[labnetwork] ZEP worth it?

[Shimon Eliav]

Dear Long,
Thanks for originating this discussion. It was nice to learn from the experience of several people. I think it is very useful and I did a summary of the replies, please find attached.
Regards,
Shimon
Hebrew University of Jerusalem
Israel

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chang, Long
Sent: Friday, 30 April 2021 18:29
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] ZEP worth it?

Thanks Everyone. It’s clear what I should do.

Long


On Apr 30, 2021, at 6:08 AM, Lapointe, Jean <Jean.Lapointe at nrc-cnrc.gc.ca<mailto:Jean.Lapointe at nrc-cnrc.gc.ca>> wrote:

Hi Long,

It does last for years, about the same as PMMA as far as I can tell. We just finished a bottle with a 2016 expiry and saw no change after opening a new bottle.
It was stored at room T.
It can withstands plasma etching much better than PMMA but doesn’t have as good an adhesion to semiconductors. So it is not a good mask for wet etching semiconductors.
It works very well for lift-off.
It is expensive but can easily be diluted to get thinner films.
It can also be developed in N-amyl acetate; much safer than xylene and with the same contrast and dose-to-clear.
Jean

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chang, Long
Sent: April 29, 2021 10:29 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] ZEP worth it?

***ATTENTION*** This email originated from outside of the NRC. ***ATTENTION*** Ce courriel provient de l'extérieur du CNRC
Hi Guys,

I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?

Thanks,
Long

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