[labnetwork] Karl Suss MA/BA6

[Mark Hofheins]

Hello All,
Does anyone have a PM procedure and or checklist for the Pm/PM's for a Karl Suss MA/BA6 exposure tool?
We have the original manual I think, but it has a few trouble shooting tips and some installation procedures is all.
Best regards,


Mark Hofheins

mhofheins at unm.edu<mailto:mhofheins at unm.edu>

Cell  505-710-3527

Office 505-272-7155



Micro Electronics Technician

Manufacturing Engineering Program

University of New Mexico MTTC

800 Bradbury S.E.  Suit 169

Albuquerque, New Mexico

87106-4346

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