money and time. This is an old gas pod, > circa 1995 and Oxford has limited information. and advice. > > NOTE: The two output lines (top line and 3rd from top) from the gas pod > get merged at the tool before entering the instrument. I am not sure why it > was plumbed this way back in 1995. > > Regards, > Kevin > > -- > Kevin M. McPeak > Assistant Professor | LSU Dept. of Chemical Engineering > 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Thu Jan 23 16:01:09 2020 From: codreanu at udel.edu (Iulian Codreanu) Date: Thu, 23 Jan 2020 16:01:09 -0500 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod In-Reply-To: References: Message-ID: <5b277a98-98a5-3b68-0de6-a33619b84257@udel.edu> Hi Kevin, I second Dennis' recommendation. I have the MFC bypass arrangement for flammable, pyrophoric, toxic, and corrosive gases. Best, Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 1/23/2020 2:47 PM, Dennis Schweiger wrote: > Kevin, > > good afternoon.? You have an interesting assortment?of technologies in > your gas box, micro-fit, and the older TB7 weld hardware. Since your > two "new" gases are relatively inert, I would pick the simplest > install to make them active.? Typically the bypass arrangement you see > on a couple of the channels is for when you need to remove the MFC, > and it's plugged.? If you were using a reactive?gas, the bypass gives > you a way to evacuate both ends of the MFC, making it "safe" to remove. > > DennisSchweiger > University of Michigan/LNF > Facilities > 734.647.2055 Ofc > > > On Thu, Jan 23, 2020 at 11:52 AM Kevin M McPeak > wrote: > > Dear Colleagues, > > Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford > ICP100 system. The gas pod (see attached photo) currently has the > following gases plumbed from top to bottom: O2, N2, CF4, and SF6. > Notice, the current CF4 and SF6 lines have additional valves and > plumbing. > > When I add the C4F8 and CHF3 do you recommend I plumb them like > the O2 and N2 gases (filter -> MFC -> valve) are or do I need to > add the additional valves and plumbing like the SF6 and CF8 lines > are? We can do either but the SF6/CF4 method is a lot more money > and time. This is an old gas pod, circa 1995 and Oxford has > limited information. and advice. > > NOTE: The two output lines (top line and 3rd from top) from the > gas pod get merged at the tool before entering the instrument. I > am not sure why it was plumbed this way back in 1995. > > Regards, > Kevin > > -- > Kevin M. McPeak > Assistant Professor | LSU Dept. of Chemical Engineering > 225-578-0058 | mcpeaklab.com | > lsu.edu/nanofabrication > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Thu Jan 23 17:35:10 2020 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Thu, 23 Jan 2020 22:35:10 +0000 Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod In-Reply-To: References: Message-ID: Hi Kevin, I agree with previous comments about the bypass not required for CF4 and SF6 and hence not required for CHF3 and C4F8. About C4F8 we had some flow issues ever and we ended up heating the line that solved the issue. Am not sure if this was related to a different cause but I thought to share the information here. Best regards, Fouad Karouta ************************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics L. Huxley Building (#56), Mills Road, Room 4.02 Australian National University ACT 2601, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu On Behalf Of Morrison, Richard H., Jr Sent: Friday, 24 January 2020 4:05 AM To: Kevin M McPeak ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Plumbing new gases in ICP-RIE gas pod Rick Morrison here from Draper, seems very curious that the CF4 and SF6 lines have a bypass and an input valve. Looks like this is a bypass to maybe vacuum pump the lines during gas bottle hookup or some other function. If that is what those are used for then I would plumb the new gas the same way. What part of the manifold are you tying the new gases into looks like you have 2 slots open where the SF6 and CF4 lines are. Rick -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin M McPeak Sent: Thursday, January 23, 2020 8:42 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod Dear Colleagues, Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing. When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice. NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995. Regards, Kevin -- Kevin M. McPeak Assistant Professor | LSU Dept. of Chemical Engineering 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From yb2471 at columbia.edu Mon Jan 27 16:13:37 2020 From: yb2471 at columbia.edu (Youry Borisenkov) Date: Mon, 27 Jan 2020 16:13:37 -0500 Subject: [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder Message-ID: Dear All, We are experiencing a strange fault with our savannah ALD. It was hard to catch but, when the Lab View GUI crashes or friezes (this happens every once in a while and the system is in Idle mode), it just sets the Nitrogen purge MFC to the max open position and empties the N2 cylinder unless we are fast to respond. Did any of you had such a problem? If so, what was the solution? -- Thanks and Best Regards, Youry Borisenkov Cleanroom Process Engineer Columbia University 530 W 120th Street Room 1017 New York, NY 10027 *Columbia Nano Initiative | Cleanroom* -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Tue Jan 28 09:35:34 2020 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm R) Date: Tue, 28 Jan 2020 14:35:34 +0000 Subject: [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder In-Reply-To: References: Message-ID: Hi Youry, I have not come across that particular issue so far. Typically, when the GUI freezes (USB errors in our case) my sense has been that everything stops in a "fail-safe" mode, i.e. heaters off, and everything else with them. I have been dealing with a fault in our controller lately, wherein the MFC circuit does not enter "bypass" when venting, instead shutting off, and preventing venting. This is a different issue, however, in that it is hardware related. Yours sounds like it's control signal-related. Perhaps a soft-ware reload? Or update? Which rev. of Savannah software do you have? Mac Harvard CNS ________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Youry Borisenkov Sent: Monday, January 27, 2020 4:13 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder Dear All, We are experiencing a strange fault with our savannah ALD. It was hard to catch but, when the Lab View GUI crashes or friezes (this happens every once in a while and the system is in Idle mode), it just sets the Nitrogen purge MFC to the max open position and empties the N2 cylinder unless we are fast to respond. Did any of you had such a problem? If so, what was the solution? -- Thanks and Best Regards, Youry Borisenkov Cleanroom Process Engineer Columbia University 530 W 120th Street Room 1017 New York, NY 10027 Columbia Nano Initiative | Cleanroom -------------- next part -------------- An HTML attachment was scrubbed... URL: From jeanne.guo at rice.edu Tue Jan 28 11:21:19 2020 From: jeanne.guo at rice.edu (Jing Guo) Date: Tue, 28 Jan 2020 10:21:19 -0600 Subject: [labnetwork] FTO sputtering using AJA Orion system? Message-ID: Hi All, We have a user target request to use our AJA Orion sputter system (7 targets). The target request is FTO, Fluorine Doped (20%) Tin Oxide. Does anyone have experience on this target sputtering process? Is there any risk that FTO contaminates the muti-targets chamber or create potential damage of the system because of doped Fluorine? Any information will be appreciated. Thanks! Best, Jing --------------------------------------- Jing Guo Ph.D. Research Scientist SEA Cleanroom (SST 017) Rice University Houston, TX jeanne.guo at rice.edu 713-348-8227 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mhofheins at unm.edu Tue Jan 28 11:47:17 2020 From: mhofheins at unm.edu (Mark Hofheins) Date: Tue, 28 Jan 2020 16:47:17 +0000 Subject: [labnetwork] CEE 200CB model coater Message-ID: We are having problems with our program software. We are not getting screen options we need for operation. Would anyone have the software that is applicable to this model? I really would rather re-load the software as opposed to send the whole tool to CEE for them to do it. Best regards, Mark Hofheins mhofheins at unm.edu Cell 505-710-3527 Office 505-272-7155 Micro Electronics Technician Manufacturing Engineering Program University of New Mexico MTTC 800 Bradbury S.E. Suit 169 Albuquerque, New Mexico 87106-4346 -------------- next part -------------- An HTML attachment was scrubbed... URL: From edeguns at gmail.com Tue Jan 28 13:10:54 2020 From: edeguns at gmail.com (Eric Deguns) Date: Tue, 28 Jan 2020 13:10:54 -0500 Subject: [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder In-Reply-To: References: Message-ID: Dear Youry, I'm one of the original folks from Cambridge Nanotech. I (along with the rest of the Cambridge NanoTech ALD group) am/arewith Veeco and we are still supporting these tools. We haven't seen the situation you describe (with the MFC failing open) with over 400 installed Savannahs. Indeed the safety concepts for the system are supposed to prevent this. A few years back I recall that Columbia had their MFC reworked/refurbished via a third party. I'm wondering if this is the root cause of the situation that you describe - there is some subtle differences between the vent/fast-vent of the MFCs. Please feel free to contact me directly at edeguns at veeco.com or my colleagues at ALDsupport at veeco.com and we can try and help you as best we can. Many thanks in advance, Eric On Mon, Jan 27, 2020 at 8:08 PM Youry Borisenkov wrote: > Dear All, > We are experiencing a strange fault with our savannah ALD. > It was hard to catch but, when the Lab View GUI crashes or friezes (this > happens every once in a while and the system is in Idle mode), it just sets > the Nitrogen purge MFC to the max open position and empties the N2 cylinder > unless we are fast to respond. > Did any of you had such a problem? If so, what was the solution? > > -- > Thanks and Best Regards, > Youry Borisenkov > Cleanroom Process Engineer > Columbia University > 530 W 120th Street Room 1017 > New York, NY 10027 > *Columbia Nano Initiative | Cleanroom* > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From yb2471 at columbia.edu Tue Jan 28 16:53:26 2020 From: yb2471 at columbia.edu (Youry Borisenkov) Date: Tue, 28 Jan 2020 16:53:26 -0500 Subject: [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder In-Reply-To: References: Message-ID: Hi Tony, We are on LabView V8.0; and the Savannah ALD software is V18-24.vi The situation I described, it indeed different. As a matter of fact, I got a response from Veeco representative and I hope he will be able to provide valuable input. Thank you and have a great week! Best regards, Youry On Tue, Jan 28, 2020 at 9:35 AM Hathaway, Malcolm R < hathaway at cns.fas.harvard.edu> wrote: > Hi Youry, > > I have not come across that particular issue so far. Typically, when the > GUI freezes (USB errors in our case) my sense has been that everything > stops in a "fail-safe" mode, i.e. heaters off, and everything else with > them. > > I have been dealing with a fault in our controller lately, wherein the MFC > circuit does not enter "bypass" when venting, instead shutting off, and > preventing venting. This is a different issue, however, in that it is > hardware related. Yours sounds like it's control signal-related. Perhaps > a soft-ware reload? Or update? Which rev. of Savannah software do you > have? > > > Mac > Harvard CNS > ------------------------------ > *From:* labnetwork-bounces at mtl.mit.edu > on behalf of Youry Borisenkov > *Sent:* Monday, January 27, 2020 4:13 PM > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Savannah ALD GUI crash - empties the N2 cylinder > > Dear All, > We are experiencing a strange fault with our savannah ALD. > It was hard to catch but, when the Lab View GUI crashes or friezes (this > happens every once in a while and the system is in Idle mode), it just sets > the Nitrogen purge MFC to the max open position and empties the N2 cylinder > unless we are fast to respond. > Did any of you had such a problem? If so, what was the solution? > > -- > Thanks and Best Regards, > Youry Borisenkov > Cleanroom Process Engineer > Columbia University > 530 W 120th Street Room 1017 > New York, NY 10027 > *Columbia Nano Initiative | Cleanroom > * > -------------- next part -------------- An HTML attachment was scrubbed... URL: From cekendri at mtu.edu Thu Jan 30 11:24:50 2020 From: cekendri at mtu.edu (Chito Kendrick) Date: Thu, 30 Jan 2020 11:24:50 -0500 Subject: [labnetwork] EV620 not initializing Message-ID: We have a EV620 Aligner at MTU and this tuesday it did not complete the initialization process after logging in, all reboots and attempts have failed. We have software version 2.64 and we are still running a Win98 system. I am talking to EVG about this problem to get a solution, but being an older system and software version they are still working on it. Therefore I was hoping this community might have faced this issue and have some advice. After typing in the password and hitting run the system starts initialization. It moves the optical head, mask stage, WEC, and then gives a double beep - all of this is normal. Instead of bringing up the recipes it has ERROR and look at the log. The log has as the last entry - "Check distance measurement !". All menus are greyed out so I can not access any other part of the software. Regards, Chito Kendrick -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 -------------- next part -------------- An HTML attachment was scrubbed... URL: From vamsinittala at gmail.com Thu Jan 30 13:23:37 2020 From: vamsinittala at gmail.com (N P VAMSI KRISHNA) Date: Thu, 30 Jan 2020 12:23:37 -0600 Subject: [labnetwork] EV620 not initializing In-Reply-To: References: Message-ID: Dear Chito, I saw this kind of error in my previous workplace during a couple of instances. Like, sudden power failure, someone pressed EMO and CPU power unplugged accidentally. I believe this problem is due to not shutting down the operating system properly. EVG guys logged into our machine through online and created a key. They have a random key generation method which is associated with the windows 98 OS. In another instance, there was a problem with the stage sensor as well. Hope this helps. Best regards, Vamsi On Thu, Jan 30, 2020 at 11:53 AM Chito Kendrick wrote: > We have a EV620 Aligner at MTU and this tuesday it did not complete the > initialization process after logging in, all reboots and attempts have > failed. We have software version 2.64 and we are still running a Win98 > system. I am talking to EVG about this problem to get a solution, but being > an older system and software version they are still working on it. > Therefore I was hoping this community might have faced this issue and have > some advice. > > After typing in the password and hitting run the system starts > initialization. It moves the optical head, mask stage, WEC, and then gives > a double beep - all of this is normal. Instead of bringing up the recipes > it has ERROR and look at the log. The log has as the last entry - "Check > distance measurement !". All menus are greyed out so I can not access any > other part of the software. > > Regards, > > Chito Kendrick > > > > -- > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- ___________________________________________________ N.P. Vamsi Krishna, PhD Postdoctoral Fellow Pritzker School of Molecular Engineering, *The University of Chicago * Center for Nanoscale Materials, *Argonne National Laboratory * Phone: 1 (331) 757-8565 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mheiden at engr.ucr.edu Thu Jan 30 13:29:56 2020 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Thu, 30 Jan 2020 18:29:56 +0000 Subject: [labnetwork] Older Unaxis 790 PECVD Service Message-ID: We have a vintage 2005 or so Unaxis 790 PECVD that has come up with an error "Disk Scan Error" There is a problem with your display settings. The adapter type is incorrect. Does anyone have experience with this or know of a vendor that can repair this age Unaxis tools? Thanks in advance, Mark Heiden NanoFab Cleanroom Manager University of California, Riverside 951-827-2551 https://nanofab.ucr.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From hit.kamble at gmail.com Thu Jan 30 14:41:41 2020 From: hit.kamble at gmail.com (Hitesh Kamble) Date: Fri, 31 Jan 2020 01:11:41 +0530 Subject: [labnetwork] EV620 not initializing In-Reply-To: References: Message-ID: Hello Chito, What i understood from your description is optics initialise, cover down but it doesn't reach to upper position? And gives initialisation error at "UC04:*" ? This is related to Way measurements system which is combination of Z-motor control and hardware settings. To identify issue>> access software in service mode: At login window, enter id password and click 3 times on EVG logo. You'll bypass initialisation and can access tool in High-level mode. There try to operate cover up/down. If this function does not work then try below troubleshooting. Checks1 : Open electronic box where you will see Z-motor controller. It should not be "F" on 7-segment display. If yes battery could have drained completely or firmware lost. Solution: Replace battery and install firmware again. Checks 2: There is a limiting screw in the Top side of the cover.It?s a M10 Nut screw near the center of the cover when you look onto the cover. When this screw is loosen, the cover can?t reach it?s upper position for initialization. Thanks, Hitesh Kamble, CEN, IIT Bombay, India. On Thu, Jan 30, 2020, 11:17 PM Chito Kendrick wrote: > We have a EV620 Aligner at MTU and this tuesday it did not complete the > initialization process after logging in, all reboots and attempts have > failed. We have software version 2.64 and we are still running a Win98 > system. I am talking to EVG about this problem to get a solution, but being > an older system and software version they are still working on it. > Therefore I was hoping this community might have faced this issue and have > some advice. > > After typing in the password and hitting run the system starts > initialization. It moves the optical head, mask stage, WEC, and then gives > a double beep - all of this is normal. Instead of bringing up the recipes > it has ERROR and look at the log. The log has as the last entry - "Check > distance measurement !". All menus are greyed out so I can not access any > other part of the software. > > Regards, > > Chito Kendrick > > > > -- > Chito Kendrick Ph.D. > > Managing Director of the Microfabrication Facility > Research Assistant Professor > Electrical and Computer Engineering > Michigan Technological University > Room 436 M&M Building > 1400 Townsend Dr. > Houghton, Michigan 49931-1295 > > 814-308-4255 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mark.chiappa at ntnu.no Fri Jan 31 04:18:30 2020 From: mark.chiappa at ntnu.no (Mark Chiappa) Date: Fri, 31 Jan 2020 09:18:30 +0000 Subject: [labnetwork] EV620 not initializing In-Reply-To: References: Message-ID: <8D8E4F3E-11B9-4538-A17B-5DD2F52BDD58@ntnu.no> Hi Chito, I agree with Hitesh. I?ve had similar issues in the past with my own 620 (similar vintage running Wn98) and in both instances is was the battery on the motor controllers. Best of luck Kind regards Mark From: on behalf of Hitesh Kamble Date: Thursday, 30 January 2020 at 21:49 To: Chito Kendrick Cc: "labnetwork at mtl.mit.edu" Subject: Re: [labnetwork] EV620 not initializing Hello Chito, What i understood from your description is optics initialise, cover down but it doesn't reach to upper position? And gives initialisation error at "UC04:*" ? This is related to Way measurements system which is combination of Z-motor control and hardware settings. To identify issue>> access software in service mode: At login window, enter id password and click 3 times on EVG logo. You'll bypass initialisation and can access tool in High-level mode. There try to operate cover up/down. If this function does not work then try below troubleshooting. Checks1 : Open electronic box where you will see Z-motor controller. It should not be "F" on 7-segment display. If yes battery could have drained completely or firmware lost. Solution: Replace battery and install firmware again. Checks 2: There is a limiting screw in the Top side of the cover.It?s a M10 Nut screw near the center of the cover when you look onto the cover. When this screw is loosen, the cover can?t reach it?s upper position for initialization. Thanks, Hitesh Kamble, CEN, IIT Bombay, India. On Thu, Jan 30, 2020, 11:17 PM Chito Kendrick > wrote: We have a EV620 Aligner at MTU and this tuesday it did not complete the initialization process after logging in, all reboots and attempts have failed. We have software version 2.64 and we are still running a Win98 system. I am talking to EVG about this problem to get a solution, but being an older system and software version they are still working on it. Therefore I was hoping this community might have faced this issue and have some advice. After typing in the password and hitting run the system starts initialization. It moves the optical head, mask stage, WEC, and then gives a double beep - all of this is normal. Instead of bringing up the recipes it has ERROR and look at the log. The log has as the last entry - "Check distance measurement !". All menus are greyed out so I can not access any other part of the software. Regards, Chito Kendrick -- Chito Kendrick Ph.D. Managing Director of the Microfabrication Facility Research Assistant Professor Electrical and Computer Engineering Michigan Technological University Room 436 M&M Building 1400 Townsend Dr. Houghton, Michigan 49931-1295 814-308-4255 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From sb86922 at usc.edu Fri Jan 31 09:01:46 2020 From: sb86922 at usc.edu (Shivakumar Bhaskaran) Date: Fri, 31 Jan 2020 14:01:46 +0000 Subject: [labnetwork] Job Opening - Lab Operation Engineer at University of Southern California Message-ID: Dear LabNetwork members, The USC Viterbi School of Engineering in Los Angeles is looking for Lab Operation Engineer to work at our new cleanroom John D. O Brien Nanofabrication Laboratory. Please forward to anyone interested Job Description: We are looking for a highly-motivatedLab Operation Engineer. Reporting to the Associate Director, this individual will support the cleanroom users with training, developing nanofabrication process and collaborate with facility staff and research users to identify tool operation issues and address those issues promptly with proper maintenance, repair, and troubleshooting. The ideal candidate should be customer service oriented and contribute towards improving the operation of the facility. Please see the link for more information. * https://usccareers.usc.edu/job/los-angeles/nanofabrication-lab-operation-engineer/1209/15068243 * Requisition ID: REQ20084972 Job Title: Nanofabrication Lab Operation Engineer Best Regards, Shiva Shivakumar Bhaskaran, Ph.D., Associate Director, John D. O?Brien Nanofabrication Laboratory Michelson Hall, 1002 Childs Way, MCB LL121, Los Angeles, California 90089, 213 821 2374 [Sign] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 3276 bytes Desc: image002.jpg URL: From bob.henderson at etchedintimeinc.com Fri Jan 31 14:16:31 2020 From: bob.henderson at etchedintimeinc.com (bob.henderson at etchedintimeinc.com) Date: Fri, 31 Jan 2020 12:16:31 -0700 Subject: [labnetwork] Wafer fabrication capability expanding to industry users Message-ID: <001501d5d86a$f27f4e20$d77dea60$@etchedintimeinc.com> Arizona State University is now partnering with industry users as well as academic users to make wafer and panel processing available for a variety of MEMS and other projects that require prototype or other R&D type fabrication. For additional details and available equipment sets you can contact me offline. Bob Henderson -------------- next part -------------- An HTML attachment was scrubbed... URL: From derose at caltech.edu Fri Jan 31 15:05:43 2020 From: derose at caltech.edu (DeRose, Guy A.) Date: Fri, 31 Jan 2020 20:05:43 +0000 Subject: [labnetwork] Laboratory Technician position at California Institute of Technology In-Reply-To: References: Message-ID: Hello Labnetwork colleagues: The Kavli Nanoscience Institute at The California Institute of Technology (Caltech) is looking to expand our technical staff, and we are planning to hire a laboratory technician. The position is full-time exempt (salary), and we are looking to fill asap. Check out the detailed posting, below, and/or pass along to others who you think might be interested. For more details about the Kavli Nanoscience Institute laboratory, see our wiki. If the link doesn?t work, the address is https://lab.kni.caltech.edu. Title: Laboratory Technician Company: Caltech Click the link below to see the details of the position: https://chm.tbe.taleo.net/chm03/ats/careers/requisition.jsp?org=CALTECH&cws=37&rid=5147 Job Summary The Kavli Nanoscience Institute (KNI) is seeking a Laboratory Technician to assist in the day-to-day technical maintenance operations of its 7,500 sq. ft. cleanroom facility and affiliated lab spaces on the Caltech campus. The Laboratory Technician will assist the lab?s technical staff in the upkeep and repair of state-of-the-art nanofabrication equipment (e.g. material etching and deposition systems, lithographic tools, and electron microscopes) by servicing vacuum systems, mechanical components, and other laboratory infrastructure such as the electrical, gas, and water lines that connect to the equipment. When repairs are needed, the successful applicant will be able to combine problem solving skills with mechanical and electrical knowhow to return equipment to optimal working order, then document the solutions to make future repairs more efficient. The Laboratory Technician will also establish effective test protocols and preventative maintenance plans that minimize the chance of equipment failure, thereby maximizing its uptime for the KNI Lab?s 100+ researchers. The Laboratory Technician will have the opportunity to learn basic operation of advanced equipment so that he/she may run common maintenance routines, and will assume primary responsibility for certain tools (e.g. wire bonder, tube furnaces), which will include training lab members ? graduate students, post-docs, and industrial users ? to operate them. Job Duties ? Administer preventative maintenance and repairs of equipment (e.g. material etching and deposition systems, lithographic tools, electron microscopes) to ensure proper working conditions, and coordinate maintenance and repairs done by external entities (e.g. vendors, Caltech facilities workers) when needed. ? Create, update, and maintain equipment troubleshooting documents for use by both lab members and other KNI technical staff. ? Assist in reviewing, revising, and implementing quality control practices, such as lab walkthrough checklists. ? Create standard operating procedures for lab equipment for which the Laboratory Technician is the primary manager (e.g. wire bonder, tube furnaces). ? Assist KNI technical staff with the day-to-day, routine operations of various pieces of equipment in the lab. ? Communicate progress and problems to supervisors via email/phone, in meetings, and in reports, depending on the urgency and scope. ? In response to new technical challenges, research and reference ? and then implement ? established scientific/technical practices, standards, and/or policies. ? Contribute to the planning, installation, and commissioning of new equipment in the laboratory, then establish operational protocols and maintenance plans for such equipment. ? Help to maintain, upgrade, and back up computer systems in the lab (e.g. computers for individual instruments, login terminals, and new computer networking projects). ? Participate in the discussion of laboratory protocols and objectives with other staff members. ? Maintain awareness of laws and regulations affecting the management of the laboratory; ensure compliance with Institute policies, scientific protocols, regulatory agencies, and safety practices. ? Assist in the maintenance of stock levels/inventory of lab supplies such as solvents, wet etchants, personal protective equipment, and other general supplies, as needed. May assist in the purchase of equipment and supplies, contact vendors, conduct product comparisons or assist in forecasting/planning future equipment and resource needs. ? Promote lab safety by assisting the KNI safety officer in the training of lab members on safety procedures and communicating with the campus safety office; document and communicate laboratory and facility safety procedures. Basic Qualifications ? Bachelor?s degree in engineering or sciences or equivalent education and experience. ? At least 4 years of relevant experience in equipment maintenance, repair, installation, and/or the fabrication industry. ? A high level of craftsmanship and a thorough knowledge of mechanical design, materials, tools, units, and basic measurement techniques. ? Attention to detail and excellent problem-solving and debugging skills. ? An ability to learn quickly and adequately transfer that knowledge to others through teaching/documentation. ? Ability to work independently and with a high level of responsibility and organization. ? Teamwork skills and an ability to collaborate with coworkers who have diverse skills and backgrounds. ? Strong communication skills. ? Must be able to work evenings and weekends as needed; though flexible working hours may be available. ? Must be able to work in a cleanroom setting, following all established protocols for gowning and safety. ? Must be able to occasionally lift 20-50 lbs. Preferred Qualifications ? Proficiency with the following software: Word, Excel, Outlook, and PowerPoint. ? Basic computer maintenance and troubleshooting skills, e.g. new hardware installs, networking, performing hard drive back ups. Required Documents ? Resume All the best, Guy DeRose, PhD, Member of the Professional Staff Associate Director of Technical Operations, Kavli Nanoscience Institute California Institute of Technology, Pasadena, CA USA (O) 1-626-395-3423 (M) 1-626-676-8529 http://kni.caltech.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From somenath.mitra at njit.edu Fri Jan 31 15:40:34 2020 From: somenath.mitra at njit.edu (Mitra, Somenath) Date: Fri, 31 Jan 2020 15:40:34 -0500 Subject: [labnetwork] please post Message-ID: Please post the following ------------------------------------------ *Associate Director of Material Characterization and Microfabrication at New Jersey Institute of Technology* The Material Characterization Laboratory (MCL) and Microfabrication Center (MFC) at the New Jersey Institute of Technology (NJIT) invites applications for the positions of Associate Director at their core facilities. The MCL core facilities comprise of extensive laboratories in Electron Microscopy, Optical Spectroscopy, and Chemical/Environmental Analysis ( http://centers.njit.edu/york/index.php). The newly built Microfabrication laboratory comprises of Class 100 clean room, Photo Lithography equipment and Microfluidic facility. The Associate Director will oversee the day to day operations of the core facilities at MCL and MFC, and will interface with industry and academia to market MCL/MFC services to generate revenue. Minimum qualifications are a Ph.D. from an accredited institution in relevant field such as chemistry, chemical engineering, physics, material science, electrical engineering or a closely related field. The successful candidates are expected to work with faculty, students and research staff to facilitate funded research, provide instrument training, and work with industrial clients to generate revenue. Inquiries can be sent to Prof. Mitra at mitra at njit.edu. ------------------------------------------------------------------------- *Somenath Mitra* Exec. Director Otto York Center for Environmental Engineering and Science http://centers.njit.edu/york/index.php Distinguished Professor of Chemistry and Environmental Science New Jersey Institute of Technology (973)596 5611 http://centers.njit.edu/separationscience/welcome/ -------------- next part -------------- An HTML attachment was scrubbed... URL: