[labnetwork] Diffusion ZnO on InAs in forming gas

[Steffen, Paul]

Michael,

It's ZnO films deposited with ALD.

-Paul

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Beaudoin, Mario <beaudoin at physics.ubc.ca>
Sent: Tuesday, August 30, 2022 7:22:12 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Diffusion ZnO on InAs in forming gas

I never allow Zn containing materials to be deposited in any of my chambers.   Exactly for that reason. Mario On 2022-08-30 2: 13 p. m. , Brian K. Olmsted wrote: ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍


I never allow Zn containing materials to be deposited in any of my chambers.  Exactly for that reason.

Mario

On 2022-08-30 2:13 p.m., Brian K. Olmsted wrote:
[CAUTION: Non-UBC Email]
Hi Paul,

Others may want to add to this with their experiences, but I have used ZnO in a retort furnace using a forming gas environment and the net result was Zn contamination so bad and persistent that the furnace was decommissioned and could not be used anymore.

Thanks,

Brian

On Tue, Aug 30, 2022 at 2:36 PM Steffen, Paul <steffen.8 at osu.edu<mailto:steffen.8 at osu.edu>> wrote:

Lab Network Community,



We have a request to diffuse ZnO on InAs in forming gas at 450 C for 1 hour in a horizontal furnace tube. Does anyone have experience with these materials in forming gas? Would the forming gas react with either material leading to decomposition and contamination of the furnace tube with Zn or As?



Thanks.



-Paul





[The Ohio State University]
Paul Steffen
Lab Manager
Institute for Materials Research Nanotech West Lab
100 Science Village, 1381 Kinnear Road, Columbus, OH 43212
614-688-3546 Office / 614-688-3379 Fax
steffen.8 at osu.edu<mailto:steffen.8 at osu.edu> nanotech.osu.edu<http://nanotech.osu.edu>



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[cid:part2.202xrLaG.PcQhbGh8 at physics.ubc.ca]
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