[labnetwork] laboratory sputter deposition equipment

[Peter Gordon]

I have worked with Angstrom a fair bit and highly recommend them as well.

Cheers,
Peter


On Fri, 17 Jul 2020 at 11:41, Shimon Eliav <shimonel at savion.huji.ac.il>
wrote:

> [External Email]
>
> Hi Guido,
> I recommend Angstrom Engineering: https://angstromengineering.com/
> They are great.
> Contact person: Mike Miller (Cc).
> Regards,
> Shimon
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] On Behalf Of Guido Janssen - 3ME
> Sent: Friday, 17 July 2020 11:30
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] laboratory sputter deposition equipment
>
> Dear colleagues
>
> Here in Delft we are in the proces of replacing our 16 years old AJA
> sputter tool, used for proces development and materials science studies.
> We’re looking for a system with three 2” targets in sputter down
> configuration able to handle small samples as well as 100 mm wafers. DC and
> RF, heated substrate holder with sample bias option, turbo pumped and
> equiped with a load lock.
> Do you know of any supplier other than AJA that offers such a system?
>
> Sincerely
> Guido Janssen
> TU Delft
> g.c.a.m.janssen at tudelft.nl
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-- 
Peter G. Gordon, PhD
CU NanoFab Facility Administrator
Department of Chemistry
Carleton University
(613) 520-2600 ext.7561
https://carleton.ca/fanssi/
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