[labnetwork] Refill ALD Cylinders
Tony L Olsen
tony.olsen at utah.edu
Thu Apr 21 12:50:54 EDT 2022
Does anybody have a source to re-use/refill ALD cylinders? We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.). It seems a waste to dispose of them, if they can be re-used. I've found a couple companies that supposedly provide this service, but they have not responded to my inquiries. Hoping there is a good track record with someone out there.
tonyO
Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Drive, Suite 2500
Salt Lake City, UT 84112
801-587-0651
www.nanofab.utah.edu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220421/fb5528ed/attachment.html>
More information about the labnetwork
mailing list