From info at fabsurplus.com Mon Mar 1 05:50:43 2021 From: info at fabsurplus.com (Stephen Howe) Date: Mon, 01 Mar 2021 11:50:43 +0100 Subject: [labnetwork] cleaning procedure for chillers In-Reply-To: References:

Message-ID: Dear All, To avoid algae growth, it is very important not to use transparent chiller hoses. Also, make sure the lid of the chiller is closed, to stop light from getting in.It is the presence of light which encourages the growth of organics in your chiller water. I have encountered people who had to scrap several really expensive RTP tools, due to the cooling circuits were blocked with organic gunk. - Yours Sincerely, SDI Fabsurplus LLC Stephen Howe Company Owner email: info at fabsurplus.com Mobile: +1 830-388-1071 Skype: stephencshowe WWW.FABSURPLUS.COM Linkedin: https://www.linkedin.com/company/sdi-fabsurplus Twitter: https://twitter.com/fabsurplus Instagram: www.instagram.com/fabsurplus Facebook:www.facebook.com/fabsurplus Important Notice The information contained in this email is confidential. If you are not the intended recipient,you must not disclose or use the information in this email in any way.If you received it in error, please tell us immediately by return email and delete this message.SDI-Fabsurplus, LLC does not guarantee the integrity of any emails or attached files. It is also not responsible for any changes made to them by any other person. Fraud Alert - The strategically important semiconductor equipment sector is currently under attack by fraudsters.Many false and mis- spelled versions of common websites are being registered for use in"Business E-mail Compromise" schemes. False companies have been set up in all parts of the world, including the USA, to do wire fraud. Avoid e-mail fraud by defining an I.T. security policy and carefully monitoring any bank transfers for false information.Check any e-mails sent to you are legitimate by looking at the e-mail headers, and scan any attachments for viruses before opening them.On Sat, 2021-02-27 at 09:34 -0800, N Shane Patrick wrote: > We have a haskris chiller on a JEOL SEM and the agreed procedure is > to add a bottle of drug store peroxide to tank, let it run normally, > no isolation, overnight or so, then drain, flush, and fill and return > to service. Algae is usually our biggest issue, and this is more than > enough to handle it. I suspect most anything will hold up fine to the > dilute peroxide solution. I have other chillers and systems where CLR > has been used for other types of clean out. > -Shane > > Sent from my iPhone > > On Feb 27, 2021, at 9:10 AM, James Mitchell > > wrote: > > > > ?I have used CLR to clean out cooling lines but you would want to > > flush it out afterwards. Mix the CLR with water and drain out after > > cycling. There are biocides you can add to cooling water to keep it > > clean. > > Jim > > On Fri, Feb 26, 2021, 3:42 PM Saba Sadeghi < > > saba.sadeghi at uwaterloo.ca> wrote: > > > Dear colleagues, > > > > > > > > > > > > We have chillers from Haskris for cooling our MBE deposition > > > system and also XRD system; I was wondering if you have a > > > procedure that you recommend for cleaning the chillers' water. > > > According to Haskris you can use hydrogen peroxide to clean the > > > water should there be any biological growth in the chiller. For > > > this, do I need to isolate the chiller from the system or can > > > hydrogen peroxide be run through the entire system? > > > > > > > > > > > > I appreciate your input. > > > > > > > > > > > > Best, > > > > > > Saba > > > > > > -- > > > > > > Saba Sadeghi, PhD > > > > > > Quantum Devices Fabrication Scientist > > > > > > Institute for Quantum Computing, University of Waterloo > > > > > > Email: saba.sadeghi at uwaterloo.ca > > > > > > > > > > > > _______________________________________________ > > > > > > labnetwork mailing list > > > > > > labnetwork at mtl.mit.edu > > > > > > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________labnetwork mailing > listlabnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From saba.sadeghi at uwaterloo.ca Mon Mar 1 12:52:10 2021 From: saba.sadeghi at uwaterloo.ca (Saba Sadeghi) Date: Mon, 1 Mar 2021 17:52:10 +0000 Subject: [labnetwork] cleaning procedure for chillers In-Reply-To: References:

, Message-ID: <3fce3fdea028431192719eda5cb46d2b@uwaterloo.ca> Dear all, Thank you for your recommendations. They were all very helpful. Best, Saba ________________________________________ From: labnetwork-bounces at mtl.mit.edu on behalf of Stephen Howe Sent: March 1, 2021 5:50:43 AM To: N Shane Patrick; James Mitchell Cc: Fab Network Subject: Re: [labnetwork] cleaning procedure for chillers Dear All, To avoid algae growth, it is very important not to use transparent chiller hoses. Also, make sure the lid of the chiller is closed, to stop light from getting in. It is the presence of light which encourages the growth of organics in your chiller water. I have encountered people who had to scrap several really expensive RTP tools, due to the cooling circuits were blocked with organic gunk. - [SDI Fabsurplus 20 years] Yours Sincerely, SDI Fabsurplus LLC Stephen Howe Company Owner email: info at fabsurplus.com Mobile: +1 830-388-1071 Skype: stephencshowe WWW.FABSURPLUS.COM Linkedin: https://www.linkedin.com/company/sdi-fabsurplus Twitter: https://twitter.com/fabsurplus Instagram: www.instagram.com/fabsurplus Facebook:www.facebook.com/fabsurplus Important Notice The information contained in this email is confidential. If you are not the intended recipient,you must not disclose or use the information in this email in any way.If you received it in error, please tell us immediately by return email and delete this message.SDI-Fabsurplus, LLC does not guarantee the integrity of any emails or attached files. It is also not responsible for any changes made to them by any other person. Fraud Alert - The strategically important semiconductor equipment sector is currently under attack by fraudsters.Many false and mis-spelled versions of common websites are being registered for use in"Business E-mail Compromise" schemes. False companies have been set up in all parts of the world, including the USA, to do wire fraud. Avoid e-mail fraud by defining an I.T. security policy and carefully monitoring any bank transfers for false information.Check any e-mails sent to you are legitimate by looking at the e-mail headers, and scan any attachments for viruses before opening them. On Sat, 2021-02-27 at 09:34 -0800, N Shane Patrick wrote: We have a haskris chiller on a JEOL SEM and the agreed procedure is to add a bottle of drug store peroxide to tank, let it run normally, no isolation, overnight or so, then drain, flush, and fill and return to service. Algae is usually our biggest issue, and this is more than enough to handle it. I suspect most anything will hold up fine to the dilute peroxide solution. I have other chillers and systems where CLR has been used for other types of clean out. -Shane Sent from my iPhone On Feb 27, 2021, at 9:10 AM, James Mitchell wrote: ? I have used CLR to clean out cooling lines but you would want to flush it out afterwards. Mix the CLR with water and drain out after cycling. There are biocides you can add to cooling water to keep it clean. Jim On Fri, Feb 26, 2021, 3:42 PM Saba Sadeghi > wrote: Dear colleagues, We have chillers from Haskris for cooling our MBE deposition system and also XRD system; I was wondering if you have a procedure that you recommend for cleaning the chillers' water. According to Haskris you can use hydrogen peroxide to clean the water should there be any biological growth in the chiller. For this, do I need to isolate the chiller from the system or can hydrogen peroxide be run through the entire system? I appreciate your input. Best, Saba -- Saba Sadeghi, PhD Quantum Devices Fabrication Scientist Institute for Quantum Computing, University of Waterloo Email: saba.sadeghi at uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From peterggordon at gmail.com Wed Mar 3 12:37:04 2021 From: peterggordon at gmail.com (Peter Gordon) Date: Wed, 3 Mar 2021 12:37:04 -0500 Subject: [labnetwork] swapping TGA balances Message-ID: Hi all, Does anyone have any experience replacing the balance on a TA Instruments Q500 TGA system? I have one that gets grumpier every year inside a drybox, and one in air that I'd like to cannibalize for parts (specifically the balance). Has anyone had success with this approach? Cheers, Peter -- Peter G. Gordon, PhD CU NanoFab Facility Administrator Department of Chemistry Carleton University (613) 520-2600 ext.7561 https://carleton.ca/fanssi/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From m.rampant at prometheuscomputing.com Fri Mar 5 07:38:01 2021 From: m.rampant at prometheuscomputing.com (Mathieu Rampant) Date: Fri, 5 Mar 2021 07:38:01 -0500 Subject: [labnetwork] NEMO Virtual Conference 2021 Message-ID: Dear all, Since the UGIM is being postponed to 2022, Prometheus Computing is considering hosting a NEMO Virtual Conference on June 8th 2021 (exact time TBD). We are a small business contracting company, and have been leading the development of NEMO at NIST for the past 2-3 years. The actual program of the event is still getting finalized, but so far: - NIST NanoFab - NIST Neutron Research Lab - Princeton University - Penn State University have all confirmed their participation and will give an update on their version of NEMO. If you are interested, please let us know by filling this form: https://forms.gle/kogtamTMTkjvWapJ6 If you would like to give a talk or present, please contact us at nemo at prometheuscomputing.com Your response will help us determine if there is enough interest and drive the topics of discussion. Note: This is a free (non commercial, non promotional) community event. Feel free to forward this to anybody who might be interested! Thank you! -- Mathieu Rampant Software Architect NEMO Project Lead Prometheus Computing LLC -------------- next part -------------- An HTML attachment was scrubbed... URL: From gheorghe.iordache at kaust.edu.sa Mon Mar 8 09:31:11 2021 From: gheorghe.iordache at kaust.edu.sa (Gheorghe Iordache) Date: Mon, 8 Mar 2021 14:31:11 +0000 Subject: [labnetwork] clean room garments laundry vendors In-Reply-To: <000001d70aaf$d880e740$8982b5c0$@columbia.edu> References: <000001d70aaf$d880e740$8982b5c0$@columbia.edu> Message-ID: <1cd7f7619e1f4f6e843d0e9ce5ef9367@SCBMCHP02.kaustcloud.com> Dear Nava, This issue is indeed extremely important to minimize the contamination of cleanroom. Long time ago, when searching for solutions, I realized there are PROs and CONs when using a service provider and this of course if this is available reasonably close to your area. I visited one of the sites of one of the biggest laundry service providers in Europe which, apart from dry cleaning and laundering, would also own and rent uniforms for different areas of activity from hotel staff to pilots. Even the service for cleanroom garments was provided at some other location some 1000 km away, they walk me thorough all their process onsite from producing the soft water for laundering to barcode tracking of every single piece of their inventory and microscopically checking the actual status of the fabric. From here, one of the requirements or advice for in-house cleaning the cleanroom garments: use water with low content of minerals. Otherwise the salts will deposit in between the fabric fibers making the fabric crispier and leading to particulate and more rapidly damaging the fabric. The same effect, at a lower extent though, is observed when drying after laundering. Some requirements: * Perform all process in clean environment equal or better than cleanroom cleanliness class (ISO 5 or above) * Use of filtered and soft water * Use of appropriate detergent * Avoid drying PROs for using a laundering service, if available: * Peace of mind. You don't need your staff to handle this * Professional procedures (if?) CONs: * Service much more expensive * Need at least 4 full sets of garments (one in the cleanroom, one at the laundry, two traveling in between the two sites) * You don't have full control over the process (environment cleanliness, chemicals used, handling, etc.) * More packaging needed, so, not environment friendly Depending on the number of cleanroom garments and the resources (people, time, money) you are willing to allocate to this, I would go for in-house laundering in a small dedicated area in the chase, without drying cycle, just left hanging over the weekend to dry. I have applied this in the past in another cleanroom and after one year and half we did not notice any microscopic deterioration of the polyester fabric for the coveralls washed weekly. I hope this helps. Kind regards, ======================= Gheorghe IORDACHE, PhD Physics, MBA Director, Nanofabrication Core Lab KAUST King Abdullah University of Science and Technology Al Khawarizmi Building 1 East, Level 3, Office 3415 Thuwal 23955-6900 Kingdom of Saudi Arabia Office: +966 (0)12 8080447 Mobile: +966 (0)540381154 Email: gheorghe.iordache at kaust.edu.sa Linkedin: https://www.linkedin.com/in/gheorghe-iordache-phd-physics-mba/ Follow the Core Labs: corelabs.kaust.edu.sa; https://twitter.com/kaust_corelabs; https://www.instagram.com/kaustcorelabs/; https://www.linkedin.com/showcase/12179999 Visit the Core Labs: https://corelabs.kaust.edu.sa/visitor-information ================ Please note that the weekend in Saudi Arabia is Friday and Saturday ======== What you do for yourself vanishes once you're gone. What you do for others stays for others as your legacy. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nava Ariel-Sternberg Sent: 24 February 2021 16:21 To: labnetwork at mtl.mit.edu Subject: [labnetwork] clean room garments laundry vendors Hi all, I know this topic was discussed in the past but I feel like the options in this area are very limited and the vendors are taking advantage of that. What is your solution for clean room garments laundry? Are you renting and sending them out to laundry? If so, could you please let me know which vendor you're using? You can respond directly to me if you don't feel comfortable sharing your feedback with everyone. Thanks, Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Mon Mar 8 17:15:33 2021 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Mon, 8 Mar 2021 22:15:33 +0000 Subject: [labnetwork] VESDA Testing in Cleanrooms Message-ID: Hi All, I was hoping this community might be able to provide some insights on testing of VESDA systems in cleanrooms. In particular, I am interested in how those of you with VESDA units handle the "smoke" test. It is my understanding that "smoke" testing typically involves the spraying of an aerosol containing hydrocarbons, such as propane, butane, ethanol, etc. at the end of the detector piping or through a test port. If your test ports are located within the confines of the clean space, how do you handle this aspect of the testing? Do you allow the use of these hydrocarbon based materials, or is there an acceptable alternative? In our particular case, the VESDA units are mounted at the intake to our recirculating air handlers, so there is concern that any overspray not pulled into the VESDA piping would end up going into the recirc unit. Given the limited frequency of the testing, the limited quantity of spray required, and the amount of air flow in the lab, perhaps we are overthinking this and dilution is the solution. Any feedback would be much appreciated. Best Regards, Matt -- Matthew T. Moneck, Ph.D Executive Manager, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Tue Mar 9 07:29:51 2021 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Tue, 9 Mar 2021 12:29:51 +0000 Subject: [labnetwork] VESDA Testing in Cleanrooms In-Reply-To: References: Message-ID: Hi, When we do that kind of testing at Draper we use DI water vapor very clean and no chance of contamination. I purchased my system from a company called Applied Physics, Inc. Bill To: PO Box 549, Niwot, CO 80544 USA Ship To: 3800 Pike Road, Unit 16-204, Longmont, CO 80503 USA www.AppliedPhysicsUSA.com Tel: 303-651-0395 It is very effective and easy to use. Data sheet is attached Rick Richard Morrison PMTS Draper Laboratory 555 Technology Square Cambridge Ma 02139 Office: 617-258-3420 Cell: 508-930-3461 From: labnetwork-bounces at mtl.mit.edu On Behalf Of Matthew Moneck Sent: Monday, March 8, 2021 5:16 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] VESDA Testing in Cleanrooms Hi All, I was hoping this community might be able to provide some insights on testing of VESDA systems in cleanrooms. In particular, I am interested in how those of you with VESDA units handle the "smoke" test. It is my understanding that "smoke" testing typically involves the spraying of an aerosol containing hydrocarbons, such as propane, butane, ethanol, etc. at the end of the detector piping or through a test port. If your test ports are located within the confines of the clean space, how do you handle this aspect of the testing? Do you allow the use of these hydrocarbon based materials, or is there an acceptable alternative? In our particular case, the VESDA units are mounted at the intake to our recirculating air handlers, so there is concern that any overspray not pulled into the VESDA piping would end up going into the recirc unit. Given the limited frequency of the testing, the limited quantity of spray required, and the amount of air flow in the lab, perhaps we are overthinking this and dilution is the solution. Any feedback would be much appreciated. Best Regards, Matt -- Matthew T. Moneck, Ph.D Executive Manager, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 0_CleanroomFogger_DIWater_ProductSheet_1Mar14.pdf Type: application/pdf Size: 217994 bytes Desc: 0_CleanroomFogger_DIWater_ProductSheet_1Mar14.pdf URL: From michael.hume at ualberta.ca Tue Mar 9 14:11:47 2021 From: michael.hume at ualberta.ca (Michael Hume) Date: Tue, 9 Mar 2021 12:11:47 -0700 Subject: [labnetwork] Looking for MKS/ENI RF Generator Message-ID: Hi All, We've had a fault with one of our RF generators and have currently been quoted a 10 week estimate from the repair shop. We'd like to cut this time down. I'm wondering if a) anyone has a spare generator they are willing to part with (with a possible trade deal once ours is repaired?) b) anyone can recommend a good vendor of refurbished generators c) anyone can recommend a good RF generator service shop (in Canada?) Generator details are: MKS/ENI Model No: B-3013 Part No: Spectrum 3013-01 Serial No: C195 ENI Rev: 1 Date: 02/14/07 Output: 3000W Many thanks for any and all assistance, Cheers, -- Michael Hume Operations Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Ph: 780-953-5081 www.nanofab.ualberta.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From jtmitch5 at ncsu.edu Tue Mar 9 16:19:03 2021 From: jtmitch5 at ncsu.edu (James Mitchell) Date: Tue, 9 Mar 2021 16:19:03 -0500 Subject: [labnetwork] Logic Sequencer Message-ID: Anyone have one of these laying around that you don't need? [image: 20210309_145531.jpg] -- *James Mitchell* *Specialty Trades Technician* *Dept. of Electrical and Computer Engineering* *NCSU Nanofabrication Facility* *MRC RM243A **Box 7911* *2410 Campus Shore Dr., Raleigh, NC 27606* *jtmitch5 at ncsu.edu* *Desk: 919-515-5394* *Cell: 919-717-7325* -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 20210309_145531.jpg Type: image/jpeg Size: 3105815 bytes Desc: not available URL: From jtmitch5 at ncsu.edu Tue Mar 9 16:22:12 2021 From: jtmitch5 at ncsu.edu (James Mitchell) Date: Tue, 9 Mar 2021 16:22:12 -0500 Subject: [labnetwork] Looking for MKS/ENI RF Generator In-Reply-To: References: Message-ID: Have contacted MKS? Did find one on EBAY. https://www.ebay.com/c/1723818665 Jim On Tue, Mar 9, 2021 at 3:53 PM Michael Hume wrote: > Hi All, > > We've had a fault with one of our RF generators and have currently been > quoted a 10 week estimate from the repair shop. We'd like to cut this time > down. > > I'm wondering if > > a) anyone has a spare generator they are willing to part with (with a > possible trade deal once ours is repaired?) > b) anyone can recommend a good vendor of refurbished generators > c) anyone can recommend a good RF generator service shop (in Canada?) > > Generator details are: > MKS/ENI Model No: B-3013 > Part No: Spectrum 3013-01 > Serial No: C195 ENI Rev: 1 > Date: 02/14/07 > Output: 3000W > > Many thanks for any and all assistance, > Cheers, > > -- > > Michael Hume > > Operations Manager > > University of Alberta - nanoFAB > > W1-060 ECERF Building > > 9107 - 116 Street > > Edmonton, Alberta > > > Ph: 780-953-5081 > www.nanofab.ualberta.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- *James Mitchell* *Specialty Trades Technician* *Dept. of Electrical and Computer Engineering* *NCSU Nanofabrication Facility* *MRC RM243A **Box 7911* *2410 Campus Shore Dr., Raleigh, NC 27606* *jtmitch5 at ncsu.edu* *Desk: 919-515-5394* *Cell: 919-717-7325* -------------- next part -------------- An HTML attachment was scrubbed... URL: From kjvowen at lnf.umich.edu Tue Mar 9 16:25:03 2021 From: kjvowen at lnf.umich.edu (Kevin Owen) Date: Tue, 9 Mar 2021 16:25:03 -0500 Subject: [labnetwork] Looking for MKS/ENI RF Generator In-Reply-To: References: Message-ID: Michael, I just had a B-3013 repaired in January in roughly a week (paid the exorbitant expedite fee), directly through MKS (Rochester, NY; not sure if they have a Canadian repair shop). They do say turnaround depends on part availability, though, and I think I was fortunate that the failed part wasn't hard to get. Unfortunately, we only have one 3000W unit, on a tool, so I can't offer it even as a trade :-/. You could also check if MKS has any refurbished ones available. ENICustomerServiceSupport at mksinst.com (or if they don't reply, you can also try PS.TechSupport at mksinst.com). The other RF repair vendor I've worked with before is RF Global Solutions, but they're even farther away, across the pond. They do have a few refurbished 3013's listed on their website right now, too: https://www.rfglobalsolutions.co.uk/product-list/. -Kevin On Tue, Mar 9, 2021 at 3:54 PM Michael Hume wrote: > Hi All, > > We've had a fault with one of our RF generators and have currently been > quoted a 10 week estimate from the repair shop. We'd like to cut this time > down. > > I'm wondering if > > a) anyone has a spare generator they are willing to part with (with a > possible trade deal once ours is repaired?) > b) anyone can recommend a good vendor of refurbished generators > c) anyone can recommend a good RF generator service shop (in Canada?) > > Generator details are: > MKS/ENI Model No: B-3013 > Part No: Spectrum 3013-01 > Serial No: C195 ENI Rev: 1 > Date: 02/14/07 > Output: 3000W > > Many thanks for any and all assistance, > Cheers, > > -- > > Michael Hume > > Operations Manager > > University of Alberta - nanoFAB > > W1-060 ECERF Building > > 9107 - 116 Street > > Edmonton, Alberta > > > Ph: 780-953-5081 > www.nanofab.ualberta.ca > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Kevin Owen Lead Research Engineer Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Tue Mar 9 17:13:23 2021 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Tue, 9 Mar 2021 22:13:23 +0000 Subject: [labnetwork] Looking for MKS/ENI RF Generator In-Reply-To: References: Message-ID: Michael, Sorry to say that the company that bought ENI has extraordinary lead times. These generators are famous for failing power FET?s. You might want to try RF 7 (spelled VII) in new Jersey. The owner was trained by Lenny West who was the god of RF thunder back in the day. He might not work on this vintage of generators but he has been the best resource for RF related issues for years. Best of luck, Steve Paolini Equipment Dood Harvard University Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu From: labnetwork-bounces at mtl.mit.edu On Behalf Of Michael Hume Sent: Tuesday, March 09, 2021 2:12 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Looking for MKS/ENI RF Generator Hi All, We've had a fault with one of our RF generators and have currently been quoted a 10 week estimate from the repair shop. We'd like to cut this time down. I'm wondering if a) anyone has a spare generator they are willing to part with (with a possible trade deal once ours is repaired?) b) anyone can recommend a good vendor of refurbished generators c) anyone can recommend a good RF generator service shop (in Canada?) Generator details are: MKS/ENI Model No: B-3013 Part No: Spectrum 3013-01 Serial No: C195 ENI Rev: 1 Date: 02/14/07 Output: 3000W Many thanks for any and all assistance, Cheers, -- Michael Hume Operations Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Ph: 780-953-5081 www.nanofab.ualberta.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From Aju.Jugessur at Colorado.EDU Tue Mar 9 17:22:52 2021 From: Aju.Jugessur at Colorado.EDU (Aju Jugessur) Date: Tue, 9 Mar 2021 22:22:52 +0000 Subject: [labnetwork] Job Opportunity: Cleanroom staff Message-ID: <58B31415-40F1-4AF4-8F9A-902EC1D31778@colorado.edu> Hi all, Please see a job opportunity below in our facilities. https://jobs.colorado.edu/jobs/JobDetail/?jobId=28790&emailCampaignId=209 If you know of any great candidates for this opportunity, please share it with them. Thanks, Regards, Aju Aju Jugessur Ph.D. IEEE Sr. Member Director, Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) Member of Engineering Staff Council (ESC) University of Colorado Boulder | College of Engineering & Applied Science 4001 Discovery Drive, N360G SEEL | Boulder, CO 80303| P: 303.735.5019| F: 303.492.2199 E-mail: aju.jugessur at colorado.edu Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur www.colorado.edu/facility/cosinc [signature_64749106] Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever (CliftonStrengths) -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 6294 bytes Desc: image001.png URL: From christophe.clement at polymtl.ca Wed Mar 10 14:57:22 2021 From: christophe.clement at polymtl.ca (=?iso-8859-1?Q?Christophe_Cl=E9ment?=) Date: Wed, 10 Mar 2021 14:57:22 -0500 (EST) Subject: [labnetwork] NEMO installation Message-ID: <053001d715e7$9669e530$c33daf90$@polymtl.ca> Hello to all We want, in the short term, migrate our cleanroom management system from Coral to NEMO. Our IT department asks us on which platform to install NEMO. Among those who have NEMO as a system, have you chosen a Linux server (is there a particular distribution we need to use?) or Windows (using Docker for example)? Thanks for your answers! Christophe Christophe Cl?ment Technicien laboratoire Laboratoire de microfabrication (LMF) Groupe des Couches Minces (GCM) www.gcmlab.ca Ecole Polytechnique de Montr?al www.polymtl.ca D?partement de g?nie physique * 2900 Boulevard Edouard Monpetit Pavillon JAB Campus de l'Universit? de Montr?al Montr?al (Qu?bec) H3T 1J4 8 christophe.clement at polymtl.ca ( 514 340 4711 #2417 Fax : 514 340 5195 -------------- next part -------------- An HTML attachment was scrubbed... URL: From dbarth at princeton.edu Wed Mar 10 16:22:27 2021 From: dbarth at princeton.edu (David S Barth) Date: Wed, 10 Mar 2021 21:22:27 +0000 Subject: [labnetwork] NEMO installation In-Reply-To: <053001d715e7$9669e530$c33daf90$@polymtl.ca> References: <053001d715e7$9669e530$c33daf90$@polymtl.ca> Message-ID: Hi Christophe, At Princeton, we are running NEMO on Windows Server 2019. I can't say I particularly recommend this. It's designed to run on Linux, and in order to run on Windows, you also need to run it in a Windows docker container. I had put in significant effort to get this to work. If you do decide to go this route, I'm happy to discuss the details of what was required, but barring some other reason to use Windows, you will probably have an easier time using your preferred flavor of Linux, NGINX, and Docker. Best, David Barth PRISM Cleanroom Princeton University dbarth at princeton.edu From: labnetwork-bounces at mtl.mit.edu On Behalf Of Christophe Cl?ment Sent: Wednesday, March 10, 2021 2:57 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] NEMO installation Hello to all We want, in the short term, migrate our cleanroom management system from Coral to NEMO. Our IT department asks us on which platform to install NEMO. Among those who have NEMO as a system, have you chosen a Linux server (is there a particular distribution we need to use?) or Windows (using Docker for example)? Thanks for your answers! Christophe Christophe Cl?ment Technicien laboratoire Laboratoire de microfabrication (LMF) Groupe des Couches Minces (GCM) www.gcmlab.ca Ecole Polytechnique de Montr?al www.polymtl.ca D?partement de g?nie physique * 2900 Boulevard Edouard Monpetit Pavillon JAB Campus de l'Universit? de Montr?al Montr?al (Qu?bec) H3T 1J4 * christophe.clement at polymtl.ca * 514 340 4711 #2417 Fax : 514 340 5195 -------------- next part -------------- An HTML attachment was scrubbed... URL: From m.rampant at prometheuscomputing.com Wed Mar 10 16:37:34 2021 From: m.rampant at prometheuscomputing.com (Mathieu Rampant) Date: Wed, 10 Mar 2021 16:37:34 -0500 Subject: [labnetwork] NEMO installation In-Reply-To: <053001d715e7$9669e530$c33daf90$@polymtl.ca> References: <053001d715e7$9669e530$c33daf90$@polymtl.ca> Message-ID: Hi Christophe, A linux server is definitely recommended (I would even say required, Windows doesn't play as nice with docker). NEMO is currently in production at NIST and a few other places on Linux servers running Centos7 or RHEL7 so I would recommend those. If you have more NEMO related specific questions, feel free to post on the NEMO mailing list: https://groups.google.com/a/list.nist.gov/d/forum/nemo Thanks, -- Mathieu Rampant Software Architect NEMO Project Lead Prometheus Computing LLC -------------- next part -------------- An HTML attachment was scrubbed... URL: From bkarmstr at umich.edu Mon Mar 15 14:06:28 2021 From: bkarmstr at umich.edu (Brian Armstrong) Date: Mon, 15 Mar 2021 14:06:28 -0400 Subject: [labnetwork] NanoSpec 6100 service/repair vendor recommendations Message-ID: <00da01d719c5$ec31b010$c4951030$@umich.edu> Hi all, Does anyone have recommendations for vendors that can provide service/repair at your site for Nanometrics NanoSpec 6100 thin film measurement systems? We're trying to decide if it's worth continuing with our current system or if the time has come to purchase a new system that is supported by the vendor. Our most recent experience with a repair vendor was rather disappointing in part due to shipping our system to the vendor site. Old electronics do not travel well! Best Regards, Brian Armstrong Lead Engineer in Research Lurie Nanofabrication Facility (LNF) University of Michigan -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Mon Mar 15 16:20:54 2021 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Mon, 15 Mar 2021 20:20:54 +0000 Subject: [labnetwork] NanoSpec 6100 service/repair vendor recommendations In-Reply-To: <00da01d719c5$ec31b010$c4951030$@umich.edu> References: <00da01d719c5$ec31b010$c4951030$@umich.edu> Message-ID: <1f41d84aa34a42b9a372f43d8103c545@andrew.cmu.edu> Hi Brian, We have worked with Brumley South in the past (http://www.brumleysouth.com). The handle a lot of Nanometrics and KLA systems. Best Regards, Matt -- Matthew T. Moneck, Ph.D Executive Manager, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu From: labnetwork-bounces at mtl.mit.edu On Behalf Of Brian Armstrong Sent: Monday, March 15, 2021 2:06 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] NanoSpec 6100 service/repair vendor recommendations Hi all, Does anyone have recommendations for vendors that can provide service/repair at your site for Nanometrics NanoSpec 6100 thin film measurement systems? We're trying to decide if it's worth continuing with our current system or if the time has come to purchase a new system that is supported by the vendor. Our most recent experience with a repair vendor was rather disappointing in part due to shipping our system to the vendor site. Old electronics do not travel well! Best Regards, Brian Armstrong Lead Engineer in Research Lurie Nanofabrication Facility (LNF) University of Michigan -------------- next part -------------- An HTML attachment was scrubbed... URL: From wrhess at mit.edu Mon Mar 15 16:48:44 2021 From: wrhess at mit.edu (Whitney Rochelle Hess) Date: Mon, 15 Mar 2021 20:48:44 +0000 Subject: [labnetwork] EVG501 heater driver Message-ID: <1615841326396.3600@mit.edu> Hi all, I'm reaching out to find out if anyone on LabNetwork has a working Heater Driver 10008 for an EVG501 bonder available to sell as spare parts. I'd also be interested in a non-working module if it's in a condition where I could have it repaired/refurbished by EVG. Thanks, Whitney _________________________________________ Whitney Hess, PhD Manager of Safety Systems and Programs | MIT.nano MIT, Room 12-5025 Phone: 617-253-8567 Email: wrhess at mit.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rreger at purdue.edu Wed Mar 17 08:13:52 2021 From: rreger at purdue.edu (Reger, Ronald K) Date: Wed, 17 Mar 2021 12:13:52 +0000 Subject: [labnetwork] Research Engineer Position Available at Purdue University Message-ID: Dear Colleagues, We have just posted an opening on our engineering staff at the Birck Nanotechnology Center, please see the link below. This is for a deposition engineer with physical vapor deposition experience. Please pass this along to anyone who may be interested. https://career8.successfactors.com/sfcareer/jobreqcareer?jobId=13221&company=purdueuniv Thank you, Ron Reger Engineering Manager Birck Nanotechnology Center | Room 2289 | Office: 765.494.6667 | Email: rreger at purdue.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Wed Mar 17 13:18:45 2021 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S) Date: Wed, 17 Mar 2021 17:18:45 +0000 Subject: [labnetwork] cleaning resist off clean room floors Message-ID: Colleagues, Does anyone have a better way to clean photo resist off a clean room floor other than Acetone and scotch bright. There has to be a product out there I'm missing? And or a scrubbing tool. Best Tom Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director Saab ETIC Building Director 1 University Avenue Lowell MA 01854 Mobile 617-755-0910 Land 978-934-1809 Fax 978-934-1014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From manish.keswani01 at gmail.com Thu Mar 18 13:40:10 2021 From: manish.keswani01 at gmail.com (Manish Keswani) Date: Thu, 18 Mar 2021 10:40:10 -0700 Subject: [labnetwork] FMEA analysis on toxic gas system Message-ID: Hello folks, Has anyone of you done failure modes and effects analysis (FMEA) on the toxic gas system? If so, are you able to share a copy of the analysis? We had some recent issues with our toxic gas monitoring system and during discussion the safety team recommended that we do FMEA on our gas system. It will be useful to know if any of you has done this type of analysis for toxic gases and have a copy of the report. Thank you, Manish Keswani LLNL -------------- next part -------------- An HTML attachment was scrubbed... URL: From sieb at 4dlabs.ca Thu Mar 18 14:50:07 2021 From: sieb at 4dlabs.ca (Nathanael Sieb) Date: Thu, 18 Mar 2021 11:50:07 -0700 Subject: [labnetwork] ZnSe dicing Message-ID: <460136fa-2db4-7395-8b60-50f0242d2c8d@4dlabs.ca> Hi all, Has anyone diced ZnSe before?? We have a request but haven't worked with this material before.? I'm getting mixed opinions on the safety of working with this material so I'm looking for anyone with some more advice/feedback/experience. Thanks, Nathanael *Nathanael Sieb * Director of Operations and Administration ?| 4D LABS Simon Fraser University 8888 University Dr., Burnaby, B.C. V5A 1S6 T: 778.782.8084?| F: 778.782.3765 | www.4dlabs.ca Facebook ?| Twitter ?| LinkedIn -------------- next part -------------- An HTML attachment was scrubbed... URL: From iharvey at princeton.edu Mon Mar 22 12:45:40 2021 From: iharvey at princeton.edu (Ian Harvey) Date: Mon, 22 Mar 2021 16:45:40 +0000 Subject: [labnetwork] Two openings at Princeton's PRISM Cleanroom: Director and Sr. Engineer Message-ID: <7E3B9F36-B839-4B3C-AAAF-2638E52B6BB0@princeton.edu> Dear Labnetwork Colleagues, Many of you know our senior staff member and process engineer Dr. Eric Mills. He is now in New Zealand pursuing his medical school dream, so we are in search of a highly experienced Photolitho engineer, reporting to the Cleanroom Director (me, for the moment) with job posting here: PRISM Cleanroom Senior Research Specialist I in Princeton, New Jersey | Careers at Main Campus (icims.com) [https://princeton.icims.com/icims2/servlet/icims2?module=AppInert&action=download&id=268018&hashed=1386495237] PRISM Cleanroom Senior Research Specialist I in Princeton, New Jersey | Careers at Main Campus Applications are invited from qualified candidates for a Staff Process Integration and Training Engineer position to work as a senior staff member in the Princeton University Institute for the Science and Technology (PRISM) Cleanroom. The PRISM Cleanroom is Princeton's central, shared use cleanroom facility and houses a large complement of tools dedicated to thin film deposition and photolithographic patterning, packaging and processing across all meso to nanometer length scales. The successful candidate will participate in a multidisciplinary research and education environment providing mentoring and training, utilizing a wide range of instrumentation available in the PRISM Cleanroom. These roles will provide leadership, guidance and support of projects in a multi-user facility navigating the complexities of novel process and material use across a broad tool set with a varied user base. Practical Engineers are needed who can adeptly navigate varied project goals, individuals and timelines; novel process de research-princeton.icims.com In addition, please reach out to me directly or watch for an upcoming posting if you are interested in our Cleanroom Director position, as I will be leaving Princeton at my three year mark (end of May) in order to return west and assist with eldercare. Many thanks to all my friends and colleagues in this (and the UGIM/ENRIS and the mid-Atlantic Nanofab) amazing community of peers, for all your mentoring and friendship. ?Ian Ian R. Harvey, Ph.D. PRISM Cleanroom Director Princeton University, 70 Prospect Avenue, Princeton, NJ 08540 609-285-9951 (cell) iharvey at princeton.edu PRISM-Cleanroom.princeton.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Tue Mar 23 06:06:42 2021 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 23 Mar 2021 06:06:42 -0400 Subject: [labnetwork] Career Opportunities at the University of Michigan/LNF Message-ID: Good morning all, I have great news for any of you that might be considering a relocation to fabulous Michigan, and the Ann Arbor area. The University of Michigan Lurie Nanofabrication Facility (LNF) has an opening for an engineer within our Infrastructure group. The candidate would be expected to become extremely familiar with the LNF building systems that include, but are not limited to; Gas delivery, Gas detection and Life Safety, DI water, Process chilled water, HVAC, Security, Video, Acid waste neutralization, and Power distribution. In addition, the candidate(s) will be responsible for additions to the LNF infrastructure that will improve the capabilities of the LNF laboratory, as well as provide facilities support for the surrounding LNF associated labs. For further details, the following link should take you directly to the posting. The second link takes you to the UofM jobs posting page. Please be sure to follow the directions on the posting pages for submitting your information. https://careers.umich.edu/job_detail/194370/engineer_in_research_intermediate_-_lnf_infrastructure https://careers.umich.edu/search Thank you, and please forward this information as you see fit. Dennis Schweiger Facilities Supervisor University of Michigan Lurie Nanofabrication Facility 734.647.2055 Ofc -------------- next part -------------- An HTML attachment was scrubbed... URL: From gilheart at rice.edu Thu Mar 25 11:48:14 2021 From: gilheart at rice.edu (Tim Gilheart) Date: Thu, 25 Mar 2021 10:48:14 -0500 Subject: [labnetwork] Open Position at Rice BioMaterials Center Message-ID: <15E44F6D-FAAF-442F-8F99-CDFDD6F989E8@rice.edu> Greetings all, Rice University?s BioMaterials Center (BML) is looking for a new lab manager. The BML is a specialized biomaterials core lab is distinct from our cleanroom facility but operates under the same umbrella core labs organization here at Rice. A number of our cleanroom users are also users of the BML, whose capabilities and policies are available here: https://research.rice.edu/bml/ Here is the relevant job posting: https://jobs.rice.edu/postings/25870 Please share with any qualified and interested applicants you may know. Thanks, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From km at highrioptics.com Fri Mar 26 02:05:45 2021 From: km at highrioptics.com (Keiko Munechika) Date: Fri, 26 Mar 2021 06:05:45 +0000 Subject: [labnetwork] Open Position for Nanofabrication Engineer in the Bay Area Message-ID: Dear all, HighRI Optics, Inc. is seeking a talented Nanofabrication Engineer. We are developing novel anti-reflective (AR) structures on various types of window surfaces for future imaging applications. We have an immediate opening for a Nanofabrication Engineer position. The Nanofabrication Engineer will be mainly in charge of developing the fabrication processes, optical characterization of developed AR surface, and creating reports for progress updates. Qualifications: Required degree: Ms or Ph.D. (preferred) in a field of Science or Engineering. Critical skills include expertise in a variety of nanofabrication tools and an in-depth understanding of the processes. Experience in cleanroom equipment and conventional semiconductor nanofabrication processing is a must. Experience and understanding in Optics is a huge plus. Company Information: HighRI Optics, Inc is a new spin-off company from a well-established company, aBeam Technology (est. 2003), and develops novel high refractive index materials and optical applications. We are looking to expand our nanofabrication activity. The company is based in San Francisco/Bay Area. I'd appreciate it if you can spread the word! Best regards, Keiko HighRI Optics, Inc. info at highrioptics.com km at highrioptics.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From Aju.Jugessur at Colorado.EDU Fri Mar 26 13:07:23 2021 From: Aju.Jugessur at Colorado.EDU (Aju Jugessur) Date: Fri, 26 Mar 2021 17:07:23 +0000 Subject: [labnetwork] Cleanroom staff position Message-ID: <2296354F-C35F-452E-A5B5-14D0CA829685@colorado.edu> Hi all, Our cleanroom staff position is still open. Please share this opportunity with anyone who may be interested. https://jobs.colorado.edu/jobs/JobDetail/COSINC-Facility-Manager/28790 Thanks, Regards Aju Aju Jugessur Ph.D. IEEE Sr. Member Director, Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) Member of Engineering Staff Council (ESC) University of Colorado Boulder | College of Engineering & Applied Science 4001 Discovery Drive, N360G SEEL | Boulder, CO 80303| P: 303.735.5019| F: 303.492.2199 E-mail: aju.jugessur at colorado.edu Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur www.colorado.edu/facility/cosinc [signature_2041799206] Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever (CliftonStrengths) -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 6294 bytes Desc: image001.png URL: From kun.li at kaust.edu.sa Sun Mar 28 01:09:19 2021 From: kun.li at kaust.edu.sa (Kun Li) Date: Sun, 28 Mar 2021 05:09:19 +0000 Subject: [labnetwork] Opening for Director position for Nanofabrication Core Lab at KAUST Message-ID: <89E6DA5B-A93F-4A44-A385-EE7DC0D3CEBA@contoso.com> Dear Colleagues, We are looking for a director for our Nanofabrication Core Lab at King Abdullah University of Science and Technology (KAUST). The detailed information is available in the attached document. KAUST offers highly competitive package and outstanding working and living environment. If you are interested, please send your CV to me or our HR representative listed in the document. Best wishes, Kun ______________________________________________________________________________ Kun Li, Ph. D Acting Facility Director, Materials Characterization, Nanofabrication and Plant Growth P. O. Box 2058, Building 1, # 3419 King Abdullah University of Science and Technology Thuwal 23955-6900, Kingdom of Saudi Arabia Tel: +966 (0) 12 8082331 Mobile: +966 (0) 544700336 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: NCL - Lab Director.pdf Type: application/pdf Size: 1063458 bytes Desc: NCL - Lab Director.pdf URL: From julia.aebersold at louisville.edu Mon Mar 29 11:25:14 2021 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Mon, 29 Mar 2021 15:25:14 +0000 Subject: [labnetwork] E-beam Evaporation of Ag2Ga Message-ID: We have a client that is making micro and mili size particles of Ag2Ga and they would like to evaporate them in our E-beam evaporator. Has anyone evaporated this type of material? Any concerns that pop up immediately? Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From kkwok6 at jhu.edu Mon Mar 29 18:36:03 2021 From: kkwok6 at jhu.edu (Kam Sang Kwok) Date: Mon, 29 Mar 2021 22:36:03 +0000 Subject: [labnetwork] Plasma etch PE-100 can't generate RF Message-ID: Hi, I have a RIE system (PE-100, Plasma etch) that stopped working last week. Gas flow and pressure work fine in the system, but no RF is generated. I am wondering if there is any technician who can look at my system in Maryland. Best, Mark Kwok -------------- next part -------------- An HTML attachment was scrubbed... URL: From RobertVandusen at cunet.carleton.ca Tue Mar 30 13:16:58 2021 From: RobertVandusen at cunet.carleton.ca (Robert Vandusen) Date: Tue, 30 Mar 2021 17:16:58 +0000 Subject: [labnetwork] Looking for information or manuals for an Edwards Auto500 thermal evaporator model NXG503000 Message-ID: Hi colleagues. Hope everyone is well. We may be acquiring an Edwards Auto 500, 4 pocket thermal evaporation system, with a cryodrive type compressor and pump from another department within our University. Unfortunately there are no manuals for this system which would make it difficult to setup and operate. It also seems to be missing the planetary substrate holder. If anyone has some information on this type of system that they could share that would be great. Thanks Rob. Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From gilheart at rice.edu Tue Mar 30 18:13:20 2021 From: gilheart at rice.edu (Tim Gilheart) Date: Tue, 30 Mar 2021 17:13:20 -0500 Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? Message-ID: Greetings, I?m hoping that several teams on this list have relevant experience to share, since I know a number of you manage Savannah ALD tools. Our tool has presented with leakage issues through the stop valve twice in the past 6 months. We replaced the last valve at the end of Aug 2020, and have recently again experienced issues with failing to vent (due to the valve not closing completely and the vac pump still pulling on the chamber). We have a temporary workaround in place (an external manual valve on the pump line), but this leakage through the stop valve effects process outcomes and has proven costly to address, since valve replacement seems to be the recommended solution. Our tool typically runs Al2O3, HfO2, TiO2, and ZnO processes, sometimes ZrO2. Stop valve heating jacket is maintained at the recommended 150 C, and the heaters all seem to be working properly. Does anyone have suggestions about maintaining these stop valves for longer? Or, failing that, a referral for refurbishing them? I am willing to consider a solution that involves swapping out valves 1-2/year and sending them out for rebuild if that?s an option for a reasonable cost. Thanks in advance for any advice you can share, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Tue Mar 30 21:55:06 2021 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm R) Date: Wed, 31 Mar 2021 01:55:06 +0000 Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? In-Reply-To: References: Message-ID: Hi Tim, Yes, this issue is endemic to these units, as all the deposition gases pass over the sealing surfaces of the valve under normal operating conditions. One solution is to maintain a stock of the appropriate (but expensive) Kalrez-type orings, and do a valve sealing-face cleanup at intervals. Eventually, however, you will find that deposition has encrusted the interior of the valve bellows, rendering it much less flexible than original equipment. I am happy to share with you via PM some plumbing "rearrangements" that we have instituted which seem to have helped this problem greatly. Sincerely, Mac Hathaway Senior Process and Systems Engineer Harvard CNS ________________________________ From: labnetwork on behalf of Tim Gilheart Sent: Tuesday, March 30, 2021 6:13 PM To: Fab Network Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? Greetings, I?m hoping that several teams on this list have relevant experience to share, since I know a number of you manage Savannah ALD tools. Our tool has presented with leakage issues through the stop valve twice in the past 6 months. We replaced the last valve at the end of Aug 2020, and have recently again experienced issues with failing to vent (due to the valve not closing completely and the vac pump still pulling on the chamber). We have a temporary workaround in place (an external manual valve on the pump line), but this leakage through the stop valve effects process outcomes and has proven costly to address, since valve replacement seems to be the recommended solution. Our tool typically runs Al2O3, HfO2, TiO2, and ZnO processes, sometimes ZrO2. Stop valve heating jacket is maintained at the recommended 150 C, and the heaters all seem to be working properly. Does anyone have suggestions about maintaining these stop valves for longer? Or, failing that, a referral for refurbishing them? I am willing to consider a solution that involves swapping out valves 1-2/year and sending them out for rebuild if that?s an option for a reasonable cost. Thanks in advance for any advice you can share, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From M.G.Perry at soton.ac.uk Wed Mar 31 04:20:59 2021 From: M.G.Perry at soton.ac.uk (Michael Perry) Date: Wed, 31 Mar 2021 08:20:59 +0000 Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? In-Reply-To: References: Message-ID: Hi Tim, After going through same issues as you, I replaced ours with a VAT gate valve and have not had to touch it now for several years. I think this is part number?. 01228-K06 Mike From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Tim Gilheart Sent: 30 March 2021 23:13 To: Fab Network Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? CAUTION: This e-mail originated outside the University of Southampton. Greetings, I?m hoping that several teams on this list have relevant experience to share, since I know a number of you manage Savannah ALD tools. Our tool has presented with leakage issues through the stop valve twice in the past 6 months. We replaced the last valve at the end of Aug 2020, and have recently again experienced issues with failing to vent (due to the valve not closing completely and the vac pump still pulling on the chamber). We have a temporary workaround in place (an external manual valve on the pump line), but this leakage through the stop valve effects process outcomes and has proven costly to address, since valve replacement seems to be the recommended solution. Our tool typically runs Al2O3, HfO2, TiO2, and ZnO processes, sometimes ZrO2. Stop valve heating jacket is maintained at the recommended 150 C, and the heaters all seem to be working properly. Does anyone have suggestions about maintaining these stop valves for longer? Or, failing that, a referral for refurbishing them? I am willing to consider a solution that involves swapping out valves 1-2/year and sending them out for rebuild if that?s an option for a reasonable cost. Thanks in advance for any advice you can share, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jtmitch5 at ncsu.edu Wed Mar 31 08:18:00 2021 From: jtmitch5 at ncsu.edu (James Mitchell) Date: Wed, 31 Mar 2021 08:18:00 -0400 Subject: [labnetwork] Looking for information or manuals for an Edwards Auto500 thermal evaporator model NXG503000 In-Reply-To: References: Message-ID: This is for a 306 but may help. Jim On Tue, Mar 30, 2021 at 7:37 PM Robert Vandusen < RobertVandusen at cunet.carleton.ca> wrote: > Hi colleagues. > > Hope everyone is well. > > We may be acquiring an Edwards Auto 500, 4 pocket thermal evaporation > system, with a cryodrive type compressor and pump from another department > within our University. > > Unfortunately there are no manuals for this system which would make it > difficult to setup and operate. It also seems to be missing the planetary > substrate holder. > > If anyone has some information on this type of system that they could > share that would be great. > > > > Thanks > > Rob. > > Robert Vandusen > Technical Officer, Microfabrication Lab > Electronics Department > Carleton University > room: 4184 Mackenzie Building > 613-520-2600 ext 5761 > Robert_vandusen at cunet.carleton.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- *James Mitchell* *Specialty Trades Technician* *Dept. of Electrical and Computer Engineering* *NCSU Nanofabrication Facility* *MRC RM243A **Box 7911* *2410 Campus Shore Dr., Raleigh, NC 27606* *jtmitch5 at ncsu.edu* *Desk: 919-515-5394* *Cell: 919-717-7325* -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: EBeam Auto306 Volume 2_char.pdf Type: application/pdf Size: 1470258 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: EBeam Auto306 Volume 1.pdf Type: application/pdf Size: 572213 bytes Desc: not available URL: From jtmitch5 at ncsu.edu Wed Mar 31 08:42:01 2021 From: jtmitch5 at ncsu.edu (James Mitchell) Date: Wed, 31 Mar 2021 08:42:01 -0400 Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? In-Reply-To: References: Message-ID: Are you referring to the pulse valves or a different valve? Our Fiji just started leaking yesterday but I believe it is the plasma tube. If you are referring to the pulse valves, I run water pulses through the manifold in between each run. I run a 10 cycle loop of 1 second pulses to clean up the manifold. Jim On Wed, Mar 31, 2021 at 7:53 AM Hathaway, Malcolm R < hathaway at cns.fas.harvard.edu> wrote: > Hi Tim, > > Yes, this issue is endemic to these units, as all the deposition gases > pass over the sealing surfaces of the valve under normal operating > conditions. > > One solution is to maintain a stock of the appropriate (but expensive) > Kalrez-type orings, and do a valve sealing-face cleanup at intervals. > Eventually, however, you will find that deposition has encrusted the > interior of the valve bellows, rendering it much less flexible than > original equipment. > > I am happy to share with you via PM some plumbing "rearrangements" that we > have instituted which seem to have helped this problem greatly. > > Sincerely, > > > Mac Hathaway > Senior Process and Systems Engineer > Harvard CNS > ------------------------------ > *From:* labnetwork on behalf of Tim > Gilheart > *Sent:* Tuesday, March 30, 2021 6:13 PM > *To:* Fab Network > *Subject:* [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop > valve issues? > > Greetings, > > I?m hoping that several teams on this list have relevant experience to > share, since I know a number of you manage Savannah ALD tools. > > Our tool has presented with leakage issues through the stop valve twice in > the past 6 months. We replaced the last valve at the end of Aug 2020, and > have recently again experienced issues with failing to vent (due to the > valve not closing completely and the vac pump still pulling on the chamber). > > We have a temporary workaround in place (an external manual valve on the > pump line), but this leakage through the stop valve effects process > outcomes and has proven costly to address, since valve replacement seems to > be the recommended solution. > > Our tool typically runs Al2O3, HfO2, TiO2, and ZnO processes, sometimes > ZrO2. Stop valve heating jacket is maintained at the recommended 150 C, and > the heaters all seem to be working properly. > > Does anyone have suggestions about maintaining these stop valves for > longer? Or, failing that, a referral for refurbishing them? I am willing to > consider a solution that involves swapping out valves 1-2/year and sending > them out for rebuild if that?s an option for a reasonable cost. > > Thanks in advance for any advice you can share, > > -- > Tim Gilheart, Ph.D. > Research Scientist - Nanofabrication Cleanroom Manager, > Shared Equipment Authority (SEA), Rice University > Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- *James Mitchell* *Specialty Trades Technician* *Dept. of Electrical and Computer Engineering* *NCSU Nanofabrication Facility* *MRC RM243A **Box 7911* *2410 Campus Shore Dr., Raleigh, NC 27606* *jtmitch5 at ncsu.edu* *Desk: 919-515-5394* *Cell: 919-717-7325* -------------- next part -------------- An HTML attachment was scrubbed... URL: From iharvey at princeton.edu Wed Mar 31 09:01:14 2021 From: iharvey at princeton.edu (Ian Harvey) Date: Wed, 31 Mar 2021 13:01:14 +0000 Subject: [labnetwork] Fwd: Two openings at Princeton's PRISM Cleanroom: Director and Sr. Engineer References: <7E3B9F36-B839-4B3C-AAAF-2638E52B6BB0@princeton.edu> Message-ID: <9271F1F3-2AF8-41A6-B304-AB91B4C1A99C@princeton.edu> Dear Colleagues, Here is the posting for the PRISM Cleanroom Director: https://puwebp.princeton.edu/AcadHire/apply/application.xhtml?listingId=19662 All best, ?Ian Begin forwarded message: From: Ian Harvey > Subject: Two openings at Princeton's PRISM Cleanroom: Director and Sr. Engineer Date: March 22, 2021 at 10:45:40 AM MDT To: "labnetwork at mtl.mit.edu" > Cc: Ian Harvey > Dear Labnetwork Colleagues, Many of you know our senior staff member and process engineer Dr. Eric Mills. He is now in New Zealand pursuing his medical school dream, so we are in search of a highly experienced Photolitho engineer, reporting to the Cleanroom Director (me, for the moment) with job posting here: PRISM Cleanroom Senior Research Specialist I in Princeton, New Jersey | Careers at Main Campus (icims.com) [https://princeton.icims.com/icims2/servlet/icims2?module=AppInert&action=download&id=268018&hashed=1386495237] PRISM Cleanroom Senior Research Specialist I in Princeton, New Jersey | Careers at Main Campus Applications are invited from qualified candidates for a Staff Process Integration and Training Engineer position to work as a senior staff member in the Princeton University Institute for the Science and Technology (PRISM) Cleanroom. The PRISM Cleanroom is Princeton's central, shared use cleanroom facility and houses a large complement of tools dedicated to thin film deposition and photolithographic patterning, packaging and processing across all meso to nanometer length scales. The successful candidate will participate in a multidisciplinary research and education environment providing mentoring and training, utilizing a wide range of instrumentation available in the PRISM Cleanroom. These roles will provide leadership, guidance and support of projects in a multi-user facility navigating the complexities of novel process and material use across a broad tool set with a varied user base. Practical Engineers are needed who can adeptly navigate varied project goals, individuals and timelines; novel process de research-princeton.icims.com In addition, please reach out to me directly or watch for an upcoming posting if you are interested in our Cleanroom Director position, as I will be leaving Princeton at my three year mark (end of May) in order to return west and assist with eldercare. Many thanks to all my friends and colleagues in this (and the UGIM/ENRIS and the mid-Atlantic Nanofab) amazing community of peers, for all your mentoring and friendship. ?Ian Ian R. Harvey, Ph.D. PRISM Cleanroom Director Princeton University, 70 Prospect Avenue, Princeton, NJ 08540 609-285-9951 (cell) iharvey at princeton.edu PRISM-Cleanroom.princeton.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From edeguns at gmail.com Wed Mar 31 10:55:07 2021 From: edeguns at gmail.com (Eric Deguns) Date: Wed, 31 Mar 2021 10:55:07 -0400 Subject: [labnetwork] Cambridge/Ultratech/Veeco Savannah ALD - stop valve issues? In-Reply-To: References: Message-ID: Good morning Tim, I'm the Product Manager for our R&D systems at Veeco, including the Savannah. A few points to make: - the frequency at which you are having stopvalve maintenance issues is far more frequent than most of our end-users. Typical reasons for this include either the heater jacket not working well (installation/efficiency/etc.) or end users running processes which have a large overdose of precursor. - in our maintenance manual for the Savannah, there is a cleaning procedure that allows one to recover the stopvalve to a like-new condition either via an etch back or a physical clean. I'm happy to send that to you. - as Mac has pointed out, spare o-rings are available for these valves - either from us or from Nor-cal - the "rearrangements" suggested by Mac can have other consequences too I'm happy to go over the issues you are seeing and see if we can't recommend any other courses of action for you. I agree - replacing a stopvalve every 6 months is not an option. I'll send you another email with our maintenance manual from my work email address. (cc:ed here). Of course, you are always welcome to reach out to my colleagues or I at ALDsupport at veeco.com. Kind regards, Eric On Tue, Mar 30, 2021 at 7:42 PM Tim Gilheart wrote: > Greetings, > > I?m hoping that several teams on this list have relevant experience to > share, since I know a number of you manage Savannah ALD tools. > > Our tool has presented with leakage issues through the stop valve twice in > the past 6 months. We replaced the last valve at the end of Aug 2020, and > have recently again experienced issues with failing to vent (due to the > valve not closing completely and the vac pump still pulling on the chamber). > > We have a temporary workaround in place (an external manual valve on the > pump line), but this leakage through the stop valve effects process > outcomes and has proven costly to address, since valve replacement seems to > be the recommended solution. > > Our tool typically runs Al2O3, HfO2, TiO2, and ZnO processes, sometimes > ZrO2. Stop valve heating jacket is maintained at the recommended 150 C, and > the heaters all seem to be working properly. > > Does anyone have suggestions about maintaining these stop valves for > longer? Or, failing that, a referral for refurbishing them? I am willing to > consider a solution that involves swapping out valves 1-2/year and sending > them out for rebuild if that?s an option for a reasonable cost. > > Thanks in advance for any advice you can share, > > -- > Tim Gilheart, Ph.D. > Research Scientist - Nanofabrication Cleanroom Manager, > Shared Equipment Authority (SEA), Rice University > Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: