[labnetwork] 2nd try:: Free (!) 4-chamber PECVD machine for amorphous silicon research (most recently flexible TFTs and applications)

[James C. Sturm]

2nd try.  We had 3 "almost" takers, but they all decided they wouldn't have the right type of space in the near term.

I do need it  "out of here" (for lab renovations for new faculty) in less than a month.

Sincerely, Jim Sturm

********************************************
Prof. James C. Sturm
     Chair, Department of Electrical and Computer Engineering
     Stephen R. Forrest Professor in Electrical Engineering
     Princeton University
     B410 E-Quad, Olden St.
    Princeton, NJ  08540
    609-258-5610, fax:  609-258-1177
    sturm at princeton.edu<mailto:sturm at princeton.edu>




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James C. Sturm
Sent: Wednesday, September 15, 2021 2:18 PM
To: labnetwork at mtl.mit.edu
Cc: David Radcliff <radcliff at princeton.edu>; Cecilia York <cyork at princeton.edu>
Subject: [labnetwork] Free (!) 4-chamber PECVD machine for amorphous silicon research (most recently flexible TFTs and applications)
Importance: High

My colleague Sigurd Wagner retired a few years ago and his lab is being cleaned out for new faculty.

What may have been the most productive research tool in the world for amorphous silicon (a-Si) and related research for the past 25 years is available for FREE for a non-profit institution.  The machine is a 4-chamber PECVD for depositing stacks for solar cells or for a-Si TFT's.  The catch is you have to remove it from a lab in Princeton University (New Jersey, USA) by mid October.

An overview is below, including links to many pictures.  It is in good working condition.

If interested, email me (Jim Sturm, sturm at princeton.edu<mailto:sturm at princeton.edu>, 609 258 5610) immediately and also Sigurd Wagner (wagner at princeton.edu<mailto:wagner at princeton.edu>).

Please feel free to forward to anyone who might be interested.

Sincerely,
Prof. Jim Sturm,
Princeton University

I hope the links work....

Links:  Pictures of the machine:

  *   Front view of the 4 chambers  (the one left of center with the vertical cylinder is the load-chamber;  a door lifts up to load samples).  The sample transfers laterally to the various deposition chambers. https://drive.google.com/file/d/1RPwZT1vsDFeHbSPbJNnPWoDxc8eqg5D4/view?usp=sharing

  *   Rear view of the 4 chambers: https://drive.google.com/file/d/1VH5HmW2YhCAZdsJpnJuF-UFRy8f2p1MR/view?usp=sharing
  *   Control station:  https://drive.google.com/file/d/1xkoXB3IPC3mZyNoKPDjOEtXOQCgUpU5n/view?usp=sharing
  *   Roots blower stacks (2): https://drive.google.com/file/d/1FN32VVxpHd3tLEDJ48VB3rcxqFbzE4nY/view?usp=sharing
  *   Roughing pumps (3):  https://drive.google.com/file/d/1RpPS6LIK_hiaeJqw8r3socSp_OKMkdKg/view?usp=sharing
  *   Mass Flow controller and gas switching box  (all gas plumbing has VCR connections) https://drive.google.com/file/d/1t1OcjqREwVNOkwBMw-fWTwzbw3QomC8X/view?usp=sharing

Overview:

     https://drive.google.com/file/d/1mZty5oqI3HCWbnK5PDZIyI8k4qvVEwsv/view?usp=sharing



Overview:
4- chamber PECVD for amorphous silicon TFT's and solar cell research.

  *   4 chamber machine for amorphous Si (a-Si) and amorphous SiGe alloy (a-SiGe) research.
  *   1 load chamber, and then sample is transferred horizontally to 1 of 3 deposition chambers.
  *   Sample is glass or plastic mounted on glass ~ 3" (75 mm) x 3".  It sits in a platter (~12" x 12") that is transferred, with a hole in the bottom for deposition.
  *   13.5 MHz plasma, diode-configuration
  *   Originally configured for solar cell research, with chambers for (i) a-Si(Ge), (ii) n+ a-Si(Ge), (iii) p+-Si(Ge)
  *   Used for past 20 years primarily for a-Si thin film transistor on glass and flexible plastic.  The p+ Si(Ge) chamber was converted to SiNx deposition for a gate dielectric.
  *   Built late 1990s by Innovative Systems Engineering for the lab of Sigurd Wagner, a pioneer in fundamentals of a-SiGe for solar cells and then flexible TFT for large-area and flexible electronics.    1000's of samples and 100's of papers and dozens of PhD's came from this machine.   Search on papers for "Sigurd Wagner" at Princeton from ~1995 to ~2017
  *   Gas flow and power control are automated, sample transfer from chamber to chamber is manual
  *   2 roots blower stacks for process exhaust plus 3 separate roughing pumps
  *   Machine is functional but has not run in ~5 years.  Process gases are disconnected and machine has been purged out.



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