From cbayram at illinois.edu Mon Jan 3 14:24:42 2022 From: cbayram at illinois.edu (Bayram, Can) Date: Mon, 3 Jan 2022 19:24:42 +0000 Subject: [labnetwork] Job Openings, Holonyak Micro and Nanotechnology Laboratory at The Grainger College of Engineering, University of Illinois Urbana-Champaign Message-ID: Holonyak Micro and Nanotechnology Laboratory at The Grainger College of Engineering, University of Illinois Urbana-Champaign has TWO openings: - Cleanroom Engineer https://jobs.illinois.edu/academic-job-board/job-details?jobID=157255&job=cleanroom-engineer-micro-and-nanotechnology-laboratory-157255 - Research Engineer https://jobs.illinois.edu/academic-job-board/job-details?jobID=157257&job=research-engineer-micro-and-nanotechnology-laboratory-157257 The closing date for the searches is February 21st. HMNTL is one of the country's largest and most sophisticated university facilities for conducting photonics, microelectronics, biotechnology, and nanotechnology research. Our 15 class 100 and 1000 cleanrooms, 46 general purpose labs, and 2,500 square foot biosafety level-2 bionanotechnology complex contain all the tools researchers need to conduct their work. More details at https://mntl.illinois.edu/ Please apply directly through the provided links. -- CAN BAYRAM Assoc. Prof. of Electrical and Computer Engineering, Innovative COmpound semiconductoR LABoratory (ICORLAB), Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign Nick Holonyak, Jr Micro and Nanotechnology Laboratory Office # 3264 208 North Wright Street Urbana, IL 61801 Office Phone: +1 (217) 300-0978 Cell Phone: +1 (847) 863-6991 Email: cbayram at illinois.edu Web page: icorlab.ece.illinois.edu [cid:image001.png at 01D800A5.43252020] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 5363 bytes Desc: image001.png URL: From ahryciw at ualberta.ca Tue Jan 4 12:09:49 2022 From: ahryciw at ualberta.ca (Aaron Hryciw) Date: Tue, 4 Jan 2022 10:09:49 -0700 Subject: [labnetwork] Metered chemical dispensing? In-Reply-To: References: Message-ID: Hello all, Happy New Year, and many thanks for everyone's comments and suggestions. To summarise, there were largely three classes of suggestions to deal with this issue (tracking chemical use, and encouraging chemical conservation, for cleanroom users). In escalating order of effort to implement: 1. *Policy-based approaches:* Tighten up SOPs to include permissible chemical volumes, identify users who are using unnecessarily large amounts of chemicals, and re-educate/warn/discipline/charge them if the behaviour continues. Update SOPs/policies as new legitimate cases emerge. 2. *Manual logging of chemical use: *Have users track their chemical consumption by logging the volume or weight of chemical used per tool session, whether in a physical logbook or via electronic means (e.g., incorporated into lab management software). This would both capture the actual chemical usage, allowing it to be charged back to the user, if desired, as well as encourage users to limit their chemical consumption, since knowing that they are being tracked should make them conscious of their own wastage. 3. *Automated chemical metering:* Integrate some method of estimating actual chemical use (e.g., MFC voltage for gas flow, pulse counters for ALD precursors or liquid flow control valves) with one's lab management software, such that the entire process is automated. Significant effort is likely required from both equipment engineering and software/computer engineering teams. Thank-you again for the discussion and your experiences. Cheers, ? Aaron Aaron Hryciw, PhD, PEng Fabrication Group Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Canada T6G 2V4 Ph: 780-940-7938 www.nanofab.ualberta.ca On Wed, Dec 22, 2021 at 3:39 AM Owain Clark wrote: > Another vote that unless you have the spare resources to dedicate to > implementing and maintaining a non-trivial technical solution your most > efficient first pass solution would likely be to tighten up on SOPs, and > identify the users that are using unusual quantities of chemicals ? find > out why and then try to improve/substitute the process in question or > re-educate them in correct use as needed. > > > > We only charge for gold use in evaporators (per g, crucible weighed > before/after) and e-beam lith. chemicals issued to users (ZEP/E-spacer by > ml issued). Other expensive consumables are purchased privately per > research group. The method is quite old school, users fill in a log book as > needed, a spreadsheet is summarised, and finance make the transactions > between project codes once per month. > > > > Other than that charges for common consumables > (IPA/acetone/NMP/caustics/gases etc) are averaged into the yearly rate > setting process and so far that seems to work fine. > > > > Regards, Owain > > > > *From:* labnetwork *On Behalf Of *James > Mitchell > *Sent:* 21 December 2021 21:50 > *To:* Aaron Hryciw > *Cc:* Fab Network > *Subject:* Re: [labnetwork] Metered chemical dispensing? > > > > *CAUTION:* This e-mail originated outside the University of Southampton. > > Why not charge by process the user is doing. Standardized processes would > include how much chemical would be used in a SOP. If a user abuses the > process limits they would pay a surcharge for the extra chemical they used. > If the excessive chemical usage continues the user would no longer be > welcomed. > > > > Jim > > > > On Tue, Dec 21, 2021, 4:14 PM Aaron Hryciw wrote: > > Hi all, > > > > In our open-access cleanroom, we provide common chemicals "free of > charge", in the sense that there is no additional charge to use them apart > from the tool time (e.g., hourly rate for wet deck login). This includes > such chemicals as acetone, IPA, photoresist developers, standard metal wet > etchants, KOH, etc.; the cost of supplying the chemical is (at least in > principle) wrapped up into the tool rate. I believe that this is a fairly > standard approach among cleanrooms in academic settings. > > > > A shortcoming of this approach is that high-volume chemical users are > being charged the same as low-volume chemical users; there is also no > (financial) incentive for users to limit their chemical usage to just the > volume they need. We are therefore looking into ways in which we can > capture the actual volume of chemicals used by each user, at least for some > high-value and/or high-volume chemicals, such that billing for > chemical usage can be applied more fairly. As global supply chain issues > have increased the cost of chemicals, this is becoming even more important. > > > > Ideally, the method of capturing usage should be largely automated (e.g., > not just a physical chemical use logbook at each wet deck), such that it > does not take a lot of staff bandwidth to administrate, and should not rely > on the honour system only (e.g., logging usage of a material in our lab > management software), to ensure compliance. > > > > One approach we have been considering is having some kind of metered > chemical dispensing. For instance, the piranha wet deck would be plumbed > with dispensers (e.g., chemical-compatible metering pumps) for sulfuric > acid and hydrogen peroxide, perhaps drawing from large drums of the stock > chemicals housed remotely (e.g., in a subfab or service chase). A > qualified user would login to the dispenser (via our lab > management software), dispense the required volumes of the chemicals, > logout, and the volume used would be tracked and automatically logged to > their account. > > > > I expect that such a scheme is not as simple as it seems, and that there > are probably a host of engineering, software, and other logistical problems > that would need to be solved to implement this safely and effectively, at > least if a turnkey solution for this does not already exist. Has anyone > implemented anything like this in their own cleanroom? Or is this a > horribly over-engineered solution to a relatively minor problem? I'd be > very interested in hearing how others have dealt with the problem of > charging users fairly for chemical usage. > > > > Cheers, > > > > ? Aaron > > > > > > > Aaron Hryciw, PhD, PEng > > Fabrication Group Manager > > University of Alberta - nanoFAB > > W1-060 ECERF Building > > 9107 - 116 Street > > Edmonton, Alberta > > Canada T6G 2V4 Ph: 780-940-7938 > > www.nanofab.ualberta.ca > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From na2661 at columbia.edu Wed Jan 5 10:27:55 2022 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Wed, 5 Jan 2022 10:27:55 -0500 Subject: [labnetwork] CNI at Columbia University is hiring Message-ID: <017b01d80248$d04c1ea0$70e45be0$@columbia.edu> Dear all, CNI labs are still accepting applications for two positions: 1. Shared Materials Characterization Lab Director: http://apply.interfolio.com/98374 2. Cleanroom Engineer: https://apply.interfolio.com/100101 Come and work with us in the (still) greatest city in the world J Happy New Year! Nava Nava Ariel-Sternberg, Ph.D. Director of CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From terreb at umich.edu Wed Jan 5 12:59:22 2022 From: terreb at umich.edu (Terre Briggs) Date: Wed, 5 Jan 2022 12:59:22 -0500 Subject: [labnetwork] LPCVD film anomaly In-Reply-To: References: Message-ID: Sorry for the delayed response but we just recently finished up the work needed to fix our bubble issue. The cause of the problem was condensation of the DCS in the gas delivery lines. Our fix was to replace all of the DCS gas delivery lines and their components within the furnace gas box. All 3 tubes now have bubble free Nitride, HTO and LSN films. Thanks to everyone who responded to our request for help in solving this issue. Terre On Tue, Aug 3, 2021 at 9:06 AM Terre Briggs wrote: > Hello All, > We are currently having film quality issues with our LPCVD Low Stress > Nitride, HTO and Nitride films. Without getting into all of the details > just yet I am sharing with you some SEM images. The anomaly, as our furnace > manufacturer describes it, are what look like spheres, or bubbles on the > surface of the films. We are pretty confident that the spheres are only on > the surface and not down into the film itself. > It is very random across the wafers and across the wafer load. After > further processing, the spheres come off and leave behind a divot, or > crater on the surface. This can also be seen in the SEM images. > My question is, has anyone ever seen anything like this with any of > your LPCVD films? I have been working with Tempress for the last several > months to resolve the issue, but they have never seen anything like > this, and so far we have not made any progress in determining the source. > Any help would be appreciated. > > Thanks.....Terre > > Terre Briggs > Engineer in Research Sr. > Lurie Nanofabrication Laboratory > University of Michigan > 1301 Beal Ave. > Ann Arbor, MI 48109 > 734-320-4470 > > -- Terre Briggs Engineer in Research Sr. Lurie Nanofabrication Laboratory University of Michigan 1301 Beal Ave. Ann Arbor, MI 48109 734-320-4470 -------------- next part -------------- An HTML attachment was scrubbed... URL: From aandreib at gmail.com Wed Jan 5 17:00:24 2022 From: aandreib at gmail.com (Andrei Alamariu) Date: Wed, 5 Jan 2022 17:00:24 -0500 Subject: [labnetwork] LPCVD film anomaly In-Reply-To: References: Message-ID: Hello, A hell of a work indeed! Usually /most frequent the replacement of the DCS gas delivery line, is just its section from the Quartz tube injector end to the Down-Stream valve. Not the whole gas jungle. Sometime during Quartz tube replacement the air gets into that line section if a cap is not placed on immediately with N2 purge flow on: close the N2 purge valve after the the line was capped. Thanks, Andrei Sent from my iPad > On Jan 5, 2022, at 3:42 PM, Terre Briggs wrote: > ? > Sorry for the delayed response but we just recently finished up the work needed to fix our bubble issue. The cause of the problem was condensation of the DCS in the gas delivery lines. Our fix was to replace all of the DCS gas delivery lines and their components within the furnace gas box. All 3 tubes now have bubble free Nitride, HTO and LSN films. Thanks to everyone who responded to our request for help in solving this issue. > > Terre > > On Tue, Aug 3, 2021 at 9:06 AM Terre Briggs wrote: >> Hello All, >> We are currently having film quality issues with our LPCVD Low Stress Nitride, HTO and Nitride films. Without getting into all of the details just yet I am sharing with you some SEM images. The anomaly, as our furnace manufacturer describes it, are what look like spheres, or bubbles on the surface of the films. We are pretty confident that the spheres are only on the surface and not down into the film itself. >> It is very random across the wafers and across the wafer load. After further processing, the spheres come off and leave behind a divot, or crater on the surface. This can also be seen in the SEM images. >> My question is, has anyone ever seen anything like this with any of your LPCVD films? I have been working with Tempress for the last several months to resolve the issue, but they have never seen anything like this, and so far we have not made any progress in determining the source. Any help would be appreciated. >> >> Thanks.....Terre >> >> Terre Briggs >> Engineer in Research Sr. >> Lurie Nanofabrication Laboratory >> University of Michigan >> 1301 Beal Ave. >> Ann Arbor, MI 48109 >> 734-320-4470 > > > -- > Terre Briggs > Engineer in Research Sr. > Lurie Nanofabrication Laboratory > University of Michigan > 1301 Beal Ave. > Ann Arbor, MI 48109 > 734-320-4470 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jeffrey.Salzmann at integer.net Thu Jan 6 13:10:25 2022 From: Jeffrey.Salzmann at integer.net (Salzmann, Jeffrey) Date: Thu, 6 Jan 2022 18:10:25 +0000 Subject: [labnetwork] Looking for PFA or PTFE carriers for thicker wafers Message-ID: Hello! I am working with 100mm wafers, but they?re up to 2mm thick (versus the standard 525/625?m). Does anyone have a recommendation or contact I could use to procure these? Thanks! Jeff Jeff Salzmann Senior Research Engineer Advanced Materials Technology Group Integer* 10000 Wehrle Drive Clarence, NY, 14031 Tel +1 716.759.5796 Cell +1 716.867.1302 Jeffrey.Salzmann at integer.net www.integer.net * Integer comprises the following companies: Greatbatch Medical -?? Lake Region Medical -?? Electrochem ________________________________ Integer Confidentiality Notice: This electronic mail transmission is intended for the use of the individual or entity to which it is addressed and may contain confidential or proprietary information belonging to the sender. If you are not the intended recipient, you are hereby notified that any disclosure, copying, distribution, or the taking of any action in reliance on the contents of this information is strictly prohibited. If you have received this transmission in error, please notify the sender immediately by e-mail and delete the original message. Thank you for your cooperation. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahryciw at ualberta.ca Thu Jan 6 16:55:01 2022 From: ahryciw at ualberta.ca (Aaron Hryciw) Date: Thu, 6 Jan 2022 14:55:01 -0700 Subject: [labnetwork] Looking for PFA or PTFE carriers for thicker wafers In-Reply-To: References: Message-ID: Hi Jeff, We got a PFA cassette for thick 100 mm wafers last year from Pozzetta . The part number was CR100A-EMF, and it accommodated 12 wafers up to 6.28 mm thick. Hope this helps. Cheers, ? Aaron Aaron Hryciw, PhD, PEng Fabrication Group Manager University of Alberta - nanoFAB W1-060 ECERF Building 9107 - 116 Street Edmonton, Alberta Canada T6G 2V4 Ph: 780-940-7938 www.nanofab.ualberta.ca On Thu, Jan 6, 2022 at 2:46 PM Salzmann, Jeffrey < Jeffrey.Salzmann at integer.net> wrote: > Hello! > > I am working with 100mm wafers, but they?re up to 2mm thick (versus the > standard 525/625?m). > > > > Does anyone have a recommendation or contact I could use to procure these? > > > > Thanks! > Jeff > > > > *Jeff Salzmann* > > Senior Research Engineer > > Advanced Materials Technology Group > > > > *Integer* * > > 10000 Wehrle Drive > > Clarence, NY, 14031 > > Tel +1 716.759.5796 > > Cell +1 716.867.1302 > > Jeffrey.Salzmann at integer.net > > www.integer.net > > > > ** Integer comprises the following companies: * > > Greatbatch Medical -?? Lake Region Medical -?? Electrochem > > > > ------------------------------ > > Integer Confidentiality Notice: This electronic mail transmission is > intended for the use of the individual or entity to which it is addressed > and may contain confidential or proprietary information belonging to the > sender. If you are not the intended recipient, you are hereby notified that > any disclosure, copying, distribution, or the taking of any action in > reliance on the contents of this information is strictly prohibited. If you > have received this transmission in error, please notify the sender > immediately by e-mail and delete the original message. Thank you for your > cooperation. > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From lino.eugene at uwaterloo.ca Fri Jan 7 11:59:18 2022 From: lino.eugene at uwaterloo.ca (Lino Eugene) Date: Fri, 7 Jan 2022 16:59:18 +0000 Subject: [labnetwork] Looking for PFA or PTFE carriers for thicker wafers In-Reply-To: References: Message-ID: Hi Jeffrey, ePAK modifies their standard wafer cassettes by removing teeth to make the slots larger. It is probably the same process for other companies. They can modify their standard PFA cassette eWB0309. You need to make sure that the outline fits with your SRD. Best, Lino Eugene, P.Eng., Ph.D., Micro/nanofabrication process engineer Quantum Nano-Fabrication and Characterization Facility QNC 1611 University of Waterloo 200 University Avenue West Waterloo, ON, Canada N2L 3G1 Ph: +1 519-888-4567 #37788 Cell: +1 226-929-1685 Website: https://qnfcf.uwaterloo.ca/ From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Salzmann, Jeffrey Sent: January 6, 2022 13:10 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Looking for PFA or PTFE carriers for thicker wafers Hello! I am working with 100mm wafers, but they?re up to 2mm thick (versus the standard 525/625?m). Does anyone have a recommendation or contact I could use to procure these? Thanks! Jeff Jeff Salzmann Senior Research Engineer Advanced Materials Technology Group Integer* 10000 Wehrle Drive Clarence, NY, 14031 Tel +1 716.759.5796 Cell +1 716.867.1302 Jeffrey.Salzmann at integer.net www.integer.net * Integer comprises the following companies: Greatbatch Medical -?? Lake Region Medical -?? Electrochem ________________________________ Integer Confidentiality Notice: This electronic mail transmission is intended for the use of the individual or entity to which it is addressed and may contain confidential or proprietary information belonging to the sender. If you are not the intended recipient, you are hereby notified that any disclosure, copying, distribution, or the taking of any action in reliance on the contents of this information is strictly prohibited. If you have received this transmission in error, please notify the sender immediately by e-mail and delete the original message. Thank you for your cooperation. -------------- next part -------------- An HTML attachment was scrubbed... URL: From rlc12 at cornell.edu Fri Jan 7 12:16:17 2022 From: rlc12 at cornell.edu (Rebecca Lee Vliet) Date: Fri, 7 Jan 2022 17:16:17 +0000 Subject: [labnetwork] CNF TCN VIRTUAL Short Course - REGISTRATION DEADLINE: 1/10/22 Message-ID: The registration deadline for the CNF TCN is Monday, January 10, 2022. CNF Technology & Characterization at the Nanoscale (CNF TCN) VIRTUAL Short Course January 19, 2022 - January 21, 2022 The CNF TCN is going virtual for January 2022! The virtual shorts course will be held Wednesday, January 19, 2022 - Friday, January 21, 2022, daily from 11:00am to 4:00pm (EDT). Each day offers lectures and laboratory demonstrations designed to impart a broad understanding of the science and technology required to undertake research in nanoscience. TCN is an ideal way for faculty, students, post docs and staff members to rapidly come up to speed in many of the technologies that users of the CNF need to employ. Members of the high tech business community will also find it an effective way to learn best practices for success in a nanofab environment. Attendance is open to the general scientific community. Note: The short course does not replace the three part training required to become a user of our facility. To become a CNF user, please visit the "Getting Started" link (https:cnf.cornell.edu/howto) on the CNF website. For more information and to register visit: https://cnf.cornell.edu/education/tcn -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Announcement_January2022_EMAIL.jpg Type: image/jpeg Size: 205208 bytes Desc: Announcement_January2022_EMAIL.jpg URL: From dcchrist at wisc.edu Mon Jan 10 13:10:18 2022 From: dcchrist at wisc.edu (Daniel Christensen) Date: Mon, 10 Jan 2022 18:10:18 +0000 Subject: [labnetwork] Survey on 2022 UGIM Conference attendance Message-ID: Hi Labnetwork Community, The University of Wisconsin-Madison has been trying to host the UGIM conference. It was first scheduled in the summer of 2020 and was postponed due to COVID. Subsequently it was postponed again in 2021. We are trying to judge the potential attendance for a UGIM for this summer. Please respond to this brief survey so that we can better understand the likelihood of an in-person conference being successful. The survey is found here: https://docs.google.com/forms/d/e/1FAIpQLSc2iW3A4i2sKmKM6Np3BwmGTdk4s6TC5NfNE33Y4cuu6RxgAg/viewform?vc=0&c=0&w=1&flr=0 Currently UGIM 2020 -> 2022 is scheduled is for June 6-9 of 2022. For more information, the website for the conference is: https://ugim2020.wisc.edu/ Thank you! Dan Christensen & Jerry Hunter University of Wisconsin-Madison -------------- next part -------------- An HTML attachment was scrubbed... URL: From rlschoeppner at ucsb.edu Mon Jan 10 15:59:02 2022 From: rlschoeppner at ucsb.edu (Rachel Schoeppner) Date: Mon, 10 Jan 2022 12:59:02 -0800 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs Message-ID: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Good Afternoon and Happy Monday! I am looking into developing a recycling program for uncontaminated disposable gloves that my facility goes through in abundant quantities, with the eventual goal of expanding to similar labs on campus. It has become glaringly obvious that our facility, and ones like ours, use a vast number of gloves that just end up in a landfill to decompose over the course of many years to decades. I am hoping to start working to divert this waste stream and recycle as many gloves as we can by starting a disposable glove recycling program here at UCSB. So as I am starting to gather data and more information about the best way to go about this, I was wondering if any of your labs have looked into similar initiatives that have been or are currently successful. If so, I would be very interested to know how these programs were started, what companies you might go through for the recycling since most public recycling centers do not process these types of plastics, and any ideas for how to make the program financially viable (break-even, not turn a profit) rather than a drain on resources, which could lead to the eventual failure of the program. Thanks so much for your time! All the best, Rachel ? Rachel Schoeppner, Ph.D Nanostructure Cleanroom Facility Manager California NanoSystems Institute (CNSI) University of California, Santa Barbara rlschoeppner at ucsb.edu rachel at cnsi.ucsb.edu (805)893-2296 -------------- next part -------------- An HTML attachment was scrubbed... URL: From logence at uc.cl Wed Jan 12 09:38:27 2022 From: logence at uc.cl (=?UTF-8?Q?Lo=c3=afk_Gence?=) Date: Wed, 12 Jan 2022 11:38:27 -0300 Subject: [labnetwork] Student access to SEM and EBL-SEM Message-ID: Dear All, I hope you are all fine. I was wondering how you are managing the access to SEM and EBL-SEM, for your researchers. Here, de do have 2 SEM's in our faculty, one with EBL.? The access is mainly through service for SEM imaging. Are the undergraduate, and postgraduate students allowed to be independent users ? Besides the training for being a cleanroom user, which level of training is requested to get freely access to SEM? I thank you for your feedback! Best, Lo?k -- Dr. Lo?k Gence Assistant Professor Functional Materials & Devices Lab Pontificia Universidad Cat?lica de Chile Avda. Vicu?a Mackenna 4860, CP 7820436 Santiago Lab: +56 95504 9648 www.lgdeviceslab.com From julia.aebersold at louisville.edu Wed Jan 12 12:29:22 2022 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Wed, 12 Jan 2022 17:29:22 +0000 Subject: [labnetwork] Student access to SEM and EBL-SEM In-Reply-To: References: Message-ID: We use interlocks via FOM software on our tools that controls access and usage. The software also lets us keep track of usage for billing and manages training requests. Once a person is trained then they have access to the facility and instruments that are trained on. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ ________________________________ From: labnetwork on behalf of Lo?k Gence Sent: Wednesday, January 12, 2022 9:38 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Student access to SEM and EBL-SEM [You don't often get email from logence at uc.cl. Learn why this is important at http://aka.ms/LearnAboutSenderIdentification.] CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Dear All, I hope you are all fine. I was wondering how you are managing the access to SEM and EBL-SEM, for your researchers. Here, de do have 2 SEM's in our faculty, one with EBL. The access is mainly through service for SEM imaging. Are the undergraduate, and postgraduate students allowed to be independent users ? Besides the training for being a cleanroom user, which level of training is requested to get freely access to SEM? I thank you for your feedback! Best, Lo?k -- Dr. Lo?k Gence Assistant Professor Functional Materials & Devices Lab Pontificia Universidad Cat?lica de Chile Avda. Vicu?a Mackenna 4860, CP 7820436 Santiago Lab: +56 95504 9648 https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.lgdeviceslab.com%2F&data=04%7C01%7Cjulia.aebersold%40louisville.EDU%7Ca19897c437474a927f1608d9d5ec9c23%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637776034500110790%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=bK3gpfp1ycjv%2FBdJuOrqBXUGCXIySOewKUYJkymCCpY%3D&reserved=0 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=04%7C01%7Cjulia.aebersold%40louisville.EDU%7Ca19897c437474a927f1608d9d5ec9c23%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637776034500110790%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=qLqp%2BzcAffq3R%2F4DG1XobtJHoWVD%2BrN8fVt6la0oBE0%3D&reserved=0 -------------- next part -------------- An HTML attachment was scrubbed... URL: From fsflack at wisc.edu Wed Jan 12 12:59:03 2022 From: fsflack at wisc.edu (Frank Flack) Date: Wed, 12 Jan 2022 17:59:03 +0000 Subject: [labnetwork] Student access to SEM and EBL-SEM In-Reply-To: References: Message-ID: Hi Lo?k, For our lab's EBL-SEM, all users, regardless of academic status, must undergo a training class to gain access to the instrument. After a practice session or two, they must then pass a proficiency demonstration if they want to make unrestricted reservations. I hope this helps. Feel free to email me for more info. Best, Frank Frank S. Flack Wisconsin Centers for Nanoscale Technology Rm. 3120 Engineering Centers Bldg. 1550 Engineering Drive Madison, WI 53706 ________________________________________ From: labnetwork on behalf of Lo?k Gence Sent: Wednesday, January 12, 2022 8:38 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Student access to SEM and EBL-SEM Dear All, I hope you are all fine. I was wondering how you are managing the access to SEM and EBL-SEM, for your researchers. Here, de do have 2 SEM's in our faculty, one with EBL. The access is mainly through service for SEM imaging. Are the undergraduate, and postgraduate students allowed to be independent users ? Besides the training for being a cleanroom user, which level of training is requested to get freely access to SEM? I thank you for your feedback! Best, Lo?k -- Dr. Lo?k Gence Assistant Professor Functional Materials & Devices Lab Pontificia Universidad Cat?lica de Chile Avda. Vicu?a Mackenna 4860, CP 7820436 Santiago Lab: +56 95504 9648 www.lgdeviceslab.com _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From logence at uc.cl Wed Jan 12 16:10:31 2022 From: logence at uc.cl (=?UTF-8?Q?Lo=c3=afk_Gence?=) Date: Wed, 12 Jan 2022 18:10:31 -0300 Subject: [labnetwork] Student access to SEM and EBL-SEM In-Reply-To: References: Message-ID: <1cecb33a-68aa-8cdd-e8cc-3597e47362f4@uc.cl> Dear All, I thank you very much for your time and all the input. Thank you Bill, Michael, Long, for the additional materials. The references, videos and docs help a lot! Stay safe! Best regards, Lo?k Le 12/01/2022 ? 14:19, Albert William (Bill) Flounders a ?crit?: > Loik Gence, > Very generic questions sometimes generate limited response. > However, I hope you get feedback on this broad question. > At the Berkeley NanoLab, graduate and postdoctoral researchers > are trained as independent users of SEM and EB litho. > These are some of the more complex and challenging tools for > researchers to become qualified. I think most academic labs on the > network > also make their tools available to individual users. > (TEM is sometimes restricted to "service by operator" due to the greater > expertise needed for sample prep - but many academic labs also train > researchers > to use TEM indpenedently. > > Our training materials are available for review. Our equipment manual > is here > https://nanolab.berkeley.edu/public/manuals/equipment_manual.shtml > Chapters 4.0 / 4.10 /? 8.80 may be useful. > > Cornell is hosting a lab wide training in the near future. > I will forward the link. I expect they would welcome a late registration. > > Regards to all at your facility. > Wishing you a Healthy New Year. > Sincerely, > Bill Flounders > UC Berkeley > > > > > On Wed, Jan 12, 2022 at 8:58 AM Lo?k Gence wrote: > > Dear All, > > > I hope you are all fine. > > > I was wondering how you are managing the access to SEM and > EBL-SEM, for > your researchers. Here, de do have 2 SEM's in our faculty, one with > EBL.? The access is mainly through service for SEM imaging. > > > Are the undergraduate, and postgraduate students allowed to be > independent users ? > > Besides the training for being a cleanroom user, which level of > training > is requested to get freely access to SEM? > > > > I thank you for your feedback! > > > Best, > > Lo?k > > > > > > -- > Dr. Lo?k Gence > Assistant Professor > Functional Materials & Devices Lab > Pontificia Universidad Cat?lica de Chile > Avda. Vicu?a Mackenna 4860, > CP 7820436 Santiago > Lab: +56 95504 9648 > www.lgdeviceslab.com > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Dr. Lo?k Gence Assistant Professor Functional Materials & Devices Lab Pontificia Universidad Cat?lica de Chile Avda. Vicu?a Mackenna 4860, CP 7820436 Santiago Lab: +56 95504 9648 www.lgdeviceslab.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From mvoorhis at purdue.edu Fri Jan 14 17:54:26 2022 From: mvoorhis at purdue.edu (Voorhis, Mark L.) Date: Fri, 14 Jan 2022 22:54:26 +0000 Subject: [labnetwork] Open Position at BNC: Nano Research Facility Engineer Message-ID: Dear Lab Network, We're looking for an individual who is ready to take their next giant leap as a Nano Research Facility Engineer for Purdue University. The Nano Research Facility Engineer will be an integral part of the operation and maintenance of a specialized nanotechnology research facility. The ideal candidate will be experienced and knowledgeable in sophisticated building automation systems, air handling systems for semiconductor ISO 3 classrooms, and industrial power systems. Please share this link with anyone you think might be interested in making their next move into a Purdue career: https://careers.purdue.edu/job/West-Lafayette-Nanotechnology-Research-Facility-Engineer-IN-47906/826261100/?utm_source=emailcampaign&utm_campaign=Lab Thank you, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center www.purdue.edu/discoverypark/birck/ mvoorhis at purdue.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From tatiana.pinedo at monash.edu Sun Jan 16 19:04:46 2022 From: tatiana.pinedo at monash.edu (Tatiana Pinedo Rivera) Date: Mon, 17 Jan 2022 11:04:46 +1100 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs In-Reply-To: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Message-ID: Dear Rachel, Sorry I do not have an answer for you. But we at the Melbourne Centre for Nanofabrication, one of the Australian National Fabrication Facility centres are extremely interested in setting up a similar program. We have a quite active Green Impact Team and we have been trying to make our cleanroom slightly less wasteful (for instance, we are encouraging reuse of epaks and wafer/sample carriers where possible (they were previously all going to the bin after one use), we are also collecting Silicon waste for the first time (previously it was all going to the landfill)). We recently started to collect our lab (packaging) soft plastic waste but the University we are affiliated to (Monash University) can only collect soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only transparent), it should be slightly stretchable before it rips and should not make a crinkly noise when scrunched, no tape, no labels... For our "domestic" soft-plastic collection, which we also started collecting in the kitchen area, rules are much more flexible and thankfully we in Australia have the RedCycle program which collects all sorts of soft plastics from plastic bags to candy and chips wrappers. I wonder whether they might be able to help. Ideally we would like to start collecting our disposable cleanroom overshoes which are made out of a crinkly blue plastic and gloves, similar to you, we produce large amounts of this type of waste. Of course things are a bit different here in Australia, but if you have received responses regarding this topic, could you please let me know? If you have implemented other things in the cleanroom to make your workplace a bit more sustainable, would you mind sharing some ideas? I have been thinking for a while that we should join a group of cleanroom (or other manufacturing) facilities who have all embraced (or are trying to) a sustainable approach, if such a group exists, if it doesn't we should start one! Thanks in advance, Tatiana *Tatiana Pinedo Rivera*, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner wrote: > Good Afternoon and Happy Monday! > > > I am looking into developing a recycling program for uncontaminated > disposable gloves that my facility goes through in abundant quantities, > with the eventual goal of expanding to similar labs on campus. It has > become glaringly obvious that our facility, and ones like ours, use a vast > number of gloves that just end up in a landfill to decompose over the > course of many years to decades. I am hoping to start working to divert > this waste stream and recycle as many gloves as we can by starting a > disposable glove recycling program here at UCSB. > > > So as I am starting to gather data and more information about the best way > to go about this, I was wondering if any of your labs have looked into > similar initiatives that have been or are currently successful. If so, I > would be very interested to know how these programs were started, what > companies you might go through for the recycling since most public > recycling centers do not process these types of plastics, and any ideas for > how to make the program financially viable (break-even, not turn a profit) > rather than a drain on resources, which could lead to the eventual failure of > the program. > > > Thanks so much for your time! > > > All the best, > > > Rachel > > ? > > *Rachel Schoeppner, Ph.D* > > Nanostructure Cleanroom Facility Manager > California NanoSystems Institute (CNSI) > University of California, Santa Barbara > rlschoeppner at ucsb.edu > rachel at cnsi.ucsb.edu > (805)893-2296 > > > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From yakimom at sunypoly.edu Sun Jan 16 20:36:00 2022 From: yakimom at sunypoly.edu (Michael Yakimov) Date: Mon, 17 Jan 2022 01:36:00 +0000 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs In-Reply-To: References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Message-ID: You may want to clarify what kind of gloves are you using. My impression that PVC cannot really get recycled, so is latex. For nitrile gloves, Kimberly-Clark purportedly has a recycling program which their customers can participate. Get Outlook for Android ________________________________ From: labnetwork on behalf of Tatiana Pinedo Rivera Sent: Sunday, January 16, 2022 7:04:46 PM To: Rachel Schoeppner Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs Dear Rachel, Sorry I do not have an answer for you. But we at the Melbourne Centre for Nanofabrication, one of the Australian National Fabrication Facility centres are extremely interested in setting up a similar program. We have a quite active Green Impact Team and we have been trying to make our cleanroom slightly less wasteful (for instance, we are encouraging reuse of epaks and wafer/sample carriers where possible (they were previously all going to the bin after one use), we are also collecting Silicon waste for the first time (previously it was all going to the landfill)). We recently started to collect our lab (packaging) soft plastic waste but the University we are affiliated to (Monash University) can only collect soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only transparent), it should be slightly stretchable before it rips and should not make a crinkly noise when scrunched, no tape, no labels... For our "domestic" soft-plastic collection, which we also started collecting in the kitchen area, rules are much more flexible and thankfully we in Australia have the RedCycle program which collects all sorts of soft plastics from plastic bags to candy and chips wrappers. I wonder whether they might be able to help. Ideally we would like to start collecting our disposable cleanroom overshoes which are made out of a crinkly blue plastic and gloves, similar to you, we produce large amounts of this type of waste. Of course things are a bit different here in Australia, but if you have received responses regarding this topic, could you please let me know? If you have implemented other things in the cleanroom to make your workplace a bit more sustainable, would you mind sharing some ideas? I have been thinking for a while that we should join a group of cleanroom (or other manufacturing) facilities who have all embraced (or are trying to) a sustainable approach, if such a group exists, if it doesn't we should start one! Thanks in advance, Tatiana Tatiana Pinedo Rivera, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com [https://docs.google.com/uc?export=download&id=1grGJ0x7zSGEDjFMQ_9V7yfxjLIrHtzro&revid=0B2svxH10JkpxbVE5akRHRC8rY0NKZEVkRTJtNU5VR3ZvU3dNPQ] On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: Good Afternoon and Happy Monday! I am looking into developing a recycling program for uncontaminated disposable gloves that my facility goes through in abundant quantities, with the eventual goal of expanding to similar labs on campus. It has become glaringly obvious that our facility, and ones like ours, use a vast number of gloves that just end up in a landfill to decompose over the course of many years to decades. I am hoping to start working to divert this waste stream and recycle as many gloves as we can by starting a disposable glove recycling program here at UCSB. So as I am starting to gather data and more information about the best way to go about this, I was wondering if any of your labs have looked into similar initiatives that have been or are currently successful. If so, I would be very interested to know how these programs were started, what companies you might go through for the recycling since most public recycling centers do not process these types of plastics, and any ideas for how to make the program financially viable (break-even, not turn a profit) rather than a drain on resources, which could lead to the eventual failure of the program. Thanks so much for your time! All the best, Rachel ? Rachel Schoeppner, Ph.D Nanostructure Cleanroom Facility Manager California NanoSystems Institute (CNSI) University of California, Santa Barbara rlschoeppner at ucsb.edu rachel at cnsi.ucsb.edu (805)893-2296 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From tatiana.pinedo at monash.edu Tue Jan 18 01:29:01 2022 From: tatiana.pinedo at monash.edu (Tatiana Pinedo Rivera) Date: Tue, 18 Jan 2022 17:29:01 +1100 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs In-Reply-To: References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Message-ID: Absolutely Michael, Our gloves are nitrile gloves (the white cleanroom type in the cleanroom (from OnBoard Solutions) and blue in the non-cleanroom labs (from MediFlex)). Thank you for the tip about Kimberly-Clark, they do not supply our cleanroom gloves, but I can still contact them. You actually gave me the idea of contacting my local glove suppliers. Let's see what their response is. Actually it might be a really good idea to contact all our consumable suppliers and force them to implement programs to collect waste and do something useful with it. If all the cleanroom facilities and other manufacturing facilities, University labs, etc start to do this, there is going to be a point where these companies might actually do something about this issue either because they will find a financial benefit to do it or hopefully out of a sense of environmental responsibility. Michael, can I ask you if your facility is already part of a sustainability program? Would you and your management consider starting one? If anyone is interested in having an informal meeting about sustainability in cleanrooms and other similar facilities, please get in touch to organise one. Or if such a meeting already exists, please share the invitation ;) Cheers from Australia! *Tatiana Pinedo Rivera*, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com On Mon, 17 Jan 2022 at 12:36, Michael Yakimov wrote: > You may want to clarify what kind of gloves are you using. > My impression that PVC cannot really get recycled, so is latex. For > nitrile gloves, Kimberly-Clark purportedly has a recycling program which > their customers can participate. > > Get Outlook for Android > ------------------------------ > *From:* labnetwork on behalf of Tatiana > Pinedo Rivera > *Sent:* Sunday, January 16, 2022 7:04:46 PM > *To:* Rachel Schoeppner > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Inquiry about any disposable glove recycling > programs currently implemented by any labs > > Dear Rachel, > > Sorry I do not have an answer for you. But we at the Melbourne Centre for > Nanofabrication, one of the Australian National > Fabrication Facility centres are extremely interested in setting up a > similar program. We have a quite active Green Impact Team and we have been > trying to make our cleanroom slightly less wasteful (for instance, we are > encouraging reuse of epaks and wafer/sample carriers where possible (they > were previously all going to the bin after one use), we are also collecting > Silicon waste for the first time (previously it was all going to the > landfill)). > > We recently started to collect our lab (packaging) soft plastic waste but > the University we are affiliated to (Monash University) can only collect > soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only > transparent), it should be slightly stretchable before it rips and should > not make a crinkly noise when scrunched, no tape, no labels... > > For our "domestic" soft-plastic collection, which we also started > collecting in the kitchen area, rules are much more flexible and thankfully > we in Australia have the RedCycle program which collects all sorts of soft > plastics from plastic bags to candy and chips wrappers. I wonder whether > they might be able to help. > > Ideally we would like to start collecting our disposable cleanroom > overshoes which are made out of a crinkly blue plastic and gloves, similar > to you, we produce large amounts of this type of waste. > > Of course things are a bit different here in Australia, but if you have > received responses regarding this topic, could you please let me know? > If you have implemented other things in the cleanroom to make your > workplace a bit more sustainable, would you mind sharing some ideas? I have > been thinking for a while that we should join a group of cleanroom (or > other manufacturing) facilities who have all embraced (or are trying to) a > sustainable approach, if such a group exists, if it doesn't we should start > one! > > Thanks in advance, > > Tatiana > > *Tatiana Pinedo Rivera*, PhD > Nanolithography and Characterisation Team Leader > Senior Process Engineer > > Melbourne Centre for Nanofabrication > ANFF Victoria > 151 Wellington Road, Clayton VIC 3168 Australia > > P: +61 (0)3 9905 9660 > E: tatiana.pinedo at nanomelbourne.com > W: http://nanomelbourne.com > > > > > On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: > > Good Afternoon and Happy Monday! > > > I am looking into developing a recycling program for uncontaminated > disposable gloves that my facility goes through in abundant quantities, > with the eventual goal of expanding to similar labs on campus. It has > become glaringly obvious that our facility, and ones like ours, use a vast > number of gloves that just end up in a landfill to decompose over the > course of many years to decades. I am hoping to start working to divert > this waste stream and recycle as many gloves as we can by starting a > disposable glove recycling program here at UCSB. > > > So as I am starting to gather data and more information about the best way > to go about this, I was wondering if any of your labs have looked into > similar initiatives that have been or are currently successful. If so, I > would be very interested to know how these programs were started, what > companies you might go through for the recycling since most public > recycling centers do not process these types of plastics, and any ideas for > how to make the program financially viable (break-even, not turn a profit) > rather than a drain on resources, which could lead to the eventual failure of > the program. > > > Thanks so much for your time! > > > All the best, > > > Rachel > > ? > > *Rachel Schoeppner, Ph.D* > > Nanostructure Cleanroom Facility Manager > California NanoSystems Institute (CNSI) > University of California, Santa Barbara > rlschoeppner at ucsb.edu > rachel at cnsi.ucsb.edu > (805)893-2296 > > > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From yakimom at sunypoly.edu Tue Jan 18 07:45:03 2022 From: yakimom at sunypoly.edu (Michael Yakimov) Date: Tue, 18 Jan 2022 12:45:03 +0000 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs In-Reply-To: References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Message-ID: As with any recycling program, you may want to think about what comes from the other end of it. Nitrile is a pretty specialized plastic, so I doubt a separate recycling stream is justified just by low volume of it. Even if it is, with inherited degradation of recycling there is no way to use recycled material for safety-critical applications, such as gloves or seals Looks like nitrile can be an add-on to ABS recycling - again with degradation uses of the product would be relegated to low-grade stuff like traffic cones. Given that ABS is already code 7, most likely we're talking about some specialized recycling of factory waste, not general collection process. If anything, I would look at this report: https://austroads.com.au/latest-news/use-of-recycled-plastic-in-asphalt Use of recycled plastic in asphalt | Austroads Monday, 12 April 2021. Austroads has published a comprehensive overview of the type, volume, and price of recycled plastics and their possible uses in asphalt. austroads.com.au If nothing else, you may get a publication or two out of qualifying tests. ________________________________ From: Tatiana Pinedo Rivera Sent: Tuesday, January 18, 2022 1:29 AM To: Michael Yakimov Cc: Rachel Schoeppner ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs Absolutely Michael, Our gloves are nitrile gloves (the white cleanroom type in the cleanroom (from OnBoard Solutions) and blue in the non-cleanroom labs (from MediFlex)). Thank you for the tip about Kimberly-Clark, they do not supply our cleanroom gloves, but I can still contact them. You actually gave me the idea of contacting my local glove suppliers. Let's see what their response is. Actually it might be a really good idea to contact all our consumable suppliers and force them to implement programs to collect waste and do something useful with it. If all the cleanroom facilities and other manufacturing facilities, University labs, etc start to do this, there is going to be a point where these companies might actually do something about this issue either because they will find a financial benefit to do it or hopefully out of a sense of environmental responsibility. Michael, can I ask you if your facility is already part of a sustainability program? Would you and your management consider starting one? If anyone is interested in having an informal meeting about sustainability in cleanrooms and other similar facilities, please get in touch to organise one. Or if such a meeting already exists, please share the invitation ;) Cheers from Australia! Tatiana Pinedo Rivera, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com [https://docs.google.com/uc?export=download&id=1grGJ0x7zSGEDjFMQ_9V7yfxjLIrHtzro&revid=0B2svxH10JkpxbVE5akRHRC8rY0NKZEVkRTJtNU5VR3ZvU3dNPQ] On Mon, 17 Jan 2022 at 12:36, Michael Yakimov > wrote: You may want to clarify what kind of gloves are you using. My impression that PVC cannot really get recycled, so is latex. For nitrile gloves, Kimberly-Clark purportedly has a recycling program which their customers can participate. Get Outlook for Android ________________________________ From: labnetwork > on behalf of Tatiana Pinedo Rivera > Sent: Sunday, January 16, 2022 7:04:46 PM To: Rachel Schoeppner > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs Dear Rachel, Sorry I do not have an answer for you. But we at the Melbourne Centre for Nanofabrication, one of the Australian National Fabrication Facility centres are extremely interested in setting up a similar program. We have a quite active Green Impact Team and we have been trying to make our cleanroom slightly less wasteful (for instance, we are encouraging reuse of epaks and wafer/sample carriers where possible (they were previously all going to the bin after one use), we are also collecting Silicon waste for the first time (previously it was all going to the landfill)). We recently started to collect our lab (packaging) soft plastic waste but the University we are affiliated to (Monash University) can only collect soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only transparent), it should be slightly stretchable before it rips and should not make a crinkly noise when scrunched, no tape, no labels... For our "domestic" soft-plastic collection, which we also started collecting in the kitchen area, rules are much more flexible and thankfully we in Australia have the RedCycle program which collects all sorts of soft plastics from plastic bags to candy and chips wrappers. I wonder whether they might be able to help. Ideally we would like to start collecting our disposable cleanroom overshoes which are made out of a crinkly blue plastic and gloves, similar to you, we produce large amounts of this type of waste. Of course things are a bit different here in Australia, but if you have received responses regarding this topic, could you please let me know? If you have implemented other things in the cleanroom to make your workplace a bit more sustainable, would you mind sharing some ideas? I have been thinking for a while that we should join a group of cleanroom (or other manufacturing) facilities who have all embraced (or are trying to) a sustainable approach, if such a group exists, if it doesn't we should start one! Thanks in advance, Tatiana Tatiana Pinedo Rivera, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com [https://docs.google.com/uc?export=download&id=1grGJ0x7zSGEDjFMQ_9V7yfxjLIrHtzro&revid=0B2svxH10JkpxbVE5akRHRC8rY0NKZEVkRTJtNU5VR3ZvU3dNPQ] On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: Good Afternoon and Happy Monday! I am looking into developing a recycling program for uncontaminated disposable gloves that my facility goes through in abundant quantities, with the eventual goal of expanding to similar labs on campus. It has become glaringly obvious that our facility, and ones like ours, use a vast number of gloves that just end up in a landfill to decompose over the course of many years to decades. I am hoping to start working to divert this waste stream and recycle as many gloves as we can by starting a disposable glove recycling program here at UCSB. So as I am starting to gather data and more information about the best way to go about this, I was wondering if any of your labs have looked into similar initiatives that have been or are currently successful. If so, I would be very interested to know how these programs were started, what companies you might go through for the recycling since most public recycling centers do not process these types of plastics, and any ideas for how to make the program financially viable (break-even, not turn a profit) rather than a drain on resources, which could lead to the eventual failure of the program. Thanks so much for your time! All the best, Rachel ? Rachel Schoeppner, Ph.D Nanostructure Cleanroom Facility Manager California NanoSystems Institute (CNSI) University of California, Santa Barbara rlschoeppner at ucsb.edu rachel at cnsi.ucsb.edu (805)893-2296 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From price.798 at osu.edu Tue Jan 18 09:23:25 2022 From: price.798 at osu.edu (Price, Aimee) Date: Tue, 18 Jan 2022 14:23:25 +0000 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs In-Reply-To: References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Message-ID: Hi Tatiana, If you all start a sustainability group, I?d love to be involved. My lab worked with our university?s sustainability organization to become the first user group on campus to get their Green Lab certification. Some of the considerations are things that I hadn?t thought of, some didn?t apply to the cleanroom specifically, like sash locations on hoods. However, some were easy to implement like rinsing and recycling acid/base/oxidizer bottles and contacting suppliers about reusing their packing materials etc. Best of luck with this initiative. Aimee From: labnetwork On Behalf Of Tatiana Pinedo Rivera Sent: Tuesday, January 18, 2022 1:29 AM To: Michael Yakimov Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs Absolutely Michael, Our gloves are nitrile gloves (the white cleanroom type in the cleanroom (from OnBoard Solutions) and blue in the non-cleanroom labs (from MediFlex)). Thank you for the tip about Kimberly-Clark, they do not supply our cleanroom gloves, but I can still contact them. You actually gave me the idea of contacting my local glove suppliers. Let's see what their response is. Actually it might be a really good idea to contact all our consumable suppliers and force them to implement programs to collect waste and do something useful with it. If all the cleanroom facilities and other manufacturing facilities, University labs, etc start to do this, there is going to be a point where these companies might actually do something about this issue either because they will find a financial benefit to do it or hopefully out of a sense of environmental responsibility. Michael, can I ask you if your facility is already part of a sustainability program? Would you and your management consider starting one? If anyone is interested in having an informal meeting about sustainability in cleanrooms and other similar facilities, please get in touch to organise one. Or if such a meeting already exists, please share the invitation ;) Cheers from Australia! Tatiana Pinedo Rivera, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com [https://docs.google.com/uc?export=download&id=1grGJ0x7zSGEDjFMQ_9V7yfxjLIrHtzro&revid=0B2svxH10JkpxbVE5akRHRC8rY0NKZEVkRTJtNU5VR3ZvU3dNPQ] On Mon, 17 Jan 2022 at 12:36, Michael Yakimov > wrote: You may want to clarify what kind of gloves are you using. My impression that PVC cannot really get recycled, so is latex. For nitrile gloves, Kimberly-Clark purportedly has a recycling program which their customers can participate. Get Outlook for Android ________________________________ From: labnetwork > on behalf of Tatiana Pinedo Rivera > Sent: Sunday, January 16, 2022 7:04:46 PM To: Rachel Schoeppner > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs Dear Rachel, Sorry I do not have an answer for you. But we at the Melbourne Centre for Nanofabrication, one of the Australian National Fabrication Facility centres are extremely interested in setting up a similar program. We have a quite active Green Impact Team and we have been trying to make our cleanroom slightly less wasteful (for instance, we are encouraging reuse of epaks and wafer/sample carriers where possible (they were previously all going to the bin after one use), we are also collecting Silicon waste for the first time (previously it was all going to the landfill)). We recently started to collect our lab (packaging) soft plastic waste but the University we are affiliated to (Monash University) can only collect soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only transparent), it should be slightly stretchable before it rips and should not make a crinkly noise when scrunched, no tape, no labels... For our "domestic" soft-plastic collection, which we also started collecting in the kitchen area, rules are much more flexible and thankfully we in Australia have the RedCycle program which collects all sorts of soft plastics from plastic bags to candy and chips wrappers. I wonder whether they might be able to help. Ideally we would like to start collecting our disposable cleanroom overshoes which are made out of a crinkly blue plastic and gloves, similar to you, we produce large amounts of this type of waste. Of course things are a bit different here in Australia, but if you have received responses regarding this topic, could you please let me know? If you have implemented other things in the cleanroom to make your workplace a bit more sustainable, would you mind sharing some ideas? I have been thinking for a while that we should join a group of cleanroom (or other manufacturing) facilities who have all embraced (or are trying to) a sustainable approach, if such a group exists, if it doesn't we should start one! Thanks in advance, Tatiana Tatiana Pinedo Rivera, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com [https://docs.google.com/uc?export=download&id=1grGJ0x7zSGEDjFMQ_9V7yfxjLIrHtzro&revid=0B2svxH10JkpxbVE5akRHRC8rY0NKZEVkRTJtNU5VR3ZvU3dNPQ] On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: Good Afternoon and Happy Monday! I am looking into developing a recycling program for uncontaminated disposable gloves that my facility goes through in abundant quantities, with the eventual goal of expanding to similar labs on campus. It has become glaringly obvious that our facility, and ones like ours, use a vast number of gloves that just end up in a landfill to decompose over the course of many years to decades. I am hoping to start working to divert this waste stream and recycle as many gloves as we can by starting a disposable glove recycling program here at UCSB. So as I am starting to gather data and more information about the best way to go about this, I was wondering if any of your labs have looked into similar initiatives that have been or are currently successful. If so, I would be very interested to know how these programs were started, what companies you might go through for the recycling since most public recycling centers do not process these types of plastics, and any ideas for how to make the program financially viable (break-even, not turn a profit) rather than a drain on resources, which could lead to the eventual failure of the program. Thanks so much for your time! All the best, Rachel ? Rachel Schoeppner, Ph.D Nanostructure Cleanroom Facility Manager California NanoSystems Institute (CNSI) University of California, Santa Barbara rlschoeppner at ucsb.edu rachel at cnsi.ucsb.edu (805)893-2296 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From kpayer at mit.edu Tue Jan 18 10:45:49 2022 From: kpayer at mit.edu (Kristofor Robert Payer) Date: Tue, 18 Jan 2022 15:45:49 +0000 Subject: [labnetwork] Job Opening, Research Specialist, MIT.nano Message-ID: Hello, We have a job opening for a Research Specialist for Wet Chemical Processing at MIT.nano, details and links below. This is an entry-level position, so cleanroom experience is not necessarily required, feel free to pass along to anyone who may be qualified. RESEARCH SPECIALIST/WET CHEMICAL PROCESSING, MIT.nano, to be responsible for wet chemical processing and safety. Equipment will include flammable and corrosive hoods and wet benches, heated tanks, sonicators, chemical spinners, spin-rinse-dryers, liquid chemical pumps, electroplating, etc. The duties will involve equipment operation, facility operation and safety, engagement with the user community, and a variety of other responsibilities. Job Requirements REQUIRED: B.S. in chemical engineering, chemistry, or related discipline; two years? specialized lab experience, preferably working in a semiconductor process facility; experience working with hazardous materials, including wet corrosive chemicals, solvents, and polymers; knowledge of chemical compatibilities and reactivity and general laboratory and cleanroom protocols and operation; experience with safe practices for working with hazardous materials; proficiency with hazard communication and learning/understanding safety information (e.g., safety data sheets, PubChem, etc.); excellent interpersonal and written and oral communication skills; and interest in training the user community. Must be able to work alone or within a team in a highly research-oriented yet disciplined environment that requires frequent interaction with faculty, students, and research staff; regularly move and transport up to 50lbs. and wear respiratory protection, including air-purifying respirator and self-contained breathing apparatus; and recognize and respond to unsafe conditions or dangerous situations. PREFERRED: experience with photolithography processes and materials; HAZWOPER certification; working knowledge of established and emerging research processes; ability to assist researchers in experimental design; training experience in on-on-one and/or group settings; ability to convey complex ideas to personnel with diverse backgrounds/education experience; experience with program logic controllers; and proficiency with document and data management tools (e.g., Microsoft SharePoint sites, Wikis, QuickBase, Dropbox). Job #20653 Link to posting and additional details: https://careers.peopleclick.com/careerscp/client_mit/external/jobDetails/jobDetail.html?jobPostId=22842&localeCode=en-us https://hr.mit.edu/careers Kristofor Payer Assistant Director of Operations MIT.nano Massachusetts Institute of Technology 60 Vassar Street 12-4011 Cambridge, MA 02139 617-324-1469 kpayer at mit.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Jan 18 14:13:00 2022 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Tue, 18 Jan 2022 19:13:00 +0000 Subject: [labnetwork] Director of Shared Facilities at the University of Louisville Message-ID: Hello everyone. The University of Louisville is actively seeking a Director of Shared Facilities at our institution. This person will serve as the institutional coordinator for core research facility operations across our university. The Director will establish strategic planning initiatives, operational best practices and infrastructural and financial support, oversee centralized shared support services/resources and establish effective operational and compliance oversight of core facilities. This person will also work closely with core facility leadership on establishing strategic priorities and sustainable business models. Please, help spread the word for this important position to potential candidates. https://www.higheredjobs.com/institution/details.cfm?JobCode=177767275&Title=Director%20of%20Shared%20Research%20Facilities%20%28Job%20Id%3A%2042704%29&aID=7137 Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.rooks at yale.edu Tue Jan 18 14:40:07 2022 From: michael.rooks at yale.edu (Michael Rooks) Date: Tue, 18 Jan 2022 14:40:07 -0500 Subject: [labnetwork] Cleanroom Job opening at Yale In-Reply-To: References: Message-ID: Yale University cleanroom is looking for a *Staff Scientist* to assist in managing the cleanroom operation. Engineers who have hands-on experience maintaining equipment related to Dry Etching or Thin Film Growth, are encouraged to apply. We're also interested in applicants who have experience in the following area: (i) toxic gas safety system; (ii) UHV system; (iii) metrology system. Applicants must be willing to work in a cleanroom environment, must be interested in training new users. Yale offers a competitive pay package for any qualified applicant, depending on the experience. Best, *Yong Sun - Cleanroom Director* Email: yong.sun at yale.edu Phone: 609-917-5076 ------------------------------ To: Sun, Yong Subject: Staff Job Posting Opened - 70678BR * Requisition Number: 70678BR Posting Title: Staff Scientist Hiring Manager: Yong Sun * *Link: https://sjobs.brassring.com/TGnewUI/Search/home/HomeWithPreLoad?partnerid=25053&siteid=5248&PageType=JobDetails&jobid=1524643 * -------------- next part -------------- An HTML attachment was scrubbed... URL: From kevin.walsh at louisville.edu Tue Jan 18 16:21:30 2022 From: kevin.walsh at louisville.edu (Walsh,Kevin M.) Date: Tue, 18 Jan 2022 21:21:30 +0000 Subject: [labnetwork] Faculty Director of Nano Center Opening at UofL Message-ID: The University of Louisville (UofL) invites applications for an Associate or Full Professor of Engineering who will also serve as the Faculty Director of our interdisciplinary NSF NNCI Micro Nano Technology Center (MNTC). The UofL MNTC is part of the prestigious 16-site National Science Foundation NNCI national nanotechnology network (National Nanotechnology Coordinated Infrastructure - www.nnci.net ). The UofL MNTC consists of a state-of-the-art $30M 10,000 sq ft cleanroom for the fabrication of micro/nano-scaled devices and materials, as well as a very competitive complementary Imaging and Characterization core facility. Additional information about the UofL MNTC and our NSF NNCI site can be found at www.louisville.edu/micronano and www.kymultiscale.net respectively. As Faculty Director of our MNTC, the successful candidate is expected to lead our nationally recognized MNTC core facility, perform cutting-edge research, create a high-profile research center that leverages the expertise of the faculty and facilities, and contribute to the mission of his/her assigned academic department. Although it is anticipated that Electrical and Computer Engineering (ECE) will be the primary home department for the successful applicant, this position encourages crossing traditional academic boundaries to engage interested faculty from other engineering departments at the Speed School of Engineering, as well as related units in Arts & Science and the Medical School. The ECE Department provides instruction at the bachelor's, master's, and Ph.D. levels, with areas of specialty including robotics, nanotechnology, MEMS, electronics, electro-optics, computer vision and image processing, medical imaging, communication systems, intelligent control, and computational intelligence. To learn more about this interesting opportunity and how to apply, please visit: www.kymultiscale.net/job-opportunity or https://www.higheredjobs.com/institution/details.cfm?JobCode=177384877&Title=Professor%20%28Open%20Rank%29%20%28Job%20Id%3A%2040336%29&aID=7137 . -------------- next part -------------- An HTML attachment was scrubbed... URL: From rlschoeppner at ucsb.edu Tue Jan 18 17:06:45 2022 From: rlschoeppner at ucsb.edu (Rachel Schoeppner) Date: Tue, 18 Jan 2022 14:06:45 -0800 Subject: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs In-Reply-To: References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> Message-ID: <45372B7D-94AC-4494-9404-A86F8E4D4A45@ucsb.edu> Hi Aimee, Tatiana, and Michael, Thanks so much for the discussions and food for thought! I finally caught up on the emails. I agree that gloves in general are not easily recycled and I suppose the correct term would more be ?down-cycled?. There are specialty programs here in the US and I think in the UK as well... (TerraCycle and RightCycle in particular) that processes the gloves into small pellets that then get used as fillers for other products? so diverting them out of the landfill at least. They are generally expensive and so has been a hinderance for many companies and universities in the past. I have found a few departments at universities in my research that has developed a program similar to one that I would love to start here at UCSB. I am not sure if their programs are still going strong or if the cost of upkeep has made it prohibitive. I fully support the idea of banding together and encouraging making these programs the norm rather than the exception because they are cost prohibitive. It is such an important initiative and one I would be very happy to be a part of! I know there is a list of Universities that support Green Labs (https://www.labconscious.com/green-lab-groups ) that are all working on different aspects within their individual departments or universities (I believe this is what you were talking about, Aimee). I would really like to get at least this down-cycling of the disposable gloves to be a university-wide endeavor but figuring out where to start is often the challenge! If anyone wants to have a brainstorming session on best practices to get programs like this going, I would be very interested in being involved as well! All the best, Rachel ? Rachel Schoeppner, Ph.D Nanostructure Cleanroom Facility Manager California NanoSystems Institute (CNSI) University of California, Santa Barbara rlschoeppner at ucsb.edu rachel at cnsi.ucsb.edu (805)893-2296 > On Jan 18, 2022, at 6:23 AM, Price, Aimee wrote: > > > Hi Tatiana, > If you all start a sustainability group, I?d love to be involved. My lab worked with our university?s sustainability organization to become the first user group on campus to get their Green Lab certification. Some of the considerations are things that I hadn?t thought of, some didn?t apply to the cleanroom specifically, like sash locations on hoods. However, some were easy to implement like rinsing and recycling acid/base/oxidizer bottles and contacting suppliers about reusing their packing materials etc. > > Best of luck with this initiative. > > Aimee > From: labnetwork On Behalf Of Tatiana Pinedo Rivera > Sent: Tuesday, January 18, 2022 1:29 AM > To: Michael Yakimov > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs > > Absolutely Michael, > Our gloves are nitrile gloves (the white cleanroom type in the cleanroom (from OnBoard Solutions) and blue in the non-cleanroom labs (from MediFlex)). > Thank you for the tip about Kimberly-Clark, they do not supply our cleanroom gloves, but I can still contact them. > > You actually gave me the idea of contacting my local glove suppliers. Let's see what their response is. Actually it might be a really good idea to contact all our consumable suppliers and force them to implement programs to collect waste and do something useful with it. If all the cleanroom facilities and other manufacturing facilities, University labs, etc start to do this, there is going to be a point where these companies might actually do something about this issue either because they will find a financial benefit to do it or hopefully out of a sense of environmental responsibility. > > Michael, can I ask you if your facility is already part of a sustainability program? Would you and your management consider starting one? > > If anyone is interested in having an informal meeting about sustainability in cleanrooms and other similar facilities, please get in touch to organise one. Or if such a meeting already exists, please share the invitation ;) > > Cheers from Australia! > > Tatiana Pinedo Rivera, PhD > Nanolithography and Characterisation Team Leader > Senior Process Engineer > > Melbourne Centre for Nanofabrication > ANFF Victoria > 151 Wellington Road, Clayton VIC 3168 Australia > > P: +61 (0)3 9905 9660 > E: tatiana.pinedo at nanomelbourne.com > W: http://nanomelbourne.com > > > > > On Mon, 17 Jan 2022 at 12:36, Michael Yakimov > wrote: > You may want to clarify what kind of gloves are you using. > My impression that PVC cannot really get recycled, so is latex. For nitrile gloves, Kimberly-Clark purportedly has a recycling program which their customers can participate. > > Get Outlook for Android > From: labnetwork > on behalf of Tatiana Pinedo Rivera > > Sent: Sunday, January 16, 2022 7:04:46 PM > To: Rachel Schoeppner > > Cc: labnetwork at mtl.mit.edu > > Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs > > Dear Rachel, > > Sorry I do not have an answer for you. But we at the Melbourne Centre for Nanofabrication, one of the Australian National Fabrication Facility centres are extremely interested in setting up a similar program. We have a quite active Green Impact Team and we have been trying to make our cleanroom slightly less wasteful (for instance, we are encouraging reuse of epaks and wafer/sample carriers where possible (they were previously all going to the bin after one use), we are also collecting Silicon waste for the first time (previously it was all going to the landfill)). > > We recently started to collect our lab (packaging) soft plastic waste but the University we are affiliated to (Monash University) can only collect soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only transparent), it should be slightly stretchable before it rips and should not make a crinkly noise when scrunched, no tape, no labels... > > For our "domestic" soft-plastic collection, which we also started collecting in the kitchen area, rules are much more flexible and thankfully we in Australia have the RedCycle program which collects all sorts of soft plastics from plastic bags to candy and chips wrappers. I wonder whether they might be able to help. > > Ideally we would like to start collecting our disposable cleanroom overshoes which are made out of a crinkly blue plastic and gloves, similar to you, we produce large amounts of this type of waste. > > Of course things are a bit different here in Australia, but if you have received responses regarding this topic, could you please let me know? > If you have implemented other things in the cleanroom to make your workplace a bit more sustainable, would you mind sharing some ideas? I have been thinking for a while that we should join a group of cleanroom (or other manufacturing) facilities who have all embraced (or are trying to) a sustainable approach, if such a group exists, if it doesn't we should start one! > > Thanks in advance, > > Tatiana > > Tatiana Pinedo Rivera, PhD > Nanolithography and Characterisation Team Leader > Senior Process Engineer > > Melbourne Centre for Nanofabrication > ANFF Victoria > 151 Wellington Road, Clayton VIC 3168 Australia > > P: +61 (0)3 9905 9660 > E: tatiana.pinedo at nanomelbourne.com > W: http://nanomelbourne.com > > > > > On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: > Good Afternoon and Happy Monday! > > > I am looking into developing a recycling program for uncontaminated disposable gloves that my facility goes through in abundant quantities, with the eventual goal of expanding to similar labs on campus. It has become glaringly obvious that our facility, and ones like ours, use a vast number of gloves that just end up in a landfill to decompose over the course of many years to decades. I am hoping to start working to divert this waste stream and recycle as many gloves as we can by starting a disposable glove recycling program here at UCSB. > > > > So as I am starting to gather data and more information about the best way to go about this, I was wondering if any of your labs have looked into similar initiatives that have been or are currently successful. If so, I would be very interested to know how these programs were started, what companies you might go through for the recycling since most public recycling centers do not process these types of plastics, and any ideas for how to make the program financially viable (break-even, not turn a profit) rather than a drain on resources, which could lead to the eventual failure of the program. > > > > Thanks so much for your time! > > > > All the best, > > > Rachel > > > ? > > Rachel Schoeppner, Ph.D > > Nanostructure Cleanroom Facility Manager > California NanoSystems Institute (CNSI) > University of California, Santa Barbara > rlschoeppner at ucsb.edu > rachel at cnsi.ucsb.edu > (805)893-2296 > > > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcchrist at wisc.edu Wed Jan 19 14:07:46 2022 From: dcchrist at wisc.edu (Daniel Christensen) Date: Wed, 19 Jan 2022 19:07:46 +0000 Subject: [labnetwork] another chance to tell us about UGIM 2022 Message-ID: Hi Labnetwork Community, This is a second chance to let us know if you plan to attend UGIM 2022. If you have already responded to the first labnetwork post or to a direct email from Jerry Hunter, then THANK YOU, we already have you info and greatly appreciate the RSVP. If you have not yet responded, we very much would like an idea of attendance so that we can plan accordingly. The University of Wisconsin-Madison has been trying to host the UGIM conference. It was first scheduled in the summer of 2020 and was postponed due to COVID. Subsequently it was postponed again in 2021. We are trying to judge the potential attendance for a UGIM for this summer. Please respond to this brief survey so that we can better understand the likelihood of an in-person conference being successful. The survey is found here: https://docs.google.com/forms/d/e/1FAIpQLSc2iW3A4i2sKmKM6Np3BwmGTdk4s6TC5NfNE33Y4cuu6RxgAg/viewform?vc=0&c=0&w=1&flr=0 I'll follow up with the numbers from the responses in another week or two. Currently UGIM 2020 -> 2022 is scheduled is for June 6-9 of 2022. For more information, the website for the conference is: https://ugim2020.wisc.edu/ Thank you! Dan Christensen & Jerry Hunter University of Wisconsin-Madison Daniel C. Christensen Laboratory Manager Nanoscale Fabrication Center University of Wisconsin-Madison -------------- next part -------------- An HTML attachment was scrubbed... URL: From gzhong at cns.fas.harvard.edu Wed Jan 19 18:10:27 2022 From: gzhong at cns.fas.harvard.edu (Zhong, Guixiong) Date: Wed, 19 Jan 2022 23:10:27 +0000 Subject: [labnetwork] Touchscreen problem, SUSS MJB4, CNS, Harvard Message-ID: <13DDCC3D-DE05-4874-AEF7-F50B66BB4708@cns.fas.harvard.edu> Hi Labnetwork community, Does anyone know who can repair the touch screen on the Suss MJB4 mask aligner? The touchscreen monitor stopped displaying. We contacted SUSS MicroTec but they did not have resources to repair it. The problem seems to be that nobody remains at Suss knows the older setup. We also purchased a new touchscreen. Unfortunately, the PLC of the new touchscreen did not work on the old MJB4 (SN105). Please email me if you know anyone could repair the touchscreen. Much appreciated. Best regards, Guixiong Zhong Principal Engineer Center for Nanoscale Systems Harvard University 11 Oxford Street Cambridge, MA, 02138 TEL: 1-617-384-5672 (Office) Email: gzhong at cns.fas.harvard.edu http://www.cns.fas.harvard.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From James.Grant at glasgow.ac.uk Thu Jan 20 02:56:16 2022 From: James.Grant at glasgow.ac.uk (James Grant) Date: Thu, 20 Jan 2022 07:56:16 +0000 Subject: [labnetwork] Plasma Etching/Deposition MAEBL Equivalent? Message-ID: Hello, Been tasked to try and find the most suitable plasma etching/deposition workshop/conference/event that is equivalent to MAEBL (https://maebl.org/). Never come across such an event in the plasma etching/deposition domain. What I find is that workshops/conferences are more focused on either an aspect of plasma etching/deposition (e.g. https://ald2022.avs.org/) or are material/application specific (e.g. https://www.iwn2022.org/). Cheers, James Dr. James Paul Grant Research Engineer in Plasma Processing Plasma Etch Group james.grant at glasgow.ac.uk [cid:image001.png at 01D80DD2.3CED5670] www.JWNC.gla.ac.uk [cid:image002.png at 01D80DD2.3CED5670] LinkedIn.com/company/JWNC [cid:image003.png at 01D80DD2.3CED5670] @UofG_JWNC -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 26666 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 1538 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 1717 bytes Desc: image003.png URL: From tatiana.pinedo at monash.edu Thu Jan 20 08:24:01 2022 From: tatiana.pinedo at monash.edu (Tatiana Pinedo Rivera) Date: Fri, 21 Jan 2022 00:24:01 +1100 Subject: [labnetwork] Starting a cleanroom/lab sustainability sub group (please express interest to join first informal meeting) In-Reply-To: <45372B7D-94AC-4494-9404-A86F8E4D4A45@ucsb.edu> References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> <45372B7D-94AC-4494-9404-A86F8E4D4A45@ucsb.edu> Message-ID: Hi all, First of all, it's great to see that other facilities care about this subject! Michael, thank you very much for sharing your knowledge and resources on soft plastic recycling. I agree with Rachel, there is a lot of food for thought here. I am still waiting for a response from my suppliers and I plan to contact our overshoes and wafer container suppliers next. Funny story, I recently attended the 2021 Global Yeah Youth Summit on Glasgow COP26 and one of the speakers was Jeanne Beacham the CEO of Delphon the company that makes Gel-Paks (we also use a ton of those) and she mentioned in her talk that we should get the companies that produce consumables to get involved and to feel responsible for doing something with the waste that is produced from those same consumables. She didn't exactly phrased it like that, but that was more or less the message she gave. Aimee, I know you from MAEBL and I am a fan of yours! It would be fantastic to start a cleanroom sustainability group! I have heard about the Green Lab certification (is it the same as this https://www.mygreenlab.org/green-lab-certification.html or is it a local program in the US?). Our facility and the University we are affiliated to (Monash University) like pretty much all major Australian Universities is heavily involved in the Green Impact program which runs in over 1500 universities across the globe. Last year we got the Bronze Lab award and this year we got Gold, but honestly, we still have a ton of work to do to be more sustainable! So, let's make this happen and plan an informal zoom meeting. I would be happy to set up the meeting. I am on leave until Jan 31, so perhaps some time in February will be best. It will be interesting to try to find a time that suits most people (North Americans are likely the majority here). Order of business can be: - Let's see how many people show up and would be interested in initiating a green cleanroom group (I am assuming that most of us in this group work in cleanrooms or similar set ups) - We can certainly also discuss /compare different sustainability programs. - We can talk about the initiatives that have been implemented in our laboratories/cleanrooms and other brilliant ideas that some of us may have. - We can talk about how to get more people involved. It's not much but we can take it from there! What do you think? All best from Australia, Tatiana *Tatiana Pinedo Rivera*, PhD Nanolithography and Characterisation Team Leader Senior Process Engineer Melbourne Centre for Nanofabrication ANFF Victoria 151 Wellington Road, Clayton VIC 3168 Australia P: +61 (0)3 9905 9660 E: tatiana.pinedo at nanomelbourne.com W: http://nanomelbourne.com On Wed, 19 Jan 2022 at 09:06, Rachel Schoeppner wrote: > Hi Aimee, Tatiana, and Michael, > > > Thanks so much for the discussions and food for thought! I finally caught > up on the emails. I agree that gloves in general are not easily recycled > and I suppose the correct term would more be ?down-cycled?. There are > specialty programs here in the US and I think in the UK as well... > (TerraCycle and RightCycle in particular) that processes the gloves into > small pellets that then get used as fillers for other products? so > diverting them out of the landfill at least. They are generally expensive > and so has been a hinderance for many companies and universities in the > past. I have found a few departments at universities in my research that > has developed a program similar to one that I would love to start here at > UCSB. I am not sure if their programs are still going strong or if the cost > of upkeep has made it prohibitive. > > I fully support the idea of banding together and encouraging making these > programs the norm rather than the exception because they are cost > prohibitive. It is such an important initiative and one I would be very > happy to be a part of! I know there is a list of Universities that support > Green Labs (https://www.labconscious.com/green-lab-groups) that are all > working on different aspects within their individual departments or > universities (I believe this is what you were talking about, Aimee). I > would really like to get at least this down-cycling of the disposable > gloves to be a university-wide endeavor but figuring out where to start is > often the challenge! > > If anyone wants to have a brainstorming session on best practices to get > programs like this going, I would be very interested in being involved as > well! > > > All the best, > > Rachel > > ? > > *Rachel Schoeppner, Ph.D* > > Nanostructure Cleanroom Facility Manager > California NanoSystems Institute (CNSI) > University of California, Santa Barbara > rlschoeppner at ucsb.edu > rachel at cnsi.ucsb.edu > (805)893-2296 > > > > > > > > > > > > On Jan 18, 2022, at 6:23 AM, Price, Aimee wrote: > > > Hi Tatiana, > If you all start a sustainability group, I?d love to be involved. My lab > worked with our university?s sustainability organization to become the > first user group on campus to get their Green Lab certification. Some of > the considerations are things that I hadn?t thought of, some didn?t apply > to the cleanroom specifically, like sash locations on hoods. However, some > were easy to implement like rinsing and recycling acid/base/oxidizer > bottles and contacting suppliers about reusing their packing materials etc. > > > Best of luck with this initiative. > > Aimee > *From:* labnetwork *On Behalf Of *Tatiana > Pinedo Rivera > *Sent:* Tuesday, January 18, 2022 1:29 AM > *To:* Michael Yakimov > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Inquiry about any disposable glove recycling > programs currently implemented by any labs > > Absolutely Michael, > Our gloves are nitrile gloves (the white cleanroom type in the cleanroom > (from OnBoard Solutions) and blue in the non-cleanroom labs (from > MediFlex)). > Thank you for the tip about Kimberly-Clark, they do not supply our > cleanroom gloves, but I can still contact them. > > You actually gave me the idea of contacting my local glove suppliers. > Let's see what their response is. Actually it might be a really good idea > to contact all our consumable suppliers and force them to implement > programs to collect waste and do something useful with it. If all the > cleanroom facilities and other manufacturing facilities, University labs, > etc start to do this, there is going to be a point where these companies > might actually do something about this issue either because they will find > a financial benefit to do it or hopefully out of a sense of environmental > responsibility. > > Michael, can I ask you if your facility is already part of a > sustainability program? Would you and your management consider starting > one? > > If anyone is interested in having an informal meeting about sustainability > in cleanrooms and other similar facilities, please get in touch to organise > one. Or if such a meeting already exists, please share the invitation ;) > > Cheers from Australia! > > *Tatiana Pinedo Rivera*, PhD > Nanolithography and Characterisation Team Leader > Senior Process Engineer > > Melbourne Centre for Nanofabrication > ANFF Victoria > 151 Wellington Road, Clayton VIC 3168 Australia > > P: +61 (0)3 9905 9660 > E: tatiana.pinedo at nanomelbourne.com > W: http://nanomelbourne.com > > > > > On Mon, 17 Jan 2022 at 12:36, Michael Yakimov > wrote: > > You may want to clarify what kind of gloves are you using. > My impression that PVC cannot really get recycled, so is latex. For > nitrile gloves, Kimberly-Clark purportedly has a recycling program which > their customers can participate. > > Get Outlook for Android > > ------------------------------ > *From:* labnetwork on behalf of Tatiana > Pinedo Rivera > *Sent:* Sunday, January 16, 2022 7:04:46 PM > *To:* Rachel Schoeppner > *Cc:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] Inquiry about any disposable glove recycling > programs currently implemented by any labs > > Dear Rachel, > > Sorry I do not have an answer for you. But we at the Melbourne Centre for > Nanofabrication, one of the Australian National > Fabrication Facility centres are extremely interested in setting up a > similar program. We have a quite active Green Impact Team and we have been > trying to make our cleanroom slightly less wasteful (for instance, we are > encouraging reuse of epaks and wafer/sample carriers where possible (they > were previously all going to the bin after one use), we are also collecting > Silicon waste for the first time (previously it was all going to the > landfill)). > > We recently started to collect our lab (packaging) soft plastic waste but > the University we are affiliated to (Monash University) can only collect > soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only > transparent), it should be slightly stretchable before it rips and should > not make a crinkly noise when scrunched, no tape, no labels... > > For our "domestic" soft-plastic collection, which we also started > collecting in the kitchen area, rules are much more flexible and thankfully > we in Australia have the RedCycle program which collects all sorts of soft > plastics from plastic bags to candy and chips wrappers. I wonder whether > they might be able to help. > > Ideally we would like to start collecting our disposable cleanroom > overshoes which are made out of a crinkly blue plastic and gloves, similar > to you, we produce large amounts of this type of waste. > > Of course things are a bit different here in Australia, but if you have > received responses regarding this topic, could you please let me know? > If you have implemented other things in the cleanroom to make your > workplace a bit more sustainable, would you mind sharing some ideas? I have > been thinking for a while that we should join a group of cleanroom (or > other manufacturing) facilities who have all embraced (or are trying to) a > sustainable approach, if such a group exists, if it doesn't we should start > one! > > Thanks in advance, > > Tatiana > > *Tatiana Pinedo Rivera*, PhD > Nanolithography and Characterisation Team Leader > Senior Process Engineer > > Melbourne Centre for Nanofabrication > ANFF Victoria > 151 Wellington Road, Clayton VIC 3168 Australia > > P: +61 (0)3 9905 9660 > E: tatiana.pinedo at nanomelbourne.com > W: http://nanomelbourne.com > > > > > On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: > > Good Afternoon and Happy Monday! > > > I am looking into developing a recycling program for uncontaminated > disposable gloves that my facility goes through in abundant quantities, > with the eventual goal of expanding to similar labs on campus. It has > become glaringly obvious that our facility, and ones like ours, use a vast > number of gloves that just end up in a landfill to decompose over the > course of many years to decades. I am hoping to start working to divert > this waste stream and recycle as many gloves as we can by starting a > disposable glove recycling program here at UCSB. > > > > So as I am starting to gather data and more information about the best way > to go about this, I was wondering if any of your labs have looked into > similar initiatives that have been or are currently successful. If so, I > would be very interested to know how these programs were started, what > companies you might go through for the recycling since most public > recycling centers do not process these types of plastics, and any ideas for > how to make the program financially viable (break-even, not turn a profit) > rather than a drain on resources, which could lead to the > eventual failure of the program. > > > > Thanks so much for your time! > > > > All the best, > > > Rachel > > ? > > *Rachel Schoeppner, Ph.D* > > Nanostructure Cleanroom Facility Manager > California NanoSystems Institute (CNSI) > University of California, Santa Barbara > rlschoeppner at ucsb.edu > rachel at cnsi.ucsb.edu > (805)893-2296 > > > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From grallion at ncsu.edu Thu Jan 20 08:26:19 2022 From: grallion at ncsu.edu (Greg Allion) Date: Thu, 20 Jan 2022 08:26:19 -0500 Subject: [labnetwork] Touchscreen problem, SUSS MJB4, CNS, Harvard In-Reply-To: <13DDCC3D-DE05-4874-AEF7-F50B66BB4708@cns.fas.harvard.edu> References: <13DDCC3D-DE05-4874-AEF7-F50B66BB4708@cns.fas.harvard.edu> Message-ID: Hi Guixiong, Jude Bartlebaugh at EINMAS is my go to guy for Suss aligner repairs. He's an ex Suss guy from a while back. He stocks some parts and has a good connection for older parts he doesn't stock. http://einmas.com/about-mask-aligner-service.html Good luck, Greg On Wed, Jan 19, 2022 at 7:47 PM Zhong, Guixiong wrote: > Hi Labnetwork community, > > > > Does anyone know who can repair the touch screen on the Suss MJB4 mask > aligner? The touchscreen monitor stopped displaying. We contacted SUSS > MicroTec but they did not have resources to repair it. The problem seems to > be that nobody remains at Suss knows the older setup. We also purchased a > new touchscreen. Unfortunately, the PLC of the new touchscreen did not work > on the old MJB4 (SN105). Please email me if you know anyone could repair > the touchscreen. Much appreciated. > > > > Best regards, > > > > Guixiong Zhong > > Principal Engineer > > Center for Nanoscale Systems > > Harvard University > > 11 Oxford Street > > Cambridge, MA, 02138 > > TEL: 1-617-384-5672 (Office) > > Email: gzhong at cns.fas.harvard.edu > > http://www.cns.fas.harvard.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Greg Allion NC State University Nanofabrication Facility (NNF) Lithography Engineer -------------- next part -------------- An HTML attachment was scrubbed... URL: From odc1n08 at soton.ac.uk Thu Jan 20 09:07:21 2022 From: odc1n08 at soton.ac.uk (Owain Clark) Date: Thu, 20 Jan 2022 14:07:21 +0000 Subject: [labnetwork] Plasma Etching/Deposition MAEBL Equivalent? In-Reply-To: References: Message-ID: I'd also be interested in such a thing... With perhaps a lean more towards the process and fundamental side vs applications If you are after further education in etch process I would recommend the CEI lectures - https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html I attended quite a while ago, the material was excellent and a lot of theory stretches to far more etch processes than just CMOS and ULSI applications. O. From: labnetwork On Behalf Of James Grant Sent: 20 January 2022 07:56 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Plasma Etching/Deposition MAEBL Equivalent? CAUTION: This e-mail originated outside the University of Southampton. Hello, Been tasked to try and find the most suitable plasma etching/deposition workshop/conference/event that is equivalent to MAEBL (https://maebl.org/). Never come across such an event in the plasma etching/deposition domain. What I find is that workshops/conferences are more focused on either an aspect of plasma etching/deposition (e.g. https://ald2022.avs.org/) or are material/application specific (e.g. https://www.iwn2022.org/). Cheers, James Dr. James Paul Grant Research Engineer in Plasma Processing Plasma Etch Group james.grant at glasgow.ac.uk [cid:image001.png at 01D80E07.07F953D0] www.JWNC.gla.ac.uk [cid:image004.png at 01D80E07.07F953D0] LinkedIn.com/company/JWNC [cid:image005.png at 01D80E07.07F953D0] @UofG_JWNC -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 26666 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image004.png Type: image/png Size: 518 bytes Desc: image004.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image005.png Type: image/png Size: 486 bytes Desc: image005.png URL: From bill_flounders at berkeley.edu Thu Jan 20 12:35:14 2022 From: bill_flounders at berkeley.edu (Albert William (Bill) Flounders) Date: Thu, 20 Jan 2022 09:35:14 -0800 Subject: [labnetwork] Plasma Etching/Deposition MAEBL Equivalent? In-Reply-To: References: Message-ID: Not the same as MAEBL but AVS short courses may be of interest https://avs.org/education/short-courses/short-course-schedule/ Bill Flounders UC Berkeley On Thu, Jan 20, 2022 at 9:05 AM Owain Clark wrote: > I?d also be interested in such a thing? With perhaps a lean more towards > the process and fundamental side vs applications > > > > If you are after further education in etch process I would recommend the > CEI lectures - > https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html > I attended quite a while ago, the material was excellent and a lot of > theory stretches to far more etch processes than just CMOS and ULSI > applications. > > > > O. > > > > *From:* labnetwork *On Behalf Of *James > Grant > *Sent:* 20 January 2022 07:56 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Plasma Etching/Deposition MAEBL Equivalent? > > > > *CAUTION:* This e-mail originated outside the University of Southampton. > > Hello, > > > > Been tasked to try and find the most suitable plasma etching/deposition > workshop/conference/event that is equivalent to MAEBL (https://maebl.org/ > > ). > > > > Never come across such an event in the plasma etching/deposition domain. > What I find is that workshops/conferences are more focused on either an > aspect of plasma etching/deposition (e.g. https://ald2022.avs.org/ > ) > or are material/application specific (e.g. https://www.iwn2022.org/ > > ). > > > > Cheers, > > > > James > > > > Dr. James Paul Grant > > Research Engineer in Plasma Processing > > > > *Plasma Etch Group* > > james.grant at glasgow.ac.uk > > > > > > www.JWNC.gla.ac.uk > > LinkedIn.com/company/JWNC > > @UofG_JWNC > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 26666 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image004.png Type: image/png Size: 518 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image005.png Type: image/png Size: 486 bytes Desc: not available URL: From rlschoeppner at ucsb.edu Thu Jan 20 14:20:52 2022 From: rlschoeppner at ucsb.edu (Rachel Schoeppner) Date: Thu, 20 Jan 2022 11:20:52 -0800 Subject: [labnetwork] Starting a cleanroom/lab sustainability sub group (please express interest to join first informal meeting) In-Reply-To: References: <70235804-AC24-4A3F-B8C5-86165A58D837@ucsb.edu> <45372B7D-94AC-4494-9404-A86F8E4D4A45@ucsb.edu> Message-ID: Hi Tatiana, I think this is a great idea! I am very interested in getting involved and hearing some of the initiatives you have worked on to implement positive changes in your lab already. I am in California but am quite motivated to start something so I can be flexible with my availability. Thanks for the greenlab certification link, I will be looking into the first steps for our lab this month and hope our zoom meeting will give me more ideas on how to implement these changes. Thanks so much for taking this first step! Rachel ? Rachel Schoeppner, Ph.D Nanostructure Cleanroom Facility Manager California NanoSystems Institute (CNSI) University of California, Santa Barbara rlschoeppner at ucsb.edu rachel at cnsi.ucsb.edu (805)893-2296 > On Jan 20, 2022, at 5:24 AM, Tatiana Pinedo Rivera wrote: > > Hi all, > > First of all, it's great to see that other facilities care about this subject! > > Michael, thank you very much for sharing your knowledge and resources on soft plastic recycling. I agree with Rachel, there is a lot of food for thought here. > I am still waiting for a response from my suppliers and I plan to contact our overshoes and wafer container suppliers next. Funny story, I recently attended the 2021 Global Yeah Youth Summit on Glasgow COP26 and one of the speakers was Jeanne Beacham the CEO of Delphon the company that makes Gel-Paks (we also use a ton of those) and she mentioned in her talk that we should get the companies that produce consumables to get involved and to feel responsible for doing something with the waste that is produced from those same consumables. She didn't exactly phrased it like that, but that was more or less the message she gave. > > Aimee, I know you from MAEBL and I am a fan of yours! It would be fantastic to start a cleanroom sustainability group! I have heard about the Green Lab certification (is it the same as this https://www.mygreenlab.org/green-lab-certification.html or is it a local program in the US?). Our facility and the University we are affiliated to (Monash University) like pretty much all major Australian Universities is heavily involved in the Green Impact program which runs in over 1500 universities across the globe. Last year we got the Bronze Lab award and this year we got Gold, but honestly, we still have a ton of work to do to be more sustainable! > > So, let's make this happen and plan an informal zoom meeting. I would be happy to set up the meeting. I am on leave until Jan 31, so perhaps some time in February will be best. It will be interesting to try to find a time that suits most people (North Americans are likely the majority here). > Order of business can be: > Let's see how many people show up and would be interested in initiating a green cleanroom group (I am assuming that most of us in this group work in cleanrooms or similar set ups) > We can certainly also discuss /compare different sustainability programs. > We can talk about the initiatives that have been implemented in our laboratories/cleanrooms and other brilliant ideas that some of us may have. > We can talk about how to get more people involved. > It's not much but we can take it from there! What do you think? > > All best from Australia, > > Tatiana > > Tatiana Pinedo Rivera, PhD > Nanolithography and Characterisation Team Leader > Senior Process Engineer > > Melbourne Centre for Nanofabrication > ANFF Victoria > 151 Wellington Road, Clayton VIC 3168 Australia > > P: +61 (0)3 9905 9660 > E: tatiana.pinedo at nanomelbourne.com > W: http://nanomelbourne.com > > > > > On Wed, 19 Jan 2022 at 09:06, Rachel Schoeppner > wrote: > Hi Aimee, Tatiana, and Michael, > > > Thanks so much for the discussions and food for thought! I finally caught up on the emails. I agree that gloves in general are not easily recycled and I suppose the correct term would more be ?down-cycled?. There are specialty programs here in the US and I think in the UK as well... (TerraCycle and RightCycle in particular) that processes the gloves into small pellets that then get used as fillers for other products? so diverting them out of the landfill at least. They are generally expensive and so has been a hinderance for many companies and universities in the past. I have found a few departments at universities in my research that has developed a program similar to one that I would love to start here at UCSB. I am not sure if their programs are still going strong or if the cost of upkeep has made it prohibitive. > > I fully support the idea of banding together and encouraging making these programs the norm rather than the exception because they are cost prohibitive. It is such an important initiative and one I would be very happy to be a part of! I know there is a list of Universities that support Green Labs (https://www.labconscious.com/green-lab-groups ) that are all working on different aspects within their individual departments or universities (I believe this is what you were talking about, Aimee). I would really like to get at least this down-cycling of the disposable gloves to be a university-wide endeavor but figuring out where to start is often the challenge! > > If anyone wants to have a brainstorming session on best practices to get programs like this going, I would be very interested in being involved as well! > > > All the best, > > Rachel > > ? > > Rachel Schoeppner, Ph.D > > Nanostructure Cleanroom Facility Manager > California NanoSystems Institute (CNSI) > University of California, Santa Barbara > rlschoeppner at ucsb.edu > rachel at cnsi.ucsb.edu > (805)893-2296 > > > > > > > > > > > >> On Jan 18, 2022, at 6:23 AM, Price, Aimee > wrote: >> >> >> Hi Tatiana, >> If you all start a sustainability group, I?d love to be involved. My lab worked with our university?s sustainability organization to become the first user group on campus to get their Green Lab certification. Some of the considerations are things that I hadn?t thought of, some didn?t apply to the cleanroom specifically, like sash locations on hoods. However, some were easy to implement like rinsing and recycling acid/base/oxidizer bottles and contacting suppliers about reusing their packing materials etc. >> >> Best of luck with this initiative. >> >> Aimee >> From: labnetwork > On Behalf Of Tatiana Pinedo Rivera >> Sent: Tuesday, January 18, 2022 1:29 AM >> To: Michael Yakimov > >> Cc: labnetwork at mtl.mit.edu >> Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs >> >> Absolutely Michael, >> Our gloves are nitrile gloves (the white cleanroom type in the cleanroom (from OnBoard Solutions) and blue in the non-cleanroom labs (from MediFlex)). >> Thank you for the tip about Kimberly-Clark, they do not supply our cleanroom gloves, but I can still contact them. >> >> You actually gave me the idea of contacting my local glove suppliers. Let's see what their response is. Actually it might be a really good idea to contact all our consumable suppliers and force them to implement programs to collect waste and do something useful with it. If all the cleanroom facilities and other manufacturing facilities, University labs, etc start to do this, there is going to be a point where these companies might actually do something about this issue either because they will find a financial benefit to do it or hopefully out of a sense of environmental responsibility. >> >> Michael, can I ask you if your facility is already part of a sustainability program? Would you and your management consider starting one? >> >> If anyone is interested in having an informal meeting about sustainability in cleanrooms and other similar facilities, please get in touch to organise one. Or if such a meeting already exists, please share the invitation ;) >> >> Cheers from Australia! >> >> Tatiana Pinedo Rivera, PhD >> Nanolithography and Characterisation Team Leader >> Senior Process Engineer >> >> Melbourne Centre for Nanofabrication >> ANFF Victoria >> 151 Wellington Road, Clayton VIC 3168 Australia >> >> P: +61 (0)3 9905 9660 >> E: tatiana.pinedo at nanomelbourne.com >> W: http://nanomelbourne.com >> >> >> >> >> On Mon, 17 Jan 2022 at 12:36, Michael Yakimov > wrote: >> You may want to clarify what kind of gloves are you using. >> My impression that PVC cannot really get recycled, so is latex. For nitrile gloves, Kimberly-Clark purportedly has a recycling program which their customers can participate. >> >> Get Outlook for Android >> From: labnetwork > on behalf of Tatiana Pinedo Rivera > >> Sent: Sunday, January 16, 2022 7:04:46 PM >> To: Rachel Schoeppner > >> Cc: labnetwork at mtl.mit.edu > >> Subject: Re: [labnetwork] Inquiry about any disposable glove recycling programs currently implemented by any labs >> >> Dear Rachel, >> >> Sorry I do not have an answer for you. But we at the Melbourne Centre for Nanofabrication, one of the Australian National Fabrication Facility centres are extremely interested in setting up a similar program. We have a quite active Green Impact Team and we have been trying to make our cleanroom slightly less wasteful (for instance, we are encouraging reuse of epaks and wafer/sample carriers where possible (they were previously all going to the bin after one use), we are also collecting Silicon waste for the first time (previously it was all going to the landfill)). >> >> We recently started to collect our lab (packaging) soft plastic waste but the University we are affiliated to (Monash University) can only collect soft-plastic (LDPE) of very high quality, uncontaminated, not-dyed (only transparent), it should be slightly stretchable before it rips and should not make a crinkly noise when scrunched, no tape, no labels... >> >> For our "domestic" soft-plastic collection, which we also started collecting in the kitchen area, rules are much more flexible and thankfully we in Australia have the RedCycle program which collects all sorts of soft plastics from plastic bags to candy and chips wrappers. I wonder whether they might be able to help. >> >> Ideally we would like to start collecting our disposable cleanroom overshoes which are made out of a crinkly blue plastic and gloves, similar to you, we produce large amounts of this type of waste. >> >> Of course things are a bit different here in Australia, but if you have received responses regarding this topic, could you please let me know? >> If you have implemented other things in the cleanroom to make your workplace a bit more sustainable, would you mind sharing some ideas? I have been thinking for a while that we should join a group of cleanroom (or other manufacturing) facilities who have all embraced (or are trying to) a sustainable approach, if such a group exists, if it doesn't we should start one! >> >> Thanks in advance, >> >> Tatiana >> >> Tatiana Pinedo Rivera, PhD >> Nanolithography and Characterisation Team Leader >> Senior Process Engineer >> >> Melbourne Centre for Nanofabrication >> ANFF Victoria >> 151 Wellington Road, Clayton VIC 3168 Australia >> >> P: +61 (0)3 9905 9660 >> E: tatiana.pinedo at nanomelbourne.com >> W: http://nanomelbourne.com >> >> >> >> >> On Tue, 11 Jan 2022 at 09:23, Rachel Schoeppner > wrote: >> Good Afternoon and Happy Monday! >> >> >> I am looking into developing a recycling program for uncontaminated disposable gloves that my facility goes through in abundant quantities, with the eventual goal of expanding to similar labs on campus. It has become glaringly obvious that our facility, and ones like ours, use a vast number of gloves that just end up in a landfill to decompose over the course of many years to decades. I am hoping to start working to divert this waste stream and recycle as many gloves as we can by starting a disposable glove recycling program here at UCSB. >> >> >> >> So as I am starting to gather data and more information about the best way to go about this, I was wondering if any of your labs have looked into similar initiatives that have been or are currently successful. If so, I would be very interested to know how these programs were started, what companies you might go through for the recycling since most public recycling centers do not process these types of plastics, and any ideas for how to make the program financially viable (break-even, not turn a profit) rather than a drain on resources, which could lead to the eventual failure of the program. >> >> >> >> Thanks so much for your time! >> >> >> >> All the best, >> >> >> Rachel >> >> >> ? >> >> Rachel Schoeppner, Ph.D >> >> Nanostructure Cleanroom Facility Manager >> California NanoSystems Institute (CNSI) >> University of California, Santa Barbara >> rlschoeppner at ucsb.edu >> rachel at cnsi.ucsb.edu >> (805)893-2296 >> >> >> >> >> >> >> >> >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From ana.n.cohen.ctr at army.mil Fri Jan 21 10:11:29 2022 From: ana.n.cohen.ctr at army.mil (Cohen, Ana N CTR USARMY DEVCOM ARL (USA)) Date: Fri, 21 Jan 2022 15:11:29 +0000 Subject: [labnetwork] Touchscreen problem, SUSS MJB4, CNS, Harvard Message-ID: All our SUSS MA6 aligner repair is with Mark Anderson (owns AlignTech, LLC). He comes on site for the PM and big maintenance visits, but also always super helpful and responsive over the phone for quick troubleshooting. Phone: 802-878-0199 Not sure his experience with the MJB4 in particular, but he is well versed in older versions of SUSS aligners and last I knew he was actually getting specific training on some of the more computer-based systems. Based in Vermont, so would definitely easy travel for the Northeast. Should be able to tell you right away if it?s a repair he can manage. Best of luck! -- Ana N. Cohen [she/her/hers] Photolithography Technician US Army Research Laboratory 2800 Powder Mill Road Adelphi, MD 20783 Tel: 301-394-1527 ana.n.cohen.ctr at army.mil From: labnetwork On Behalf Of Zhong, Guixiong Sent: Wednesday, January 19, 2022 6:10 PM To: labnetwork at mtl.mit.edu Subject: [URL Verdict: Neutral][Non-DoD Source] [labnetwork] Touchscreen problem, SUSS MJB4, CNS, Harvard All active links contained in this email were disabled. Please verify the identity of the sender, and confirm the authenticity of all links contained within the message prior to copying and pasting the address to a Web browser. _____ Hi Labnetwork community, Does anyone know who can repair the touch screen on the Suss MJB4 mask aligner? The touchscreen monitor stopped displaying. We contacted SUSS MicroTec but they did not have resources to repair it. The problem seems to be that nobody remains at Suss knows the older setup. We also purchased a new touchscreen. Unfortunately, the PLC of the new touchscreen did not work on the old MJB4 (SN105). Please email me if you know anyone could repair the touchscreen. Much appreciated. Best regards, Guixiong Zhong Principal Engineer Center for Nanoscale Systems Harvard University 11 Oxford Street Cambridge, MA, 02138 TEL: 1-617-384-5672 (Office) Email: gzhong at cns.fas.harvard.edu Caution-http://www.cns.fas.harvard.edu < Caution-http://www.cns.fas.harvard.edu/ > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: smime.p7s Type: application/pkcs7-signature Size: 5466 bytes Desc: not available URL: From mtang at stanford.edu Mon Jan 24 10:09:57 2022 From: mtang at stanford.edu (Mary Tang) Date: Mon, 24 Jan 2022 07:09:57 -0800 Subject: [labnetwork] Senior Process Engineer position at the Stanford Nanofab Message-ID: <857b6805-3b9d-568a-de4e-eb2dec895c69@stanford.edu> Dear friends - Yes, the Great Resignation has descended on SNF.? But we've been very fortunate in finding truly worthy successors to our sorely missed friends/former colleagues.? On that note, I'd like to share a new opening we have for a Senior Process Engineer, ideally with expertise in chemical deposition processes (ideally, ALD, PECVD, LPCVD - MOCVD or MBE would be a bonus!)? The official job posting can be found here: https://careersearch.stanford.edu/jobs/senior-process-engineer-15548 Please do share this posting and let interested folk know that I'd be glad to talk - Best - Mary -- Mary X. Tang, Ph.D. Managing Director Stanford Nanofabrication Facility Paul G. Allen Building 420 Via Palou Mall Stanford, CA 94305 https://snf.stanford.edu mtang at stanford.edu From Matt.Dwyer at drs.com Mon Jan 24 12:18:29 2022 From: Matt.Dwyer at drs.com (Dwyer, Matt) Date: Mon, 24 Jan 2022 17:18:29 +0000 Subject: [labnetwork] [EXTERNAL] Touchscreen problem, SUSS MJB4, CNS, Harvard In-Reply-To: References: Message-ID: We have been very happy with Mark Anderson (AlignTech LLC), as well as Kyle Willis (WECpro ), for service of our MA6. If they can?t help with your MJB4 issue, they may know who to direct you to. Matt Matt Dwyer Principal Process Engineer DRS Daylight Solutions 1832 Wright St, Madison, WI 53704 USA Tel +1 608 287 3785 matt.dwyer at drs.com leonardodrs.com daylightsolutions.com From: labnetwork On Behalf Of Cohen, Ana N CTR USARMY DEVCOM ARL (USA) Sent: Friday, January 21, 2022 9:11 AM To: Zhong, Guixiong ; labnetwork at mtl.mit.edu Subject: [EXTERNAL] [labnetwork] Touchscreen problem, SUSS MJB4, CNS, Harvard All our SUSS MA6 aligner repair is with Mark Anderson (owns AlignTech, LLC). He comes on site for the PM and big maintenance visits, but also always super helpful and responsive over the phone for quick troubleshooting. Phone: 802-878-0199 Not sure his experience with the MJB4 in particular, but he is well versed in older versions of SUSS aligners and last I knew he was actually getting specific training on some of the more computer-based systems. Based in Vermont, so would definitely easy travel for the Northeast. Should be able to tell you right away if it?s a repair he can manage. Best of luck! -- Ana N. Cohen [she/her/hers] Photolithography Technician US Army Research Laboratory 2800 Powder Mill Road Adelphi, MD 20783 Tel: 301-394-1527 ana.n.cohen.ctr @army.mil From: labnetwork > On Behalf Of Zhong, Guixiong Sent: Wednesday, January 19, 2022 6:10 PM To: labnetwork at mtl.mit.edu Subject: [URL Verdict: Neutral][Non-DoD Source] [labnetwork] Touchscreen problem, SUSS MJB4, CNS, Harvard All active links contained in this email were disabled. Please verify the identity of the sender, and confirm the authenticity of all links contained within the message prior to copying and pasting the address to a Web browser. _____ Hi Labnetwork community, Does anyone know who can repair the touch screen on the Suss MJB4 mask aligner? The touchscreen monitor stopped displaying. We contacted SUSS MicroTec but they did not have resources to repair it. The problem seems to be that nobody remains at Suss knows the older setup. We also purchased a new touchscreen. Unfortunately, the PLC of the new touchscreen did not work on the old MJB4 (SN105). Please email me if you know anyone could repair the touchscreen. Much appreciated. Best regards, Guixiong Zhong Principal Engineer Center for Nanoscale Systems Harvard University 11 Oxford Street Cambridge, MA, 02138 TEL: 1-617-384-5672 (Office) Email: gzhong at cns.fas.harvard.edu Caution-http://www.cns.fas.harvard.edu < Caution-http://www.cns.fas.harvard.edu/ > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 10598 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... 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Name: smime.p7s Type: application/pkcs7-signature Size: 6624 bytes Desc: not available URL: From donalj at mit.edu Mon Jan 24 13:53:29 2022 From: donalj at mit.edu (Donal Jamieson) Date: Mon, 24 Jan 2022 18:53:29 +0000 Subject: [labnetwork] STS Carousel Software Message-ID: <152a662daf184c11814348439a9e4a36@oc11expo12.exchange.mit.edu> Hi folks, We have an older STS DRIE Multiplex system (1998 era running Win3.11) that we recently moved from MTL to MIT.nano. Unfortunately the 3.5" floppy drive in the Carousel computer did not survive the move and also damaged the disc it contained. I have replaced the FD and have tried all of the Carousel software versions I have on hand but the loadlock PC is not communicating with the system PC. I was hoping that there may be a similar system still out these and the owner could email a copy of the software for us to try. Also, if there are any vendors that may offer updates to older systems, that info would be appreciated. Research Specialist MIT Nano Office: 39-225 Phone: 617-452-2983 -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.martin at louisville.edu Tue Jan 25 09:19:22 2022 From: michael.martin at louisville.edu (Martin,Michael David) Date: Tue, 25 Jan 2022 14:19:22 +0000 Subject: [labnetwork] STS Carousel Software In-Reply-To: <152a662daf184c11814348439a9e4a36@oc11expo12.exchange.mit.edu> References: <152a662daf184c11814348439a9e4a36@oc11expo12.exchange.mit.edu> Message-ID: Hi Donal, We have a similar vintage DRIE. I will take a look at today to see if we can help you out. Regards, Michael ________________________________ From: labnetwork on behalf of Donal Jamieson Sent: Monday, January 24, 2022 1:53 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] STS Carousel Software You don't often get email from donalj at mit.edu. Learn why this is important CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hi folks, We have an older STS DRIE Multiplex system (1998 era running Win3.11) that we recently moved from MTL to MIT.nano. Unfortunately the 3.5? floppy drive in the Carousel computer did not survive the move and also damaged the disc it contained. I have replaced the FD and have tried all of the Carousel software versions I have on hand but the loadlock PC is not communicating with the system PC. I was hoping that there may be a similar system still out these and the owner could email a copy of the software for us to try. Also, if there are any vendors that may offer updates to older systems, that info would be appreciated. Research Specialist MIT Nano Office: 39-225 Phone: 617-452-2983 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rreger at purdue.edu Tue Jan 25 15:30:03 2022 From: rreger at purdue.edu (Reger, Ronald K) Date: Tue, 25 Jan 2022 20:30:03 +0000 Subject: [labnetwork] HEPA/ULPA Filter Experience? Message-ID: Dear Colleagues, The cleanroom here at the Purdue Birck Nanotechnology Center is in its 17th year, and we're starting to see increased frequency on some typical and expected maintenance items. And while we haven't had any catastrophic failures yet in our HEPA & UPLA filters we are wondering when they may need some serious attention/replacement. All along we've had to replace an occasional filter panel due to some deterioration of a seal or maybe an inadvertent puncture, but we haven't had any wholesale replacement of complete banks or bays yet. We're wondering what other nanofabs have experienced in terms of HEPA/ULPA filter replacements? Is there a target date (~ 20 years, 25 years?) at which filters fail and entire bays are replaced? Are seals degrading at a certain time as shown with increasing particle counts? Have different nanofabs experienced vastly different durations for the quality of filtration? Any insight into filter degradation & replacement experience would be greatly appreciated as we plan for the next few years of maintenance items in our fab. Thanks very much for your information. Ron Ron Reger Engineering Manager Birck Nanotechnology Center | Room 2289 | Office: 765.494.6667 | Email: rreger at purdue.edu Wiki: https://wiki.itap.purdue.edu/display/BNCWiki iLabs: https://purdue.ilabsolutions.com/homepage/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From fabien.dauzou at edgehogtech.com Tue Jan 25 15:43:02 2022 From: fabien.dauzou at edgehogtech.com (Fabien Dauzou) Date: Tue, 25 Jan 2022 20:43:02 +0000 Subject: [labnetwork] ICP Etcher GEN 2 for SODALIME glass [470 mm x 370 mm x 3 mm] Message-ID: Dear Labnetwork, We are scaling up our process and we are actively looking for an etcher ICP that can accept GEN 2 size sodalime glass [470 mm x 370 mm x 3 mm]. Does any of you know a possible equipment that we can run trial or maybe even do a campaign? We are primarily working on SODALIME glass. Thank you for your support. Best regards, Bien cordialement, Fabien Dauzou Photovoltaic Enthusiast | Edgehog Senior Process Scientist | Cleantech Optimist fabien.dauzou at edgehogtech.com Mob: 438-868-1657 https://www.edgehogtech.com/ [cid:image001.png at 01D81202.3BA3BA50] 780 Av. Brewster, RC-016, Montreal, QC, Canada, H4C 2K1 Think green, before printing this email. [SF_TAG_MEMBER_OF_CMYK] Winner of the 2020 CES Climate Change Innovator Award -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2898442 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 943972 bytes Desc: image002.jpg URL: From schweig at umich.edu Wed Jan 26 07:08:09 2022 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 26 Jan 2022 07:08:09 -0500 Subject: [labnetwork] HEPA/ULPA Filter Experience? In-Reply-To: References: Message-ID: Ron, Good morning. Here at the University of Michigan/LNF we just replaced our HEPA filters in May of 2017. This was the second replacement for the cleanroom that was built in 1986. The first set of filters got changed out back in 1996/1997, so roughly 10 years. The second set we let go a little longer as they fell off of everyone's radar, and we ended up at about 20 years of life. We were starting to see a lot of contamination on the back sides of the HEPA filters whenever we had to remove one to change a ballast for the T-8 lamps. When we did the replacement in 2017, we completely relamped the 1986 portion of the cleanroom to LED, and even added some lighting in the bays where it had always been a little on the dark side. My guess is, depending on what you have for ductwork ahead of your HEPAs (is the insulation on the inside or outside of the ductwork), will be a big determinant in what you can expect for the lifetime of your HEPAs. For some reason, back in 1986, it was "good design practice" to put the insulation on the inside of the ductwork, now 40 years later, we're seeing increased degradation of that insulation material, and it's filling up our new Hepas. There's a project on our books to replace all of that ductwork, and CRAC fans, but it has a $5 million dollar price tag.... in addition to the impact of closing portions of the lab. I'd be happy to discuss this more with you. Feel free to give me a call, or shoot me an email. Dennis Schweiger Facilities Supervisor University of Michigan/LNF 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Tue, Jan 25, 2022 at 7:59 PM Reger, Ronald K wrote: > Dear Colleagues, > > The cleanroom here at the Purdue Birck Nanotechnology Center is in its > 17th year, and we're starting to see increased frequency on some typical > and expected maintenance items. And while we haven't had any catastrophic > failures yet in our HEPA & UPLA filters we are wondering when they may need > some serious attention/replacement. All along we've had to replace an > occasional filter panel due to some deterioration of a seal or maybe an > inadvertent puncture, but we haven't had any wholesale replacement of > complete banks or bays yet. > > We're wondering what other nanofabs have experienced in terms of HEPA/ULPA > filter replacements? Is there a target date (~ 20 years, 25 years?) at > which filters fail and entire bays are replaced? Are seals degrading at a > certain time as shown with increasing particle counts? Have different > nanofabs experienced vastly different durations for the quality of > filtration? > > Any insight into filter degradation & replacement experience would be > greatly appreciated as we plan for the next few years of maintenance items > in our fab. > > Thanks very much for your information. > > > Ron > > *Ron Reger* > *Engineering Manager* > Birck Nanotechnology Center | Room 2289 | > *Office:* 765.494.6667 | *Email:* *rreger at purdue.edu* > Wiki: *https://wiki.itap.purdue.edu/display/BNCWiki* > > iLabs: *https://purdue.ilabsolutions.com/homepage/* > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Thu Jan 27 11:05:07 2022 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Thu, 27 Jan 2022 11:05:07 -0500 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> Message-ID: <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? If anyone would like ordering information? just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu > On Mar 11, 2019, at 4:40 PM, Kurt Kupcho wrote: > > Thanks Mark. > > I would be interested in hearing your Ar lipseal burn results as well. > > Kurt > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > NFC > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > From: Mark Weiler [mailto:mweiler at andrew.cmu.edu ] > Sent: Monday, March 11, 2019 3:33 PM > To: Kurt Kupcho > Cc: LaFleur, David W; Fab Network > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hi Kurt, > > I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. > > Mark > > > ________________________________________________________________ > > Mark Weiler > Equipment & Facilites Manager > Clair and John Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > http://www.nanofab.ece.cmu.edu > > > > > > On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: > > Hi Mark & David ? > > I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. > > I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. > > Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. > > Best, > > Kurt > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > NFC > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu ] On Behalf Of Mark Weiler > Sent: Wednesday, March 06, 2019 8:04 AM > To: LaFleur, David W > Cc: Fab Network > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hi David, > > I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. > > It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. > > My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. > > Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL > > Best, > > Mark > > Mark Weiler > Equipment & Facilities Manager > Claire and John Bertucci Nanotechnology Laboratory > Electrical and Computer Engineering | Carnegie Mellon University > 5000 Forbes Ave., Pittsburgh, PA 15213-3890 > T: 412.268.2471 > F: 412.268.3497 > www.ece.cmu.edu > nanofab.ece.cmu.edu > > On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: > > Hi Mark, > > We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. > > Regards, > > David LaFleur > Equipment Engineer > CNS, Harvard University > > From: "labnetwork-bounces at mtl.mit.edu " > on behalf of Mark Weiler > > Date: Tuesday, March 5, 2019 at 3:44 PM > To: Fab Network > > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hello Everyone, > > We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. > > Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. > > Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. > > Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. > > This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. > > Have any of you seen this before? > > Best regards, > > Mark > > > ________________________________________________________________ > > Mark Weiler > Equipment & Facilites Manager > Clair and John Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > http://www.nanofab.ece.cmu.edu > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: images.png Type: image/png Size: 720 bytes Desc: not available URL: From julia.aebersold at louisville.edu Thu Jan 27 12:39:51 2022 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 27 Jan 2022 17:39:51 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> Message-ID: We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network ; Kurt Kupcho ; Aebersold,Julia W. Cc: LaFleur, David W ; Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can't say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville... If anyone would like ordering information... just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image001.png at 01D8137A.A7F8ADE0] On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals... In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David - I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great - throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones "feeling the pain" so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don't last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don't get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs... however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It's as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data.... we just can't complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean... then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 720 bytes Desc: image001.png URL: From dlafleur at cns.fas.harvard.edu Thu Jan 27 12:41:44 2022 From: dlafleur at cns.fas.harvard.edu (LaFleur, David W) Date: Thu, 27 Jan 2022 17:41:44 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> Message-ID: Hi Mark, Thanks for your work on this problem. I would be interested in trying them. I change my lip seal every 2 weeks just because we PM the machine frequently. We have so many users on this system and cross contamination becomes an issue. But if they last longer and they are inexpensive I would change over. Regards, Dave LaFleur From: Mark Weiler Date: Thursday, January 27, 2022 at 11:05 AM To: Fab Network , Kurt Kupcho , "julia.aebersold at louisville.edu" Cc: "LaFleur, David W" , Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? If anyone would like ordering information? just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image001.png at 01D8137B.3D991F60] On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David ? I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 721 bytes Desc: image001.png URL: From kurt.kupcho at wisc.edu Thu Jan 27 12:43:38 2022 From: kurt.kupcho at wisc.edu (Kurt Kupcho) Date: Thu, 27 Jan 2022 17:43:38 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> Message-ID: With a 13s lip seal burn with O2 plasma of SPTS lip seals I can get 0.4mt/min leak up rate. With limiting O2 plasma cleans after SF6/O2 runs to the minimum amount of time to clean out the SF6 we are also able to extend the lifetime significantly. I am still interested in Mark's new lip seals though because these lip seals will probably not be available from SPTS much longer. They already stopped supporting anything about our tool model over 5 years ago. Kurt Kurt Kupcho Materials Science Engineer Nanoscale Fabrication Center (NFC) University of Wisconsin 1550 Engineering Dr. ECB 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 [cid:image002.png at 01D81373.1F2C8DD0] From: Aebersold,Julia W. Sent: Thursday, January 27, 2022 11:40 AM To: Mark Weiler ; Fab Network ; Kurt Kupcho Cc: LaFleur, David W ; Daniel Christensen Subject: RE: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > Cc: LaFleur, David W >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can't say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville... If anyone would like ordering information... just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image003.png at 01D81373.1F2C8DD0] On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals... In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David - I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great - throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones "feeling the pain" so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don't last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don't get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs... however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It's as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data.... we just can't complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean... then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 30076 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 720 bytes Desc: image003.png URL: From mweiler at andrew.cmu.edu Thu Jan 27 13:42:06 2022 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Thu, 27 Jan 2022 13:42:06 -0500 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: References: Message-ID: <82A08688-43AC-4D39-8A70-1DD334930623@andrew.cmu.edu> FYI... I did not perform an O2 or Ar plasma burn in on these seals. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilites Bertucci Nanotechnology Laboratory Eden Hall Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu "Be kind; everyone is on their own journey." Daniel Ek Sent from my iPhone > On Jan 27, 2022, at 12:43 PM, Kurt Kupcho wrote: > > ? > With a 13s lip seal burn with O2 plasma of SPTS lip seals I can get 0.4mt/min leak up rate. With limiting O2 plasma cleans after SF6/O2 runs to the minimum amount of time to clean out the SF6 we are also able to extend the lifetime significantly. > > I am still interested in Mark?s new lip seals though because these lip seals will probably not be available from SPTS much longer. They already stopped supporting anything about our tool model over 5 years ago. > > Kurt > > > Kurt Kupcho > Materials Science Engineer > Nanoscale Fabrication Center (NFC) > University of Wisconsin > 1550 Engineering Dr. > ECB 3110 > Madison, WI 53706 > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > From: Aebersold,Julia W. > Sent: Thursday, January 27, 2022 11:40 AM > To: Mark Weiler ; Fab Network ; Kurt Kupcho > Cc: LaFleur, David W ; Daniel Christensen > Subject: RE: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) > > We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. > > Cheers! > > Julia Aebersold, Ph.D. > Manager, Micro/Nano Technology Center > University of Louisville > Shumaker Research Building, Room 233 > 2210 South Brook Street > Louisville, KY 40292 > (502) 852-1572 > > http://louisville.edu/micronano/ > > From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] > Sent: Thursday, January 27, 2022 11:05 AM > To: Fab Network ; Kurt Kupcho ; Aebersold,Julia W. > Cc: LaFleur, David W ; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) > > CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. > Hello Everyone, > > I have some good results to share on our quest for a better DRIE Lip Seal. > > The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. > > We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. > > Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? > > If anyone would like ordering information? just let me know. > > Best Regards, > > Mark > > ________________________________________________________________ > > Mark Weiler > Manager, Equipment & Facilities > Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > F: 412-268-3497 > http://www.nanofab.ece.cmu.edu > > > > > On Mar 11, 2019, at 4:40 PM, Kurt Kupcho wrote: > > Thanks Mark. > > I would be interested in hearing your Ar lipseal burn results as well. > > Kurt > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > NFC > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] > Sent: Monday, March 11, 2019 3:33 PM > To: Kurt Kupcho > Cc: LaFleur, David W; Fab Network > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hi Kurt, > > I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. > > Mark > > > ________________________________________________________________ > > Mark Weiler > Equipment & Facilites Manager > Clair and John Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > http://www.nanofab.ece.cmu.edu > > > > > > > On Mar 11, 2019, at 3:55 PM, Kurt Kupcho wrote: > > Hi Mark & David ? > > I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. > > I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. > > Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. > > Best, > > Kurt > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > NFC > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler > Sent: Wednesday, March 06, 2019 8:04 AM > To: LaFleur, David W > Cc: Fab Network > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hi David, > > I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. > > It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. > > My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. > > Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL > > Best, > > Mark > > Mark Weiler > Equipment & Facilities Manager > Claire and John Bertucci Nanotechnology Laboratory > Electrical and Computer Engineering | Carnegie Mellon University > 5000 Forbes Ave., Pittsburgh, PA 15213-3890 > T: 412.268.2471 > F: 412.268.3497 > www.ece.cmu.edu > nanofab.ece.cmu.edu > > On Mar 6, 2019, at 08:46, LaFleur, David W wrote: > > Hi Mark, > > We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. > > Regards, > > David LaFleur > Equipment Engineer > CNS, Harvard University > > From: "labnetwork-bounces at mtl.mit.edu" on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM > To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hello Everyone, > > We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. > > Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. > > Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. > > Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. > > This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. > > Have any of you seen this before? > > Best regards, > > Mark > > > ________________________________________________________________ > > Mark Weiler > Equipment & Facilites Manager > Clair and John Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > http://www.nanofab.ece.cmu.edu > > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From RobertVandusen at cunet.carleton.ca Thu Jan 27 14:44:31 2022 From: RobertVandusen at cunet.carleton.ca (Robert Vandusen) Date: Thu, 27 Jan 2022 19:44:31 +0000 Subject: [labnetwork] Looking for POCL3 supplier Message-ID: Hi everyone. I was hoping someone might be able to help lead me in the right direction to find a source for POCL3 (Phosphorus Oxychloride). I am looking for either a new vessel for our existing setup or possibly a new bubbler setup and source vessel for our Bruce 8 furnace. We currently have an older JC Schumacher source controller (model 7, PN STC 500) which has a Schumacher 750ml POCL3 vessel (PN POCL3750D). It looks like the Air Products who took over from J.C. Schumacher no longer supply this product. If anyone is able to help that would be appreciated. Thanks Rob Robert Vandusen Microfabrication Cleanlab Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From yb2471 at columbia.edu Thu Jan 27 15:07:06 2022 From: yb2471 at columbia.edu (Youry Borisenkov) Date: Thu, 27 Jan 2022 15:07:06 -0500 Subject: [labnetwork] MKS Baratron repair service Message-ID: Happy Thursday everyone, I hope you are all doing well. Can you recommend a repair service for MKS baratron? specifically this one: https://www.mksinst.com/f/628h-heated-capacitance-manometers MKS? 628F Baratron? Temperature Regulated Capacitance Manometer We already ordered a new one but the lead time is extremely long. So another possibility would be to find someone who knows how to test and fix these. Thank you in advance! Youry Process engineer - CNI Shared Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 -------------- next part -------------- An HTML attachment was scrubbed... URL: From carsen at stanford.edu Thu Jan 27 16:20:48 2022 From: carsen at stanford.edu (Carsen Kline) Date: Thu, 27 Jan 2022 21:20:48 +0000 Subject: [labnetwork] Looking for POCL3 supplier In-Reply-To: References: Message-ID: Rob - Though it's been a few years, we were most recently getting it from Versum Materials, who took over from Air Products. They supply our TEOS and Trans-LC, and they're still in Carlsbad, CA where Schumacher were. Contact vmuscso at versummaterials.com, 1-800-837-2724. Carsen Carsen Kline Lab Operations Manager Stanford Nanofabrication Facility 650-724-8214 snfexfab.stanford.edu ________________________________ From: labnetwork on behalf of Robert Vandusen Sent: Thursday, January 27, 2022 11:44 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Looking for POCL3 supplier Hi everyone. I was hoping someone might be able to help lead me in the right direction to find a source for POCL3 (Phosphorus Oxychloride). I am looking for either a new vessel for our existing setup or possibly a new bubbler setup and source vessel for our Bruce 8 furnace. We currently have an older JC Schumacher source controller (model 7, PN STC 500) which has a Schumacher 750ml POCL3 vessel (PN POCL3750D). It looks like the Air Products who took over from J.C. Schumacher no longer supply this product. If anyone is able to help that would be appreciated. Thanks Rob Robert Vandusen Microfabrication Cleanlab Facility Manager Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From blewis at eng.ufl.edu Thu Jan 27 16:31:14 2022 From: blewis at eng.ufl.edu (Lewis,William) Date: Thu, 27 Jan 2022 21:31:14 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> Message-ID: We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment. Bill Lewis Research Service Center University of Florida walewis at ufl.edu 3five2-258-zero5zero7 https://rsc.aux.eng.ufl.edu/ From: labnetwork On Behalf Of Aebersold,Julia W. Sent: Thursday, January 27, 2022 12:40 PM To: Mark Weiler ; Fab Network ; Kurt Kupcho Cc: Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > Cc: LaFleur, David W >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can't say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville... If anyone would like ordering information... just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image001.png at 01D8139B.7AB7E3C0] On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals... In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David - I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great - throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones "feeling the pain" so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don't last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don't get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs... however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It's as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data.... we just can't complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean... then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 720 bytes Desc: image001.png URL: From kurt.kupcho at wisc.edu Thu Jan 27 14:08:45 2022 From: kurt.kupcho at wisc.edu (Kurt Kupcho) Date: Thu, 27 Jan 2022 19:08:45 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: <82A08688-43AC-4D39-8A70-1DD334930623@andrew.cmu.edu> References: <82A08688-43AC-4D39-8A70-1DD334930623@andrew.cmu.edu> Message-ID: That is a good sign that they are not sticky like the SPTS ones then! If you are willing please pass on the order info for your new lip seals. Best, Kurt Kurt Kupcho Materials Science Engineer Nanoscale Fabrication Center (NFC) University of Wisconsin 1550 Engineering Dr. ECB 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 [cid:image001.png at 01D8137F.028F26E0] From: Mark Weiler Sent: Thursday, January 27, 2022 12:42 PM To: Kurt Kupcho Cc: Aebersold,Julia W. ; Fab Network ; LaFleur, David W ; Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) FYI... I did not perform an O2 or Ar plasma burn in on these seals. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilites Bertucci Nanotechnology Laboratory Eden Hall Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu "Be kind; everyone is on their own journey." Daniel Ek Sent from my iPhone On Jan 27, 2022, at 12:43 PM, Kurt Kupcho > wrote: ? With a 13s lip seal burn with O2 plasma of SPTS lip seals I can get 0.4mt/min leak up rate. With limiting O2 plasma cleans after SF6/O2 runs to the minimum amount of time to clean out the SF6 we are also able to extend the lifetime significantly. I am still interested in Mark?s new lip seals though because these lip seals will probably not be available from SPTS much longer. They already stopped supporting anything about our tool model over 5 years ago. Kurt Kurt Kupcho Materials Science Engineer Nanoscale Fabrication Center (NFC) University of Wisconsin 1550 Engineering Dr. ECB 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Aebersold,Julia W. > Sent: Thursday, January 27, 2022 11:40 AM To: Mark Weiler >; Fab Network >; Kurt Kupcho > Cc: LaFleur, David W >; Daniel Christensen > Subject: RE: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > Cc: LaFleur, David W >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? If anyone would like ordering information? just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David ? I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 30076 bytes Desc: image001.png URL: From mweiler at andrew.cmu.edu Thu Jan 27 16:46:25 2022 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Thu, 27 Jan 2022 16:46:25 -0500 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> Message-ID: <8B135379-9A76-41D6-AE05-C57A97D0ABE9@andrew.cmu.edu> Hi Bill, That?s brilliant. Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process? Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu > On Jan 27, 2022, at 4:31 PM, Lewis,William wrote: > > > We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment. > > > Bill Lewis > Research Service Center > University of Florida > walewis at ufl.edu > 3five2-258-zero5zero7 > https://rsc.aux.eng.ufl.edu/ > > > From: labnetwork > On Behalf Of Aebersold,Julia W. > Sent: Thursday, January 27, 2022 12:40 PM > To: Mark Weiler >; Fab Network >; Kurt Kupcho > > Cc: Daniel Christensen > > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) > > [External Email] > We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. > > Cheers! > > Julia Aebersold, Ph.D. > Manager, Micro/Nano Technology Center > University of Louisville > Shumaker Research Building, Room 233 > 2210 South Brook Street > Louisville, KY 40292 > (502) 852-1572 > > http://louisville.edu/micronano/ > > From: Mark Weiler [mailto:mweiler at andrew.cmu.edu ] > Sent: Thursday, January 27, 2022 11:05 AM > To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > > Cc: LaFleur, David W >; Daniel Christensen > > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) > > CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. > Hello Everyone, > > I have some good results to share on our quest for a better DRIE Lip Seal. > > The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. > > We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. > > Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? > > If anyone would like ordering information? just let me know. > > Best Regards, > > Mark > > ________________________________________________________________ > > Mark Weiler > Manager, Equipment & Facilities > Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > F: 412-268-3497 > http://www.nanofab.ece.cmu.edu > > > > On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: > > Thanks Mark. > > I would be interested in hearing your Ar lipseal burn results as well. > > Kurt > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > NFC > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > From: Mark Weiler [mailto:mweiler at andrew.cmu.edu ] > Sent: Monday, March 11, 2019 3:33 PM > To: Kurt Kupcho > Cc: LaFleur, David W; Fab Network > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hi Kurt, > > I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. > > Mark > > > ________________________________________________________________ > > Mark Weiler > Equipment & Facilites Manager > Clair and John Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > http://www.nanofab.ece.cmu.edu > > > > > > On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: > > Hi Mark & David ? > > I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. > > I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. > > Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. > > Best, > > Kurt > > > --------------------------------------------------- > Kurt Kupcho > Process Engineer/Safety Officer > > NFC > 1550 Engineering Drive > ECB Room 3110 > Madison, WI 53706 > > E: kurt.kupcho at wisc.edu > T: 608-262-2982 > > > > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu ] On Behalf Of Mark Weiler > Sent: Wednesday, March 06, 2019 8:04 AM > To: LaFleur, David W > Cc: Fab Network > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hi David, > > I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. > > It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. > > My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. > > Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL > > Best, > > Mark > > Mark Weiler > Equipment & Facilities Manager > Claire and John Bertucci Nanotechnology Laboratory > Electrical and Computer Engineering | Carnegie Mellon University > 5000 Forbes Ave., Pittsburgh, PA 15213-3890 > T: 412.268.2471 > F: 412.268.3497 > www.ece.cmu.edu > nanofab.ece.cmu.edu > > On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: > > Hi Mark, > > We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. > > Regards, > > David LaFleur > Equipment Engineer > CNS, Harvard University > > From: "labnetwork-bounces at mtl.mit.edu " > on behalf of Mark Weiler > > Date: Tuesday, March 5, 2019 at 3:44 PM > To: Fab Network > > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures > > Hello Everyone, > > We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. > > Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. > > Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. > > Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. > > This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. > > Have any of you seen this before? > > Best regards, > > Mark > > > ________________________________________________________________ > > Mark Weiler > Equipment & Facilites Manager > Clair and John Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > http://www.nanofab.ece.cmu.edu > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: images.png Type: image/png Size: 720 bytes Desc: not available URL: From blewis at eng.ufl.edu Fri Jan 28 08:03:12 2022 From: blewis at eng.ufl.edu (Lewis,William) Date: Fri, 28 Jan 2022 13:03:12 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: <8B135379-9A76-41D6-AE05-C57A97D0ABE9@andrew.cmu.edu> References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> <8B135379-9A76-41D6-AE05-C57A97D0ABE9@andrew.cmu.edu> Message-ID: Hi Mark, Treat was the wrong word. Just rub Fomblin (PFPE) on the seal. From: Mark Weiler Sent: Thursday, January 27, 2022 4:46 PM To: Lewis,William Cc: Aebersold,Julia W. ; Fab Network ; Kurt Kupcho ; Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] Hi Bill, That?s brilliant. Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process? Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image001.png at 01D8141D.AB565AC0] On Jan 27, 2022, at 4:31 PM, Lewis,William > wrote: We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment. Bill Lewis Research Service Center University of Florida walewis at ufl.edu 3five2-258-zero5zero7 https://rsc.aux.eng.ufl.edu/ From: labnetwork > On Behalf Of Aebersold,Julia W. Sent: Thursday, January 27, 2022 12:40 PM To: Mark Weiler >; Fab Network >; Kurt Kupcho > Cc: Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > Cc: LaFleur, David W >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? If anyone would like ordering information? just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David ? I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 720 bytes Desc: image001.png URL: From kjvowen at lnf.umich.edu Fri Jan 28 09:02:19 2022 From: kjvowen at lnf.umich.edu (Kevin Owen) Date: Fri, 28 Jan 2022 09:02:19 -0500 Subject: [labnetwork] MKS Baratron repair service In-Reply-To: References: Message-ID: Youry, I have been getting ours repaired directly by MKS over the past few years and don't have any complaints about their service. I believe I just used the RMA form on their website: https://www.mksinst.com/contact-us/rma-form. -Kevin On Thu, Jan 27, 2022 at 4:06 PM Youry Borisenkov wrote: > Happy Thursday everyone, > > I hope you are all doing well. > > Can you recommend a repair service for MKS baratron? > > specifically this one: > https://www.mksinst.com/f/628h-heated-capacitance-manometers > MKS? 628F Baratron? Temperature Regulated Capacitance Manometer > > We already ordered a new one but the lead time is extremely long. > So another possibility would be to find someone who knows how to test and > fix these. > > Thank you in advance! > Youry > > Process engineer - CNI Shared Labs > > Columbia University > > CEPSR/MC 8903 > > 530 west 120th st. NY > > NY 10027 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Kevin Owen Lead Research Engineer Operations Group, Lurie Nanofabrication Facility University of Michigan (734) 545-4014 -------------- next part -------------- An HTML attachment was scrubbed... URL: From betemc at rit.edu Fri Jan 28 09:10:35 2022 From: betemc at rit.edu (Bruce Tolleson) Date: Fri, 28 Jan 2022 14:10:35 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> <8B135379-9A76-41D6-AE05-C57A97D0ABE9@andrew.cmu.edu> Message-ID: <908c0fddeb8c4f0aa86efae4b2515c76@ex04mail01a.ad.rit.edu> Hi M ark, We use Fomblin grease and apply a thin coat to a clean o-ring upon installation and we get great life out of ours as well. Good Luck, Bruce E. Tolleson Rochester Institute of Technology 82 Lomb Memorial Drive, Bldg 17-2627 Rochester, NY 14623-5604 (315) 573-6263 [http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg] From: labnetwork On Behalf Of Lewis,William Sent: Friday, January 28, 2022 8:03 AM To: Mark Weiler Cc: Fab Network ; Kurt Kupcho ; Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) Hi Mark, Treat was the wrong word. Just rub Fomblin (PFPE) on the seal. From: Mark Weiler > Sent: Thursday, January 27, 2022 4:46 PM To: Lewis,William > Cc: Aebersold,Julia W. >; Fab Network >; Kurt Kupcho >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] Hi Bill, That?s brilliant. Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process? Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image003.png at 01D81426.E76B20A0] On Jan 27, 2022, at 4:31 PM, Lewis,William > wrote: We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment. Bill Lewis Research Service Center University of Florida walewis at ufl.edu 3five2-258-zero5zero7 https://rsc.aux.eng.ufl.edu/ From: labnetwork > On Behalf Of Aebersold,Julia W. Sent: Thursday, January 27, 2022 12:40 PM To: Mark Weiler >; Fab Network >; Kurt Kupcho > Cc: Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > Cc: LaFleur, David W >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? If anyone would like ordering information? just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David ? I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 2550 bytes Desc: image002.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 720 bytes Desc: image003.png URL: From codreanu at udel.edu Fri Jan 28 13:39:42 2022 From: codreanu at udel.edu (Iulian Codreanu) Date: Fri, 28 Jan 2022 13:39:42 -0500 Subject: [labnetwork] Litho engineer position in Delaware Message-ID: <80409329-30b9-9d63-df9b-b37915c09ee8@udel.edu> Hello, I hope this note finds everyone well and in good spirits. The UD NanoFab has a Lithography Engineer opening. The main responsibilities are to provide user training and support on the EBPG5200 e-beam writer, MLA100 laser writer, NXQ8006 aligner, Merlin SEM, and miscellaneous lithography equipment. All the tools are six years old or newer. We are located in an area with a relatively low cost of living (e.g. no sales tax and low property taxes) and close to major cities in the Northeast as well as the beach and the mountains. In addition to competitive salaries, UD offers a generous benefit package; some highlights are listed below: -11% University contribution to the retirement plan -Tuition-free undergraduate education for employees and family members -Time off: 22 days of vacation, 7 holidays, and December holiday break -Health insurance plans with modest premiums and excellent coverage. http://www.udel.edu/faculty-staff/human-resources/benefits/ The link to the position (Job 498428) is below: https://careers.udel.edu/cw/en-us/job/498428/lithography-engineer-ud-nanofabrication-facility Could you please forward to anyone who may be interested? I would be happy to answer questions about the position. Thank you very much, Iulian -- iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Fri Jan 28 15:16:20 2022 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Fri, 28 Jan 2022 15:16:20 -0500 Subject: [labnetwork] MKS Baratron repair service In-Reply-To: References: Message-ID: Hi Youry, You can also try coastal instruments? at: mfchelp.com. They can repair/service different makes/models of manometers including MKS Baratron branded devices. Their price is about $275 with ~7-10 business day turnaround. As long as the sensor is not drifting or the device contaminated, they should be able to service it. I had just been researching getting some of ours repaired and calibrated? So this is good timing. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilites Bertucci Nanotechnology Laboratory Eden Hall Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu "Be kind; everyone is on their own journey." Daniel Ek Sent from my iPhone > On Jan 27, 2022, at 4:02 PM, Youry Borisenkov wrote: > > ? > Happy Thursday everyone, > > I hope you are all doing well. > > Can you recommend a repair service for MKS baratron? > > specifically this one: > > https://www.mksinst.com/f/628h-heated-capacitance-manometers > MKS? 628F Baratron? Temperature Regulated Capacitance Manometer > > We already ordered a new one but the lead time is extremely long. > So another possibility would be to find someone who knows how to test and fix these. > > Thank you in advance! > Youry > Process engineer - CNI Shared Labs > > Columbia University > > CEPSR/MC 8903 > > 530 west 120th st. NY > > NY 10027 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From christophe.clement at polymtl.ca Fri Jan 28 17:19:34 2022 From: christophe.clement at polymtl.ca (=?iso-8859-1?Q?Christophe_Cl=E9ment?=) Date: Fri, 28 Jan 2022 17:19:34 -0500 (EST) Subject: [labnetwork] Suss Parts for bonder SB6e Message-ID: <009d01d81495$219dc520$64d94f60$@polymtl.ca> Hello community We have a bonder SB6e from Suss and need to change a sandwich plate for 4-inch wafer (SiC plate). As Prices at Suss increase exponentially, does anyone of you know a supplier where we can have parts for Suss tools? Thank you Christophe Christophe Cl?ment Technicien laboratoire Laboratoire de microfabrication (LMF) Groupe des Couches Minces (GCM) www.gcmlab.ca Ecole Polytechnique de Montr?al www.polymtl.ca D?partement de g?nie physique * 2900 Boulevard Edouard Monpetit Pavillon JAB Campus de l'Universit? de Montr?al Montr?al (Qu?bec) H3T 1J4 * christophe.clement at polymtl.ca * 514 340 4711 #2417 Fax : 514 340 5195 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ivan.shubin at ramphotonics.com Fri Jan 28 18:21:28 2022 From: ivan.shubin at ramphotonics.com (ivan.shubin at ramphotonics.com) Date: Fri, 28 Jan 2022 16:21:28 -0700 Subject: [labnetwork] XeF2 on 200mm wafers Message-ID: <20220128162128.258970d9d2eadc9e3ae574bfcf257139.710c4dbd19.wbe@email23.godaddy.com> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: sigimg1 Type: image/jpeg Size: 5373 bytes Desc: not available URL: From rosendo.bindoy at kaust.edu.sa Mon Jan 31 07:41:24 2022 From: rosendo.bindoy at kaust.edu.sa (Rosendo Bindoy) Date: Mon, 31 Jan 2022 12:41:24 +0000 Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) In-Reply-To: <908c0fddeb8c4f0aa86efae4b2515c76@ex04mail01a.ad.rit.edu> References: <8395D872-145D-42D7-8D7D-558BAE91C048@cns.fas.harvard.edu> <6181704F-4A5F-4A52-B386-7B6C505A5B1F@andrew.cmu.edu> <0E780989-ED17-46BA-B3FC-92932EDB936C@andrew.cmu.edu> <6790982C-EC5A-40A7-9409-4BBE54538962@andrew.cmu.edu> <8B135379-9A76-41D6-AE05-C57A97D0ABE9@andrew.cmu.edu> <908c0fddeb8c4f0aa86efae4b2515c76@ex04mail01a.ad.rit.edu> Message-ID: <1B79455E-138B-4289-BD50-1DDDAD930945@kaust.edu.sa> Hello Mark, Same with Bruce, I also apply a thin coat of vacuum grease after cleaning the lip seal, but instead of Fomblin grease I use Apiezon Grease which is silicone free. Regards, Rosendo Rosendo M. Bindoy Equipment Engineer Nanofabrication Core Lab Ibn Sina Bldg. 3 (Sea Side), Level 0 Room 0252 King Abdullah University of Science and Technology Phone: +966 12 808 4413 Mobile: +966 54 251 5257 Email: rosendo.bindoy at kaust.edu.sa Visit The Core Labs From: labnetwork on behalf of Bruce Tolleson Date: Friday, 28 January 2022 at 8:14 PM To: "Lewis, William" , Mark Weiler Cc: Fab Network , Kurt Kupcho , Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) Hi M ark, We use Fomblin grease and apply a thin coat to a clean o-ring upon installation and we get great life out of ours as well. Good Luck, Bruce E. Tolleson Rochester Institute of Technology 82 Lomb Memorial Drive, Bldg 17-2627 Rochester, NY 14623-5604 (315) 573-6263 [http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg] From: labnetwork On Behalf Of Lewis,William Sent: Friday, January 28, 2022 8:03 AM To: Mark Weiler Cc: Fab Network ; Kurt Kupcho ; Daniel Christensen Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) Hi Mark, Treat was the wrong word. Just rub Fomblin (PFPE) on the seal. From: Mark Weiler > Sent: Thursday, January 27, 2022 4:46 PM To: Lewis,William > Cc: Aebersold,Julia W. >; Fab Network >; Kurt Kupcho >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] Hi Bill, That?s brilliant. Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process? Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu [cid:image002.png at 01D816B9.00155AF0] On Jan 27, 2022, at 4:31 PM, Lewis,William > wrote: We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment. Bill Lewis Research Service Center University of Florida walewis at ufl.edu 3five2-258-zero5zero7 https://rsc.aux.eng.ufl.edu/ From: labnetwork > On Behalf Of Aebersold,Julia W. Sent: Thursday, January 27, 2022 12:40 PM To: Mark Weiler >; Fab Network >; Kurt Kupcho > Cc: Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) [External Email] We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Thursday, January 27, 2022 11:05 AM To: Fab Network >; Kurt Kupcho >; Aebersold,Julia W. > Cc: LaFleur, David W >; Daniel Christensen > Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE) CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello Everyone, I have some good results to share on our quest for a better DRIE Lip Seal. The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can?t say whether it was truly the Ar Plasma that helped. We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that. Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville? If anyone would like ordering information? just let me know. Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 4:40 PM, Kurt Kupcho > wrote: Thanks Mark. I would be interested in hearing your Ar lipseal burn results as well. Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: Mark Weiler [mailto:mweiler at andrew.cmu.edu] Sent: Monday, March 11, 2019 3:33 PM To: Kurt Kupcho Cc: LaFleur, David W; Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi Kurt, I will let you know the results of the new seals? In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning. Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu On Mar 11, 2019, at 3:55 PM, Kurt Kupcho > wrote: Hi Mark & David ? I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue. I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great ? throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you. Best, Kurt --------------------------------------------------- Kurt Kupcho Process Engineer/Safety Officer NFC 1550 Engineering Drive ECB Room 3110 Madison, WI 53706 E: kurt.kupcho at wisc.edu T: 608-262-2982 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Weiler Sent: Wednesday, March 06, 2019 8:04 AM To: LaFleur, David W Cc: Fab Network Subject: Re: [labnetwork] STS DRIE Multiplex Lip Seal failures Hi David, I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans. It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number. Thank you for sharing your info; now I know we are not the only ones ?feeling the pain? so to speak and can officially commiserate... LOL Best, Mark Mark Weiler Equipment & Facilities Manager Claire and John Bertucci Nanotechnology Laboratory Electrical and Computer Engineering | Carnegie Mellon University 5000 Forbes Ave., Pittsburgh, PA 15213-3890 T: 412.268.2471 F: 412.268.3497 www.ece.cmu.edu nanofab.ece.cmu.edu On Mar 6, 2019, at 08:46, LaFleur, David W > wrote: Hi Mark, We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don?t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don?t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are. Regards, David LaFleur Equipment Engineer CNS, Harvard University From: "labnetwork-bounces at mtl.mit.edu" > on behalf of Mark Weiler > Date: Tuesday, March 5, 2019 at 3:44 PM To: Fab Network > Subject: [labnetwork] STS DRIE Multiplex Lip Seal failures Hello Everyone, We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter. Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs? however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It?s as if they are made of Buna and not meant for this application. Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data?. we just can?t complete the work due to failing seals. Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean? then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us. Have any of you seen this before? Best regards, Mark ________________________________________________________________ Mark Weiler Equipment & Facilites Manager Clair and John Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 http://www.nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... 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