From spaolini at cns.fas.harvard.edu  Thu Apr  1 12:12:51 2021
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Thu, 1 Apr 2021 16:12:51 +0000
Subject: [labnetwork] Looking for valve control card
Message-ID: <BL0PR07MB4050C51B2D5186F5091D14ECDF7B9@BL0PR07MB4050.namprd07.prod.outlook.com>

Folks,
  I am looking for a valve controller board for an EVG 501 wafer bonder. The part# is  ED500 20V06. Please let me know if anyone has one for sale.
   Thanks!

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

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From julia.aebersold at louisville.edu  Thu Apr  1 13:23:40 2021
From: julia.aebersold at louisville.edu (Aebersold,Julia W.)
Date: Thu, 1 Apr 2021 17:23:40 +0000
Subject: [labnetwork] Wiring Diagram for Logitech 1CM51-CDP?
Message-ID: <DM5PR03MB3098892593B708B526D4008B867B9@DM5PR03MB3098.namprd03.prod.outlook.com>

Would anyone have a wiring diagram for a Logitech 1CM51-CDP?  Our manual stops right before the wiring schematic of this tool and we the lower bank of controls from the Plate Temperature to the Sweep is not getting power.  I can track it down, but a wiring diagram would be helpful.

[cid:image002.jpg at 01D726FA.3A062640]

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

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From blewis at eng.ufl.edu  Fri Apr  2 08:07:49 2021
From: blewis at eng.ufl.edu (Lewis,William)
Date: Fri, 2 Apr 2021 12:07:49 +0000
Subject: [labnetwork] Looking for valve control card
In-Reply-To: <BL0PR07MB4050C51B2D5186F5091D14ECDF7B9@BL0PR07MB4050.namprd07.prod.outlook.com>
References: <BL0PR07MB4050C51B2D5186F5091D14ECDF7B9@BL0PR07MB4050.namprd07.prod.outlook.com>
Message-ID: <DM5PR22MB0907E7C96411A4E46603654E9B7A9@DM5PR22MB0907.namprd22.prod.outlook.com>

Hi Steve,

Did you contact Class One Equipment?  They have some EVG parts.

Bill Lewis
Research Service Center
University of Florida
walewis at ufl.edu
https://rsc.aux.eng.ufl.edu/


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Paolini, Steven
Sent: Thursday, April 1, 2021 12:13 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Looking for valve control card

[External Email]

Folks,
  I am looking for a valve controller board for an EVG 501 wafer bonder. The part# is  ED500 20V06. Please let me know if anyone has one for sale.
   Thanks!

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
www.cns.fas.harvard.edu<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.cns.fas.harvard.edu&d=DwQFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=nn8uSPo6e_GTg283_mgdUdLFop9KkWb5kniPS0t4dn8&s=0pchr8iSNR3e3nFCzyA2_MTxgx9yioeXC8-5Bf1yAh0&e=>

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From proma016 at fiu.edu  Fri Apr  2 15:01:00 2021
From: proma016 at fiu.edu (Patrick Roman)
Date: Fri, 2 Apr 2021 12:01:00 -0700
Subject: [labnetwork] STS ASE DRIE chiller
Message-ID: <CACABG5X72pcK2=z7WZwdtHKEd4WKFCCedGjH5MM0MNQCegYbsw@mail.gmail.com>

Greetings!  Our Drie system uses a chiller with distilled water for
the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
processes, eg silicon etching?

Patrick Roman


From james.beall at nist.gov  Fri Apr  2 15:54:09 2021
From: james.beall at nist.gov (Beall, James A. (Fed))
Date: Fri, 2 Apr 2021 19:54:09 +0000
Subject: [labnetwork] STS ASE DRIE chiller
In-Reply-To: <CACABG5X72pcK2=z7WZwdtHKEd4WKFCCedGjH5MM0MNQCegYbsw@mail.gmail.com>
References: <CACABG5X72pcK2=z7WZwdtHKEd4WKFCCedGjH5MM0MNQCegYbsw@mail.gmail.com>
Message-ID: <037F785E-9898-4F8B-854B-2A7324F677AE@nist.gov>

Our SPTS Pegasus uses Galden HT135 in an SMC HRZ chiller for platen cooling.

Jim

Jim Beall
NIST Boulder Microfabrication Facility

On Apr 2, 2021, at 1:01 PM, Patrick Roman <proma016 at fiu.edu<mailto:proma016 at fiu.edu>> wrote:

Greetings!  Our Drie system uses a chiller with distilled water for
the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
processes, eg silicon etching?

Patrick Roman

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://gcc02.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=04%7C01%7Cjames.beall%40nist.gov%7C92b85dca49914590251808d8f60f557c%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C637529893019118793%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&amp;sdata=ES%2BKkzNtUqPdBJqCpckvJSzOWfwdT2BN6U1vNHe39uU%3D&amp;reserved=0

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From spaolini at cns.fas.harvard.edu  Fri Apr  2 19:27:47 2021
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Fri, 2 Apr 2021 23:27:47 +0000
Subject: [labnetwork] Looking for valve control card
In-Reply-To: <DM5PR22MB0907E7C96411A4E46603654E9B7A9@DM5PR22MB0907.namprd22.prod.outlook.com>
References: <BL0PR07MB4050C51B2D5186F5091D14ECDF7B9@BL0PR07MB4050.namprd07.prod.outlook.com>,
 <DM5PR22MB0907E7C96411A4E46603654E9B7A9@DM5PR22MB0907.namprd22.prod.outlook.com>
Message-ID: <BL0PR07MB40500F3262DB5C03EDF96007DF7A9@BL0PR07MB4050.namprd07.prod.outlook.com>

Many thanks to all that responded. My good friend and equipment wizard Mark April from Draper labs is gong to lend me one while I pursue getting one of our own. If anybody locates one, please contact me and I will not only purchase it from you, I will host a boat ride on Boston Harbor for helping us out!
   Thanks again to all,
 Equipment Dood

________________________________
From: Lewis,William <blewis at eng.ufl.edu>
Sent: Friday, April 2, 2021 9:07 AM
To: Paolini, Steven <spaolini at cns.fas.harvard.edu>; Fab Network <labnetwork at mtl.mit.edu>
Subject: RE: Looking for valve control card


Hi Steve,



Did you contact Class One Equipment?  They have some EVG parts.



Bill Lewis

Research Service Center

University of Florida

walewis at ufl.edu

https://rsc.aux.eng.ufl.edu/<https://urldefense.proofpoint.com/v2/url?u=https-3A__rsc.aux.eng.ufl.edu_&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=v4H10qWbdtWkVqOpA7BlE37rscTngIiOxQOK4y7ue_c&s=v7KJupK0e9Rp47ct5a0XnM5LMrF_O5m6rIg-_NbFRNg&e=>





From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Paolini, Steven
Sent: Thursday, April 1, 2021 12:13 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Looking for valve control card



[External Email]

Folks,

  I am looking for a valve controller board for an EVG 501 wafer bonder. The part# is  ED500 20V06. Please let me know if anyone has one for sale.

   Thanks!



Steve Paolini

Principal Equipment Engineer

Harvard University Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA 02138

617- 496- 9816

spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>

www.cns.fas.harvard.edu<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.cns.fas.harvard.edu&d=DwQFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=nn8uSPo6e_GTg283_mgdUdLFop9KkWb5kniPS0t4dn8&s=0pchr8iSNR3e3nFCzyA2_MTxgx9yioeXC8-5Bf1yAh0&e=>


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From dale at slac.stanford.edu  Fri Apr  2 20:03:34 2021
From: dale at slac.stanford.edu (Miller, Dale A.)
Date: Sat, 3 Apr 2021 00:03:34 +0000
Subject: [labnetwork] Ta/Ti wire vendor
Message-ID: <BYAPR07MB4615669CDD04B77EF15683A088799@BYAPR07MB4615.namprd07.prod.outlook.com>

Labnetwork,

I am coating some ceramic "beam kicker pipes" with TiN for our new accelerator, and I've run out of my circa 1960's supply of 0.010" Ta (80%) /Ti (20%) wire. I've contact all of my deposition material vendors and no luck. Anyone got any contacts?
Thanks,

Dale Miller
Master Science and Engineering Technician
APFD -Coating Lab
SLAC National Accelerator Laboratory
926-5202

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From hromans at eng.ucsd.edu  Sat Apr  3 14:36:03 2021
From: hromans at eng.ucsd.edu (J Romans)
Date: Sat, 3 Apr 2021 11:36:03 -0700
Subject: [labnetwork] Ta/Ti wire vendor
In-Reply-To: <BYAPR07MB4615669CDD04B77EF15683A088799@BYAPR07MB4615.namprd07.prod.outlook.com>
References: <BYAPR07MB4615669CDD04B77EF15683A088799@BYAPR07MB4615.namprd07.prod.outlook.com>
Message-ID: <CAD74n=n3veqdaETDUCiCnBZFQRnia0mWTX3qJ5OCaYvaOBAoZg@mail.gmail.com>

Have you tried California Fine Wire?

https://calfinewire. <https://calfinewire.com/>com/
<https://calfinewire.com/>

J. Hal Romans
Equipment Engineer
Nano3 Cleanroom Facility
University of California San Diego
ph: (858) 534-6674

On Sat, Apr 3, 2021 at 5:10 AM Miller, Dale A. <dale at slac.stanford.edu>
wrote:

> Labnetwork,
>
>
>
> I am coating some ceramic ?beam kicker pipes? with TiN for our new
> accelerator, and I?ve run out of my circa 1960?s supply of 0.010? Ta (80%)
> /Ti (20%) wire. I?ve contact all of my deposition material vendors and no
> luck. Anyone got any contacts?
>
> Thanks,
>
>
>
> Dale Miller
>
> Master Science and Engineering Technician
>
> APFD ?Coating Lab
>
> SLAC National Accelerator Laboratory
>
> 926-5202
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
>
> https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!Mih3wA!Siv5zD38Kh3rlfFib2IzJBgTYV2hv0cuUxUmEV3VDUKtN327aVowdcwAaZTC1uM$
>
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From info at fabsurplus.com  Sat Apr  3 17:08:19 2021
From: info at fabsurplus.com (Stephen Howe)
Date: Sat, 03 Apr 2021 23:08:19 +0200
Subject: [labnetwork] Looking for valve control card
In-Reply-To: <BL0PR07MB4050C51B2D5186F5091D14ECDF7B9@BL0PR07MB4050.namprd07.prod.outlook.com>
References: <BL0PR07MB4050C51B2D5186F5091D14ECDF7B9@BL0PR07MB4050.namprd07.prod.outlook.com>
Message-ID: <c140dbbd471a9a08b1bbce798618e53ab68425b9.camel@fabsurplus.com>

Dear Steven,
I will keep my eyes open for one of these on my daily travels in the
world of used semiconductor manufacturing equipment .
Yours sincerely,SDI Fabsurplus GroupStephen HoweCompany Owneremail: 
info at fabsurplus.comMobile (USA) : +1 830-388-1071Mobile (Italy) : +39
335-710-7756WWW.FABSURPLUS.COM

On Thu, 2021-04-01 at 16:12 +0000, Paolini, Steven wrote:
> Folks,
>   I am looking for a valve controller board for an EVG 501 wafer
> bonder. The part# is  ED500 20V06. Please let me know if anyone has
> one for sale.
>    Thanks!
>  
> Steve Paolini
> Principal Equipment Engineer
> Harvard University Center for Nanoscale Systems
> 11 Oxford St.
> Cambridge, MA 02138
> 617- 496- 9816
> spaolini at cns.fas.harvard.edu
> www.cns.fas.harvard.edu
>  
> 
> 
> 
> 
> _______________________________________________labnetwork mailing
> listlabnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From betemc at rit.edu  Mon Apr  5 08:02:53 2021
From: betemc at rit.edu (Bruce Tolleson)
Date: Mon, 5 Apr 2021 12:02:53 +0000
Subject: [labnetwork] STS ASE DRIE chiller
In-Reply-To: <037F785E-9898-4F8B-854B-2A7324F677AE@nist.gov>
References: <CACABG5X72pcK2=z7WZwdtHKEd4WKFCCedGjH5MM0MNQCegYbsw@mail.gmail.com>
 <037F785E-9898-4F8B-854B-2A7324F677AE@nist.gov>
Message-ID: <f6fa3b784a8e496e852bf6aca1aa6c59@ex04mail01a.ad.rit.edu>

Dear Labnetwork,
Our STS ASE uses an Affinity RWA-12T-CE55CBD4 chiller with an external D.I. cartridge to keep the conductivity low. It works well for us.
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Beall, James A. (Fed)
Sent: Friday, April 2, 2021 3:54 PM
To: Patrick Roman <proma016 at fiu.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] STS ASE DRIE chiller

Our SPTS Pegasus uses Galden HT135 in an SMC HRZ chiller for platen cooling.


Jim


Jim Beall
NIST Boulder Microfabrication Facility



On Apr 2, 2021, at 1:01 PM, Patrick Roman <proma016 at fiu.edu<mailto:proma016 at fiu.edu>> wrote:

Greetings!  Our Drie system uses a chiller with distilled water for
the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
processes, eg silicon etching?

Patrick Roman

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://gcc02.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=04%7C01%7Cjames.beall%40nist.gov%7C92b85dca49914590251808d8f60f557c%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C637529893019118793%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&amp;sdata=ES%2BKkzNtUqPdBJqCpckvJSzOWfwdT2BN6U1vNHe39uU%3D&amp;reserved=0

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From kjvowen at lnf.umich.edu  Mon Apr  5 17:01:23 2021
From: kjvowen at lnf.umich.edu (Kevin Owen)
Date: Mon, 5 Apr 2021 17:01:23 -0400
Subject: [labnetwork] STS ASE DRIE chiller
In-Reply-To: <f6fa3b784a8e496e852bf6aca1aa6c59@ex04mail01a.ad.rit.edu>
References: <CACABG5X72pcK2=z7WZwdtHKEd4WKFCCedGjH5MM0MNQCegYbsw@mail.gmail.com>
 <037F785E-9898-4F8B-854B-2A7324F677AE@nist.gov>
 <f6fa3b784a8e496e852bf6aca1aa6c59@ex04mail01a.ad.rit.edu>
Message-ID: <CANLyxV3vG0g1LxfQ_NWOSZhX59xmZEiH=yDxtcUbuKQ-7TPwxQ@mail.gmail.com>

Pretty much all of our RIE tools run Fluorinert (FC-3283, or the Galden
equivalent). You'll want a chiller that is designed to run that fluid
though, and furthermore I would strongly recommend against putting it in
any chiller that previously had water in it (they do not mix). That said, I
think that's a pretty common fluid at least for electrostatic chucks, and
works well down to -20C.

-Kevin

On Mon, Apr 5, 2021 at 12:10 PM Bruce Tolleson <betemc at rit.edu> wrote:

> Dear Labnetwork,
>
> Our STS ASE uses an Affinity RWA-12T-CE55CBD4 chiller with an external
> D.I. cartridge to keep the conductivity low. It works well for us.
>
> Thank you,
>
>
>
> Bruce E. Tolleson
>
> Rochester Institute of Technology
>
> 82  Lomb Memorial Drive, Bldg 17-2627
>
> Rochester, NY 14623-5604
>
> (585) 478-3836
>
> [image: http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Beall,
> James A. (Fed)
> *Sent:* Friday, April 2, 2021 3:54 PM
> *To:* Patrick Roman <proma016 at fiu.edu>
> *Cc:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] STS ASE DRIE chiller
>
>
>
> Our SPTS Pegasus uses Galden HT135 in an SMC HRZ chiller for platen
> cooling.
>
>
>
> Jim
>
>
>
> Jim Beall
>
> NIST Boulder Microfabrication Facility
>
>
>
> On Apr 2, 2021, at 1:01 PM, Patrick Roman <proma016 at fiu.edu> wrote:
>
>
>
> Greetings!  Our Drie system uses a chiller with distilled water for
> the chuck cooling.  Can anyone recommend a better cooling fluid for 5C
> processes, eg silicon etching?
>
> Patrick Roman
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
>
> https://gcc02.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&amp;data=04%7C01%7Cjames.beall%40nist.gov%7C92b85dca49914590251808d8f60f557c%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C637529893019118793%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&amp;sdata=ES%2BKkzNtUqPdBJqCpckvJSzOWfwdT2BN6U1vNHe39uU%3D&amp;reserved=0
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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From julia.aebersold at louisville.edu  Wed Apr  7 12:54:13 2021
From: julia.aebersold at louisville.edu (Aebersold,Julia W.)
Date: Wed, 7 Apr 2021 16:54:13 +0000
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
Message-ID: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>

We utilize a large array of hardware interlocks within our equipment fleet that interfaces with our software for access, training requests, reservations, invoicing, etc. Each of these relay boxes requires a static IP address.  With recent security certificate requirements in our institution getting a static IP address for new systems is becoming very arduous.

Are there alternatives out there beyond the requirement of a static IP address that address current security requirements?

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

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From betemc at rit.edu  Wed Apr  7 15:30:13 2021
From: betemc at rit.edu (Bruce Tolleson)
Date: Wed, 7 Apr 2021 19:30:13 +0000
Subject: [labnetwork] Karl Suss MA56 contact Aligner
Message-ID: <cf77369850b04fe789f11e4456dc898a@ex04mail01a.ad.rit.edu>

Dear Labnetwork,
  We have a Karl Suss MA56 contact aligner available for anyone willing to pay for shipping. The unit was just removed from the lab and was operational. The tool is palletized for truck pick up and can easily be loaded into a dock height truck. The mercury arc lamp was removed for safe transport.
If interested reply email and I can forward the data plate info and photos of the system.
Thank you,


Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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From saltlakeryan at gmail.com  Wed Apr  7 15:59:14 2021
From: saltlakeryan at gmail.com (Ryan Taylor)
Date: Wed, 7 Apr 2021 13:59:14 -0600
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
Message-ID: <5ac34657-d094-68f2-0af9-78479586dba1@gmail.com>

Hi Julia,

It sounds like you are perhaps using public IP addresses.? You should be 
able to set those up on a private network that is not routeable from the 
outside (something like a 10.0.0.0/16 network).? This should be 
configurable on the switch.? Then, as long as your lab management 
software (such as coral, nemo, etc.) is also on that network, you should 
be good.? This should address security concerns since anybody else on 
the university network will not be able to access those boxes.

Thanks,

Ryan

On 4/7/21 10:54 AM, Aebersold,Julia W. wrote:
>
> We utilize a large array of hardware interlocks within our equipment 
> fleet that interfaces with our software for access, training requests, 
> reservations, invoicing, etc. Each of these relay boxes requires a 
> static IP address.? With recent security certificate requirements in 
> our institution getting a static IP address for new systems is 
> becoming very arduous.
>
> Are there alternatives out there beyond the requirement of a static IP 
> address that address current security requirements?
>
> Cheers!
>
> Julia Aebersold, Ph.D.
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> Louisville, KY? 40292
>
> (502) 852-1572
>
> http://louisville.edu/micronano/ <http://louisville.edu/micronano/>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From michael.rooks at yale.edu  Wed Apr  7 16:40:12 2021
From: michael.rooks at yale.edu (Michael Rooks)
Date: Wed, 7 Apr 2021 16:40:12 -0400
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
Message-ID: <CAMH=VohbZGXyJSBrWJO+p53OKFRk3mu1fXwfhKHfe2HCgEH5JA@mail.gmail.com>

We have the same problem of running out of IPv4 addresses. We started using
a router to do port forwarding from the control system (Badger, similar to
Coral) to the ethernet relays. The control system, running on AWS, needs
just one ip address, blessed and approved by our IT department. The router
gets messages on different ports, then maps ports onto the internal IP
addresses of the relays. It works a lot like your home wireless router, but
with the local addresses set to fixed values. The router connects by wifi
to some relays, and by hardwire to others.

This requires the controller to allow address:port addressing, which is
easy in Badger. Does FOM let you do the same thing?

--------------------------------
Michael Rooks
nano.yale.edu


On Wed, Apr 7, 2021 at 3:50 PM Aebersold,Julia W. <
julia.aebersold at louisville.edu> wrote:

> We utilize a large array of hardware interlocks within our equipment fleet
> that interfaces with our software for access, training requests,
> reservations, invoicing, etc. Each of these relay boxes requires a static
> IP address.  With recent security certificate requirements in our
> institution getting a static IP address for new systems is becoming very
> arduous.
>
>
>
> Are there alternatives out there beyond the requirement of a static IP
> address that address current security requirements?
>
>
>
> Cheers!
>
>
>
> Julia Aebersold, Ph.D.
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> Louisville, KY  40292
>
> (502) 852-1572
>
>
>
> http://louisville.edu/micronano/
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From myakimov at sunypoly.edu  Wed Apr  7 18:04:54 2021
From: myakimov at sunypoly.edu (Yakimov, Michael)
Date: Wed, 7 Apr 2021 22:04:54 +0000
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
Message-ID: <de3c20aa292b4428b9374b2f74bddc57@ex03.univ.sunycnse.com>

As far as I understand, you have equipment enable/disable boxes, which need to be accessible by a server, not by outside world.
I would consider getting hardware interfaces into a separate network  with addresses from private pool so nothing but main server is exposed to the internet,  and security considerations are not in play. You really need to talk to your institution IT people about that. Write down all the communications required  for those hardware  boxes, hopefully they can figure it  out for you.
After all, your local IT is there to support you, not the other way around!



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aebersold,Julia W.
Sent: Wednesday, April 7, 2021 12:54
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks

We utilize a large array of hardware interlocks within our equipment fleet that interfaces with our software for access, training requests, reservations, invoicing, etc. Each of these relay boxes requires a static IP address.  With recent security certificate requirements in our institution getting a static IP address for new systems is becoming very arduous.

Are there alternatives out there beyond the requirement of a static IP address that address current security requirements?

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

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From julia.aebersold at louisville.edu  Wed Apr  7 20:48:44 2021
From: julia.aebersold at louisville.edu (Aebersold,Julia W.)
Date: Thu, 8 Apr 2021 00:48:44 +0000
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <CAMH=VohbZGXyJSBrWJO+p53OKFRk3mu1fXwfhKHfe2HCgEH5JA@mail.gmail.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>,
 <CAMH=VohbZGXyJSBrWJO+p53OKFRk3mu1fXwfhKHfe2HCgEH5JA@mail.gmail.com>
Message-ID: <DM5PR03MB30987EDD52BC3638947810D586749@DM5PR03MB3098.namprd03.prod.outlook.com>

Thanks Michael.  I will let our engineer answer your question for I am not sure and she has set up our FOM system.


Cheers!


Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


________________________________
From: Michael Rooks <michael.rooks at yale.edu>
Sent: Wednesday, April 7, 2021 4:40 PM
To: Aebersold,Julia W. <julia.aebersold at louisville.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Static IP Addresses needed for hardware interlocks


CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.

We have the same problem of running out of IPv4 addresses. We started using a router to do port forwarding from the control system (Badger, similar to Coral) to the ethernet relays. The control system, running on AWS, needs just one ip address, blessed and approved by our IT department. The router gets messages on different ports, then maps ports onto the internal IP addresses of the relays. It works a lot like your home wireless router, but with the local addresses set to fixed values. The router connects by wifi to some relays, and by hardwire to others.

This requires the controller to allow address:port addressing, which is easy in Badger. Does FOM let you do the same thing?

--------------------------------
Michael Rooks
nano.yale.edu<https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fnano.yale.edu%2F&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C6ea1a773304c4789bfc308d8fa055fdd%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637534248281163827%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=BGvS8aWfX7S%2F4NC%2BtR90BNoN2%2FoxSST17bwQ82KzZu4%3D&reserved=0>


On Wed, Apr 7, 2021 at 3:50 PM Aebersold,Julia W. <julia.aebersold at louisville.edu<mailto:julia.aebersold at louisville.edu>> wrote:

We utilize a large array of hardware interlocks within our equipment fleet that interfaces with our software for access, training requests, reservations, invoicing, etc. Each of these relay boxes requires a static IP address.  With recent security certificate requirements in our institution getting a static IP address for new systems is becoming very arduous.



Are there alternatives out there beyond the requirement of a static IP address that address current security requirements?



Cheers!



Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

Shumaker Research Building, Room 233

2210 South Brook Street

Louisville, KY  40292

(502) 852-1572



http://louisville.edu/micronano/



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C6ea1a773304c4789bfc308d8fa055fdd%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637534248281163827%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=TDuZEx%2B1sgLgqjDXKsKX8Ik2LManAEIifNkj04KwQ%2Fs%3D&reserved=0>
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From julia.aebersold at louisville.edu  Wed Apr  7 21:01:10 2021
From: julia.aebersold at louisville.edu (Aebersold,Julia W.)
Date: Thu, 8 Apr 2021 01:01:10 +0000
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <de3c20aa292b4428b9374b2f74bddc57@ex03.univ.sunycnse.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>,
 <de3c20aa292b4428b9374b2f74bddc57@ex03.univ.sunycnse.com>
Message-ID: <DM5PR03MB309872E098E4DD577F93613486749@DM5PR03MB3098.namprd03.prod.outlook.com>

I wish it were that easy Michael.


Cheers!


Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


________________________________
From: Yakimov, Michael <myakimov at sunypoly.edu>
Sent: Wednesday, April 7, 2021 6:04 PM
To: Aebersold,Julia W. <julia.aebersold at louisville.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: RE: Static IP Addresses needed for hardware interlocks


CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.

As far as I understand, you have equipment enable/disable boxes, which need to be accessible by a server, not by outside world.

I would consider getting hardware interfaces into a separate network  with addresses from private pool so nothing but main server is exposed to the internet,  and security considerations are not in play. You really need to talk to your institution IT people about that. Write down all the communications required  for those hardware  boxes, hopefully they can figure it  out for you.

After all, your local IT is there to support you, not the other way around!







From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aebersold,Julia W.
Sent: Wednesday, April 7, 2021 12:54
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks



We utilize a large array of hardware interlocks within our equipment fleet that interfaces with our software for access, training requests, reservations, invoicing, etc. Each of these relay boxes requires a static IP address.  With recent security certificate requirements in our institution getting a static IP address for new systems is becoming very arduous.



Are there alternatives out there beyond the requirement of a static IP address that address current security requirements?



Cheers!



Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

Shumaker Research Building, Room 233

2210 South Brook Street

Louisville, KY  40292

(502) 852-1572



http://louisville.edu/micronano/


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From shuyou at fomnetworks.com  Thu Apr  8 08:42:10 2021
From: shuyou at fomnetworks.com (Shuyou Li)
Date: Thu, 8 Apr 2021 12:42:10 +0000
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <DM5PR03MB30987EDD52BC3638947810D586749@DM5PR03MB3098.namprd03.prod.outlook.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>,
 <CAMH=VohbZGXyJSBrWJO+p53OKFRk3mu1fXwfhKHfe2HCgEH5JA@mail.gmail.com>,
 <DM5PR03MB30987EDD52BC3638947810D586749@DM5PR03MB3098.namprd03.prod.outlook.com>
Message-ID: <DM5PR04MB097284A630415C2D85B35E17D1749@DM5PR04MB0972.namprd04.prod.outlook.com>

Hi Julia,

Just to confirm that FOM does support port mapping. For example, you are given only one static IP address 111.112.113.114, and you have five interlocks in a single lab to be configured. You buy a router with its outfacing IP set with the give static IP, internal IP set to 192.168.0.254, and then configure port mapping on the router to have 111.112.113.114:8001 mapped to 192.168.0.101, 111.112.113.114:8002 mapped to 192.168.0.102, and so on. Now you can set the IP addresses of the interlocks as 192.168.0.101, 192.168.0.102, etc. In FOM relay IP address you just enter 111.112.113.114:8001 and the traffic will be redirected to 192.168.0.101. If you have more questions, please feel free to contact us at info at fomnetworks.com.

Thanks,
Shuyou
_________________
Shuyou Li, Ph.D.
FOM Networks, Inc.
www.fomnetworks.com<http://www.fomnetworks.com/>
Ph: (224) 225-9168<tel:%28224%29%C2%A0225-9168>
Fax: (224) 218-2807<tel:%28224%29%20218-2807>
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Aebersold,Julia W. <julia.aebersold at louisville.edu>
Sent: Wednesday, April 7, 2021 7:48 PM
To: Michael Rooks <michael.rooks at yale.edu>; Moiseeva,Evgeniya <evgenia.moiseeva at louisville.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Static IP Addresses needed for hardware interlocks

Thanks Michael.  I will let our engineer answer your question for I am not sure and she has set up our FOM system.


Cheers!


Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


________________________________
From: Michael Rooks <michael.rooks at yale.edu>
Sent: Wednesday, April 7, 2021 4:40 PM
To: Aebersold,Julia W. <julia.aebersold at louisville.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Static IP Addresses needed for hardware interlocks


CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.

We have the same problem of running out of IPv4 addresses. We started using a router to do port forwarding from the control system (Badger, similar to Coral) to the ethernet relays. The control system, running on AWS, needs just one ip address, blessed and approved by our IT department. The router gets messages on different ports, then maps ports onto the internal IP addresses of the relays. It works a lot like your home wireless router, but with the local addresses set to fixed values. The router connects by wifi to some relays, and by hardwire to others.

This requires the controller to allow address:port addressing, which is easy in Badger. Does FOM let you do the same thing?

--------------------------------
Michael Rooks
nano.yale.edu<https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fnano.yale.edu%2F&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C6ea1a773304c4789bfc308d8fa055fdd%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637534248281163827%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=BGvS8aWfX7S%2F4NC%2BtR90BNoN2%2FoxSST17bwQ82KzZu4%3D&reserved=0>


On Wed, Apr 7, 2021 at 3:50 PM Aebersold,Julia W. <julia.aebersold at louisville.edu<mailto:julia.aebersold at louisville.edu>> wrote:

We utilize a large array of hardware interlocks within our equipment fleet that interfaces with our software for access, training requests, reservations, invoicing, etc. Each of these relay boxes requires a static IP address.  With recent security certificate requirements in our institution getting a static IP address for new systems is becoming very arduous.



Are there alternatives out there beyond the requirement of a static IP address that address current security requirements?



Cheers!



Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

Shumaker Research Building, Room 233

2210 South Brook Street

Louisville, KY  40292

(502) 852-1572



http://louisville.edu/micronano/



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C6ea1a773304c4789bfc308d8fa055fdd%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637534248281163827%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=TDuZEx%2B1sgLgqjDXKsKX8Ik2LManAEIifNkj04KwQ%2Fs%3D&reserved=0>
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From thomasl at mtl.mit.edu  Thu Apr  8 11:15:14 2021
From: thomasl at mtl.mit.edu (Thomas Lohman)
Date: Thu, 8 Apr 2021 11:15:14 -0400
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
Message-ID: <5eac4b1e-fdf6-380a-ea80-e2b3d3abff28@mtl.mit.edu>


> We utilize a large array of hardware interlocks within our equipment 
> fleet that interfaces with our software for access, training requests, 
> reservations, invoicing, etc. Each of these relay boxes requires a 
> static IP address.? With recent security certificate requirements in our 
> institution getting a static IP address for new systems is becoming very 
> arduous.

Hi Julia,

I think everyone else has answered this but in general, the most 
straight forward approach is to assign the interlocks IP addresses that 
are part of a private network and then have a "proxy device" that 
handles processing the interlock communications between the LMS software 
(that I assume is running in a "cloud" somewhere) and the interlocks 
themselves. It would reside on both the public and private network. 
This way the interlocks are not visible outside their private network 
that you control and you don't have to go through getting an official 
static IP address from your institution for them.  How exactly to 
implement this will depend on the specifics of your institution's 
current networking setup and your LMS.  Hopefully, your 
computer/networking folks can assist with exploring an option along 
these lines.
  cheers,


--tom



From jtamelier at eng.ucsd.edu  Thu Apr  8 11:24:24 2021
From: jtamelier at eng.ucsd.edu (John Tamelier)
Date: Thu, 8 Apr 2021 08:24:24 -0700
Subject: [labnetwork] Static IP Addresses needed for hardware interlocks
In-Reply-To: <DM5PR03MB30987EDD52BC3638947810D586749@DM5PR03MB3098.namprd03.prod.outlook.com>
References: <DM5PR03MB30986C9D0EE7EF367B79E67186759@DM5PR03MB3098.namprd03.prod.outlook.com>
 <CAMH=VohbZGXyJSBrWJO+p53OKFRk3mu1fXwfhKHfe2HCgEH5JA@mail.gmail.com>
 <DM5PR03MB30987EDD52BC3638947810D586749@DM5PR03MB3098.namprd03.prod.outlook.com>
Message-ID: <CAMNBknkwdx3YLugkn=psj0tYi677fvRirEA7BdCzSdn8Wnzj9w@mail.gmail.com>

Hi Julia,

I want to piggyback on what some of the others have said.

UCSD uses FOM and we have blocked many of our relay controls from the
outside internet by placing them on special subnets/VLANs. Inside each
subnet/VLAN, we can set up rules about what the devices can see outside of
the subnet/VLAN. I think this is very similar to what Michael and Ryan said
above. It should be possible within FOM, but getting IT to work with you is
another story.

Please let me know if I can be of further assistance.

John


-----------------------------------

John Tamelier
Microfabrication Process Engineer

University of California, San Diego
Atkinson Hall, 5th Floor Front Desk, M/C 0436
9500 Gilman Drive
La Jolla, California 92093-0436
Phone: (858) 246-2735
Fax:   (858) 534-9092
E-mail: jtamelier at ucsd.edu           http://nano3.calit2.net
-----------------------------------



On Thu, Apr 8, 2021 at 4:50 AM Aebersold,Julia W. <
julia.aebersold at louisville.edu> wrote:

> Thanks Michael.  I will let our engineer answer your question for I am not
> sure and she has set up our FOM system.
>
> Cheers!
>
>
> Julia Aebersold, Ph.D.
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> 2210 South Brook Street
>
> Shumaker Research Building, Room 233
>
> Louisville, KY  40292
>
> (502) 852-1572
>
> http://louisville.edu/micronano/
> <https://urldefense.com/v3/__http://louisville.edu/micronano__;!!Mih3wA!SQsxbaAkcj0DJgUdXOXwvjfrPpRj6T8X9DIo1XwXjvXU-n1Xr58tb-vRon9RrY4s$>
>
>
>
> ------------------------------
> *From:* Michael Rooks <michael.rooks at yale.edu>
> *Sent:* Wednesday, April 7, 2021 4:40 PM
> *To:* Aebersold,Julia W. <julia.aebersold at louisville.edu>
> *Cc:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Static IP Addresses needed for hardware
> interlocks
>
>
> *CAUTION:* This email originated from outside of our organization. Do not
> click links, open attachments, or respond unless you recognize the sender's
> email address and know the contents are safe.
> We have the same problem of running out of IPv4 addresses. We started
> using a router to do port forwarding from the control system (Badger,
> similar to Coral) to the ethernet relays. The control system, running on
> AWS, needs just one ip address, blessed and approved by our IT department.
> The router gets messages on different ports, then maps ports onto the
> internal IP addresses of the relays. It works a lot like your home wireless
> router, but with the local addresses set to fixed values. The router
> connects by wifi to some relays, and by hardwire to others.
>
> This requires the controller to allow address:port addressing, which is
> easy in Badger. Does FOM let you do the same thing?
>
> --------------------------------
> Michael Rooks
> nano.yale.edu
> <https://urldefense.com/v3/__https://nam11.safelinks.protection.outlook.com/?url=http*3A*2F*2Fnano.yale.edu*2F&data=04*7C01*7Cjulia.aebersold*40louisville.edu*7C6ea1a773304c4789bfc308d8fa055fdd*7Cdd246e4a54344e158ae391ad9797b209*7C0*7C0*7C637534248281163827*7CUnknown*7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0*3D*7C1000&sdata=BGvS8aWfX7S*2F4NC*2BtR90BNoN2*2FoxSST17bwQ82KzZu4*3D&reserved=0__;JSUlJSUlJSUlJSUlJSUlJSUlJSU!!Mih3wA!SQsxbaAkcj0DJgUdXOXwvjfrPpRj6T8X9DIo1XwXjvXU-n1Xr58tb-vRokkga8F7$>
>
>
>
> On Wed, Apr 7, 2021 at 3:50 PM Aebersold,Julia W. <
> julia.aebersold at louisville.edu> wrote:
>
> We utilize a large array of hardware interlocks within our equipment fleet
> that interfaces with our software for access, training requests,
> reservations, invoicing, etc. Each of these relay boxes requires a static
> IP address.  With recent security certificate requirements in our
> institution getting a static IP address for new systems is becoming very
> arduous.
>
>
>
> Are there alternatives out there beyond the requirement of a static IP
> address that address current security requirements?
>
>
>
> Cheers!
>
>
>
> Julia Aebersold, Ph.D.
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> Louisville, KY  40292
>
> (502) 852-1572
>
>
>
> http://louisville.edu/micronano/
> <https://urldefense.com/v3/__http://louisville.edu/micronano/__;!!Mih3wA!SQsxbaAkcj0DJgUdXOXwvjfrPpRj6T8X9DIo1XwXjvXU-n1Xr58tb-vRounntU32$>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> <https://urldefense.com/v3/__https://nam11.safelinks.protection.outlook.com/?url=https*3A*2F*2Fmtl.mit.edu*2Fmailman*2Flistinfo.cgi*2Flabnetwork&data=04*7C01*7Cjulia.aebersold*40louisville.edu*7C6ea1a773304c4789bfc308d8fa055fdd*7Cdd246e4a54344e158ae391ad9797b209*7C0*7C0*7C637534248281163827*7CUnknown*7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0*3D*7C1000&sdata=TDuZEx*2B1sgLgqjDXKsKX8Ik2LManAEIifNkj04KwQ*2Fs*3D&reserved=0__;JSUlJSUlJSUlJSUlJSUlJSUlJSUl!!Mih3wA!SQsxbaAkcj0DJgUdXOXwvjfrPpRj6T8X9DIo1XwXjvXU-n1Xr58tb-vRog_ymvJA$>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
>
> https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!Mih3wA!SQsxbaAkcj0DJgUdXOXwvjfrPpRj6T8X9DIo1XwXjvXU-n1Xr58tb-vRotJtKkZg$
>
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From manish.keswani01 at gmail.com  Thu Apr  8 14:24:22 2021
From: manish.keswani01 at gmail.com (Manish Keswani)
Date: Thu, 8 Apr 2021 11:24:22 -0700
Subject: [labnetwork] FMEA analysis on toxic gas system
In-Reply-To: <CAL2xBHC1_1oeMpTS7k34yUNNx9aEZ6n-sLZ0iE661y7xA4jmYQ@mail.gmail.com>
References: <CAL2xBHC1_1oeMpTS7k34yUNNx9aEZ6n-sLZ0iE661y7xA4jmYQ@mail.gmail.com>
Message-ID: <CAL2xBHAbo5WKWbPqYJ5eDiiM4igAMoM76G=dyVRW1gDeVw64_Q@mail.gmail.com>

Hello folks,

Just reaching out one more time in case you could not previously respond to
my request. I only heard back from a couple of you and it does not appear
that FMEA is commonly done for toxic gases.

Thanks again.
Manish

On Thu, Mar 18, 2021 at 10:40 AM Manish Keswani <manish.keswani01 at gmail.com>
wrote:

> Hello folks,
>
> Has anyone of you done failure modes and effects analysis (FMEA) on the
> toxic gas system? If so, are you able to share a copy of the analysis?
>
> We had some recent issues with our toxic gas monitoring system and during
> discussion the safety team recommended that we do FMEA on our gas system.
> It will be useful to know if any of you has done this type of analysis for
> toxic gases and have a copy of the report.
>
> Thank you,
>
> Manish Keswani
> LLNL
>
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From Thomas_Ferraguto at uml.edu  Fri Apr  9 11:54:29 2021
From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S)
Date: Fri, 9 Apr 2021 15:54:29 +0000
Subject: [labnetwork] Black Silicon
Message-ID: <BYAPR02MB5990A400203D86EEC107F42EEC739@BYAPR02MB5990.namprd02.prod.outlook.com>

Colleagues,

I've been doing some deeper than usual silicon etch on my Oxford ICP 380 in Cryo mode using and SiO2 mask (SF6 & O2)

I've been getting what I believe to be a "Black silicon" artifact, and would either like to NOT get it or remove it.

If anyone has thoughts or could point me in the right direction , I'd appreciate it.

Best Regards

Tom


Thomas S. Ferraguto
Saab ETIC Nanofabrication Laboratory Director
Saab ETIC Building Director
1 University Avenue
Lowell MA 01854
Mobile 617-755-0910
Land 978-934-1809
Fax 978-934-1014





[cid:image003.jpg at 01D72D37.178BFB60]
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From f.karouta at gmail.com  Fri Apr  9 18:46:06 2021
From: f.karouta at gmail.com (Fouad Karouta)
Date: Sat, 10 Apr 2021 08:46:06 +1000
Subject: [labnetwork] Black Silicon
In-Reply-To: <BYAPR02MB5990A400203D86EEC107F42EEC739@BYAPR02MB5990.namprd02.prod.outlook.com>
References: <BYAPR02MB5990A400203D86EEC107F42EEC739@BYAPR02MB5990.namprd02.prod.outlook.com>
Message-ID: <CANYCV9vWp7DFkh2FQa+VKOcb+29GRc1oDpmeVQG7NAZm34MnYw@mail.gmail.com>

Hi Tom,

Black Si is reported in literature and is usually obtained when etching
with SF6+O2.
Changing the O2 ratio may help.
I do not have experience with cryo etch but I did some pillars etching in
Si. If required we can discuss details offline.

Best regards
Fouad Karouta

On Sat, 10 Apr 2021 at 7:15 am, Ferraguto, Thomas S <
Thomas_Ferraguto at uml.edu> wrote:

> Colleagues,
>
>
>
> I?ve been doing some deeper than usual silicon etch on my Oxford ICP 380
> in Cryo mode using and SiO2 mask (SF6 & O2)
>
>
>
> I?ve been getting what I believe to be a ?Black silicon? artifact, and
> would either like to NOT get it or remove it.
>
>
>
> If anyone has thoughts or could point me in the right direction , I?d
> appreciate it.
>
>
>
> Best Regards
>
>
>
> <https://www.google.com/maps/search/1+University+Avenue+%0D%0A+Lowell+MA+01854?entry=gmail&source=g>
>
> Tom
>
>
>
>
>
> Thomas S. Ferraguto
>
> Saab ETIC Nanofabrication Laboratory Director
>
> Saab ETIC Building Director
>
> 1 University Avenue
> <https://www.google.com/maps/search/1+University+Avenue+%0D%0A+Lowell+MA+01854?entry=gmail&source=g>
>
> Lowell MA 01854
> <https://www.google.com/maps/search/1+University+Avenue+%0D%0A+Lowell+MA+01854?entry=gmail&source=g>
>
> Mobile 617-755-0910
>
> Land 978-934-1809
>
> Fax 978-934-1014
>
>
>
>
>
>
>
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From vamsinittala at gmail.com  Sun Apr 11 11:01:31 2021
From: vamsinittala at gmail.com (N P Vamsi Krishna)
Date: Sun, 11 Apr 2021 10:01:31 -0500
Subject: [labnetwork] Black Silicon
In-Reply-To: <BYAPR02MB5990A400203D86EEC107F42EEC739@BYAPR02MB5990.namprd02.prod.outlook.com>
References: <BYAPR02MB5990A400203D86EEC107F42EEC739@BYAPR02MB5990.namprd02.prod.outlook.com>
Message-ID: <CA+SWD1UnPKPpevxgZDtKXKz0oJZutTS5Zyxz-1Pwi19r1aWDAA@mail.gmail.com>

Hi Tom,

Thank you for this question. I had a similar problem with Cryo etch in the
Oxford tool. I didn't understand why this is happening, but I was able to
make some repeatable samples.



My Cryo etch process was on dies and not on the full wafer. I bond the die
to the carrier wafer. Here are my observations:

1.     Pre-conditioning of the chamber with the cryo process helped a lot.

a.     After the condition run, if I see the black silicon, chamber
cleaning is required.

b.     Ar + Oxygen clean and then oxygen clean helped.

c.     Followed by repeating the conditioning.

2. Etching fewer dies worked better than multiple dies on the wafer.

3. After some successful runs, I generally observe black silicon starting
on one of the corners of the carrier wafer. Once I see the black silicon,
it's better to discard the carrier wafer and use a fresh one. Using the
same wafer resulted in full black silicon affecting the die and chamber
needing cleaning and condition again.

4. Also, the results were bad if the temperature was unstable.



To the best of my knowledge, chamber conditioning is the key.



Once your issue is fixed, I request you to share the knowledge and
experience.

Thanks & br,
Vamsi


On Fri, Apr 9, 2021 at 4:16 PM Ferraguto, Thomas S <Thomas_Ferraguto at uml.edu>
wrote:

> Colleagues,
>
>
>
> I?ve been doing some deeper than usual silicon etch on my Oxford ICP 380
> in Cryo mode using and SiO2 mask (SF6 & O2)
>
>
>
> I?ve been getting what I believe to be a ?Black silicon? artifact, and
> would either like to NOT get it or remove it.
>
>
>
> If anyone has thoughts or could point me in the right direction , I?d
> appreciate it.
>
>
>
> Best Regards
>
>
>
> Tom
>
>
>
>
>
> Thomas S. Ferraguto
>
> Saab ETIC Nanofabrication Laboratory Director
>
> Saab ETIC Building Director
>
> 1 University Avenue
>
> Lowell MA 01854
>
> Mobile 617-755-0910
>
> Land 978-934-1809
>
> Fax 978-934-1014
>
>
>
>
>
>
>
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 

___________________________________________________

N.P.  Vamsi Krishna, PhD

*Staff Scientist*

Pritzker School of Molecular Engineering, *The University of Chicago *

*Resident **Associate*

Center for Nanoscale Materials, *Argonne National Laboratory *

Phone: 1 (331) 757-8565
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From saba.sadeghi at uwaterloo.ca  Mon Apr 12 10:37:04 2021
From: saba.sadeghi at uwaterloo.ca (Saba Sadeghi)
Date: Mon, 12 Apr 2021 14:37:04 +0000
Subject: [labnetwork] ICP analysis for unknown grease
Message-ID: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>

Dear colleagues,

I have found a an unknown contamination in the loadlock of our the UHV system. It has a white, greasy, soft  texture. I'd like to know the elemental analysis of it since after wiping the system with IPA and baking it the vacuum didn't improve and I am afraid it must have left residuals.  
Would you know any company that offers elemental analysis/ ICP to identify unknown substances?

Thank you,
Saba 

--
Saba Sadeghi, PhD
Quantum Devices Fabrication Scientist
Email: saba.sadeghi at uwaterloo.ca

From mweiler at andrew.cmu.edu  Mon Apr 12 12:02:42 2021
From: mweiler at andrew.cmu.edu (Mark Weiler)
Date: Mon, 12 Apr 2021 16:02:42 +0000
Subject: [labnetwork] ICP analysis for unknown grease
In-Reply-To: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
References: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
Message-ID: <B79EA0AC-E197-479E-B564-231BC69ED789@andrew.cmu.edu>

Hi Saba,

Do you have a portable RGA?  Greases and oils leave tell-tale signature peaks to tell us what they are, and then it?s a matter choosing the appropriate removal method.  As far as the bulk, visible quantities, are you sure you were able to both find and remove it all?

Best Regards,

Mark

________________________________________________________________

Mark Weiler
Manager, Equipment & Facilites
Claire and John Bertucci Nanotechnology Laboratory
Eden Hall Nanofabrication Cleanroom
Carnegie Mellon University
P: 412-268-2471
F: 412-268-3497
http://www.nanofab.ece.cmu.edu


<https://www.linkedin.com/in/marksbasics>[cid:2D2E01E3-CEC1-4F48-A845-224D8D7CED12 at wv.cc.cmu.edu]

On Apr 12, 2021, at 10:37 AM, Saba Sadeghi <saba.sadeghi at uwaterloo.ca<mailto:saba.sadeghi at uwaterloo.ca>> wrote:

Dear colleagues,

I have found a an unknown contamination in the loadlock of our the UHV system. It has a white, greasy, soft  texture. I'd like to know the elemental analysis of it since after wiping the system with IPA and baking it the vacuum didn't improve and I am afraid it must have left residuals.
Would you know any company that offers elemental analysis/ ICP to identify unknown substances?

Thank you,
Saba

--
Saba Sadeghi, PhD
Quantum Devices Fabrication Scientist
Email: saba.sadeghi at uwaterloo.ca<mailto:saba.sadeghi at uwaterloo.ca>
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From hathaway at cns.fas.harvard.edu  Mon Apr 12 12:08:34 2021
From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm R)
Date: Mon, 12 Apr 2021 16:08:34 +0000
Subject: [labnetwork] ICP analysis for unknown grease
In-Reply-To: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
References: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
Message-ID: <MN2PR07MB652610FC89C8CC5EF32A0A14CB709@MN2PR07MB6526.namprd07.prod.outlook.com>

Hello Saba,

Where in the load-lock did you find this material?  Widely, uniformly distributed, or in spots/patches?

What kind of system is this?  This is a system to which students/users have access?

In our systems, the most popular material to gunk up load-locks with is silicone heat-sink paste (sticking wafer coupons to carrier wafers), which falls neatly into the white, greasy, soft category.  The "right" kind of paste has pretty low vapor pressure, but perhaps a users found some other stuff...

If Waterloo has an SEM imaging lab, I'd think the quickest route would be to put this stuff under an EDX analyzer (assuming the SEM folks don't mind some sticky stuff in their chamber).

XRF is good for analyzing stuff that you don't want to put into a vacuum.  Most uni's that have nanofab core centers will have analytical gear like this.

For outside companies, Evans Analytical (EAG now) does this kind of work, but it tends to be kind of expensive.


Mac Hathaway
Senior Process and Systems Engineer
Harvard CNS
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Saba Sadeghi <saba.sadeghi at uwaterloo.ca>
Sent: Monday, April 12, 2021 10:37 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] ICP analysis for unknown grease

Dear colleagues,

I have found a an unknown contamination in the loadlock of our the UHV system. It has a white, greasy, soft  texture. I'd like to know the elemental analysis of it since after wiping the system with IPA and baking it the vacuum didn't improve and I am afraid it must have left residuals.
Would you know any company that offers elemental analysis/ ICP to identify unknown substances?

Thank you,
Saba

--
Saba Sadeghi, PhD
Quantum Devices Fabrication Scientist
Email: saba.sadeghi at uwaterloo.ca
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From carl.chow at hpe.com  Mon Apr 12 12:47:52 2021
From: carl.chow at hpe.com (Chow, Carl)
Date: Mon, 12 Apr 2021 16:47:52 +0000
Subject: [labnetwork] ICP analysis for unknown grease
In-Reply-To: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
References: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
Message-ID: <CS1PR8401MB122454593AF5ED7FBEEE8C4CE9709@CS1PR8401MB1224.NAMPRD84.PROD.OUTLOOK.COM>

Saba:
We used EAG two years ago to identify a mystery liquid in an etcher.  https://www.eag.com/

Regards,

Carl Chow
Hewlett Packard Labs

-----Original Message-----
From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Saba Sadeghi
Sent: Monday, April 12, 2021 7:37 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ICP analysis for unknown grease

Dear colleagues,

I have found a an unknown contamination in the loadlock of our the UHV system. It has a white, greasy, soft  texture. I'd like to know the elemental analysis of it since after wiping the system with IPA and baking it the vacuum didn't improve and I am afraid it must have left residuals.  
Would you know any company that offers elemental analysis/ ICP to identify unknown substances?

Thank you,
Saba 

--
Saba Sadeghi, PhD
Quantum Devices Fabrication Scientist
Email: saba.sadeghi at uwaterloo.ca
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork 


From stieg at cnsi.ucla.edu  Mon Apr 12 13:41:48 2021
From: stieg at cnsi.ucla.edu (Stieg, Adam)
Date: Mon, 12 Apr 2021 17:41:48 +0000
Subject: [labnetwork] ICP analysis for unknown grease
In-Reply-To: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
References: <e428b27eeeed429da3fbba15840a888b@uwaterloo.ca>
Message-ID: <3A700DCF-1F95-4744-951A-5170E56ED00F@ad.ucla.edu>

Dear Dr. Sadeghi and colleagues,

We have an open-access facility here in the CNSI at UCLA that may be able to help:

https://cnsi.ucla.edu/cein-icp-ms-core/

Please feel free to contact Paul Chang (chonghyun at ucla.edu<mailto:chonghyun at ucla.edu>) for more information.

All the best,
Adam



Adam Stieg, Ph.D.
Associate Director - California NanoSystems Institute<http://cnsi.ucla.edu/>
Executive Director ? BioPACIFIC Materials Innovation Platform<http://biopacificmip.org/>
Director ? Nano and Pico Characterization Laboratory<https://npc.cnsi.ucla.edu/>
University of California, Los Angeles
(p) 310.206.2902
(e) stieg at cnsi.ucla.edu<mailto:stieg at cnsi.ucla.edu>








?On 4/12/21, 8:42 AM, "labnetwork on behalf of Saba Sadeghi" <labnetwork-bounces at mtl.mit.edu on behalf of saba.sadeghi at uwaterloo.ca> wrote:



    Dear colleagues,



    I have found a an unknown contamination in the loadlock of our the UHV system. It has a white, greasy, soft  texture. I'd like to know the elemental analysis of it since after wiping the system with IPA and baking it the vacuum didn't improve and I am afraid it must have left residuals.

    Would you know any company that offers elemental analysis/ ICP to identify unknown substances?



    Thank you,

    Saba



    --

    Saba Sadeghi, PhD

    Quantum Devices Fabrication Scientist

    Email: saba.sadeghi at uwaterloo.ca

    _______________________________________________

    labnetwork mailing list

    labnetwork at mtl.mit.edu

    https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From mtkhbeis at gmail.com  Mon Apr 12 17:18:27 2021
From: mtkhbeis at gmail.com (Michael Khbeis)
Date: Mon, 12 Apr 2021 14:18:27 -0700
Subject: [labnetwork] FB Lab Manager position
Message-ID: <CAGLdLQEKdGGe_pZ_g9Kk=mm_TQX1TVQ7Ff3Go2m3Z7BHcbEJzw@mail.gmail.com>

FB is recruiting for a lab manager role for cleanroom management,
preferably with a background in solid state optics. Please reach out to me
if you are interested in a referral.

https://www.facebook.com/careers/v2/jobs/486648959455890/

Regards,
-- 
Dr. Michael T. Khbeis
Design / Process Engineer
(C)1-443-254-5192
mtkhbeis at gmail.com
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From kjvowen at lnf.umich.edu  Tue Apr 13 09:46:01 2021
From: kjvowen at lnf.umich.edu (Kevin Owen)
Date: Tue, 13 Apr 2021 09:46:01 -0400
Subject: [labnetwork] Favorite recirculating chiller?
Message-ID: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>

Hey everyone,

What's your favorite brand of recirculating chiller? Looking for a "general
use" chiller - DI or glycol, maybe ~1kW cooling capacity (that's pretty
standard), preferably water cooled, not crazy expensive; for a drop-in
spare, and possibly to standardize to long term. Primarily looking for
feedback on reliability, quality of repair service, etc. (I suppose along
with that, who's your favorite repair vendor?)

Cheers,
Kevin

-- 
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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From L.N.Schriek at tudelft.nl  Tue Apr 13 10:45:12 2021
From: L.N.Schriek at tudelft.nl (Lodi Schriek)
Date: Tue, 13 Apr 2021 14:45:12 +0000
Subject: [labnetwork] working with III-V materials in nanofabrication
 cleanroom environment
Message-ID: <a31501727b764241b9b7b249564e6e5a@tudelft.nl>

L.S.

We are looking for a safe handling guideline, for working with III-V materials in nanofabrication cleanroom environment (small samples (max 4") with III-V materials).
Is there something available that anyone could recommend?


Met vriendelijke groet / Kind regards
L. (Lodi) Schriek
Inspectie apparatuur Thin Film Processing

TU Delft
Faculteit Technische Natuurwetenschappen - Quantum Nanoscience
Room 22.D119
Lorentzweg 1
2628 CJ Delft
T +31 15 27 81153
E L.N.Schriek at tudelft.nl<mailto:L.N.Schriek at tudelft.nl>

[KN logo]


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From jtmitch5 at ncsu.edu  Tue Apr 13 12:00:05 2021
From: jtmitch5 at ncsu.edu (James Mitchell)
Date: Tue, 13 Apr 2021 12:00:05 -0400
Subject: [labnetwork] Favorite recirculating chiller?
In-Reply-To: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
References: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
Message-ID: <CAEXS_M9EfTCvHcdcf8T2cWB6B2OLOoAPtQkt_k7iJ90nCZ0xVA@mail.gmail.com>

I like these.
[image: image.png]
You can refurbs for about $2K.

Jim

On Tue, Apr 13, 2021 at 11:40 AM Kevin Owen <kjvowen at lnf.umich.edu> wrote:

> Hey everyone,
>
> What's your favorite brand of recirculating chiller? Looking for a
> "general use" chiller - DI or glycol, maybe ~1kW cooling capacity (that's
> pretty standard), preferably water cooled, not crazy expensive; for a
> drop-in spare, and possibly to standardize to long term. Primarily looking
> for feedback on reliability, quality of repair service, etc. (I suppose
> along with that, who's your favorite repair vendor?)
>
> Cheers,
> Kevin
>
> --
> Kevin Owen
> Lead Research Engineer
> Operations Group, Lurie Nanofabrication Facility
> University of Michigan
> (734) 545-4014
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
*James Mitchell*
*Specialty Trades Technician*
*Dept. of Electrical and Computer Engineering*
*NCSU Nanofabrication Facility*
*MRC RM243A **Box 7911*
*2410 Campus Shore Dr., Raleigh, NC 27606*
*jtmitch5 at ncsu.edu* <jtmitch5 at ncsu.edu>
*Desk: 919-515-5394*
*Cell: 919-717-7325*
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From spaolini at cns.fas.harvard.edu  Tue Apr 13 13:15:03 2021
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Tue, 13 Apr 2021 17:15:03 +0000
Subject: [labnetwork] Favorite recirculating chiller?
In-Reply-To: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
References: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
Message-ID: <BL0PR07MB4050D47FD23B8BC3FF0F677BDF4F9@BL0PR07MB4050.namprd07.prod.outlook.com>

Kevin,
  If you are not looking for precise temperature control or communication with your system, I find that Haskris chillers are very robust. The main thing I like about them is that the components are off the shelf from most major industrial suppliers. The compressors are Copeland which are extremely popular here on the East coast. The pumps vary in manufacturer but Procon is common. The layout is not as compact as some others but they are easy to work on.
Hope this helps.
             Equipment Dood

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Kevin Owen
Sent: Tuesday, April 13, 2021 9:46 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Favorite recirculating chiller?

Hey everyone,

What's your favorite brand of recirculating chiller? Looking for a "general use" chiller - DI or glycol, maybe ~1kW cooling capacity (that's pretty standard), preferably water cooled, not crazy expensive; for a drop-in spare, and possibly to standardize to long term. Primarily looking for feedback on reliability, quality of repair service, etc. (I suppose along with that, who's your favorite repair vendor?)

Cheers,
Kevin

--
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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From sieb at 4dlabs.ca  Tue Apr 13 15:58:56 2021
From: sieb at 4dlabs.ca (Nathanael Sieb)
Date: Tue, 13 Apr 2021 12:58:56 -0700
Subject: [labnetwork] Favorite recirculating chiller?
In-Reply-To: <BL0PR07MB4050D47FD23B8BC3FF0F677BDF4F9@BL0PR07MB4050.namprd07.prod.outlook.com>
References: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
 <BL0PR07MB4050D47FD23B8BC3FF0F677BDF4F9@BL0PR07MB4050.namprd07.prod.outlook.com>
Message-ID: <420ab3c6-3ee9-da90-9325-350aa2e04d83@4dlabs.ca>

I also like the Haskris units.? They can custom design it for your 
application, customer support is good, and the maintenance is fairly 
easy.? We have several of their units throughout our facility.

Thanks,
Nathanael

On 2021-04-13 10:15 a.m., Paolini, Steven wrote:
>
> Kevin,
>
> ? If you are not looking for precise temperature control or 
> communication with your system, I find that Haskris chillers are very 
> robust. The main thing I like about them is that the components are 
> off the shelf from most major industrial suppliers. The compressors 
> are Copeland which are extremely popular here on the East coast. The 
> pumps vary in manufacturer but Procon is common. The layout is not as 
> compact as some others but they are easy to work on.
>
> Hope this helps.
>
> ???????????? Equipment Dood
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA 02138
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu
>
> www.cns.fas.harvard.edu
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of 
> *Kevin Owen
> *Sent:* Tuesday, April 13, 2021 9:46 AM
> *To:* Fab Network <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Favorite recirculating chiller?
>
> Hey everyone,
>
> What's your favorite brand of recirculating chiller? Looking for a 
> "general use" chiller - DI or glycol, maybe ~1kW cooling capacity 
> (that's pretty standard), preferably water cooled, not crazy 
> expensive; for a drop-in spare, and possibly to standardize to long 
> term. Primarily looking for feedback on reliability, quality of repair 
> service, etc. (I suppose along with that, who's your favorite repair 
> vendor?)
>
> Cheers,
>
> Kevin
>
> -- 
>
> Kevin Owen
>
> Lead Research Engineer
>
> Operations Group, Lurie Nanofabrication Facility
>
> University of Michigan
>
> (734) 545-4014
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

*Nathanael Sieb *
Director of Operations and Administration ?| 4D LABS 
<http://www.4dlabs.ca/>
Simon Fraser University
8888 University Dr., Burnaby, B.C. V5A 1S6
T: 778.782.8084?| F: 778.782.3765 | www.4dlabs.ca <http://www.4dlabs.ca>
Facebook <https://www.facebook.com/4dlabs/>?| Twitter 
<https://twitter.com/4D_LABS>?| LinkedIn 
<https://www.linkedin.com/company/sfu-4d-labs/about/>

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From mkhodada at central.uh.edu  Tue Apr 13 17:27:43 2021
From: mkhodada at central.uh.edu (Mohammad Khodadadi)
Date: Tue, 13 Apr 2021 16:27:43 -0500
Subject: [labnetwork] Favorite recirculating chiller?
In-Reply-To: <BL0PR07MB4050D47FD23B8BC3FF0F677BDF4F9@BL0PR07MB4050.namprd07.prod.outlook.com>
References: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
 <BL0PR07MB4050D47FD23B8BC3FF0F677BDF4F9@BL0PR07MB4050.namprd07.prod.outlook.com>
Message-ID: <CACEs6rToUTHAt_vFe71qYaLtMvnmh=ASjcA-YaMbNitzaynviQ@mail.gmail.com>

Hi Kevin,

If you are looking for room temperature cooling, we have *great experience*
replacing our central water cooling system with *Thermoflex 2500* at the
University of Houston Nanofabrication Center <https://uhnf.egr.uh.edu/>.


   1. The *price is reasonable*. ( you can buy a refurbished one for $2500)
   2. They are *robust *and *portable*.
   3. *Maintenance *is *easy*, *fast*, and *affordable*. ( Basically, over
   time we replace the water pump (1 hr ), the coupling (20 min), or the motor
   (1 hr))
   4. We use *distilled water* as a coolant and Watts Flow-Pro FPMB5-978 as
   a water filter.
   5. We have an SSP
   <https://docs.google.com/document/d/1uS0CnZuPyQf69iTjuWkM6C7I0fBM5xYS3xacBVWyUd8/edit#>in
   case you need it.

Sincerely yours;
Mo Khodadadi, Ph.D.
Center for Integrated Bio and NanoSystems
University of Houston

mkhodada at central.uh.edu <mkhodadadi at uh.edu>


On Tue, Apr 13, 2021 at 2:57 PM Paolini, Steven <
spaolini at cns.fas.harvard.edu> wrote:

> Kevin,
>
>   If you are not looking for precise temperature control or communication
> with your system, I find that Haskris chillers are very robust. The main
> thing I like about them is that the components are off the shelf from most
> major industrial suppliers. The compressors are Copeland which are
> extremely popular here on the East coast. The pumps vary in manufacturer
> but Procon is common. The layout is not as compact as some others but they
> are easy to work on.
>
> Hope this helps.
>
>              Equipment Dood
>
>
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA 02138
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu
>
> www.cns.fas.harvard.edu
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> * On Behalf Of *Kevin
> Owen
> *Sent:* Tuesday, April 13, 2021 9:46 AM
> *To:* Fab Network <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Favorite recirculating chiller?
>
>
>
> Hey everyone,
>
>
>
> What's your favorite brand of recirculating chiller? Looking for a
> "general use" chiller - DI or glycol, maybe ~1kW cooling capacity (that's
> pretty standard), preferably water cooled, not crazy expensive; for a
> drop-in spare, and possibly to standardize to long term. Primarily looking
> for feedback on reliability, quality of repair service, etc. (I suppose
> along with that, who's your favorite repair vendor?)
>
>
>
> Cheers,
>
> Kevin
>
>
>
> --
>
> Kevin Owen
>
> Lead Research Engineer
>
> Operations Group, Lurie Nanofabrication Facility
>
> University of Michigan
>
> (734) 545-4014
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From kjvowen at lnf.umich.edu  Wed Apr 14 08:44:21 2021
From: kjvowen at lnf.umich.edu (Kevin Owen)
Date: Wed, 14 Apr 2021 08:44:21 -0400
Subject: [labnetwork] Favorite recirculating chiller?
In-Reply-To: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
References: <CANLyxV0yi+8b+V-B6xOgKkApEKircz0hajaSS3PcESZYw31pHg@mail.gmail.com>
Message-ID: <CANLyxV32dVojNN+3C+9_85D_2zwn4t3weXMeEiyGYOssaa+Aqg@mail.gmail.com>

Everyone,

Thanks for all your feedback! This is my favorite kind of discussion on
here haha.

-Kevin

On Tue, Apr 13, 2021 at 9:46 AM Kevin Owen <kjvowen at lnf.umich.edu> wrote:

> Hey everyone,
>
> What's your favorite brand of recirculating chiller? Looking for a
> "general use" chiller - DI or glycol, maybe ~1kW cooling capacity (that's
> pretty standard), preferably water cooled, not crazy expensive; for a
> drop-in spare, and possibly to standardize to long term. Primarily looking
> for feedback on reliability, quality of repair service, etc. (I suppose
> along with that, who's your favorite repair vendor?)
>
> Cheers,
> Kevin
>
> --
> Kevin Owen
> Lead Research Engineer
> Operations Group, Lurie Nanofabrication Facility
> University of Michigan
> (734) 545-4014
>


-- 
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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From lvchang at Central.UH.EDU  Fri Apr 16 11:12:03 2021
From: lvchang at Central.UH.EDU (Chang, Long)
Date: Fri, 16 Apr 2021 15:12:03 +0000
Subject: [labnetwork] USAF-1951 GDS
Message-ID: <4452839B-2D52-48CD-9CA6-793773FF16F1@cougarnet.uh.edu>

Hello,

Does anyone have the USAF 1951 pattern in GDS format?

Thanks,
Long

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From gyger at kth.se  Fri Apr 16 13:30:29 2021
From: gyger at kth.se (Samuel Gyger)
Date: Fri, 16 Apr 2021 19:30:29 +0200
Subject: [labnetwork] USAF-1951 GDS
In-Reply-To: <4452839B-2D52-48CD-9CA6-793773FF16F1@cougarnet.uh.edu>
References: <4452839B-2D52-48CD-9CA6-793773FF16F1@cougarnet.uh.edu>
Message-ID: <39CB0B8C-4F7B-41B9-B7A6-41D78F5DEC99@getmailspring.com>

This webpage could be what you are looking for, you need to convert the Autocad files to gds though.

http://www.vinland.com/USAF-1951.html
Regards,
Samuel

On Apr 16 2021, at 5:12 pm, Chang, Long <lvchang at Central.UH.EDU> wrote:
> Hello,
>
> Does anyone have the USAF 1951 pattern in GDS format?
>
> Thanks,
> Long
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From saba.sadeghi at uwaterloo.ca  Mon Apr 19 11:00:03 2021
From: saba.sadeghi at uwaterloo.ca (Saba Sadeghi)
Date: Mon, 19 Apr 2021 15:00:03 +0000
Subject: [labnetwork] Cleaning a contaminated UHV chamber
Message-ID: <51f6bcd6ce17456eac99cca601a1f3c8@uwaterloo.ca>

Dear colleagues,

I have found a contamination in the loadlock of our UHV system with base pressure of 5E-9 mbar.

I am almost certain the contamination is a type of PFPE (fluorinated) grease as it didn't dissolve in 4 types of solvents (hexane, IPA, acetone and toluene) but I have sent a sample to EAG for further analysis.

Solvents for this type of grease are fluorinated fluids like:  Galden or Fluorinert or supercritical fluids.

My question is how should I proceed with cleaning, do you have a method to suggest? is cleaning a UHV chamber something that is possible to implement in the house?

Also, what do you think of using a dry-surface cleaning using CO2 snow?

As always I appreciate your input.

Best,
Saba Sadeghi, PhD
Quantum Devices Fabrication Scientist
Email: saba.sadeghi at uwaterloo.ca




From AngelaMWilliams at cunet.carleton.ca  Thu Apr 22 16:18:46 2021
From: AngelaMWilliams at cunet.carleton.ca (Angela Williams)
Date: Thu, 22 Apr 2021 20:18:46 +0000
Subject: [labnetwork] Pattern Generators : Mann 1600 Working Condition;
 Mann 3000 Stage Issues and Jade Step and Repeat Camera
Message-ID: <YT1PR01MB33550DFA173211C844B85F22F8469@YT1PR01MB3355.CANPRD01.PROD.OUTLOOK.COM>

Dear All,
Good afternoon.  We trust all is well.
Would there be any interest out there for :

  1.  David W. Mann PG 1600
  2.  David W. Mann PG 3000
  3.  Jade 4M 10AXYL Step and Repeat Camera
Please Contact us for more information.

Thank you and take care,
Angela

Angela Mccormick-Williams
Lab Technician
Carleton University - Department of Electronics
1125 Colonel By Dr., Ottawa ON K1S5B6
613-520-2600 X5771
613-804-8620 (Cell)


Sent from Mail<https://go.microsoft.com/fwlink/?LinkId=550986> for Windows 10


This email contains links to content or websites. Always be cautious when clicking on external links or attachments. If in doubt, please forward suspicious emails to phishing at carleton.ca.

-----End of Disclaimer-----

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From wjkiethe at ncsu.edu  Fri Apr 23 14:02:51 2021
From: wjkiethe at ncsu.edu (Bill Kiether)
Date: Fri, 23 Apr 2021 14:02:51 -0400
Subject: [labnetwork] Replacement for Leybold Dryvac 50P?
Message-ID: <CAN1vinvf9s7kpmTP=WqXbKHJ56yzQq8U2J7M5PFmZs_kF=7jww@mail.gmail.com>

Hello,

We have a Leybold Dryvac 50P dry pump (model 13833) with a Roots Blower on
our Oxford PlasmaLab 80+ PECVD/RIE tool that has met it's final days. Has
anyone recently had one of these models refurbished (i.e. do you have a
good vendor? ) I have reached out to Leybold and a handful of vacuum pump
repair shops, but no luck so far.

Alternatively, has anyone successfully upgraded to a newer pumping stack on
this PECVD tool? What was your experience?

Bill Kiether
Sr. Research Engineer
NCSU Nanofabrication Facility
wjkiethe at ncsu.edu
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From shimonel at savion.huji.ac.il  Sat Apr 24 11:47:44 2021
From: shimonel at savion.huji.ac.il (Shimon Eliav)
Date: Sat, 24 Apr 2021 15:47:44 +0000
Subject: [labnetwork] Replacement for Leybold Dryvac 50P?
In-Reply-To: <CAN1vinvf9s7kpmTP=WqXbKHJ56yzQq8U2J7M5PFmZs_kF=7jww@mail.gmail.com>
References: <CAN1vinvf9s7kpmTP=WqXbKHJ56yzQq8U2J7M5PFmZs_kF=7jww@mail.gmail.com>
Message-ID: <DB9PR10MB492154F80C9416DF6D3FE51ED6449@DB9PR10MB4921.EURPRD10.PROD.OUTLOOK.COM>

Hi Bill,

We had a similar story with our PlasmaLab 100, some years ago.

The system came originally equipped with an Adixen Pump with roots blower, I think similar to the Leybold pump you mentioned. The pump worked fine, but every four years we had to send it to be refurbished in France, an expensive process (money and also time).

I decided to exchange the Adixen pump for an equivalent Edwards, since we have local service at affordable prices here in Israel.

Our PlasmaLab system sends START/STOP and STAND-BY commands to the pump. Those are simple dry-contacts commands, but the technician from Edwards didn?t succeeded to make the connection. Then I came into the scene and with patience I made it work.

Since we have Edwards service available here near us, we programed the pump to ?run to fail? and when the time comes we will send it for complete refurbishing, what will take one week to be done. I think it is a good arrangement. Much less expensive than the original situation and also faster.

Original Adixen Pump Model: ADS 602P
Edwards Pump model: IH600
Attached: PlasmaLab 100 Rough Pump Connections Schematics
Exchange Date: 02/2016 ? five years and running!

Regards,

Shimon Eliav
The Hebrew University of Jerusalem
The Unit for Nano Fabrication
Jerusalem - ISRAEL





From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Kiether
Sent: Friday, 23 April 2021 21:03
To: labnetwork at mtl.mit.edu
Cc: Jon Lewis <jlewis at classone.com>; Philip Barletta <pbarlet at ncsu.edu>
Subject: [labnetwork] Replacement for Leybold Dryvac 50P?

Hello,

We have a Leybold Dryvac 50P dry pump (model 13833) with a Roots Blower on our Oxford PlasmaLab 80+ PECVD/RIE tool that has met it's final days. Has anyone recently had one of these models refurbished (i.e. do you have a good vendor? ) I have reached out to Leybold and a handful of vacuum pump repair shops, but no luck so far.

Alternatively, has anyone successfully upgraded to a newer pumping stack on this PECVD tool? What was your experience?

Bill Kiether
Sr. Research Engineer
NCSU Nanofabrication Facility
wjkiethe at ncsu.edu<mailto:wjkiethe at ncsu.edu>
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From jpress at classoneequipment.com  Sun Apr 25 22:50:09 2021
From: jpress at classoneequipment.com (Jehan Press)
Date: Sun, 25 Apr 2021 19:50:09 -0700
Subject: [labnetwork] Replacement for Leybold Dryvac 50P?
In-Reply-To: <CA+KqeCm9WysAyB_hb5OdtN8X+2UktMk4e76sCKyDqNCJVXRr7w@mail.gmail.com>
References: <CAN1vinvf9s7kpmTP=WqXbKHJ56yzQq8U2J7M5PFmZs_kF=7jww@mail.gmail.com>
 <CA+KqeCm9WysAyB_hb5OdtN8X+2UktMk4e76sCKyDqNCJVXRr7w@mail.gmail.com>
Message-ID: <CAMHNqVWYLGh-c6A1x=wnhKptGhYMFbSv5pBGap8uc=XqfRLb0Q@mail.gmail.com>

Hi Bill,

   We have not had that particular pump model to refubish, so I don't know
a vendor that would rebuild the Leybold 50P for sure.  You could try
Advaco, Provac, or PTB Sales.

   Replacement options depend on if you need the pump signals integrated
with the Oxford software.  Is you pump currently controlled through the
Oxford software?  It's fairly common to see customers run the Edwards
QDP80/QMB250 pump stack or iQDP/QMB250.   Due to their high current draw,
Edwards pumps must be powered externally (not using the internal
contactor).  You can run the pumps this way, but there are no comms between
the pump and tool to stop gas flows if the pump stops (only the 600T
pressure switch).  Edwards does make a tool interface module (TIM) that can
be used to integrate the Edwards pump comms with the Oxford, but wiring
that would likely require Oxford's or Edwards' assistance.

    We can connect on Monday if you would like to discuss this further.
You can reach me on my cell at (612) 227-5029.

Best Regards,

Jehan Press
*Account Manager*

*ClassOne* *Equipment*
5302 Snapfinger Woods Dr.
<https://maps.google.com/?q=5302+Snapfinger+Woods+Dr.+Atlanta,+GA+30035+United+States&entry=gmail&source=g>
Atlanta, GA 30035
<https://maps.google.com/?q=5302+Snapfinger+Woods+Dr.+Atlanta,+GA+30035+United+States&entry=gmail&source=g>
United States
<https://maps.google.com/?q=5302+Snapfinger+Woods+Dr.+Atlanta,+GA+30035+United+States&entry=gmail&source=g>
T: +1 (770) 808-8708 (x3103) <%2B1%20%28770%29%20808-8708>
F: +1 (770) 808-8308
Email: jpress at classoneequipment.com
W: www.ClassOne.com <http://www.classone.com/>
W: www.ClassOneEquipment.com <http://www.classoneequipment.com/>
Book a Meeting: https://calendly.com/jehanpress


*This email and any attachments are ClassOne confidential, may be
attorney-client privileged and are intended only for the use of the
addressee. Unauthorized use, distribution or copying is forbidden and may
be unlawful. If you have received this email in error, please notify the
sender immediately by return email and delete all copies of this email.
Thank you.*



On Sun, Apr 25, 2021 at 4:09 AM Jon Lewis <jlewis at classone.com> wrote:

> Hi Bill,
> Nice to hear from you, I hope you are well.
>
> I have copied Jehan Press from the factory that may be able to suggest an
> avenue for you.
>
> Jehan, can you give Bill (NC State) any help on pump replacement/rebuild?
> Thanks.
>
> Best Regards,
> Jon
>
> Jon Lewis
> *Account Manager, Eastern US*
>
> *ClassOne*
> 5302 Snapfinger Woods Dr.
> <https://maps.google.com/?q=5302+Snapfinger+Woods+Dr.+Atlanta,+GA+30035+United+States&entry=gmail&source=g>
> Atlanta, GA 30035
> <https://maps.google.com/?q=5302+Snapfinger+Woods+Dr.+Atlanta,+GA+30035+United+States&entry=gmail&source=g>
> United States
> <https://maps.google.com/?q=5302+Snapfinger+Woods+Dr.+Atlanta,+GA+30035+United+States&entry=gmail&source=g>
>
> M: +1 (804) 690-2128 <8046902128>
> Email: jlewis at classone.com
> W: www.ClassOne.com <http://www.classone.com/>
> W: www.ClassOneEquipment.com <http://www.classoneequipment.com/>
>
>
>
>
> *This email and any attachments are ClassOne confidential, may be
> attorney-client privileged and are intended only for the use of the
> addressee. Unauthorized use, distribution or copying is forbidden and may
> be unlawful. If you have received this email in error, please notify the
> sender immediately by return email and delete all copies of this email.
> Thank you.*
>
>
> On Fri, Apr 23, 2021 at 2:03 PM Bill Kiether <wjkiethe at ncsu.edu> wrote:
>
>> Hello,
>>
>> We have a Leybold Dryvac 50P dry pump (model 13833) with a Roots Blower
>> on our Oxford PlasmaLab 80+ PECVD/RIE tool that has met it's final days.
>> Has anyone recently had one of these models refurbished (i.e. do you have a
>> good vendor? ) I have reached out to Leybold and a handful of vacuum pump
>> repair shops, but no luck so far.
>>
>> Alternatively, has anyone successfully upgraded to a newer pumping stack
>> on this PECVD tool? What was your experience?
>>
>> Bill Kiether
>> Sr. Research Engineer
>> NCSU Nanofabrication Facility
>> wjkiethe at ncsu.edu
>>
>
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From dcchrist at wisc.edu  Mon Apr 26 09:37:28 2021
From: dcchrist at wisc.edu (Daniel Christensen)
Date: Mon, 26 Apr 2021 13:37:28 +0000
Subject: [labnetwork] Staff Engineer job open at Univ of Wisconsin-Madison
Message-ID: <DM5PR06MB2411BEE573486F9266575EB4BE429@DM5PR06MB2411.namprd06.prod.outlook.com>

Hi,

The Nanoscale Fabrication Center (NFC) at the University of Wisconsin-Madison is seeking a nano-fabrication engineer.  Position Vacancy Listing (PVL) is #233629 titled Instrumentation Technologist with an anticipated start date of August 1, 2021.  A minimum of BS in Electrical Engineering, Chemical Engineering, Physics, Materials Science, or Interdisciplinary Program Degree with micro/nano device fabrication experience is required. An advanced degree is desirable or equivalent professional experience and knowledge in varied area of semiconductor fabrication and process design.
The candidate must have a strong background in the use of micro- and nanofabrication techniques, equipment, and clean room protocols.  Special consideration will be given to candidates with experience in one or more of these fabrication techniques: lithography, e-beam evaporators, sputter deposition tools, reactive ion etchers, horizontal tube furnaces, or LPCVD systems. Experience and expertise in
electrical and electronic, mechanical, pneumatic, and vacuum components as related to semiconductor/device fabrication.  Maintenance will be performed independently by the candidate and in close collaboration with field service engineers.  The candidate will be expected to assist students and other researchers in all areas of tool use and process development.  The position will be responsible for developing documentation and training materials. The position will be responsible to training new users on the proper operation of the nano-fabrication systems.

For a full position description information and specific application instructions, go to:  https://jobs.hr.wisc.edu/en-us/job/508955/instrumentation-tech

All applications must be placed online through the link above.


A successful applicant will be responsible for ensuring eligibility for employment in the United States on or before the effective date of the appointment. University sponsorship is not available for this position.  Unless confidentiality is requested in writing, information regarding applicants must be released upon request. Finalists cannot be guaranteed confidentiality.  UW-Madison provides equal employment opportunity for all persons and is in compliance with State and Federal regulations.





Daniel C. Christensen
Laboratory Manager
Nanoscale Fabrication Center
University of Wisconsin-Madison

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From bgila at ufl.edu  Mon Apr 26 17:25:38 2021
From: bgila at ufl.edu (Gila,Brent P)
Date: Mon, 26 Apr 2021 17:25:38 -0400
Subject: [labnetwork] Position open in the Research Service Centers at the
 University of Florida
Message-ID: <cb62ed85-b0cf-db60-6e54-832c5d7d5678@ufl.edu>

Hello,

We have an opening for a fabrication engineer here at the University of 
Florida.? Please share this with any interested persons.

Here is the direct link to the posting: 
https://explore.jobs.ufl.edu/en-us/job/516456/engineer-ii

Our website is https://rsc.aux.eng.ufl.edu/ for an overview of the 
facilities and staff.

Best Regards,
Brent
-- 
Brent P. Gila, PhD.
Associate Director, Research Service Centers
University of Florida
1041 Center Drive
Gainesville, Florida 32611
Tel:352-273-2245,? Fax:352-846-2877
email: bgila at ufl.edu


From peterggordon at gmail.com  Tue Apr 27 09:45:44 2021
From: peterggordon at gmail.com (Peter Gordon)
Date: Tue, 27 Apr 2021 09:45:44 -0400
Subject: [labnetwork] OES and Picosun tools
Message-ID: <CAB7+dW9aZEpsy2xwOx56gh_vYARFnDwmYOn-qh9LL--YOAfJ4w@mail.gmail.com>

Hi all,

I have started gathering information regarding OES systems for our Picosun
PE-ALD tool. I would like to characterize not only the plasma itself, but
species within the plasma, to investigate the chemical mechanism of film
growth. Our tool has ports for in situ analysis, but I'm not 100% sure an
OES system would be compatible.

I would love to hear from anyone who has used these systems (particularly
on Picosun tools):  suggested resolution, hardware, any tips at all would
be very helpful as I've not used OES before. I'm currently looking at Ocean
Insight spectrometers.

Thanks,
Peter


-- 
Peter G. Gordon, PhD
CU NanoFab Facility Administrator
Department of Chemistry
Carleton University
(613) 520-2600 ext.7561
https://carleton.ca/fanssi/
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From lvchang at Central.UH.EDU  Thu Apr 29 10:28:45 2021
From: lvchang at Central.UH.EDU (Chang, Long)
Date: Thu, 29 Apr 2021 14:28:45 +0000
Subject: [labnetwork] ZEP worth it?
Message-ID: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>

Hi Guys,

I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?

Thanks,
Long

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From michael.rooks at yale.edu  Thu Apr 29 12:00:05 2021
From: michael.rooks at yale.edu (Michael Rooks)
Date: Thu, 29 Apr 2021 12:00:05 -0400
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <CAMH=Voj+9gT=fSgH1+1gWzn5HZd0y3hyq1W=bnnmRTrdzVJohg@mail.gmail.com>

The dose depends a lot on the developer. It's a tradeoff between resolution
and sensitivity. You could develop ZEP in IPA/water or cold xylene for very
high resolution. But then the sensitivity is closer to that of PMMA. We use
CSAR instead of ZEP. It's the same polymer but a lot less expensive. Shelf
life is very long - similar to PMMA. We still use a lot of PMMA, which is
perfectly fine for liftoff.

--------------------------------
Michael Rooks
nano.yale.edu


On Thu, Apr 29, 2021 at 11:47 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From mondol at mit.edu  Thu Apr 29 12:13:16 2021
From: mondol at mit.edu (Mark K Mondol)
Date: Thu, 29 Apr 2021 16:13:16 +0000
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <1619712794938.80311@mit.edu>

Long:


I would estimate the dose ratio between PMMA and ZEP to be closer to 4 or 5 to 1.  ZEP definitely has a shelf life, 1-2 years, maybe longer. It has much better etch resistance than PMMA.  It is expensive.


CSAR from All Resists is very similar and much cheaper, it requires about 20% more dose than ZEP.


Regards,


Mark K Mondol


----------------------------------------------------------------------------------
Mark K Mondol
Assistant Director NanoStructures Laboratory
And
Facility Manager Scanning Electron Beam Lithography Facility
Bldg 36 Room 229
 mondol at mit.edu
office - 617-253-9617
cell - 617-224-8756
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Chang, Long <lvchang at Central.UH.EDU>
Sent: Thursday, April 29, 2021 10:28 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ZEP worth it?

Hi Guys,

I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?

Thanks,
Long

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From lopezg at seas.upenn.edu  Thu Apr 29 12:15:49 2021
From: lopezg at seas.upenn.edu (Gerald Lopez)
Date: Thu, 29 Apr 2021 12:15:49 -0400
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <CAERBAG92fmgMs+YCjm=N34QyYb=pmAnh69cPXy=xygbtB5MfvQ@mail.gmail.com>

Hey, Long -

Many of us in the EBL community have not had issues with ZEP expiring. If
the bottle cap is not secured properly, your spin curves may simply be off
over time. This can be remedied by adding more solvent (anisole).
Alternatively, there is CSAR 62 by AllResist <http://allresist.de/>; they
will actually have a booth at the EIPBN virtual exhibition hall from June
1-4, 2021 (www.eipbn.org) The performance is about the same as ZEP in terms
of dose and etch-selectivity, and I believe is cheaper.

Cheers,
Gerald-

Gerald G. Lopez, Ph.D. (he/him/his)
Director of Business Development
University of Pennsylvania
Singh Center for Nanotechnology
3205 Walnut Street
Philadelphia, PA 19104
https://nano.upenn.edu
+1-215-573-4041



On Thu, Apr 29, 2021 at 11:54 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From deolivei at ualberta.ca  Thu Apr 29 12:17:53 2021
From: deolivei at ualberta.ca (Gustavo de Oliveira Luiz)
Date: Thu, 29 Apr 2021 10:17:53 -0600
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <CALPuYFzteRnZehLhjw1piyLnQ9mUO4UWKM7xZBaHDb85mgLAHw@mail.gmail.com>

Hi Long,

The main problem with ZEP, as I see it, is it's cost. Other than that, it's
very reliable, has better contrast than PMMA for the same conditions and
produces very good results, not to mention that the selectivity to plasma
etch is considerably better than PMMA. As for the dose to clear, in my
experience working at 10 kV and 30 kV, ZEP requires about 1/3 of the PMMA
dose to clear.

Regarding shelf life, I've recently tested a batch that expired back in
2015. Patterning wise, it worked just as well as a batch that we bought at
the beginning of this year.

The choice between PMMA and ZEP, at least to me, boils down to application
requirements and budget. If your application requires very smooth edges, or
etching a little deeper without losing much resolution and you can afford a
few $1000 for 100 mL of resist, I'd work with ZEP and perhaps consider
using cold development to increase contrast. Otherwise, PMMA is a very good
resist in general, and you can still try cold development to improve
contrast and obtain very good results.

Cheers,
--
Gustavo de Oliveira Luiz, PhD
Applications/Research Specialist
nanoFAB, University of Alberta
+1 (780) 619-1463

On Thu, Apr 29, 2021 at 9:46 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From orad at reshef.ca  Thu Apr 29 14:00:46 2021
From: orad at reshef.ca (Orad Reshef)
Date: Thu, 29 Apr 2021 14:00:46 -0400
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <CAAP5ujjwhGSBs=3avnyi_17HJbiQsyxUgnwiN=VEQ54-vi3SAw@mail.gmail.com>

Dear Long,

It does not last forever, though it DOES last after the expiration date on
the label. I've heard of people decanting it on arrival and into smaller
portions and freezing those, but I've never done that myself.

I think the main benefit to ZEP when compared to PMMA is its etch
resistance to certain gases. The dose is sufficiently lower that if you
need to write large areas it could be worth it.

You can also certainly obtain smoother features than with PMMA too, but for
nearly all applications I'm not sure it's worth the price tag just for
that.

Orad Reshef, PhD

D?partement de physique | Department of Physics
Universit? d?Ottawa | University of Ottawa
boydnlo.ca | reshef.ca


On Thu, Apr 29, 2021 at 11:48 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From kjvowen at lnf.umich.edu  Thu Apr 29 14:11:43 2021
From: kjvowen at lnf.umich.edu (Kevin Owen)
Date: Thu, 29 Apr 2021 14:11:43 -0400
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <CANLyxV3bTsAqPWgnxaqKB5KeJevYnDYQLTjQ+y8z85XsUu-QDA@mail.gmail.com>

Chang,

I've found ZEP is way more stable when used as a plasma etch mask; I swear
PMMA etches if you look at it cross-eyed... I don't typically handle the
ZEP myself, but I am pretty sure the bottle we keep in the fridge (gotta
keep it in the fridge) has lasted quite a long time.

-Kevin

On Thu, Apr 29, 2021 at 11:48 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi Guys,
>
> I have no experience with ZEP, but the data sheet suggest a critical dose
> of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP
> and under what conditions is it worth the cost? Does it last forever in
> storage like PMMA?
>
> Thanks,
> Long
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
Kevin Owen
Lead Research Engineer
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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From agah at vt.edu  Thu Apr 29 15:50:53 2021
From: agah at vt.edu (Masoud Agah)
Date: Thu, 29 Apr 2021 15:50:53 -0400
Subject: [labnetwork] VNNI (Virginia Nanotechnology Networked
 Infrastructure) Coordinator Position Available
Message-ID: <CAH1UHX_=_fgWo9g1SgreqaR0Fe7rcWieLSvn5VTJ5FgXhAQC5w@mail.gmail.com>

Dear colleagues,

I appreciate if you distribute the following job description among MS/PHD
students with related expertise.

Website for applying:
https://careers.pageuppeople.com/968/cw/en-us/job/515923?lApplicationSubSourceID=11250

VNNI Coordinator

The Virginia Microelectronics Consortium (VMEC) has approved a proposal to
establish the Virginia Nanotechnology Networked Infrastructure (VNNI). VNNI
aims at creating a virtual bridge between all nanofabrication and
semiconductor processing cleanrooms at universities across the Commonwealth
of Virginia to provide seamless access to all these state-of-the-art
facilities for faculty, students and technology businesses. VNNI, when
fully established, will impact education and training, research and
innovation, and economic development. The two major components of VNNI are
the multi-institutional cloud-based core facility management system and Web
Portal. VNNI Web Portal will act as the gateway to the Commonwealth of
Virginia nanotechnology excellence and will provide the necessary resources
for access to high-tech material growth, nanofab, metrology infrastructure,
recipe bank, scholarship impact, student training impact, and all key
cleanroom documentations.

VNNI Coordinator will work under the direct supervision of Prof. Masoud
Agah, the VMEC Professor of Engineering at Virginia Tech and the Founding
Director of VNNI to establish the network and the web portal. VNNI
Coordinator will collaborate with VNNI Site Managers (cleanroom managers at
different universities), to implement unified VNNI multimedia
documentations for safety training, tool training, site specific policies,
fee structure, recipe repository, and reporting policies. The VNNI
Coordinator will play a key role in the design and execution of the Web
Gateway and in the execution of the cloud-based management system.

This position is for one year and depending on the availability of funds
can be extended for subsequent years. Funds are also available for the
travel of the VNNI Coordinator to the participating cleanroom sites and
attending at related meetings.



With best regards,
Masoud

Masoud Agah
Virginia Microelectronics Consortium (VMEC) Professor of Engineering
> The Bradley Dept. of Electrical and Computer Engineering
> Mechanical Engineering Department (Affiliate)
Member
> Faculty Senate and University Council
Virginia Tech
Voice: (540) 231-2653
VT MEMS Lab <http://www.agah-lab.org>
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From Jean.Lapointe at nrc-cnrc.gc.ca  Fri Apr 30 07:08:51 2021
From: Jean.Lapointe at nrc-cnrc.gc.ca (Lapointe, Jean)
Date: Fri, 30 Apr 2021 11:08:51 +0000
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
Message-ID: <adfe5885af0a407888e2c25479e18a96@DC01ZWH0016.Corp.nrc.gc.ca>

Hi Long,

It does last for years, about the same as PMMA as far as I can tell. We just finished a bottle with a 2016 expiry and saw no change after opening a new bottle.
It was stored at room T.
It can withstands plasma etching much better than PMMA but doesn?t have as good an adhesion to semiconductors. So it is not a good mask for wet etching semiconductors.
It works very well for lift-off.
It is expensive but can easily be diluted to get thinner films.
It can also be developed in N-amyl acetate; much safer than xylene and with the same contrast and dose-to-clear.
Jean

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chang, Long
Sent: April 29, 2021 10:29 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ZEP worth it?


***ATTENTION*** This email originated from outside of the NRC. ***ATTENTION*** Ce courriel provient de l'ext?rieur du CNRC
Hi Guys,

I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?

Thanks,
Long

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From Khaled.Mnaymneh at nrc-cnrc.gc.ca  Fri Apr 30 11:13:15 2021
From: Khaled.Mnaymneh at nrc-cnrc.gc.ca (Mnaymneh, Khaled)
Date: Fri, 30 Apr 2021 15:13:15 +0000
Subject: [labnetwork] =?windows-1252?q?Postdoctoral_Research_Fellow_Posit?=
 =?windows-1252?q?ion_=96_Integrated_Quantum_Optics_Fabrication?=
Message-ID: <d281d0e8ec964533819e28550f503ada@DC01ZWH0011.Corp.nrc.gc.ca>

Dear Colleagues,



The Department of Electronics (ELEC) at Carleton University, Ottawa, Canada, together with the National Research Council (NRC) of Canada, is accepting applications for a Postdoctoral Research Fellow position dedicated to the design and fabrication of integrated quantum optical devices in a silicon nitride platform. The applicant should have research experience in material science, nanofabrication and photonic devices, supported by a good publication record. Knowledge of quantum optics will be considered an asset. The successful applicant will work with our Carleton-NRC team to first develop the silicon nitride materials platform followed by the design, nanofabrication and characterization of devices such as frequency combs and cavity resonators for applications in quantum key distribution and the enhancement rates of non-classical light sources. This position is supported by an external grant and is for a period of 2 years.



Candidates must have completed a Ph.D. degree in Engineering Physics, Electrical Engineering, Physics or in a closely related field. The candidate should have direct research experience and skills in the following areas:



?         film deposition and growth of dielectrics and semiconductors, particularly in the area of low-pressure chemical vapor deposition (LPCVD)



?         cleanroom processing and fabrication of photonic devices such as dry and wet etching, lithography and layout techniques, etc.



?         material characterization techniques such as ellipsometry and film stress analysis



?         coupled-mode, optical waveguide and micro-resonator theory and design



The successful applicant will collaborate closely and conduct research with personnel at all levels within the Carleton and NRC groups. Additionally, the Fellow is expected to assist with conference and journal publications and reports. Excellent written and oral communication skills are essential to the position. Applications should include a CV, publication history and a cover letter clearly outlining how their part research and experience provide the necessary qualifications. Additionally, contact information for 3 references should be available upon request.



Carleton University is committed to EDI and fostering diversity within its community as a source of excellence, cultural enrichment, and social strength. We therefore welcome applications from underrepresented groups including, but not limited to: women; visible minorities; First Nations, Inuit and M?tis peoples; persons with disabilities; and persons of any sexual orientation, gender identity and/or expression. Carleton understands that career paths vary. Legitimate career interruptions will in no way prejudice the assessment process and their impact will be carefully considered.



Please direct enquires and applications to Professor Connor Kupchak (connor.kupchak at carleton.ca) and Dr. Khaled Mnaymneh (khaled.mnaymneh at nrc-cnrc.gc.ca<mailto:khaled.mnaymneh at nrc-cnrc.gc.ca>).



Best regards,

Khaled.

--
Dr Khaled Mnaymneh, PEng
Advanced Fabrication Technology
Emerging Technologies Division
National Research Council Canada
1200 Montreal Road, Bldg M50, IPF RM130
Ottawa, Ontario, Canada  K1A 0R6
Phone: (613) 949 1725
khaled.mnaymneh at nrc-cnrc.gc.ca


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From lvchang at Central.UH.EDU  Fri Apr 30 11:29:22 2021
From: lvchang at Central.UH.EDU (Chang, Long)
Date: Fri, 30 Apr 2021 15:29:22 +0000
Subject: [labnetwork] ZEP worth it?
In-Reply-To: <adfe5885af0a407888e2c25479e18a96@DC01ZWH0016.Corp.nrc.gc.ca>
References: <B3369266-C811-4FC8-9BFE-1EA656BE6ED4@cougarnet.uh.edu>
 <adfe5885af0a407888e2c25479e18a96@DC01ZWH0016.Corp.nrc.gc.ca>
Message-ID: <39D63588-A2F4-40B1-902F-1EAF5CBD5549@cougarnet.uh.edu>

Thanks Everyone. It?s clear what I should do.

Long

On Apr 30, 2021, at 6:08 AM, Lapointe, Jean <Jean.Lapointe at nrc-cnrc.gc.ca<mailto:Jean.Lapointe at nrc-cnrc.gc.ca>> wrote:

Hi Long,

It does last for years, about the same as PMMA as far as I can tell. We just finished a bottle with a 2016 expiry and saw no change after opening a new bottle.
It was stored at room T.
It can withstands plasma etching much better than PMMA but doesn?t have as good an adhesion to semiconductors. So it is not a good mask for wet etching semiconductors.
It works very well for lift-off.
It is expensive but can easily be diluted to get thinner films.
It can also be developed in N-amyl acetate; much safer than xylene and with the same contrast and dose-to-clear.
Jean

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chang, Long
Sent: April 29, 2021 10:29 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] ZEP worth it?


***ATTENTION*** This email originated from outside of the NRC. ***ATTENTION*** Ce courriel provient de l'ext?rieur du CNRC

Hi Guys,

I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?

Thanks,
Long

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