[labnetwork] TDMAS SiO2 recipe on a Beneq system

[Martin,Michael David]

Hi guys,
    Would anyone be willing to share process details for using TDMAS (Tris(dimethylamino)silane) on a Beneq ALD system?  Beneq tells me they do not have experience with that precursor.  Barring a recipe for the particular tool, it would be helpful to just have a general starting point such as precursor temperature, injection and purge times, substrate temperature, ozone flow rate, etc.  There seems to be a frustrating lack of detail in the literature and I have a customer that is chomping at the bit to get SiO2 down.  <https://www.sigmaaldrich.com/US/en/substance/trisdimethylaminosilane1613215112897?context=product>

Regards,
   Michael


Senior Process Engineer

Micro/Nano Technology Center

University of Louisville

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