[labnetwork] SUSS mask aligner consumable replacement

[Lewis,William]

Hi Nava,

I have replaced it.  It's very simple.  Remove the lamp.  There are 3 or 4 hex screws with a rectangle shaped washer that holds the mirror in place.  With the housing laying on it's side, remove the screws and washers.  Remove the mirror without touching the reflective aluminum surface (grab at the lamp feed through hole at the top) and remove it.

I would not purchase the mirror from Suss.  I have done so in the past and the aluminum flaked off within a year.  I purchased one from Class One Equipment and it has lasted several years.  It was also 1/4th of the cost from Suss.  Not sure who manufactured the mirror but probably Edmund Optics or similar vendor.


Bill Lewis
Research Service Center
University of Florida
1041 Center Dr
Gainesville, FL 32611



From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Nava Ariel-Sternberg
Sent: Monday, January 4, 2021 12:21 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] SUSS mask aligner consumable replacement

[External Email]

Hi all,
I hope you all had a good and relaxing break. Happy New Year!
I was hoping to see if anyone has ever replaced the ellipsoidal reflector in a SUSS mask aligner and can provide some assistance/tips. It shouldn't be too complicated but we want to make sure we do it right and don't miss anything that could potentially degrade the tool's performance.
The company is refusing to help us.
Any procedures/pointers would be greatly appreciated!
Nava

Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Labs
Columbia University
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600


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