[labnetwork] [URL Verdict: Neutral][Non-DoD Source] Re: Iridium sputter target?
Burke, Robert A CTR USARMY DEVCOM ARL (USA)
robert.a.burke96.ctr at army.mil
Fri Apr 22 10:20:44 EDT 2022
Hi Brian,
We might be able to help. We have an 8” Ir target on one of our sputter systems that we use for Ir and IrO2 sputtering. The heater is currently down for that system so we would only be able to do room temperature depositions.
Best Regards,
Rob
Robert Burke
Cleanroom Operations Manager
U.S. Army Research Laboratory
2800 Powder Mill Road
Adelphi, Maryland 20783
Bldg. 207 | Z3D-42 | Tel: 301-394-1277
General Technical Services, LLC
1451 Route 34 South - Suite 301
Wall Township, NJ 07727
Tel: 732-280-2022 (Main) | Fax: 732-681-9314
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of N Shane Patrick
Sent: Thursday, April 21, 2022 5:27 PM
To: Macdonald, Robert (GE Research, US) <robert.macdonald at ge.com>
Cc: labnetwork at mtl.mit.edu
Subject: [URL Verdict: Neutral][Non-DoD Source] Re: [labnetwork] Iridium sputter target?
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I don’t know who else on campus might be running a system for that, but we, at least, don’t currently have Iridium capability.
N. Shane Patrick
Manager, Lab Operations and Safety
Electron Beam Lithography
Washington Nanofabrication Facility (WNF)
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington - NanoES
Fluke Hall 129, Box 352143
(206) 221-1045
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On Apr 21, 2022, at 9:08 AM, Macdonald, Robert (GE Research, US) <robert.macdonald at ge.com < Caution-mailto:robert.macdonald at ge.com > > wrote:
UW Seattle used to have an 8” target (yes, 8”!). You can check with them?
From: labnetwork <labnetwork-bounces at mtl.mit.edu < Caution-mailto:labnetwork-bounces at mtl.mit.edu > > On Behalf Of Zhichao Wang
Sent: Wednesday, April 20, 2022 1:46 PM
To: julia.aebersold at louisville.edu < Caution-mailto:julia.aebersold at louisville.edu >
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Subject: EXT: Re: [labnetwork] Iridium sputter target?
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The same situation there. We were asked for Ir sputtering last month. The cost of a 3 inch target is more than $100,000 from the quote that we got from a supplier. That stops us from proceeding with the project.
Best,
Chao
--
Zhichao (Chao) Wang, Ph.D.
Nano Process Specialist
UDNF
University of Delaware
Pronouns: He/Him/His
------------------------
Office Number:(302) 831-4839
221 Academy St.,RM170
Newark, DE 19711
On Wed, Apr 20, 2022 at 1:11 PM Aebersold,Julia W. <julia.aebersold at louisville.edu < Caution-mailto:julia.aebersold at louisville.edu > > wrote:
We were also asked to deposit iridium last year and the cost of the 3” target immediately stopped the project.
Cheers!
Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY 40292
(502) 852-1572
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From: labnetwork <labnetwork-bounces at mtl.mit.edu < Caution-mailto:labnetwork-bounces at mtl.mit.edu > > On Behalf Of Brian K. Olmsted
Sent: Tuesday, April 19, 2022 1:03 PM
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Subject: [labnetwork] Iridium sputter target?
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Hi,
I've got a prospective customer interested in sputtering iridium. We don't have an iridium target and it probably doesn't make a lot of sense for us to purchase one for extremely limited interest/use. However, if there is another lab that has this capability I would be happy to steer them to you for at least this step in their process.
Any information or help is appreciated.
Thanks,
Brian K. Olmsted
Associate Director of Laboratory Operations
University of Minnesota | MNC
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