[labnetwork] Older Unaxis 790 PECVD Service

[Mark Heiden]

We have a vintage 2005 or so Unaxis 790 PECVD that has come up with an error "Disk Scan Error"  There is a problem with your display settings. The adapter type is incorrect.

Does anyone have experience with this or know of a vendor that can repair this age Unaxis tools?

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
University of California, Riverside
951-827-2551
https://nanofab.ucr.edu/


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