[labnetwork] Low-Stress silicon nitride via LPCVD capability

[Bill Kiether]

Hello all,

We have a customer that needs some specific capabilities for low stress
Silicon Nitride that we can't provide right now. Does anyone have a well
established process that can reach these values. The specs are:

4" wafers
Target thicknesses are 500A and 1500A,
with stress 200MPa +/- 50 and refractive index 2.15 +/- 0.05

Please send me your contact info and I will pass it along.
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