[labnetwork] Plasma etch PE-100 can't generate RF
Kam Sang Kwok
kkwok6 at jhu.edu
Mon Mar 29 18:36:03 EDT 2021
Hi,
I have a RIE system (PE-100, Plasma etch) that stopped working last week. Gas flow and pressure work fine in the system, but no RF is generated.
I am wondering if there is any technician who can look at my system in Maryland.
Best,
Mark Kwok
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