[labnetwork] LPCVD film anomaly

[Terre Briggs]

Sorry for the delayed response but we just recently finished up the work
needed to fix our bubble issue. The cause of the problem was condensation
of the DCS in the gas delivery lines. Our fix was to replace all of the DCS
gas delivery lines and their components within the furnace gas box. All 3
tubes now have bubble free Nitride, HTO and LSN films. Thanks to everyone
who responded to our request for help in solving this issue.

Terre

On Tue, Aug 3, 2021 at 9:06 AM Terre Briggs <terreb at umich.edu> wrote:

> Hello All,
>     We are currently having film quality issues with our LPCVD Low Stress
> Nitride, HTO and Nitride films. Without getting into all of the details
> just yet I am sharing with you some SEM images. The anomaly, as our furnace
> manufacturer describes it, are what look like spheres, or bubbles on the
> surface of the films. We are pretty confident that the spheres are only on
> the surface and not down into the film itself.
> It is very random across the wafers and across the wafer load. After
> further processing, the spheres come off and leave behind a divot, or
> crater on the surface. This can also be seen in the SEM images.
>    My question is, has anyone ever seen anything like this with any of
> your LPCVD films? I have been working with Tempress for the last several
> months to resolve the issue, but they have never seen anything like
> this, and so far we have not made any progress in determining the source.
> Any help would be appreciated.
>
> Thanks.....Terre
>
> Terre Briggs
> Engineer in Research Sr.
> Lurie Nanofabrication Laboratory
> University of Michigan
> 1301 Beal Ave.
> Ann Arbor, MI 48109
> 734-320-4470
>
>

-- 
Terre Briggs
Engineer in Research Sr.
Lurie Nanofabrication Laboratory
University of Michigan
1301 Beal Ave.
Ann Arbor, MI 48109
734-320-4470
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