[labnetwork] Branson S3100 plasma asher repair

James Mitchell jtmitch5 at ncsu.edu
Thu Jun 17 13:33:13 EDT 2021


Try Class One.

Jim

On Thu, Jun 17, 2021 at 1:23 PM Kevin M McPeak <kmcpeak at lsu.edu> wrote:

> Dear Colleagues,
>
> We have an old Branson S3100 plasma asher in the LSU nanofab. We believe
> the matching network is in need of repair. The power supply is stable when
> connected to a dummy load but gives unstable power output when connected to
> the matching network/chamber.
>
> Does anyone on the list know of a reliable 3rd party that works on these
> old tools? Thanks!
>
> Regards,
> Kevin
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
*James Mitchell*
*Specialty Trades Technician*
*Dept. of Electrical and Computer Engineering*
*NCSU Nanofabrication Facility*
*MRC RM243A **Box 7911*
*2410 Campus Shore Dr., Raleigh, NC 27606*
*jtmitch5 at ncsu.edu* <jtmitch5 at ncsu.edu>
*Desk: 919-515-5394*
*Cell: 919-717-7325*
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210617/12015bc1/attachment.html>


More information about the labnetwork mailing list