[labnetwork] STS DRIE mass flow controller programming

[Kevin Owen]

At least for the Pegasus software (which I think is the same), the
configuration editor requires a 4 digit code that changes weekly. In the
past, I've been able to convince SPTS to share the current week's code to
make minor changes like that.

On Mon, Oct 19, 2020, 9:15 PM Paolini, Steven <spaolini at cns.fas.harvard.edu>
wrote:

> Patrick,
>
>   If you can’t access and modify the configuration files, you will need
> the vendor to assist you.
>
>   Best of luck,
>
>
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA 02138
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu
>
> www.cns.fas.harvard.edu
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> *On
> Behalf Of *Patrick Roman
> *Sent:* Monday, October 19, 2020 2:21 PM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] STS DRIE mass flow controller programming
>
>
>
> Greetings,
>
>
>
> I have an original STS ASE DRIE system that needs to have the SF6 input
> increased to optimize silicon etching performance.  My SF6 MFC is limited
> to 50 sccm in the software settings and I would like to increase that limit
> to 150 sccm.  The hardware has 500 sccm capability.  Does anyone have this
> experience/know how?  Thanks in advance!!!
>
>
> Regards,
>
>
>
> Patrick Roman, PhD
>
> Associate Professor of Research
>
> Mechanical and Materials Engineering
>
> Assistant Director, AMERI
> <https://urldefense.proofpoint.com/v2/url?u=http-3A__ameri.fiu.edu_&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=kl-ROS_wuXVE3wGJPZKNxwo0kfAuIr8LS9ykvHQrSco&s=2-th-Nvz6RSbG1jBoEtYyWCzOXLeGZSPIp2wxOXVRnc&e=>
>
> R&D Engineer, GFJC
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> , NFSTC
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>
> College of Engineering and Computing
> Florida International University
>
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>
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