[labnetwork] Looking for PECVD TEOS capability

Jorg Scholvin scholvin at mit.edu
Mon Jul 13 11:02:05 EDT 2020


Hi Labnetwork:

We have a small group of users who are in need of periodic PECVD TEOS deposition (400C or below), on pieces or up to 6" wafers.

Our PECVD TEOS tool has not been as reliable as we like, and it would be great to offer our users an alternative during tool downtime.

If you have PECVD TEOS capabilities, and are able to process samples on behalf of outside users (shipping back and forth), please let me know - we'd be delighted.  If preferred we can also facilitate the interactions so you'd only have to deal with one point of contact (for instructions, shipping, billing etc).

Thanks!

-Jorg
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200713/345e08a0/attachment.html>


More information about the labnetwork mailing list