[labnetwork] Methods/tools for removing wafers/pieces from hot platen (hot plate or CVD system)

Bill Kiether wjkiethe at ncsu.edu
Mon Dec 6 10:58:20 EST 2021


Hello,

I'm asking for advice on the best tool set for safely removing wafers
(2"-6") or pieces (~ 1x1 cm) from the surface of a very hot (250 C- 350 C)
surface,  eg. a hot plate or CVD platen (say 10" diameter).   I have
found a vacuum wand tip (Pella) that can handle wafers at 250 C, but the
tube is too short (2").  Basically, I'm looking for vacuum wand tips for
high temp with at least an 8" tube length, or long pairs of tweezers easily
manipulated, or a set of thermal gloves that are dextrous enough to handle
tweezers.

Bill Kiether
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