[labnetwork] Ebeam evaporation of Ge2Sb2Se5 - risks?
Christophe Clément
christophe.clement at polymtl.ca
Sun Apr 17 14:30:19 EDT 2022
Hello Labnetwork community
We have a user that want to use our shared Ebeam evaporator to deposit Ge2Sb2Se5 material.
As the tool is used by all of our user, I do not want to contaminate the chamber with something potentially toxic.
Does any of you can share expericence with such material? Cleaning method, prefered deposition way: Ebeam or sputtering ?
Thank you for your help
Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) [ http://www.gcmlab.ca/ | www.gcmlab.ca ]
Ecole Polytechnique de Montréal [ http://www.polymtl.ca/ | www.polymtl.ca ]
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4
8 [ mailto:christophe.clement at polymtl.ca | christophe.clement at polymtl.ca ]
( 514 340 4711 #2417
Fax : 514 340 5195
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