[labnetwork] Angstrom Engineering

[Shimon Eliav]

Hi Adam,

We have just installed a new evaporation system from Angstrom. It is a "Quantum Series" machine.
We did a quite long selection process and Angstrom was chosen with clear advantages over the five other consulted companies:

*        The technical level of the Angstrom staff:  every question, every issue, was immediately explained and elaborated in such a way that we understood they are serious people and knew what they are doing.

*        The quality of the offered items: their proposal had the best combination of parts and the best solution to our application.

*        Price: there was a long negotiation around our tight budget and they manage to accommodate to it.

*        After the PO: they didn't change. They continued in the same way they were in the beginning of the process. It doesn't happen always: I saw a lot of companies that after the PO they change their way and then you understand with who you are making business.

*        Acceptance Test & Delivery: everything smoothly done according to the schedule.

*        Service: Angstrom has a very good representative here in Israel and the remote service also works fine. The small problems we had up to now were solved quite fast.

Regarding lift-off process using PMMA, we perform it regularly. At high deposition rates, like 10A/sec, we experienced some blistering, but once it was reduced to 5A/sec, the problem was solved.

The system automation works just fine: once a recipe is loaded, it runs without any user intervention.

I hope it can help. Feel free for any other question.

Good luck,

Shimon Eliav
The Unit for Nano Fabrication
The Hebrew University of Jerusalem
Jerusalem - ISRAEL

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of NEAL, ADAM T DR-02 USAF AFMC AFRL/RXAN
Sent: Thursday, 19 March 2020 17:49
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Angstrom Engineering

Labnetwork,

My organization is considering purchase of a metallization tool (electron-beam evaporation and pulsed DC sputtering combination) from Angstrom Engineering (angstromengineering.com), and I wanted to solicit feedback from list members who have experience with Angstrom's tools.  In addition to general feedback, I'm also looking for information on the following from any list members who have used or maintained Angstrom's e-beam evaporation or sputtering tools:


1.      Do you and your users have a successful track record of performing electron-beam evaporation and liftoff with Angstrom tools, including PMMA resist?  We have been quoted for a "Nebula" chamber, so I'd love to hear from anyone who has direct experience with that chamber geometry.

2.      What has your experience been like with Angstrom's customers service?

3.      What is your experience of the control/automation software on the system?  Once the sample is loaded, can how much user intervention is required if a recipe is already developed?

Please send your feedback directly to me at adam.neal.3 at us.af.mil;adam.t.neal at gmail.com<mailto:adam.neal.3 at us.af.mil;adam.t.neal at gmail.com?subject=Re:%20Angstrom%20Engineering>.  Thank you in advance for any feedback you can provide.

Adam T. Neal, Ph.D.
Research Electrical Engineer
Acting Research Team Lead
Agile RF Electronics Team
Materials and Manufacturing Directorate
Air Force Research Laboratory
E-mail: adam.neal.3 at us.af.mil;adam.t.neal at gmail.com<mailto:adam.neal.3 at us.af.mil;adam.t.neal at gmail.com?subject=Re:%20Angstrom%20Engineering>
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