[labnetwork] On-line teaching reference for simple microfabrication
Flückiger Philippe
philippe.fluckiger at epfl.ch
Tue Feb 23 02:50:37 EST 2021
Hello James,
You might want to have a look to the EPFL online course Micro and Nanofabrication (MEMS):
- https://www.edx.org/course/micro-and-nanofabrication-mems
With my very best regards,
Philippe
Dr Philippe Flückiger
Director of Operations
http://cmi.epfl.ch/
Phone +41 21 693 6695
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Phillip Himmer
Sent: vendredi, 19 février 2021 19:55
To: James C. Sturm <sturm at princeton.edu>
Cc: labnetwork at mtl.mit.edu; Angela Hwang <aahwang at stanford.edu>
Subject: Re: [labnetwork] On-line teaching reference for simple microfabrication
Hi James
Stanford has been developing a nanofabrication training course called nano at stanford hosted on edX
https://www.edx.org/course/nano-stanford
If you find this of interest we would enjoy hearing back from you
Angela Hwang is the academic program manager for Sanford, you can contact her or myself with any questions
regards
Phillip
From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of James C. Sturm
Sent: Wednesday, February 17, 2021 10:17 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] On-line teaching reference for simple microfabrication
I'm looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.
i. How you can use photolithography to pattern a selective etch, or for liftoff,
ii. Some figures and qualitative description of some different thin film formation or deposition methods
iii. A few simple integrated processes to make a device of some sort.
I'm sure they are out there.
Thanks, Jim Sturm
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