[labnetwork] Refill ALD Cylinders

[Bruce Tolleson]

Hi Tony,
  We use Strem Chemical to clean and refill all of our precursors.  They are easy to work with and turn them around in short order.
Strem has a Cylinder Refill form on their web site with the instructions and phone numbers.
  I hope this helps,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(315) 573-6263
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Eric Deguns
Sent: Thursday, April 21, 2022 4:12 PM
To: Tony L Olsen <tony.olsen at utah.edu>
Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Refill ALD Cylinders

Hi Tony,

Most of the standard ALD precursors vendors will "clean and refill" cylinders for you - but they will charge you a cleaning fee.  By this, I mean - Strem, Air Liquide, Gelest, etc. Sometimes this cleaning fee can be quite expensive which makes it more cost effective to purchase new ones.

If you have personnel in the Chemistry department who can refill these cylinders in an appropriate glovebox, refilling on top of the same material is also possible.  For example, filling TMA into a empty cylinder which previously held TMA. Proper training and equipment is key here.

For some applications, you many not want to do a refill depending on the precursor "stickiness" or it's purity requirements.

Hope that helps.

Best,

Eric

P.S. My work contact is Edeguns at veeco.com<mailto:Edeguns at veeco.com>


Sent from my iPhone


On Apr 21, 2022, at 4:02 PM, Tony L Olsen <tony.olsen at utah.edu<mailto:tony.olsen at utah.edu>> wrote:

Does anybody have a source to re-use/refill ALD cylinders?  We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to dispose of them, if they can be re-used.  I’ve found a couple companies that supposedly provide this service, but they have not responded to my inquiries.  Hoping there is a good track record with someone out there.

tonyO


Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Drive, Suite 2500
Salt Lake City, UT  84112
801-587-0651
www.nanofab.utah.edu


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