[labnetwork] LPCVD for college lab

[Morrison, Richard H., Jr]

How many tubes are you looking to replace?

Back in 2014 we researched LPCVD/Diffusion.

Expertech , makes single tube that you can stack good option
Centrotherm
Sandvik/MRL
Tempress
Thermco
Tylan

We chose Sandvik/MRL due to the fact that we had MRL tubes and had a good relationship with local sales/service. We bought a 3 stack for Oxide anneal and a 3 stack LPCVD both stacks has loaders, it was north of a $1M ,but right now prices are sky high and lead times are really out there so be prepared.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Bruce Tolleson
Sent: Tuesday, August 31, 2021 8:24 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] LPCVD for college lab

Dear Labnetwork,
  We are looking at replacing our older LPCVD system with a new system.  We have looked at several systems but most are production units. We are a research and undergraduate lab.  Footprint, cost and ease of operation are more of a priority than throughput.
Does anyone recommend a new system that would fit better?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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