[labnetwork] Dry pumps on ALD systems?

[Iulian Codreanu]

Mark's note reminded me that I also have a precursor foreline trap 
(Mass-Vac 355063).

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 7/9/2021 11:47 AM, April, Mark R. wrote:
>
> Hi Mac,
>
> I have an Ebara  A10S dry pump connected to the ALD system at Draper.  
> Prior to the dry pump, I have a multi-trap with a SS gauze filter and 
> an activated charcoal filter element.
>
> The dry pump has been in operation since the purchase of the ALD in 
> 2013 and we have not had any issues
>
> Thanks
>
> *Mark R. April*
> Senior Equipment Engineer
>
> Microfabrication Laboratory
> color_logo_small4/
> 555 Technology Square/
>
> /Cambridge, MA 02139/
>
> /mapril at draper.com <mailto:mapril at draper.com> /
>
> /O # 617-258-1613 C # 617-455-1596/
>
> /www.draper.com <http://www.draper.com/>/
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of 
> *Iulian Codreanu
> *Sent:* Friday, July 9, 2021 10:38 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] Dry pumps on ALD systems?
>
> Hi Mac,
>
> Our FlexAL came with an Adixen ADS 602P four years ago. At some point 
> the service engineer had to adjust a breaker inside the tool's power 
> box to allow the pump to draw more current at startup.
>
> Cheers,
>
> Iulian
>
>
> iulian Codreanu, Ph.D.
> Director, Nanofabrication Facility
> University of Delaware
> Harker ISE Lab, Room 163
> 221 Academy Street
> Newark, DE 19716
> 302-831-2784
> http://udnf.udel.edu  <http://udnf.udel.edu>
>
> On 7/8/2021 1:56 PM, Mac Hathaway wrote:
>
>     Hello Folks,
>
>     I'm wondering: how many of you have tried a dry pump on your ALD
>     system?
>
>     If you have, how did it work out?
>
>     If you could supply the following details, that would be great:
>
>     ALD system model;
>
>     Dry pump model and CFM;
>
>     How long it's been running that way;
>
>     Any issues you've run in to.
>
>     For background, we have long been working under the assumption
>     that, due to the reactive nature of the ALD precursors, and the
>     abrasive nature of the effluent, PFPE-base wet pumps are the way
>     to go.  However, we grow tired of dealing with pump oil and
>     associated issues, and we're using dry pumps successfully
>     elsewhere in the fab...
>
>     Thanks!
>
>     Mac
>
>     -- 
>
>     Mac Hathaway
>
>     Senior Process and Systems Engineer
>
>     Harvard Center for Nanoscale Systems
>
>     11 Oxford St.
>
>     Cambridge, MA  02138
>
>     617-495-9012
>
>
>
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