[labnetwork] Looking for an MFC

Paolini, Steven spaolini at cns.fas.harvard.edu
Thu Dec 8 12:08:53 EST 2022


Hello Fabbers!
  I need an MKS "G" series MFC for 100% SiH4. It needs to have male VCR connections, a 15 pin sub D electrical interface, all metal seals, and a 100sccm range.
I ordered one from the manufacturer but the lead time is extraordinary.  We are willing to pay top dollar for one if someone should have a match.
  Thanks!
  Equipment Dood

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

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