[labnetwork] pvd alliance concept

[Samuel Tavares da Silva Maraschin]

Hi everyone,

Recently we bought a PVD equipment from Alliance Concept model AC450. We have been experienced several problems: overheating (even melt an Alumminium target); DC Source only works up to 10% of its power, over that it generates arc; Target contamination even when the shutter is closed.

We are in touch with manufacture but they seem useless. I don't know if the machine has a problem or the equipment is just bad.

I would appreciate any help regarding these issues. Did anyone have same problems with this equipment?

Regards,
[http://projeto.unisinos.br/emm/2019/institucional/reposicionamento/ass-email-uni/400px-assinaEMAIL_v2_r1_c1.jpg]
Samuel Tavares da Silva Maraschin

[http://projeto.unisinos.br/emm/2019/institucional/reposicionamento/ass-email-uni/400px-assinaEMAIL_v2_r3_c1.jpg]
Auxiliar Técnico e de Pesquisa
Instituto Tecnológico de Semicondutores - itt CHIP


55 51 3591-1122 | Ramal 3184

[http://projeto.unisinos.br/emm/2019/institucional/reposicionamento/ass-email-uni/400px-assinaEMAIL_v2_r5_c1-correct.jpg]<http://www.unisinos.br/>





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