[labnetwork] Refill ALD Cylinders

[Eric Deguns]

Hi Tony,

Most of the standard ALD precursors vendors will "clean and refill" cylinders for you - but they will charge you a cleaning fee.  By this, I mean - Strem, Air Liquide, Gelest, etc. Sometimes this cleaning fee can be quite expensive which makes it more cost effective to purchase new ones.

If you have personnel in the Chemistry department who can refill these cylinders in an appropriate glovebox, refilling on top of the same material is also possible.  For example, filling TMA into a empty cylinder which previously held TMA. Proper training and equipment is key here.

For some applications, you many not want to do a refill depending on the precursor "stickiness" or it's purity requirements.

Hope that helps.

Best,

Eric

P.S. My work contact is Edeguns at veeco.com



Sent from my iPhone

> On Apr 21, 2022, at 4:02 PM, Tony L Olsen <tony.olsen at utah.edu> wrote:
> 
> 
> Does anybody have a source to re-use/refill ALD cylinders?  We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to dispose of them, if they can be re-used.  I’ve found a couple companies that supposedly provide this service, but they have not responded to my inquiries.  Hoping there is a good track record with someone out there.
>  
> tonyO
>  
>  
> Tony Olsen
> Nanofab Cleanroom Supervisor/Process Engineer
> University of Utah
> 36 S Wasatch Drive, Suite 2500
> Salt Lake City, UT  84112
> 801-587-0651
> www.nanofab.utah.edu
>  
>  
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