[labnetwork] STS DRIE mass flow controller programming

[Patrick Roman]

Greetings,

I have an original STS ASE DRIE system that needs to have the SF6 input
increased to optimize silicon etching performance.  My SF6 MFC is limited
to 50 sccm in the software settings and I would like to increase that limit
to 150 sccm.  The hardware has 500 sccm capability.  Does anyone have this
experience/know how?  Thanks in advance!!!

Regards,

Patrick Roman, PhD
Associate Professor of Research

Mechanical and Materials Engineering

Assistant Director, AMERI <http://ameri.fiu.edu/>

R&D Engineer, GFJC <https://gfjc.fiu.edu/>, NFSTC <https://www.nfstc.org/>

College of Engineering and Computing
Florida International University
10555 West Flagler Street, EC3355
Miami, Florida  33174
Tel (305) 348-1651
Fax (305) 348-1932
Cell (202) 294-8602
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