[labnetwork] Yellow filters for litho room: what specs are out there?

[Xin (Shane) GUO]

Hello Mario,

I saw your past post regarding amber UV filter films for the cleanroom. I
am in a similar situation looking for UV filter films for our cleanroom
lights. Lithoprotect is also what I have found so far. I am wondering if
you have identified suppliers from North America and can share such
information with me.

Best

*Shane Guo, PhD, P.Eng.,* *PMP*
*Lab Manager*
*York MicroFab Facilities (YMF)/ESSE*
C 289-588-6605
T 416-736-2100 ext 44160
sguo18 at yorku.ca | lassonde.yorku.ca
Lassonde School of Engineering | York University
RM037, Bergeron Building
4700 Keele Street Toronto ON, Canada M3J 1P3



On Thu, Dec 20, 2018 at 8:09 PM Beaudoin, Mario <beaudoin at physics.ubc.ca>
wrote:

> Dear Labnetworks community,
>
> I'm in the process of renovating our cleanroom and want yellow filters
> that meet the specs of *Lithoprotect*, specifically, I want way less than
> 1% transmission below 500nm.  *Lithoprotect* (see link below) claims less
> than 0.001% transmission below about 475nm.  In our old cleanroom, we used
> to have traditional 1% yellow windows that turned out to be inadequate for
> our maskless lithography system.
>
>
> https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf
>
> Does anyone know of a US supplier that offers similar product?  On the
> other hand, does anyone know of products that are not quite as performing
> but still offer say 0.01% transmission below 500nm?  We will be using 405nm
> and 365nm light with a traditional mask aligner and a maskless system.  We
> typically use AZ 5214E-IR and nLoF 2020 resists for down to 1um features;
> some users still use Shipley 1813 and we have another set of groups using
> SU-8 resists.  We're not committed to any supplier but do require tight
> performance.
>
> I'm cc'ing our cleanroom manufacturer engineers in this thread.
>
> Regards,
>
> Mario
> --
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