[labnetwork] GILD / PLIE capabilities?
Brian K. Olmsted
olms0025 at umn.edu
Wed Apr 13 15:48:42 EDT 2022
Hi,
Does anyone have (or know of a group who has) Gas Immersion Laser Doping
(GILD) or Pulse Laser Induced Epitaxy (PLIE) capabilities for implanting a
high concentration of Boron (1e21/cm^3) into the top ~200 nm of a bare Si
wafer?
Wafer size isn't important.
Thanks much,
Brian K. Olmsted
Associate Director of Laboratory Operations
University of Minnesota | MNC
www.mnc.umn.edu
612.626.3287
olms0025 at umn.edu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220413/8e7246bb/attachment.html>
More information about the labnetwork
mailing list