[labnetwork] FTO sputtering using AJA Orion system?

[Jing Guo]

Hi All, 

We have a user target request to use our AJA Orion sputter system (7 targets). The target request is FTO, Fluorine Doped (20%) Tin Oxide. 
Does anyone have experience on this target sputtering process?
Is there any risk that FTO contaminates the muti-targets chamber or create potential damage of the system because of doped Fluorine?

Any information will be appreciated.

Thanks!

Best,

Jing

---------------------------------------
Jing Guo Ph.D.
Research Scientist
SEA Cleanroom (SST 017)
Rice University
Houston, TX 
jeanne.guo at rice.edu
713-348-8227







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