[labnetwork] Cleanroom Pressure Setpoint

[Robert Vandusen]

Hi Adam.
Our main cleanroom was build in the early 90’s.  We run our class 100 rooms at ~35Pa, our class 1000 at ~30Pa, and our class 10,000 areas at ~ 22Pa.
We have never had a noticeable issues with particles.  Whenever we have checked the levels are always well below spec.
In instances when our pressures have increased because of control issues we have had to watch to make sure our drop in ceiling tiles (between the HEPA’s) do not start to pop up and unseat.

Our newer class 10,000 cleanroom runs at 12Pa.

Rob
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600<tel:613-520-2600> ext 5761
Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Shimon Eliav
Sent: April 10, 2022 1:31 AM
To: Adam Pettigrew <apettigr at ualberta.ca>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cleanroom Pressure Setpoint

[External Email]
Hi Adam,
The pressure set-point for our cleanroom is 15 Pa. Classes 1,000 to 10,000.
We never played with this parameter.
Regards,
Shimon

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Adam Pettigrew
Sent: Wednesday, 6 April 2022 22:53
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cleanroom Pressure Setpoint

Hey All,

I am curious what others have as a setpoint for their cleanroom pressure relative to an unclean or lower classification cleanroom. I have found some information which suggests 10-15Pa is more than sufficient. We have ours set quite high at 60Pa but it typically sits at 45Pa. If you have tried adjusting the pressure, have you noticed any change in cleanliness/particle counts? Any information would be really appreciated.

Thanks,
Adam

--

Adam Pettigrew

Systems Technician

University of Alberta - nanoFAB

W1-028A ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 587-879-1514
www.nanofab.ualberta.ca<http://www.nanofab.ualberta.ca/>
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