[labnetwork] Methods/tools for removing wafers/pieces from hot platen (hot plate or CVD system)

[Ted Wangensteen]

U can simply use a STD small metal wafer holder that have flat area below
and u squeeze down to hold pieces or wafers. The trick is getting the pcs
off the hot plate. Again, simply using anything metal to push against one
side of the wafer or small piece to get it on edge , while u slip the wafer
holder underneath sample on the opposite side. Works for us at Aggiefab. We
do this every day on PECVD where Temp 350C.

Ted Wangensteen, Research Engineer, Texas A and M

On Monday, December 6, 2021, Bill Kiether <wjkiethe at ncsu.edu> wrote:

> Hello,
>
> I'm asking for advice on the best tool set for safely removing wafers
> (2"-6") or pieces (~ 1x1 cm) from the surface of a very hot (250 C- 350 C)
> surface,  eg. a hot plate or CVD platen (say 10" diameter).   I have
> found a vacuum wand tip (Pella) that can handle wafers at 250 C, but the
> tube is too short (2").  Basically, I'm looking for vacuum wand tips for
> high temp with at least an 8" tube length, or long pairs of tweezers easily
> manipulated, or a set of thermal gloves that are dextrous enough to handle
> tweezers.
>
> Bill Kiether
>
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