[labnetwork] HEPA/ULPA Filter Experience?

Wed Feb 16 16:16:10 EST 2022

Ron,

Typically I measure the pressure drop across a new filter at installation. When the Magnehelic shows the drop has doubled, I replace the filters.

Are you seeing excessive current draw on the FFUs or low face velocities? I concur with Deon’s comments about prefilters.

I’ve also experienced high levels of boron-based contamination due to the borosilicate glass fiber in the filters. In that case, the filters need immediate replacement.

Email me directly if you have further questions.

Regards,
Jeff

Jeff Salzmann
Senior Research Engineer
Advanced Materials Technology Group

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Collins, Deon
Sent: Wednesday, February 16, 2022 2:45 PM
To: Reger, Ronald K <rreger at purdue.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] HEPA/ULPA Filter Experience?

CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.
Deon Collins from Holonyak lab University of Illinois

Our facility has replaced HEPA filters lab independent as well as the entire cleanroom once. Our HEPA’s filter are molded into the supply side(ceiling) with no temporary seals. The filters are bolted into the ceiling as well as caulked into the structure itself, so replacement is labor intensive.

Do you have any particle count trends to go by? Do you have any Magnehelic trends to go by? If you are seeing a high delta between the two in conjunction with high particle counts it is time.

If your maintenance group has done a good job of maintaining the pre filters HEPA filters will see prolonged life. If the pre filters have been ignored the HEPA filters will suffer.

As mentioned below your ductwork integrity has a profound effect on your system. You could see an individual lab with excellent results while the lab adjacent is suspect.

Deon D. Collins

FACILITY MANAGER
Holonyak Lab
University of Illinois at Urbana-Champaign
208 N Wright St Rm. 248 | 2250
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>

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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Reger, Ronald K
Sent: Tuesday, January 25, 2022 2:30 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] HEPA/ULPA Filter Experience?

Dear Colleagues,

The cleanroom here at the Purdue Birck Nanotechnology Center is in its 17th year, and we're starting to see increased frequency on some typical and expected maintenance items.  And while we haven't had any catastrophic failures yet in our HEPA & UPLA filters we are wondering when they may need some serious attention/replacement.  All along we've had to replace an occasional filter panel due to some deterioration of a seal or maybe an inadvertent puncture, but we haven't had any wholesale replacement of complete banks or bays yet.

We're wondering what other nanofabs have experienced in terms of HEPA/ULPA filter replacements?  Is there a target date (~ 20 years, 25 years?) at which filters fail and entire bays are replaced?  Are seals degrading at a certain time as shown with increasing particle counts?  Have different nanofabs experienced vastly different durations for the quality of filtration?

Any insight into filter degradation & replacement experience would be greatly appreciated as we plan for the next few years of maintenance items in our fab.

Thanks very much for your information.

Ron

Ron Reger
Engineering Manager
Birck Nanotechnology Center | Room 2289 |
Office:  765.494.6667 | Email: rreger at purdue.edu<mailto:rreger at purdue.edu>
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