[labnetwork] Dry pumps on ALD systems?

[DeRose, Guy A.]

Hello group,
Our Oxford FlexAL ALD system was purchased new in 2019 with an Adixen A604H dry pump.  It has worked very well since then – just make sure you provide the specified amount of cooling water from your facility / chiller. Our Oxford PECVD has an ADS 602P dry pump, and those run very well also.  We have had that PECVD in operation since 2005, and we have a spare ADS 602P, which we swap out for rebuilds roughly on an annual basis.
FYI,
Guy
Guy DeRose, PhD, Member of the Professional Staff
Associate Director of Technical Operations, Kavli Nanoscience Institute
California Institute of Technology, Pasadena, CA USA
(O) 1-626-395-3423 (M) 1-626-676-8529
http://kni.caltech.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of "Zuzanna A. Lewicka" <zlewicka at princeton.edu>
Date: Monday, July 12, 2021 at 8:40 AM
To: "April, Mark R." <mapril at draper.com>, "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Dry pumps on ALD systems?

Hello,
We have recently upgraded our thermal ALD (Savannah 100) unit and installed Edwards dry scroll pump nxds15ic (8.8 CFM) with heated ALD trap provided by Veeco. So far, we have run about 25,000 cycles with no issues.
Best regards,
Zuzanna Lewicka
Princeton University


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Friday, July 9, 2021 11:54 AM
To: April, Mark R. <mapril at draper.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Dry pumps on ALD systems?

Mark's note reminded me that I also have a precursor foreline trap (Mass-Vac 355063).


iulian Codreanu, Ph.D.

Director, Nanofabrication Facility

University of Delaware

Harker ISE Lab, Room 163

221 Academy Street

Newark, DE 19716

302-831-2784

http://udnf.udel.edu
On 7/9/2021 11:47 AM, April, Mark R. wrote:
Hi Mac,
I have an Ebara  A10S dry pump connected to the ALD system at Draper.  Prior to the dry pump, I have a multi-trap with a SS gauze filter and an activated charcoal filter element.
The dry pump has been in operation since the purchase of the ALD in 2013 and we have not had any issues
Thanks

Mark R. April
Senior  Equipment Engineer
Microfabrication Laboratory
[color_logo_small4]
555 Technology Square
Cambridge, MA  02139
mapril at draper.com<mailto:mapril at draper.com>
O # 617-258-1613 C # 617-455-1596
www.draper.com<http://www.draper.com/>



From: labnetwork <labnetwork-bounces at mtl.mit.edu><mailto:labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Friday, July 9, 2021 10:38 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Dry pumps on ALD systems?

Hi Mac,

Our FlexAL came with an Adixen ADS 602P four years ago. At some point the service engineer had to adjust a breaker inside the tool's power box to allow the pump to draw more current at startup.

Cheers,

Iulian



iulian Codreanu, Ph.D.

Director, Nanofabrication Facility

University of Delaware

Harker ISE Lab, Room 163

221 Academy Street

Newark, DE 19716

302-831-2784

http://udnf.udel.edu
On 7/8/2021 1:56 PM, Mac Hathaway wrote:
Hello Folks,

I'm wondering: how many of you have tried a dry pump on your ALD system?

If you have, how did it work out?

If you could supply the following details, that would be great:

ALD system model;

Dry pump model and CFM;

How long it's been running that way;

Any issues you've run in to.

For background, we have long been working under the assumption that, due to the reactive nature of the ALD precursors, and the abrasive nature of the effluent, PFPE-base wet pumps are the way to go.  However, we grow tired of dealing with pump oil and associated issues, and we're using dry pumps successfully elsewhere in the fab...

Thanks!

Mac

--

Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA  02138
617-495-9012




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