[labnetwork] Liquid nitrogen and argon shortage

[Owain Clark]

First I've heard of it potentially but with the last 2 years in general I am not at all surprised.

Probably the best things to do are install N2 saving kits on all dry pumps that use a purge. These only turn on N2 when in process and then shut off after process finish + a timed setpoint. At 25-35slm 2 per typical dry pump for PECD/LPCVD savings it add up quickly. 

Then I would tune furnace n2 standby purges down, or mothball some furnaces as they are also a big consumer. 

O. 

-----Original Message-----
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Manish Keswani
Sent: 04 December 2021 01:24
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Liquid nitrogen and argon shortage

CAUTION: This e-mail originated outside the University of Southampton.

Hello everyone,

We just learned that there is a severe shortage of liquid nitrogen and argon in the US. Our entire lab will be impacted by this and we will need to evaluate consumption of these gases for different tools in our Nano fabrication center and make priority for tools usage based on that. Nitrogen is used as a purge gas for pumps and equipment and we will be looking into tools that consume significant amount of nitrogen and how to minimize their use or use them more efficiently.

If you have any thoughts or ideas that will help with this issue, please share them.

Thanks,
Manish

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