[labnetwork] Angstrom Engineering

NEAL, ADAM T DR-02 USAF AFMC AFRL/RXAN adam.neal.3 at us.af.mil
Thu Mar 19 11:49:17 EDT 2020


Labnetwork,

My organization is considering purchase of a metallization tool (electron-beam evaporation and pulsed DC sputtering combination) from Angstrom Engineering (angstromengineering.com), and I wanted to solicit feedback from list members who have experience with Angstrom's tools.  In addition to general feedback, I'm also looking for information on the following from any list members who have used or maintained Angstrom's e-beam evaporation or sputtering tools:


1.       Do you and your users have a successful track record of performing electron-beam evaporation and liftoff with Angstrom tools, including PMMA resist?  We have been quoted for a "Nebula" chamber, so I'd love to hear from anyone who has direct experience with that chamber geometry.

2.       What has your experience been like with Angstrom's customers service?

3.       What is your experience of the control/automation software on the system?  Once the sample is loaded, can how much user intervention is required if a recipe is already developed?

Please send your feedback directly to me at adam.neal.3 at us.af.mil;adam.t.neal at gmail.com<mailto:adam.neal.3 at us.af.mil;adam.t.neal at gmail.com?subject=Re:%20Angstrom%20Engineering>.  Thank you in advance for any feedback you can provide.

Adam T. Neal, Ph.D.
Research Electrical Engineer
Acting Research Team Lead
Agile RF Electronics Team
Materials and Manufacturing Directorate
Air Force Research Laboratory
E-mail: adam.neal.3 at us.af.mil;adam.t.neal at gmail.com<mailto:adam.neal.3 at us.af.mil;adam.t.neal at gmail.com?subject=Re:%20Angstrom%20Engineering>
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