[labnetwork] Mask Aligner Reflector Scratches

[Chang, Long]

Hi All,

Last week our mask aligner lamp exploded because the cooling fan failed. After cleaning up, I noticed some scratches on the reflector. It’s really hard to take a photo of it, but see attached. Has anyone used a scratched reflector with experiences to share?

Thanks,
Long
[cid:CBC1F355-6E64-4E0C-8FC5-E3C78BB85068 at serc.dhcp.e.uh.edu][cid:8D1CF2CC-B2E5-444A-B3E9-9C77A655F654 at serc.dhcp.e.uh.edu]
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