From kmcpeak at lsu.edu Mon Jul 4 01:31:13 2022 From: kmcpeak at lsu.edu (Kevin M McPeak) Date: Mon, 4 Jul 2022 05:31:13 +0000 Subject: [labnetwork] RTA of spin-on dopant on Silicon Message-ID: Dear Colleagues, We have a user who is interested in using our new Jipilec/ECM RTA to anneal a boron spin-on dopant in an effort to make good ohmic contacts to Si(100) ,1-10 ohm-cm initially. After doping one side of the wafer they will deposit Al pads and anneal in forming gas. Our goal is to get the doping level to 1x10^19 cm^-3 or higher. We currently are at ~1?10^18 cm^-3. (4000 rpm spin coat, 60 sec anneal at 1050 C, post HF etch with 10% HF for an hour.). Any advice would be most appreciated. 1050 C is the hottest we can go in our RTA. Regards, Kevin -------------- next part -------------- An HTML attachment was scrubbed... URL: From avanmete at gmu.edu Tue Jul 5 17:10:36 2022 From: avanmete at gmu.edu (Amy Adams) Date: Tue, 5 Jul 2022 21:10:36 +0000 Subject: [labnetwork] George Mason University Nanofabrication Manager Job Announcement Message-ID: Dear Lab Network Administrator, Thank you for accepting my request to join the network. Would it be possible to share the following Job Announcement with the network. * George Mason University (Manassas, VA) invites applications for a full-time Nanofabrication Manager. The Nanofabrication Manager will have the opportunity to shape the development of Mason's newly built 2,350 square foot Nanofabrication Facility (NFF) comprised of a class 1000 clean room and class 100,000 characterization lab. The Nanofabrication Manager will be responsible for managing the NFF for the benefit of Mason faculty, staff, and students, as well as external stakeholders. * * Candidates must have Master's degree in scientific, engineering, or related field or equivalent relevant experience; Significant (generally seven (7) years) technical experience working in a clean room facility/laboratory with experience across several pieces of equipment; and Considerable (generally three (3) years) experience managing laboratory operations and/or personnel. * * Learn more about the position and apply by the full consideration date (7/22/22): https://jobs.gmu.edu/postings/54597 We look forward to welcoming the selected candidate to our collaborative and innovative team! Best Regards, Amy * -------------- next part -------------- An HTML attachment was scrubbed... URL: From mhuff at mems-exchange.org Wed Jul 6 15:00:52 2022 From: mhuff at mems-exchange.org (Michael Huff) Date: Wed, 6 Jul 2022 15:00:52 -0400 Subject: [labnetwork] FEI 820 FIB available Message-ID: <480C718A-7BF8-4A7E-A75C-42646C09EE9A@mems-exchange.org> Hello All, We have an old FEI Model 820 focused ion beam (FIB) tool that we want to get rid of free of charge to anyone who wants it. We have not used it for a few years. Someone who has one of these old FIB systems and needs replacement parts would be a good fit. You just have to come and pick it up and it is yours. Thanks, -Michael Contact: email: mhuff at mems-exchange.org and michaelhuff at alum.mit.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Wed Jul 6 17:10:04 2022 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Wed, 6 Jul 2022 21:10:04 +0000 Subject: [labnetwork] Furnace question Message-ID: HI All, Back in 2014 we purchased a 3 stack LPCVD stack from MRL. Last year YES purchased the furnace business from Sandvik. We have been trying to get a quote from them to convert a SiC LPCVD to a poly tube for 12 months and there is no interest. Does anybody know if there is a company that could do that for us. Thanks Rick Richard Morrison PMTS Draper Laboratory 555 Technology Square Cambridge Ma 02139 Office: 617-258-3420 Cell: 508-930-3461 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From sandra.malhotra at tamu.edu Wed Jul 6 17:51:46 2022 From: sandra.malhotra at tamu.edu (Malhotra, Sandra Guy) Date: Wed, 6 Jul 2022 21:51:46 +0000 Subject: [labnetwork] Question about ebeam evaporation of antimony triselenide (Sb2Se3) Message-ID: Howdy All, We have a user who would like to deposit antimony triselenide (Sb2Se3) in one of our ebeam evaporation tools. We are concerned about the toxicity of these materials, particularly where bead blasting of the kits is concerned. I'd like to ask the network if anyone has accommodated this material in their PVD tools, and if so, how they mitigated any toxicity concerns? Thanks in advance for your inputs! Best, Sandra G. Malhotra, Ph.D. | Technical Lab Manager AggieFab Nanofabrication Facility https://aggiefab.tamu.edu/ Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University 3253 TAMU | College Station, TX 77843 ph: 979.845.3199 | sandra.malhotra at tamu.edu - - - - - - - - - - - - - - - - - - - - - - - - TEXAS A&M UNIVERSITY | FEARLESS on Every Front -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob.geil at unc.edu Thu Jul 7 12:10:05 2022 From: bob.geil at unc.edu (Geil, Bob) Date: Thu, 7 Jul 2022 16:10:05 +0000 Subject: [labnetwork] Position open for Materials Characterization and Outreach Scientist at UNC-CH Message-ID: The Chapel Hill Analytical and Nanofabrication Laboratory (CHANL) at UNC-Chapel Hill is seeking a Materials Characterization and Outreach Scientist that is as passionate about scanning electron and atomic force microscopies as they are about promoting scientific outreach and educational activities. Responsibilities will include supporting CHANL?s microscopy instrumentation through new user trainings, maintaining instrumentation, and providing characterization services. A major portion of the role will also entail coordinating, developing, and assisting in outreach and educational activities to support the mission of the Research Triangle Nanotechnology Network (RTNN) and the UNC Department of Chemistry. The full posting can be found here: https://unc.peopleadmin.com/postings/233919 Bob Geil, PhD Technical Director ? CHANL Dept. of Chemistry ? UNC-CH https://chanl.unc.edu/ 245 Chapman Hall, CB 3216 Chapel Hill, NC 27599 -------------- next part -------------- An HTML attachment was scrubbed... URL: From markc at exper-tech.com Wed Jul 6 21:25:51 2022 From: markc at exper-tech.com (mark cooper) Date: Thu, 7 Jul 2022 01:25:51 +0000 Subject: [labnetwork] Furnace question In-Reply-To: References: Message-ID: Richard, We may be able to assist, there are a number of customers on that platform with less than desirable support. I would need more details, which we can take off line. Mark Cooper Mark Cooper General Manager 10 Victor Square, Suite 100 Scotts Valley, CA. 95066 Office: (831) 439-9300 Direct:(831) 440-4422 Mobile:(831) 332-9396 markc at exper-tech.com [cid:image001.png at 01D89165.D1AAB660] This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments. From: labnetwork On Behalf Of Morrison, Richard H., Jr Sent: Wednesday, July 6, 2022 2:10 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Furnace question HI All, Back in 2014 we purchased a 3 stack LPCVD stack from MRL. Last year YES purchased the furnace business from Sandvik. We have been trying to get a quote from them to convert a SiC LPCVD to a poly tube for 12 months and there is no interest. Does anybody know if there is a company that could do that for us. Thanks Rick Richard Morrison PMTS Draper Laboratory 555 Technology Square Cambridge Ma 02139 Office: 617-258-3420 Cell: 508-930-3461 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ Expert Semiconductor Technology, Inc. Phone: (831) 439-9300 Fax: (831) 439-8139 This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments. mark cooper Expert Semiconductor Technology, Inc. Phone: (831) 439-9300 Fax: (831) 439-8139 This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 49721 bytes Desc: image001.png URL: From kckeenan at seas.upenn.edu Thu Jul 7 08:42:01 2022 From: kckeenan at seas.upenn.edu (Kyle Keenan) Date: Thu, 7 Jul 2022 08:42:01 -0400 Subject: [labnetwork] Furnace question In-Reply-To: References: Message-ID: Depending upon what you need done, they have an agreement with former Sandvik employee Dave Selbee that he is allowed to provide certain services that they do not. It may be worth asking him. Dave Selbee Selbee Semiconductor Services LLC 209-768-7300 Good luck. Kyle On Wed, Jul 6, 2022 at 9:22 PM Morrison, Richard H., Jr < rmorrison at draper.com> wrote: > HI All, > > > > Back in 2014 we purchased a 3 stack LPCVD stack from MRL. Last year YES > purchased the furnace business from Sandvik. We have been trying to get a > quote from them to convert a SiC LPCVD to a poly tube for 12 months and > there is no interest. Does anybody know if there is a company that could do > that for us. > > > > Thanks > > > > Rick > > > > > > Richard Morrison > > PMTS > > Draper Laboratory > > 555 Technology Square > > Cambridge Ma 02139 > > Office: 617-258-3420 > > Cell: 508-930-3461 > > > ------------------------------ > Notice: This email and any attachments may contain proprietary (Draper > non-public) and/or export-controlled information of Draper. If you are not > the intended recipient of this email, please immediately notify the sender > by replying to this email and immediately destroy all copies of this email. > ------------------------------ > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!RLhuSBiApig2FPwYBgzb1GTGOxOwB04862W1fRsIahyJVIa16U2qfq-V1HfrovCnAD6WS5RNyUdzNfCgLtP-ybY$ > -- Kyle Keenan Laboratory Manager Quattrone Nanofabrication Facility University of Pennsylvania P: 215-898-7560 F: 215-573-4925 -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Jul 7 12:12:14 2022 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 7 Jul 2022 16:12:14 +0000 Subject: [labnetwork] Furnace question In-Reply-To: References: Message-ID: I heard at UGIM that Sandvik is gotten away from the tube furnace business, but is still supplying some components. Maybe Expertech or Tystar could help you? Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork On Behalf Of Morrison, Richard H., Jr Sent: Wednesday, July 6, 2022 5:10 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Furnace question CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. HI All, Back in 2014 we purchased a 3 stack LPCVD stack from MRL. Last year YES purchased the furnace business from Sandvik. We have been trying to get a quote from them to convert a SiC LPCVD to a poly tube for 12 months and there is no interest. Does anybody know if there is a company that could do that for us. Thanks Rick Richard Morrison PMTS Draper Laboratory 555 Technology Square Cambridge Ma 02139 Office: 617-258-3420 Cell: 508-930-3461 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcchrist at wisc.edu Fri Jul 8 16:47:51 2022 From: dcchrist at wisc.edu (Daniel Christensen) Date: Fri, 8 Jul 2022 20:47:51 +0000 Subject: [labnetwork] Job opening at the University of Wisconsin-Madison - Nanoscale Imaging and Analysis Center Message-ID: Job opening at the University of Wisconsin-Madison, Wisconsin Centers for Nanoscale Technology - Nanoscale Imaging and Analysis Center This position's responsibilities will include, but are not limited to: - The position will be responsible for the operation and training of users in advanced characterization techniques in the WCNT including, but not limited to SPM, SEM, FIB, TEM, Raman, FTIR, XRD, SIMS, nano mechanical testing, and XPS depending on candidate experience - The position will be responsible for developing documentation and training materials for the proper use of characterization systems - The position will be responsible for training new users on the proper operation of the characterization instruments in the WCNT. The position will teach proper protocols including safety and shared research facility etiquette - The candidate will write standard operating procedures and train students in the use of specific instrumentation - The candidate will be expected to assist students and other researchers in all areas of instrument use and method development for common WCNT characterization applications - Interaction with the lead PI groups and the lab manager to identify research trends and new instruments for the centers Link to opening: . https://jobs.hr.wisc.edu/en-us/job/514426/characterization-engineer I'm posting this for a sibling core facility to please send an questions to the person in the job link. Thanks, Dan C Daniel C. Christensen Laboratory Manager Nanoscale Fabrication Center University of Wisconsin-Madison -------------- next part -------------- An HTML attachment was scrubbed... URL: From gilheart at rice.edu Sun Jul 10 23:14:10 2022 From: gilheart at rice.edu (Timothy J Gilheart) Date: Sun, 10 Jul 2022 22:14:10 -0500 Subject: [labnetwork] Question about ebeam evaporation of antimony triselenide (Sb2Se3) In-Reply-To: References: Message-ID: <50BA72EA-95C7-40A9-AFC1-79D62AD0A4A2@rice.edu> Hi Sandra, I?d be concerned about both toxicity and vacuum system performance with this material, so I would decline such a request if I received it. I have some direct experiences with both e-beam and thermal evaporation of Sb, but only in small amounts for a doping layer application. It sublimes and has relatively high vapor pressure, so it?s tricky to manage in either method. Toxicity concerns are much less with this element, but there is danger in acute or chronic exposure to inhaled powders. In my previous experience, I had just 2 nm of Ab sandwiched between a couple of other well-adhered metal films each almost 100 nm thick, so loose Sb flakes and powder was very unlikely for my applications, and our shield-cleaning vendor would accept parts with the level of Sb contamination we documented. Se is both toxic and has high vapor pressure. I consider it a ?no-go? material in all of our shared vacuum deposition tools, since we have little redundancy in our capabilities. If you had enough capacity to have a dedicated machine for Se and other materials of concern, maybe, but it?s still toxic. With a higher melting point, I would expect Sb2Se3 to be better on the vapor pressure concern. but I don?t think the potential for toxicity goes away. In fact, when consulting the various thin film deposition guides freely available, the notes suggest co-evaporation of Se is needed to reduce stoichiometric variations, so that puts you right back into all the concerns surrounding Se. Hope some of this perspective helps you make an informed decision for your context. Best of luck with it, -- Tim Gilheart, Ph.D. Research Scientist - Nanofabrication Cleanroom Manager, Shared Equipment Authority (SEA), Rice University Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu > On Jul 6, 2022, at 4:51 PM, Malhotra, Sandra Guy wrote: > > Howdy All, > We have a user who would like to deposit antimony triselenide (Sb2Se3) in one of our ebeam evaporation tools. We are concerned about the toxicity of these materials, particularly where bead blasting of the kits is concerned. I'd like to ask the network if anyone has accommodated this material in their PVD tools, and if so, how they mitigated any toxicity concerns? > > Thanks in advance for your inputs! > > Best, > > Sandra G. Malhotra, Ph.D. | Technical Lab Manager > > AggieFab Nanofabrication Facility > https://aggiefab.tamu.edu/ > Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University > 3253 TAMU | College Station, TX 77843 > ph: 979.845.3199 | sandra.malhotra at tamu.edu > - - - - - - - - - - - - - - - - - - - - - - - - > TEXAS A&M UNIVERSITY | FEARLESS on Every Front > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!BuQPrrmRaQ!nnNv75nE28AhhDe0AkUvwImi9BAcxzR82KSmrUL6I15XRGofbC6p97j-sKWucJmvciorcu5rfaWPBiZjhdnRHjlZh6InVybYx8ajRsA$ -------------- next part -------------- An HTML attachment was scrubbed... URL: From lopezg at seas.upenn.edu Mon Jul 11 09:38:34 2022 From: lopezg at seas.upenn.edu (Gerald Lopez) Date: Mon, 11 Jul 2022 09:38:34 -0400 Subject: [labnetwork] MAEBL 2022 Registration is Now Open Message-ID: Dear Colleagues: Registration for MAEBL 2022 is now open. Included in this year's program is MABELx Asia-Pacific, our first bonus online meeting that will be held on *July 29, AEDT*. All meeting details can be found in our MAEBL 2022 program . The 6th *M*eeting for *A*dvanced *E*lectron *B*eam *L*ithography (MAEBL) will be held *September 14-15, 2022*. - Where: *California Institute of Technology (and online)*. The hybrid event will stream the live talks through the GatherTown platform, but *attendees are strongly encouraged to attend in person*. - *Register: *https://maebl.eventbrite.com. Registration is the same ($165) if you attend online or in person.* Invited speakers have their registration waived.* If you are interested in presenting, please let us know. Priority will be given to those that can speak in person. - *MAEBL 2022 **Program* is available for download. MAEBL 2022 is a two-day event. The first day features the MAEBL Foundations Workshop for novice/beginners (especially researchers and students) in electron beam lithography. All are invited to participate in the Foundations Workshop to learn, brush up, or help mentor others on EBL fundamentals in machine agnostic tool operation, data preparation, process development, etc. At the end of the meeting, beginners should be conversant in EBL and be encouraged to participate in the MAEBL Core Workshop. Day Two is the Core Workshop that started it all. Be part of the conversation and learn something new (or old). Arrive early to network, receive your name badge, and grab a coffee/light continental breakfast. Bring your business cards, laptop computer with designs and SEM images of your issues, and an open mind. The goal of the meeting is to connect active novice to experienced EBL tool owners and users to openly exchange practical and directly applicable EBL knowledge in an open forum format. The event features invited talks from users in the field. [image: mockup.png] Register at https://maebl.eventbrite.com and feel free to invite others that might be interested. * Registration is only $165* for the full meeting at Caltech and bonus meetings (MAEBLx) access, whether attending online or in person. All attendees will receive a commemorative MAEBL 2022 t-shirt. Sincerely, Gerald G. Lopez, Ph.D. (he/him/his) Co-Founder and Board Chair, MAEBL Join us at Caltech for MAEBL 2022! Register at https://maebl.eventbrite.com MAEBL 2022 Sponsors: [image: sponsors.png] Gerald G. Lopez, Ph.D. (he/him/his) Director of Operations and Business Development & Center Associate Director University of Pennsylvania | Singh Center for Nanotechnology NNCI Mid-Atlantic Nanotechnology Hub (MANTH) ? nnci.net 3205 Walnut Street, Philadelphia PA 19104 USA nano.upenn.edu ? lopezg at seas.upenn.edu ? +1-215-573-4041 ? linkedin.com/in/geraldglopez/ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: sponsors.png Type: image/png Size: 112157 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: mockup.png Type: image/png Size: 54047 bytes Desc: not available URL: From diadiuk at mit.edu Tue Jul 12 09:02:57 2022 From: diadiuk at mit.edu (Vicky Diadiuk) Date: Tue, 12 Jul 2022 13:02:57 +0000 Subject: [labnetwork] tube cleaner free to good home Message-ID: Hi, We have a functional tube cleaner looking for a new home. It?ll be available on 7/27. Pls reply directly to me. Thx, Vicky Diadiuk -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 222310 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: smime.p7s Type: application/pkcs7-signature Size: 1861 bytes Desc: not available URL: From kckeenan at seas.upenn.edu Tue Jul 12 12:53:22 2022 From: kckeenan at seas.upenn.edu (Kyle Keenan) Date: Tue, 12 Jul 2022 12:53:22 -0400 Subject: [labnetwork] Lead Cleanroom Equipment Engineer - Quattrone Nanofabrication Facility Message-ID: Hello All, We are seeking candidates for the Lead Cleanroom Engineer position at QNF. Please share the link below with anyone you feel may be interested. https://wd1.myworkdaysite.com/en-US/recruiting/upenn/careers-at-penn/job/Lead-Cleanroom-Equipment-Engineer---Quattrone-Nanofabrication-Facility---Penn-Engineering_JR00056059 Thank you, -- Kyle Keenan Laboratory Manager Quattrone Nanofabrication Facility University of Pennsylvania P: 215-898-7560 F: 215-573-4925 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jtmitch5 at ncsu.edu Wed Jul 13 11:45:08 2022 From: jtmitch5 at ncsu.edu (James Mitchell) Date: Wed, 13 Jul 2022 11:45:08 -0400 Subject: [labnetwork] Manometer Message-ID: We are looking for 1 or 2 of these if any one has spares they could sell us. [image: image.png] *Thank you, Jim* *James Mitchell* *Specialty Trades Technician* *Dept. of Electrical and Computer Engineering* *North Carolina State University Nanofabrication Facility (NNF)* *MRC RM243A **Box 7911* *2410 Campus Shore Dr., Raleigh, NC 27606* *jtmitch5 at ncsu.edu* *Desk: 919-515-5394* *Cell: 919-717-7325* -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 102973 bytes Desc: not available URL: From bill_flounders at berkeley.edu Wed Jul 13 17:44:33 2022 From: bill_flounders at berkeley.edu (Albert William (Bill) Flounders) Date: Wed, 13 Jul 2022 14:44:33 -0700 Subject: [labnetwork] R&D Engineering Position at UC Berkeley Message-ID: Looking once again for one of those special engineers that keep a laboratory running. Next generation, step on up, our lab staffs are all turning over. Former generations, always welcome, come on back to the labs you love. --------------------------------------------------- The UC Berkeley NanoLab is seeking an R&D3 engineer to join the NanoLab Equipment Engineering and Support team. The Berkeley NanoLab is a shared research facility that supports the micro/nanofabrication needs of more than 400 graduate and post-doctoral researchers each year. The Equipment Engineering and Support team is responsible for maintaining and repairing the more than 150 semiconductor fabrication and metrology tools of the NanoLab. These are unique and demanding positions that require a broad range of experience and a willingness to learn as much as the expert who designed the tool with each new repair or rebuild challenge. This specific position is not a process engineering specialist nor an academic research appointment, but you will communicate with those specialists all day. This position is ideal for a hands on, mechanically inclined individual who likes to take equipment apart - and call upon an in-house custom machine shop to make improved parts - then put things back together. The selected candidate is more comfortable with a wrench than tweezers but uses both. They regularly reach for a DVM or an HLD; they often use an oscilloscope or a spectrometer. They take pride in tool performance and custom capabilities and monitor uptime more than publications or conferences. The current opening has a focus on plasma etch tools but the preferred candidate will be familiar with a wide range of PVD, CVD, and ALD systems. If you are an experienced field service engineer tired of flying around the world to production Fabs, consider a position at UC Berkeley and get ready for some creative work at our research Lab. To apply, go the UC Berkeley External Applicants Page Select External Applicants Apply Here then enter the Job ID # 38390 in the Keyword Search Field. -------------- next part -------------- An HTML attachment was scrubbed... URL: From vk409 at soe.rutgers.edu Thu Jul 14 11:34:56 2022 From: vk409 at soe.rutgers.edu (Vibhor Kumar) Date: Thu, 14 Jul 2022 15:34:56 +0000 Subject: [labnetwork] Suggestions on liquid diffusion sources Message-ID: Dear labnetwork community, We are setting up thermal diffusion furnaces for P and B diffusion. Initially we are thinking of following liquid diffusion sources: Boron tribromide, 99% min, Thermo Scientific? as B diffusion source and Phenylphosphonic dichloride, 97%, Thermo Scientific? for P diffusion I would appreciate any comments/suggestions on those and alternative. Sincerely, -Vibhor Kumar- Research Scientist, School of Engineering, Rutgers, The State University of New Jersey, NJ USA. -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Thu Jul 14 18:47:38 2022 From: kmcpeak at lsu.edu (Kevin M McPeak) Date: Thu, 14 Jul 2022 22:47:38 +0000 Subject: [labnetwork] ALD reactor thru wall sealing ideas Message-ID: Dear Colleagues, Over the past year and a half, the LSU nanofabrication facility has constructed a plasma-enhanced ALD tool with much advice from Scott Butcher at MEAglow. See photos of the tool here: https://photos.app.goo.gl/iBMRZnYfKJmJBQtKA Our current plan is to house the tool outside the cleanroom and have the heated/insulated door stick through a hole in the cleanroom wall (1/2" thick Al honeycomb), see photos. We are looking for ideas on the best way to seal the hole in the wall around the jacket. We are thinking of cutting the wall larger than the jacket diameter and then fabricating a large rubber grommet around the jacket. Hopefully, some of you have tools with these kinds of seals and can provide first-hand experience or even sources for the materials. The reactor body is built from a MDC 8" Tee (https://www.mdcprecision.com/404041-tee-8-inchflange) with a 3/4" thick heated jacket wrapped around it. The maximum external temperature of the jacket is 129 F (touch safe). Thanks for your input in advance! Regards, Kevin From cg70 at rice.edu Fri Jul 15 09:46:48 2022 From: cg70 at rice.edu (Carlos Gramajo) Date: Fri, 15 Jul 2022 08:46:48 -0500 Subject: [labnetwork] ALD reactor thru wall sealing ideas In-Reply-To: References: Message-ID: Kevin, Please correct me if I am wrong, but it looks like the machine will be in the air return area, maybe class 10,000. I don't believe that you need a tight seal there since the air pressure differential should move air away from your clean area. All you need to do is remove the possibility of a large draught around your door. I might suggest cutting out a square with a hole the size of the nipple, then cut that in half. Once you have put the door through then use those two pieces you cut out and collar it around the nipple and screw it onto the wall. you can even get some adhesive rubber tape to put on the edge of the cutout semicircles to have a tighter seal when you collar it. I hope this idea helps, Regards, Carlos On Fri, Jul 15, 2022 at 6:55 AM Kevin M McPeak wrote: > Dear Colleagues, > > Over the past year and a half, the LSU nanofabrication facility has > constructed a plasma-enhanced ALD tool with much advice from Scott Butcher > at MEAglow. See photos of the tool here: > https://urldefense.com/v3/__https://photos.app.goo.gl/iBMRZnYfKJmJBQtKA__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5wYhp_CY$ > > Our current plan is to house the tool outside the cleanroom and have the > heated/insulated door stick through a hole in the cleanroom wall (1/2" > thick Al honeycomb), see photos. > > We are looking for ideas on the best way to seal the hole in the wall > around the jacket. We are thinking of cutting the wall larger than the > jacket diameter and then fabricating a large rubber grommet around the > jacket. Hopefully, some of you have tools with these kinds of seals and can > provide first-hand experience or even sources for the materials. > > The reactor body is built from a MDC 8" Tee ( > https://urldefense.com/v3/__https://www.mdcprecision.com/404041-tee-8-inchflange__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5julTbUE$ > ) with a 3/4" thick heated jacket wrapped around it. The maximum external > temperature of the jacket is 129 F (touch safe). > > Thanks for your input in advance! > > Regards, > Kevin > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5l7HS7X0$ > -- Carlos Gramajo Cleanroom Research Scientist Shared Equipment Authority (SEA), Rice University Cell: 713-743-8115; Office: 713-348-8243; cg70 at rice.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jtmitch5 at ncsu.edu Fri Jul 15 11:21:25 2022 From: jtmitch5 at ncsu.edu (James Mitchell) Date: Fri, 15 Jul 2022 11:21:25 -0400 Subject: [labnetwork] ALD reactor thru wall sealing ideas In-Reply-To: References: Message-ID: I have had to cut through a honeycomb wall like that. Once I had the opening I needed I used a large piece of tubing to insulate the opening. I got 2 or 3 inch OD soft plastic tubing and cut a longways slit in it and fitted it around the opening. This would make it safe to reach through. You could also use silicone to seal it and hold it in place. Jim On Fri, Jul 15, 2022 at 7:54 AM Kevin M McPeak wrote: > Dear Colleagues, > > Over the past year and a half, the LSU nanofabrication facility has > constructed a plasma-enhanced ALD tool with much advice from Scott Butcher > at MEAglow. See photos of the tool here: > https://photos.app.goo.gl/iBMRZnYfKJmJBQtKA > > Our current plan is to house the tool outside the cleanroom and have the > heated/insulated door stick through a hole in the cleanroom wall (1/2" > thick Al honeycomb), see photos. > > We are looking for ideas on the best way to seal the hole in the wall > around the jacket. We are thinking of cutting the wall larger than the > jacket diameter and then fabricating a large rubber grommet around the > jacket. Hopefully, some of you have tools with these kinds of seals and can > provide first-hand experience or even sources for the materials. > > The reactor body is built from a MDC 8" Tee ( > https://www.mdcprecision.com/404041-tee-8-inchflange) with a 3/4" thick > heated jacket wrapped around it. The maximum external temperature of the > jacket is 129 F (touch safe). > > Thanks for your input in advance! > > Regards, > Kevin > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- *Thank you, Jim* *James Mitchell* *Specialty Trades Technician* *Dept. of Electrical and Computer Engineering* *North Carolina State University Nanofabrication Facility (NNF)* *MRC RM243A **Box 7911* *2410 Campus Shore Dr., Raleigh, NC 27606* *jtmitch5 at ncsu.edu* *Desk: 919-515-5394* *Cell: 919-717-7325* -------------- next part -------------- An HTML attachment was scrubbed... URL: From RobertVandusen at cunet.carleton.ca Mon Jul 18 11:02:38 2022 From: RobertVandusen at cunet.carleton.ca (Robert Vandusen) Date: Mon, 18 Jul 2022 15:02:38 +0000 Subject: [labnetwork] Looking for Quartz tube supplier Message-ID: Hi everyone. Here at Carleton we operate 2 older Bruce Furnaces (Atm and LPCVD) and we are looking for a tube (and other quartz parts ) supplier. If anyone has any recommendations and would like to email me (directly if you want) that would be great. I would be curious to know if there are any suppliers that can also chemically pre-clean furnace tubes for CMOS processing. Thanks in advance. Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.martin at louisville.edu Mon Jul 18 11:50:28 2022 From: michael.martin at louisville.edu (Martin, Michael) Date: Mon, 18 Jul 2022 15:50:28 +0000 Subject: [labnetwork] Looking for Quartz tube supplier In-Reply-To: References: Message-ID: Hi Robert, We've had good service from Joseph Luptak - ext.: 1232 Technical Glass Products, Inc. | 881 Callendar Blvd. | Painesville, Ohio 44077 | 440-639-6399 phone | 440-639-1292 fax jluptak at tgpohio.com | www.technicalglass.com Regards, Michael ________________________________ From: labnetwork on behalf of Robert Vandusen Sent: Monday, July 18, 2022 11:02 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Looking for Quartz tube supplier CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hi everyone. Here at Carleton we operate 2 older Bruce Furnaces (Atm and LPCVD) and we are looking for a tube (and other quartz parts ) supplier. If anyone has any recommendations and would like to email me (directly if you want) that would be great. I would be curious to know if there are any suppliers that can also chemically pre-clean furnace tubes for CMOS processing. Thanks in advance. Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From markc at exper-tech.com Mon Jul 18 13:21:53 2022 From: markc at exper-tech.com (mark cooper) Date: Mon, 18 Jul 2022 17:21:53 +0000 Subject: [labnetwork] Looking for Quartz tube supplier In-Reply-To: References: Message-ID: Robert, Do you have drawings of your existing tubes or are you starting from scratch? We do supply some legacy installations with quartz and services. Depends a little on exactly what you need. Feel free to email me off line. Best regards. Mark Cooper President 10 Victor Square, Suite 100 Scotts Valley, CA. 95066 Office: (831) 439-9300 Direct:(831) 440-4422 Mobile:(831) 332-9396 markc at exper-tech.com [cid:image001.png at 01D89A90.33003790] This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments. From: labnetwork On Behalf Of Robert Vandusen Sent: Monday, July 18, 2022 8:03 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Looking for Quartz tube supplier Hi everyone. Here at Carleton we operate 2 older Bruce Furnaces (Atm and LPCVD) and we are looking for a tube (and other quartz parts ) supplier. If anyone has any recommendations and would like to email me (directly if you want) that would be great. I would be curious to know if there are any suppliers that can also chemically pre-clean furnace tubes for CMOS processing. Thanks in advance. Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-2600 ext 5761 Robert_vandusen at cunet.carleton.ca Expert Semiconductor Technology, Inc. Phone: (831) 439-9300 Fax: (831) 439-8139 This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments. mark cooper Expert Semiconductor Technology, Inc. Phone: (831) 439-9300 Fax: (831) 439-8139 This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 49721 bytes Desc: image001.png URL: From na2661 at columbia.edu Tue Jul 19 11:24:36 2022 From: na2661 at columbia.edu (Nava Ariel-Sternberg) Date: Tue, 19 Jul 2022 11:24:36 -0400 Subject: [labnetwork] Die packages and epoxy vendors Message-ID: <00cd01d89b83$a7cf6e80$f76e4b80$@columbia.edu> Hi all, We have a group interested in purchasing packages of PLCC 68 type and some epoxy. Do you have any recommended vendors for these? Thanks, Nava Dr. Nava Ariel-Sternberg Senior Director of CNI Labs Columbia University CEPSR/MC 8903 530 west 120th st. NY NY 10027 Office: 212-8549927 Cell: 201-5627600 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Tue Jul 19 11:47:58 2022 From: kmcpeak at lsu.edu (Kevin M McPeak) Date: Tue, 19 Jul 2022 15:47:58 +0000 Subject: [labnetwork] Vacuum pump inlet trap for ALD tool Message-ID: Dear Colleagues, First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool. As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD. We plan on avoiding chlorinated metalorganic precursors, so a stainless steel trap should be ok. What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts? Regards, Kevin -------------- next part -------------- An HTML attachment was scrubbed... URL: From mroselius at criticalsystemsinc.com Tue Jul 19 12:51:06 2022 From: mroselius at criticalsystemsinc.com (Mitchell Roselius) Date: Tue, 19 Jul 2022 16:51:06 +0000 Subject: [labnetwork] Vacuum pump inlet trap for ALD tool In-Reply-To: References: Message-ID: Hi Kevin, We have used Mass Vac for several applications to protect our dry bed abatement canisters. I don't have experience using the Multi-Trap for ALD Vacuum pumps, but I have been very pleased with the Mass Vac systems. I have worked with David Rolph when needing particle traps. I included his email and phone below in case you want to reach out to him. Email: drolph at massvac.com Phone: 978-835-4666 Best Regards, Mitchell Roselius Eastern Regional Sales Engineer Critical Systems, Inc. Phone: 713.542.5436 Office: 877.572.5515 www.CriticalSystemsInc.com [cid:image001.png at 01D89B6D.A7BC84C0] Note: 7 days per week technical support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork On Behalf Of Kevin M McPeak Sent: Tuesday, July 19, 2022 11:48 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Vacuum pump inlet trap for ALD tool Dear Colleagues, First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool. As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD. We plan on avoiding chlorinated metalorganic precursors, so a stainless steel trap should be ok. What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts? Regards, Kevin This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 8462 bytes Desc: image001.png URL: From rob.breisch at trilliumus.com Tue Jul 19 14:25:04 2022 From: rob.breisch at trilliumus.com (Rob Breisch) Date: Tue, 19 Jul 2022 18:25:04 +0000 Subject: [labnetwork] Vacuum pump inlet trap for ALD tool In-Reply-To: References: Message-ID: <9973C6784F21124B9C9CD4FD39EA8D840303361BE9@MAIL02.trilliumsubfab.com> I agree with Mitchell. Dave Rolph has solved some problems for my customers with MultiTraps and those customers are still using them today. He will tell you if the multitap will work for the ALD application based upon his experience, but I have never consulted him on this application. However, in my experience, most fab customers have chosen to heat the forelines on ALD as opposed to adding traps prior to the pump to prevent things like TMA from depositing. If your chlorinated material has a similar profile (remains in gas phase at pump operating temp), I think it would be worth investigating a foreline heat solution. If you are doing ALD with DCS and Ammonia, there is a known solution adopted from LPCVD Nitride for a water cooled trap after the pump. The total solution is heated foreline, hot running pump, heated exhaust line, then water cooled trap (collecting Ammonium Chloride). The A25S is hot running, so you've got that part solved already. The conundrum here is do you cool the gas stream using the trap and risk condensation in the pump or just try to keep in the vapor phase until it can be trapped or abated. I think it may come down to the act materials you intend to be depositing. It would be good to speak to a technical person from Edwards and Ebara to also get their perspective as they work very closely with ALD system OEMs. Regards, Rob Breisch Vice President, Sales and Marketing [email logo 3] Trillium US, Inc. My Mobile: 801-726-5035 Trillium Toll Free: 800-453-1340 Email: rob.breisch at trilliumus.com WebSite: www.trilliumus.com Follow Trillium on LinkedIn This transmission is intended for the named addressee(s) only and may contain confidential and privileged information. Reading, copying or disseminating this transmission by anyone other than the named addressee(s) is strictly prohibited. If you have received this message in error, please notify us immediately by reply e-mail or phone at (503) 682-3837. From: labnetwork On Behalf Of Mitchell Roselius Sent: Tuesday, July 19, 2022 10:51 AM To: Kevin M McPeak ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Vacuum pump inlet trap for ALD tool Hi Kevin, We have used Mass Vac for several applications to protect our dry bed abatement canisters. I don't have experience using the Multi-Trap for ALD Vacuum pumps, but I have been very pleased with the Mass Vac systems. I have worked with David Rolph when needing particle traps. I included his email and phone below in case you want to reach out to him. Email: drolph at massvac.com Phone: 978-835-4666 Best Regards, Mitchell Roselius Eastern Regional Sales Engineer Critical Systems, Inc. Phone: 713.542.5436 Office: 877.572.5515 www.CriticalSystemsInc.com [cid:image003.png at 01D89B69.035D30E0] Note: 7 days per week technical support Phone: 1-888-218-6308 Email: Fieldservices at criticalsystemsinc.com From: labnetwork > On Behalf Of Kevin M McPeak Sent: Tuesday, July 19, 2022 11:48 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Vacuum pump inlet trap for ALD tool Dear Colleagues, First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool. As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD. We plan on avoiding chlorinated metalorganic precursors, so a stainless steel trap should be ok. What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts? Regards, Kevin This email and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. If you have received this email in error please notify the system manager. This message contains confidential information and is intended only for the individual named. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited.'. If the disclaimer can't be applied, attach the message to a new disclaimer message. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 7265 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 8462 bytes Desc: image003.png URL: From lvchang at Central.UH.EDU Tue Jul 19 20:52:02 2022 From: lvchang at Central.UH.EDU (Chang, Long) Date: Wed, 20 Jul 2022 00:52:02 +0000 Subject: [labnetwork] Ebeam evaporation of Yb Message-ID: <109329CA-7D9C-49B8-A4A2-F9A815CAF6FA@central.uh.edu> Hi all, a user wants to deposit Yb in our ebeam evaporator. Yb does not seem like a health hazard or adversely affects vacuum. It?s packed in oil, so is a bit complex to clean and load it while minimizing exposure to air. Does anyone have experience with Yb to share? Sent from my iPhone From jpalmer at Princeton.EDU Wed Jul 20 09:01:30 2022 From: jpalmer at Princeton.EDU (Joseph E. Palmer) Date: Wed, 20 Jul 2022 09:01:30 -0400 Subject: [labnetwork] Ebeam evaporation of Yb In-Reply-To: <109329CA-7D9C-49B8-A4A2-F9A815CAF6FA@central.uh.edu> References: <109329CA-7D9C-49B8-A4A2-F9A815CAF6FA@central.uh.edu> Message-ID: Yb sublimates (like Cr).? I've only ever thermally deposited it. Never had any issues. Joe On 7/19/2022 8:52 PM, Chang, Long wrote: > Hi all, a user wants to deposit Yb in our ebeam evaporator. Yb does not seem like a health hazard or adversely affects vacuum. It?s packed in oil, so is a bit complex to clean and load it while minimizing exposure to air. Does anyone have experience with Yb to share? > > Sent from my iPhone > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://nam12.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=05%7C01%7Cjpalmer%40princeton.EDU%7Cb06d2efb36ee476482f108da6a4654b7%7C2ff601167431425db5af077d7791bda4%7C0%7C0%7C637939147552652971%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=AzUWmU%2B%2BgKcIUbao8FtwvifnTw8U6rJktgPP%2Buw7AsQ%3D&reserved=0 -- Joseph E. Palmer Chief of Operations for the MNFC PIM, Princeton University Contact: Office: 609-258-4706 Cell: 609-731-8962 From codreanu at udel.edu Thu Jul 21 17:10:09 2022 From: codreanu at udel.edu (Iulian Codreanu) Date: Thu, 21 Jul 2022 17:10:09 -0400 Subject: [labnetwork] Litho engineer position in Delaware Message-ID: Good Afternoon, The NanoFab at University of Delaware is looking for a Lithography Engineer. The main responsibilities are to provide user training and support on the EBPG5200 e-beam writer, MLA100 laser writer, NXQ8006 aligner, Merlin SEM, and miscellaneous lithography equipment. All the tools are six years old or newer. We are located in an area with a relatively low cost of living (e.g. no sales tax and low property taxes) and close to major cities in the Northeast as well as the beach and the mountains. In addition to competitive salaries, UD offers a generous benefit package; some highlights are listed below: -11% University contribution to the retirement plan -Tuition-free undergraduate education for employees and family members -Time off: 22 days of vacation, 7 holidays, and December holiday break -Health insurance plans with modest premiums and excellent coverage. http://www.udel.edu/faculty-staff/human-resources/benefits/ The link to the position (Job 498428) is below: https://careers.udel.edu/cw/en-us/job/498428/lithography-engineer-ud-nanofabrication-facility Could you please forward to anyone who may be interested? I would be happy to answer questions about the position. Thank you very much, Iulian -- iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Fri Jul 22 11:21:11 2022 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Fri, 22 Jul 2022 11:21:11 -0400 Subject: [labnetwork] 3D Printed Spinner Chucks In-Reply-To: References: Message-ID: <6ffc4b08-d59e-55f8-33f9-4718521e5f93@cns.fas.harvard.edu> Hello All, Just a quick few of questions: Has anyone ever tried 3D-printed spinner chucks?? Are any of the common printer resins/final plastic materials compatible with the typical photo solvents? If so, does anyone have an .stl or other 3D-printer compatible file of a spinner chuck (any size) that we could try this out with? Thanks! Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 7/21/2022 5:10 PM, Iulian Codreanu wrote: > Good Afternoon, > > The NanoFab at University of Delaware is looking for a Lithography > Engineer. The main responsibilities are to provide user training and > support on the EBPG5200 e-beam writer, MLA100 laser writer, NXQ8006 > aligner, Merlin SEM, and miscellaneous lithography equipment. All the > tools are six years old or newer. > > We are located in an area with a relatively low cost of living (e.g. > no sales tax and low property taxes) and close to major cities in the > Northeast as well as the beach and the mountains. In addition to > competitive salaries, UD offers a generous benefit package; some > highlights are listed below: > -11% University contribution to the retirement plan > -Tuition-free undergraduate education for employees and family members > -Time off: 22 days of vacation, 7 holidays, and December holiday break > -Health insurance plans with modest premiums and excellent coverage. > http://www.udel.edu/faculty-staff/human-resources/benefits/ > > The link to the position (Job 498428) is below: > https://careers.udel.edu/cw/en-us/job/498428/lithography-engineer-ud-nanofabrication-facility > > Could you please forward to anyone who may be interested? I would be > happy to answer questions about the position. > > Thank you very much, > > Iulian > -- > iulian Codreanu, Ph.D. > Director, Nanofabrication Facility > University of Delaware > Harker ISE Lab, Room 163 > 221 Academy Street > Newark, DE 19716 > 302-831-2784 > http://udnf.udel.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From payne.122 at osu.edu Fri Jul 22 11:48:48 2022 From: payne.122 at osu.edu (Payne, Aaron) Date: Fri, 22 Jul 2022 15:48:48 +0000 Subject: [labnetwork] Looking for a power supply for Proton (Nel) Hydrogen generator Message-ID: <03fe1d75330c4bbdbc2bbcdcfeb457f5@osu.edu> We have an older ProtonOnsite (Nel) hydrogen generator (H series), installed in 2009. We recently had one of our power supplies fail. In the past, we were able to obtain a new power supply from Nel Hydrogen. However, they do not make this same power supply so we will need a retrofit kit for the new power supply. With the cost to install the retrofit kit close to 4x what an old power supply is, we are trying to find an alternative solution. I am looking for any helpful information on obtaining a "spare". The power supply is a 100 V @ 55 amp, 480 V Input from Bel power. Thanks, [The Ohio State University] Aaron Payne Laboratory Process Coordinator Nanotech West Suite 100, 1381 Kinnear Rd , Columbus, OH 43212 614-247-1935 Office payne.122 at osu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 3605 bytes Desc: image001.png URL: From blewis at eng.ufl.edu Fri Jul 22 14:55:12 2022 From: blewis at eng.ufl.edu (Lewis,William) Date: Fri, 22 Jul 2022 18:55:12 +0000 Subject: [labnetwork] 3D Printed Spinner Chucks In-Reply-To: <6ffc4b08-d59e-55f8-33f9-4718521e5f93@cns.fas.harvard.edu> References: <6ffc4b08-d59e-55f8-33f9-4718521e5f93@cns.fas.harvard.edu> Message-ID: Hi Mac, I have printed special adapters for ultra-small pieces for Laurell Spinners and they work well. I used a simulated polypro material on our Stratasys 3D printer and worked well with solvents. For flat surface vacuum sealing chucks without an o-ring you will need to polish the vacuum surface. Bill Lewis Research Service Center University of Florida 1041 Center Dr Gainesville, FL 32611 walewis at ufl.edu 3five2-258-zero5zero7 https://rsc.aux.eng.ufl.edu/ From: labnetwork On Behalf Of Mac Hathaway Sent: Friday, July 22, 2022 11:21 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] 3D Printed Spinner Chucks [External Email] Hello All, Just a quick few of questions: Has anyone ever tried 3D-printed spinner chucks? Are any of the common printer resins/final plastic materials compatible with the typical photo solvents? If so, does anyone have an .stl or other 3D-printer compatible file of a spinner chuck (any size) that we could try this out with? Thanks! Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA 02138 617-495-9012 On 7/21/2022 5:10 PM, Iulian Codreanu wrote: Good Afternoon, The NanoFab at University of Delaware is looking for a Lithography Engineer. The main responsibilities are to provide user training and support on the EBPG5200 e-beam writer, MLA100 laser writer, NXQ8006 aligner, Merlin SEM, and miscellaneous lithography equipment. All the tools are six years old or newer. We are located in an area with a relatively low cost of living (e.g. no sales tax and low property taxes) and close to major cities in the Northeast as well as the beach and the mountains. In addition to competitive salaries, UD offers a generous benefit package; some highlights are listed below: -11% University contribution to the retirement plan -Tuition-free undergraduate education for employees and family members -Time off: 22 days of vacation, 7 holidays, and December holiday break -Health insurance plans with modest premiums and excellent coverage. http://www.udel.edu/faculty-staff/human-resources/benefits/ The link to the position (Job 498428) is below: https://careers.udel.edu/cw/en-us/job/498428/lithography-engineer-ud-nanofabrication-facility Could you please forward to anyone who may be interested? I would be happy to answer questions about the position. Thank you very much, Iulian -- iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Tue Jul 26 08:12:27 2022 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas S) Date: Tue, 26 Jul 2022 12:12:27 +0000 Subject: [labnetwork] Nitrogen Generation Message-ID: Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Jul 26 12:32:00 2022 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Tue, 26 Jul 2022 16:32:00 +0000 Subject: [labnetwork] CHIPS Act - Update In-Reply-To: References: Message-ID: Looks like the Senate could potentially taking up the CHIPS Act very soon for a vote. https://www.cbsnews.com/video/senate-looks-to-hold-vote-on-chips-act/#x Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: labnetwork On Behalf Of Aebersold,Julia W. Sent: Tuesday, June 28, 2022 12:00 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] CHIPS Act - Update CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. Hello everyone. Just a few tidbits to update about the CHIPS Act. The semiconductor industry and the Dept of Commerce are putting pressure on Congress to come to pass the legislation before they recess in August. https://fortune.com/2022/06/28/globalwafers-intel-tsmc-congress-semiconductor-plants-chips-act-funding/ It appears that the American Semiconductor Academy is one of the initiatives driving workforce development and has published a white paper. Executive Committee of the ASA Planning Team: * Prof. Tsu-Jae King Liu (Chair), University of California, Berkeley * Prof. John Dallesasse, University of Illinois at Urbana-Champaign * Prof. Stephen Goodnick, Arizona State University * Prof. Quanxi Jia, State University of New York at Buffalo * Prof. Mark Lundstrom, Purdue University * Prof. Kang Wang, University of California, Los Angeles https://www.semi.org/en/workforce-development/ASA https://www.semi.org/sites/semi.org/files/2022-02/ASA%20whitepaper-01feb2022.pdf Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ From: Aebersold,Julia W. Sent: Wednesday, June 15, 2022 10:40 AM To: labnetwork at mtl.mit.edu Subject: CHIPS Act A quick question for everyone regarding the CHIPS Act that has yet to pass in both the House and Senate. I believe a lot of us feel this will directly impact our facilities due to workforce development needed to support this initiative and there is also real fear of talent poaching. Last week at the UGIM conference we started to have initial discussions about the CHIPS ACT, but no formal discussions. The Labnetwork community and the NNCI network are positioned to be instrumental with this effort (I think), but wanted to ask the following for I'm kind of wondering what is going on. Another thought is that it's just too early at this time since CHIPS has not been approved by Congress yet. 1. Have you been following the CHIPS Act? 2. Has anyone from your institution or state began conversations with NIST or industry regarding this effort? 3. Do you feel you have adequate programs and training in place to help cultivate the future demand needed for semiconductor engineers? Any other nuggets of info would be appreciated. Cheers! Julia Aebersold, Ph.D. Manager, Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From plenvik at ucsb.edu Tue Jul 26 13:02:49 2022 From: plenvik at ucsb.edu (Peder Lenvik) Date: Tue, 26 Jul 2022 10:02:49 -0700 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: We are considering it. Interested to hear anyone else?s experiences. *Peder Lenvik* Sr. Facilities Lead Electrical and Computer Engineering E.S.B. Bldg. #225, Room 1109F University California Santa Barbara, Santa Barbara, Ca. 93106 Cell: (805)698-7461 plenvik at ucsb.edu http://www.nanotech.ucsb.edu *From:* labnetwork *On Behalf Of *Ferraguto, Thomas S *Sent:* Tuesday, July 26, 2022 5:12 AM *To:* Labnetwork (labnetwork at mtl.mit.edu) *Cc:* thomas.ferraguto at baesystems.com *Subject:* [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From deonc69 at illinois.edu Tue Jul 26 13:20:56 2022 From: deonc69 at illinois.edu (Collins, Deon) Date: Tue, 26 Jul 2022 17:20:56 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: We as well as MNMS have in house N2 generation. It has been an eventless move with little to no downtime. We are moving to LN2 in the near future with the cost increases we have recently incurred. Deon D. Collins FACILITY MANAGER Holonyak Lab University of Illinois at Urbana-Champaign 208 N Wright St Rm. 248 | 2250 Urbana, IL 61801 217-300-7531 | deonc69 at illinois.edu [https://webtools.illinois.edu/webservices/js/ds/signature_logo.png] Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. Life is not about watching other people live it. It's about you living your own! From: labnetwork On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 7:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2602 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mr_ Deon D_ Collins.vcf Type: text/x-vcard Size: 2025 bytes Desc: Mr_ Deon D_ Collins.vcf URL: From Aju.Jugessur at Colorado.EDU Tue Jul 26 14:04:42 2022 From: Aju.Jugessur at Colorado.EDU (Aju Jugessur) Date: Tue, 26 Jul 2022 18:04:42 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: <289fbb4db118576d8c1c8c1276df9c82@mail.gmail.com> References: <289fbb4db118576d8c1c8c1276df9c82@mail.gmail.com> Message-ID: Reasons were: 1. More cost-effective in the longer term 2. Reliability with minimal downtime 3. Sized appropriately for future growth and needs Aju From: Peder Lenvik Date: Tuesday, July 26, 2022 at 11:59 AM To: Aju Jugessur , Ferraguto, Thomas S , Labnetwork Cc: thomas.ferraguto at baesystems.com Subject: RE: [labnetwork] Nitrogen Generation What make did you go with? Any ?lessons learned? to share? Peder From: Aju Jugessur Sent: Tuesday, July 26, 2022 10:57 AM To: Peder Lenvik >; Ferraguto, Thomas S >; Labnetwork > Cc: thomas.ferraguto at baesystems.com Subject: Re: [labnetwork] Nitrogen Generation We have added a N2 generator to service our new cleanroom which will be in operations in October. Thanks Aju Aju Jugessur Ph.D. IEEE Sr. Member Director, Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) Facility Member of Inclusive Culture Council (ICC) Member of Engineering Staff Council (ESC) University of Colorado Boulder | College of Engineering & Applied Science 4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019 E-mail: aju.jugessur at colorado.edu Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur www.colorado.edu/facility/cosinc (MBA candidate, CU, Class of 2023) [signature_804197951] Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever (CliftonStrengths) From: labnetwork > on behalf of Peder Lenvik > Date: Tuesday, July 26, 2022 at 11:53 AM To: Ferraguto, Thomas S >, Labnetwork > Cc: thomas.ferraguto at baesystems.com > Subject: Re: [labnetwork] Nitrogen Generation We are considering it. Interested to hear anyone else?s experiences. Peder Lenvik Sr. Facilities Lead Electrical and Computer Engineering E.S.B. Bldg. #225, Room 1109F University California Santa Barbara, Santa Barbara, Ca. 93106 Cell: (805)698-7461 plenvik at ucsb.edu http://www.nanotech.ucsb.edu From: labnetwork > On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 5:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) > Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 6301 bytes Desc: image001.png URL: From rlschoeppner at ucsb.edu Tue Jul 26 14:30:50 2022 From: rlschoeppner at ucsb.edu (Rachel Schoeppner) Date: Tue, 26 Jul 2022 11:30:50 -0700 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: <69B0B00E-0F65-48B2-8908-380E87CAD6B7@ucsb.edu> Good morning, I?m glad this topic has come up again! Our lab has been weighing the option of converting to a nitrogen generator for a few months now but haven?t come to a decision yet. Deon, can you elaborate on why you are considering going to LN2 instead? Has upkeep on the generator become more expensive or is your total N2 need increasing? Best, Rachel > On Jul 26, 2022, at 10:50 AM, Collins, Deon wrote: > > ? > We as well as MNMS have in house N2 generation. It has been an eventless move with little to no downtime. We are moving to LN2 in the near future with the cost increases we have recently incurred. > > DEON D. COLLINS > > FACILITY MANAGER > Holonyak Lab > University of Illinois at Urbana-Champaign > 208 N Wright St Rm. 248 | 2250 > Urbana, IL 61801 > 217-300-7531 | deonc69 at illinois.edu > > > > > Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. > > Life is not about watching other people live it. It?s about you living your own! > > From: labnetwork On Behalf Of Ferraguto, Thomas S > Sent: Tuesday, July 26, 2022 7:12 AM > To: Labnetwork (labnetwork at mtl.mit.edu) > Cc: thomas.ferraguto at baesystems.com > Subject: [labnetwork] Nitrogen Generation > > Colleagues, > > Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? > > FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! > > Tom > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2602 bytes Desc: not available URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mr_ Deon D_ Collins.vcf Type: text/vcard Size: 2025 bytes Desc: not available URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jmaduzi2 at illinois.edu Tue Jul 26 15:07:14 2022 From: jmaduzi2 at illinois.edu (Maduzia, Joseph Walter) Date: Tue, 26 Jul 2022 19:07:14 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: Hello, Like Deon said, we use an N2Gen at MNMS. At MNMS Cleanroom in MechSE at UIUC, we used www.onsitegas.com to purchase a 99.9995% n2 Gen a few years ago. They were cheaper for a better purity and flow rate than Parker. 99.9995% is higher purity than most of our N2 needs, but it's cheaper to supply 99.9995% to everything than to have both low and high purity N2 lines running around the facility. OnSiteGas sales team was great. We did have one issue during install. We used a SS flex hose to supply compressed air to the N2 Gen. This caused the system to "ring" every time it generated N2. I recommend using the really simple rubber hose onsitegas provides to connect from CDA to N2Gen to minimize vibration and resulting noise. The maintenance is super simple. Just a few compressed air filters on a regular schedule. Approx $500 a year. As long as the N2Gen has compressed air, it pumps out nitrogen. This was our sales rep. I'm not sure if he's still there. Michael Montesi Sales Manager-Commercial Products On Site Gas Systems, Inc. 35 Budney Rd. Newington, CT 06111 Phone: 860-667-8888 Ext: 230 http://www.onsitegas.com/ Thank you, JOE MADUZIA Senior Research Engineer, Grainger College of Engineering, MechSE, Univ of IL 2239 LuMEB | (P) 217.244.6302 | https://cleanroom.mechse.illinois.edu/ From: labnetwork On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 7:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From rreger at purdue.edu Tue Jul 26 15:11:31 2022 From: rreger at purdue.edu (Reger, Ronald K) Date: Tue, 26 Jul 2022 19:11:31 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: We at Purdue are just starting to consider this, so we will be very interested in learning from you all. Ron Reger From: labnetwork On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 8:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation ---- External Email: Use caution with attachments, links, or sharing data ---- Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From joseph.losby at ucalgary.ca Tue Jul 26 15:41:47 2022 From: joseph.losby at ucalgary.ca (Joseph Losby) Date: Tue, 26 Jul 2022 19:41:47 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: Hi Everyone, we are in the early stages of building a cleanroom facility and looking into nitrogen production as well. I am interested in any options. The vendors that I have spoken with require N2 purity, flow, volume, and pressure. Any advice on how one would roughly calculate the latter three parameters, or have values based on usage by your facility? I have been using the latter option and scaling our requirements accordingly based on tools we plan on acquiring, and roughly what our facility usage would be. Cheers, Joseph Losby Institute for Quantum Science and Technology University of Calgary ________________________________ From: labnetwork on behalf of Peder Lenvik Sent: July 26, 2022 11:02 AM To: Ferraguto, Thomas S ; Labnetwork Cc: thomas.ferraguto at baesystems.com Subject: Re: [labnetwork] Nitrogen Generation [?EXTERNAL] We are considering it. Interested to hear anyone else?s experiences. Peder Lenvik Sr. Facilities Lead Electrical and Computer Engineering E.S.B. Bldg. #225, Room 1109F University California Santa Barbara, Santa Barbara, Ca. 93106 Cell: (805)698-7461 plenvik at ucsb.edu http://www.nanotech.ucsb.edu From: labnetwork > On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 5:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) > Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From deonc69 at illinois.edu Tue Jul 26 15:52:30 2022 From: deonc69 at illinois.edu (Collins, Deon) Date: Tue, 26 Jul 2022 19:52:30 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: <69B0B00E-0F65-48B2-8908-380E87CAD6B7@ucsb.edu> References: <69B0B00E-0F65-48B2-8908-380E87CAD6B7@ucsb.edu> Message-ID: We considering installation on an LN2 system only because we have a high demand in our facility of liquid N2. We have two MBE?s that use phase separators on those tools. Our LN2 cost have tripled this year therefor an LN2 generator would pay for itself in a few years. We use an estimated 545 gallons of liquid nitrogen(low pressure 50 psi) daily for the 2 MBE?s in operation. We use an estimated 402 gallons of high pressure purge gas daily from another tank. These numbers include bleed off and loss through the facility. This is an addition to the N2 we us from our Parker N2 generator. If we install a LN2 station our facility demands would still require a N2 system due to our high volume of use in the facility. In conjunction with the generation review are looking at a full system review. Deon D. Collins FACILITY MANAGER Holonyak Lab University of Illinois at Urbana-Champaign 208 N Wright St Rm. 248 | 2250 Urbana, IL 61801 217-300-7531 | deonc69 at illinois.edu [https://webtools.illinois.edu/webservices/js/ds/signature_logo.png] Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. Life is not about watching other people live it. It?s about you living your own! From: Rachel Schoeppner Sent: Tuesday, July 26, 2022 1:31 PM To: Collins, Deon Cc: Ferraguto, Thomas S ; Labnetwork (labnetwork at mtl.mit.edu) ; thomas.ferraguto at baesystems.com Subject: Re: [labnetwork] Nitrogen Generation Good morning, I?m glad this topic has come up again! Our lab has been weighing the option of converting to a nitrogen generator for a few months now but haven?t come to a decision yet. Deon, can you elaborate on why you are considering going to LN2 instead? Has upkeep on the generator become more expensive or is your total N2 need increasing? Best, Rachel On Jul 26, 2022, at 10:50 AM, Collins, Deon > wrote: ? We as well as MNMS have in house N2 generation. It has been an eventless move with little to no downtime. We are moving to LN2 in the near future with the cost increases we have recently incurred. Deon D. Collins FACILITY MANAGER Holonyak Lab University of Illinois at Urbana-Champaign 208 N Wright St Rm. 248 | 2250 Urbana, IL 61801 217-300-7531 | deonc69 at illinois.edu [cid:image001.png at 01D8A0F9.BB2C4090] Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. Life is not about watching other people live it. It?s about you living your own! From: labnetwork > On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 7:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) > Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2602 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mr_ Deon D_ Collins.vcf Type: text/x-vcard Size: 2025 bytes Desc: Mr_ Deon D_ Collins.vcf URL: From welander at slac.stanford.edu Tue Jul 26 16:12:28 2022 From: welander at slac.stanford.edu (Welander, Paul B.) Date: Tue, 26 Jul 2022 20:12:28 +0000 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: SLAC is building a new superconducting quantum device foundry, and we've installed a nitrogen generator from Nano-Purification Systems (https://www.n-psi.com/gen2-nitrogen-generators). Our plan is to use the generator for 99.5% pure N2, supplementing our liquid tank which we use for 5N purity. The generator was commissioned only last month, so I can't comment yet on reliability, PM, etc. Paul ****************************************** Paul B. Welander, Ph.D. Technology Innovation Directorate SLAC National Accelerator Laboratory 2575 Sand Hill Road Menlo Park, CA 94025 ****************************************** From: labnetwork On Behalf Of Ferraguto, Thomas S Sent: Tuesday, July 26, 2022 5:12 AM To: Labnetwork (labnetwork at mtl.mit.edu) Cc: thomas.ferraguto at baesystems.com Subject: [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From wsmith at haverford.edu Tue Jul 26 15:27:19 2022 From: wsmith at haverford.edu (Walter Smith) Date: Tue, 26 Jul 2022 15:27:19 -0400 Subject: [labnetwork] How to display an external signal as an image on a Dimension AFM? Message-ID: Colleagues - We have an old but still working Dimension AFM from Digital Instruments (now Bruker), and we are doing a type of electrical AFM using homebuilt electronics. We'd like to display the signal from the homebuilt electronics as an image on the Dimension AFM. We have the "Signal Access Module" breakout box, so we can easily access all the wires connecting between the controller and the AFM. It seems like there are connections on that box that should permit showing the signal applied as an image, but I don't see a way to do it. Maybe we need the right configuration files? Any help would be greatly appreciated! --Walter (Note: We actually have a Bioscope, but I'm almost certain that this is equivalent to a Dimension.) -- Walter F. Smith Paul and Sally Bolgiano Professor of Physics Haverford College 370 Lancaster Ave. Haverford. PA 19041 610-896-1332 Fax: 610-896-4904 wsmith at haverford.edu http://www.haverford.edu/physics-astro/Smith Editor of "Experimental Physics: Principles and Practice for the Laboratory", Taylor & Francis, 2020 https://www.routledge.com/Experimental-Physics-Principles-and-Practice-for-the-Laboratory/Smith/p/book/9781498778473 Author of "Waves and Oscillations: A Prelude to Quantum Mechanics". Click on the link below for the official Oxford University Press advertisement: http://www.elabs3.com/content/18690/html/Smith10.html -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Tue Jul 26 17:34:21 2022 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Tue, 26 Jul 2022 17:34:21 -0400 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: Hi Tom, We installed a 3000 cfh generator in our facility several years back. The installation coincided with the opening of a new facility that was expected to have increased N2 requirements over our old facility. After running the generator for several years, I can say without a doubt it has been worth the effort and cost. Our facility currently runs 3 feeds of N2. We run 99.999% boil-off from our LN2 tank as ?utility N2? for chamber vents, turbo purges, gas cabinet venturis and pneumatics, and several other applications. We also run the LN2 boil-off through purifiers for our ?process N2.? The generator was installed to run 99.9% ?purge N2? for wet deck head casing purges, some pump purges, and other ?waste gas? applications. The generator was sized for 3000 cfh at just over 100psi, and we nominally run at 2000 ? 24000 cfh on a regular basis (wet decks alone require over 1000 cfh continuous flow). Even though it was spec?d at 99.9%, we often produce close to 99.99% N2. At this rate of usage, we saw an ROI of under 2yrs. At a higher rate of usage, we would have even shorter ROI, but we wanted to ensure there was some margin for added capacity. Our system requires up to 210cfm of compressed air at 110psi. It uses pressure swing absorption (PSA) through a carbon molecular sieve (CMS), and the output of the generator goes to a 1000 gal receiver tank before being pushed out to labs. The generator portion of the system is very robust and has low maintenance cost, but the air compressors can require a significant amount of maintenance. Fortunately, ours are maintained by the University facilities group. However, I have one word of caution. Make sure to discuss the cycle times for the PSA process with the air compressor vendors to ensure their compressors can handle the application. In the PSA process, the N2 generation takes place in one of two towers containing a CMS. After the CMS in one tower becomes saturated, the air is diverted to the other tower, and a blow-down is executed to regenerate the first tower. The process is not too dissimilar from a twin-tower dessicant dryer, with the exception that cycle times are much shorter in the PSA process. Our generator cycles every 60sec, which cause the variable drives on the air compressors to constantly ramp up and down, adding more wear and tear than expected. With that in mind, you may want to consider a large buffer tank in between the air compressors and generator. Lastly, we also set up our system for at least some level of redundancy. The air compressor system is mostly redundant, but there can be single points of failure, such as a power outage. In such a failure, we have a cross-over valve that allows the generated N2 lines to be supplied by our LN2 tank. We don?t want to run this way for very long, but it gives us enough time to receive notifications and conserve N2 usage until the compressors and generator come back online. Hope this helps. I?m happy to elaborate further if needed. Best Regards, Matt -- *Matthew T. Moneck, Ph.D* Executive Director, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu *From:* labnetwork *On Behalf Of *Ferraguto, Thomas S *Sent:* Tuesday, July 26, 2022 8:12 AM *To:* Labnetwork (labnetwork at mtl.mit.edu) *Cc:* thomas.ferraguto at baesystems.com *Subject:* [labnetwork] Nitrogen Generation Colleagues, Has anyone taken the leap moved to Nitrogen Generation or at least supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? FYI... I'm no longer at UMass but there is nothing better for fast feed back than the Labnetwork! Tom -------------- next part -------------- An HTML attachment was scrubbed... URL: From a.christian at uq.edu.au Tue Jul 26 21:00:02 2022 From: a.christian at uq.edu.au (Anthony Christian) Date: Wed, 27 Jul 2022 01:00:02 +0000 Subject: [labnetwork] How to display an external signal as an image on a Dimension AFM? In-Reply-To: References: Message-ID: Hi Walter, My local expert suggested this: to add in a signal from a basic voltage source (ie photomultiplier, detector or other analogue voltage source) then the easiest way to do that is via the General I/O BNC?s on the front of the NSV controller. They don?t need the breakout box in that case. Then in the software, they can choose the Input 1 or Input 2 as one of the spare channels (up to 8 channels available to acquire ? so they just choose that one of those channels is Input 1 or Input 2). If they have a more complex signal input (ie high speed AC frequency, pulsed photon counter etc) or they specifically need/want to use the SBOB then that will need some more specific discussion. Thanks, [Signature Specialist Font] Anthony Christian ANFF Qld Manager Australian National Fabrication Facility (Qld Node) [cid:image002.jpg at 01D8A1A8.042B16A0] From: labnetwork On Behalf Of Walter Smith Sent: Wednesday, 27 July 2022 5:27 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] How to display an external signal as an image on a Dimension AFM? Colleagues - We have an old but still working Dimension AFM from Digital Instruments (now Bruker), and we are doing a type of electrical AFM using homebuilt electronics. We'd like to display the signal from the homebuilt electronics as an image on the Dimension AFM. We have the "Signal Access Module" breakout box, so we can easily access all the wires connecting between the controller and the AFM. It seems like there are connections on that box that should permit showing the signal applied as an image, but I don't see a way to do it. Maybe we need the right configuration files? Any help would be greatly appreciated! --Walter (Note: We actually have a Bioscope, but I'm almost certain that this is equivalent to a Dimension.) -- Walter F. Smith Paul and Sally Bolgiano Professor of Physics Haverford College 370 Lancaster Ave. Haverford. PA 19041 610-896-1332 Fax: 610-896-4904 wsmith at haverford.edu http://www.haverford.edu/physics-astro/Smith Editor of "Experimental Physics: Principles and Practice for the Laboratory", Taylor & Francis, 2020 https://www.routledge.com/Experimental-Physics-Principles-and-Practice-for-the-Laboratory/Smith/p/book/9781498778473 Author of "Waves and Oscillations: A Prelude to Quantum Mechanics". Click on the link below for the official Oxford University Press advertisement: http://www.elabs3.com/content/18690/html/Smith10.html -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 1179 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 2471 bytes Desc: image002.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Input selection in NSV.PDF Type: application/pdf Size: 209044 bytes Desc: Input selection in NSV.PDF URL: From codreanu at udel.edu Wed Jul 27 10:41:59 2022 From: codreanu at udel.edu (Iulian Codreanu) Date: Wed, 27 Jul 2022 10:41:59 -0400 Subject: [labnetwork] Nitrogen Generation In-Reply-To: References: Message-ID: <132dcee8-3465-4e0a-7df2-ed01e500898d@udel.edu> Hi Joseph, In my experience the pressure of the gaseous N2 entering the building is of the order of 100 psig. You can estimate the required flow from the utility matrix prepared by your design team. If other labs in the building need N2, please add their estimated usage to the flow. LN2 tanks come in various volumes. The one I had at UPenn was 6,000 gallons and come with two vaporizers that alternate on their roles of generating gaseous N2. At UDel I have two 3,000 gallons tanks, each with two alternating vaporizers. At both UPenn and UDel, the tank(s) feed both the cleanroom and the research labs in the building. To avoid major issues with ice on the vaporizers, please try to avoid having the LN2 tank(s) and vaporizer(s) on the North side of the building. Cheers, Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 7/26/2022 3:41 PM, Joseph Losby wrote: > Hi Everyone, we are in the early stages of building a cleanroom > facility and looking into nitrogen production as well.? I am > interested in any options.? The vendors that I have spoken with > require N2 purity, flow, volume, and pressure.? Any advice on how one > would roughly calculate the latter three parameters, or have values > based on usage by your facility?? I have been using the latter option > and scaling our requirements accordingly based on tools we plan on > acquiring, and roughly what our facility usage would be. > > Cheers, > > Joseph Losby > Institute for Quantum Science and Technology > University of Calgary > ------------------------------------------------------------------------ > *From:* labnetwork on behalf of Peder > Lenvik > *Sent:* July 26, 2022 11:02 AM > *To:* Ferraguto, Thomas S ; Labnetwork > > *Cc:* thomas.ferraguto at baesystems.com > *Subject:* Re: [labnetwork] Nitrogen Generation > [?EXTERNAL] > > > > We are considering it. > > Interested to hear anyone else?s experiences. > > *Peder Lenvik* > > Sr. Facilities Lead > > Electrical and Computer Engineering > > E.S.B. Bldg. #225, Room 1109F > > University California Santa Barbara, Santa Barbara, Ca. 93106 > > Cell: (805)698-7461 > > plenvik at ucsb.edu > > http://www.nanotech.ucsb.edu > > *From:* labnetwork *On Behalf Of > *Ferraguto, Thomas S > *Sent:* Tuesday, July 26, 2022 5:12 AM > *To:* Labnetwork (labnetwork at mtl.mit.edu) > *Cc:* thomas.ferraguto at baesystems.com > *Subject:* [labnetwork] Nitrogen Generation > > Colleagues, > > Has anyone taken the leap moved to Nitrogen Generation or at least > supplemented with Nitrogen Generation (for 3 9's house Nitrogen)? > > FYI... I'm no longer at UMass but there is nothing better for fast > feed back than the Labnetwork! > > Tom > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From lvchang at Central.UH.EDU Thu Jul 28 15:43:58 2022 From: lvchang at Central.UH.EDU (Chang, Long) Date: Thu, 28 Jul 2022 19:43:58 +0000 Subject: [labnetwork] Oxford Plasmalab 100 CM Gauge problem Message-ID: <4D97B36A-D45F-4076-99FC-E998E5AEC7E4@cougarnet.uh.edu> Hello, The CM gauge is readying a random value from 0 to 100 mTorr. I am able to get it to work by unplugging power, tap it with screw driver, and plug in power. This CM gauge is less than a year old. The old gauge was replaced because of the same problem. I have just contacted Oxford for their suggestions, but I also wanted to check if anyone has experienced this problem. While I?m at it, our penning gauge will read 1e-9 from time to time. This is easily fixed by replugging it. It?s been like this for many years. Anyone know what might be wrong here? This gauge is 14 years old, so perhaps it just needs to be cleaned? Thanks, Long -------------- next part -------------- An HTML attachment was scrubbed... URL: From hollingshead.19 at osu.edu Fri Jul 29 10:40:06 2022 From: hollingshead.19 at osu.edu (Hollingshead, Dave) Date: Fri, 29 Jul 2022 14:40:06 +0000 Subject: [labnetwork] Drytek Dry Pumps Message-ID: Hi all, Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives. Thanks, -Dave Dave Hollingshead Manager of Research Operations - Nanotech West Lab The Ohio State University Suite 100, 1381 Kinnear Road, Columbus, OH 43212 614.292.1355 Office hollingshead.19 at osu.edu osu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From joseph.losby at ucalgary.ca Fri Jul 29 11:50:30 2022 From: joseph.losby at ucalgary.ca (Joseph Losby) Date: Fri, 29 Jul 2022 15:50:30 +0000 Subject: [labnetwork] 100kV EBL sustainability questions Message-ID: Hi Everyone, We have funding for a 50kV EBL system but are seeking additional funding for an upgrade to a 100kV system. At the forefront of our thoughts is the issue of tool sustainability. The service contracts are approximately $115k USD, and there are additional costs for labor (EBL scientist), software licenses, utilities, and whatever could go wrong that's not covered under tool warranty. What are your experiences with running a 100kV system in your facility? Do revenues cover the service contracts? How long did it take to get utilization up to your current levels? Do you have advice on how we can minimize headaches for the future? What issues have you run into? I appreciate in advance your thoughts about these questions or anything else regarding the tool. I was recently introduced to this mailing list and find it to be a valuable resource. Cheers, Joe Joseph Losby, PhD. Institute for Quantum Science and Technology University of Calgary -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.rooks at yale.edu Fri Jul 29 14:05:18 2022 From: michael.rooks at yale.edu (Michael Rooks) Date: Fri, 29 Jul 2022 14:05:18 -0400 Subject: [labnetwork] 100kV EBL sustainability questions In-Reply-To: References: Message-ID: We have a fairly small engineering program here, so the user fees from e-beam lithography just barely cover the service contract on an ebpg. Larger places (Cornell, MIT, etc) can cover most of their operating costs. But in a small research university we always operate at a loss. That's not a problem, if the university is willing to cover the balance. Service contracts: you really want the contract to include the cost of tip changes, and also the chillers. Some companies do not cover the chillers, leading to some frustrating service issues. Read the fine print. (Raith covers the water chillers, which is great.) Raith offers lower priced contracts if you are willing to put a cap on the parts and labor. This is usually a very good deal, unless your employer hits you with a spending freeze. Keep in mind that you can negotiate for N years of service when you buy the machine, so this can be included in the capital expense. BTW 100 kV is not much better than 50 kV. It helps with thick resist > 1 um, but the resolution is about the same. What you really get at 100 kV is better automation and better software, and maybe also a faster stage. -------------------------------- Michael Rooks nano.yale.edu On Fri, Jul 29, 2022 at 1:25 PM Joseph Losby wrote: > Hi Everyone, > > We have funding for a 50kV EBL system but are seeking additional funding > for an upgrade to a 100kV system. > > At the forefront of our thoughts is the issue of tool sustainability. The > service contracts are approximately $115k USD, and there are additional > costs for labor (EBL scientist), software licenses, utilities, and whatever > could go wrong that's not covered under tool warranty. > > What are your experiences with running a 100kV system in your facility? > Do revenues cover the service contracts? How long did it take to get > utilization up to your current levels? Do you have advice on how we can > minimize headaches for the future? What issues have you run into? > > I appreciate in advance your thoughts about these questions or anything > else regarding the tool. I was recently introduced to this mailing list > and find it to be a valuable resource. > > Cheers, > Joe > > Joseph Losby, PhD. > Institute for Quantum Science and Technology > University of Calgary > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Fri Jul 29 14:18:55 2022 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Fri, 29 Jul 2022 14:18:55 -0400 Subject: [labnetwork] Drytek Dry Pumps In-Reply-To: References: Message-ID: Hi Dave, We have a Drytek PS-80 pump that was backing our Versaline ICP Etcher and running BCl3 process gas for many years. When it needed maintenance in 2016 we replaced it with an Edwards QDP-80, and it is now waiting for the day that it can return to pumping of the Versaline. As far as performance I would rate the Edwards QDP and Drytek PS series comparable, but as far as ambient noise, I think the Drytek runs with less dB and also uses a little less N2. Two pennies... Best Regards, Mark ________________________________________________________________ Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu > On Jul 29, 2022, at 10:40 AM, Hollingshead, Dave wrote: > > Hi all, > > Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives. > > Thanks, > -Dave > > Dave Hollingshead > Manager of Research Operations ? Nanotech West Lab > The Ohio State University > Suite 100, 1381 Kinnear Road, Columbus, OH 43212 > 614.292.1355 Office > hollingshead.19 at osu.edu osu.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: images.png Type: image/png Size: 720 bytes Desc: not available URL: From yaofootball at gmail.com Fri Jul 29 14:21:18 2022 From: yaofootball at gmail.com (Football) Date: Fri, 29 Jul 2022 13:21:18 -0500 Subject: [labnetwork] Drytek Dry Pumps In-Reply-To: References: Message-ID: Dave, We have a Drytek PS80 that came with a system when the system was purchased. I found that it has been really hard to get any response, feedback or support from a Drytek's rep.... Thanks, *Fubo Rao, Ph.D.,* *Nanofabrication Cleanroom Manager,* *Center for Nanoscale Materials,* *Argonne National Laboratory* *9700 S. Cass Ave, Lemont, IL 60439* *Phone: 630-252-5708* *Email: **frao at anl.gov* On Fri, Jul 29, 2022 at 12:29 PM Hollingshead, Dave wrote: > Hi all, > > > > Does anyone have experience (good, bad, or otherwise) with Drytek dry > screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most > of the dry pumps in our lab are Edwards, but since lead times have recently > become a major issue we are considering alternatives. > > > > Thanks, > > -Dave > > > > *Dave Hollingshead * > Manager of Research Operations ? Nanotech West Lab > *The Ohio State University* > > Suite 100, 1381 Kinnear Road, Columbus, OH 43212 > 614.292.1355 Office > hollingshead.19 at osu.edu osu.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From yaofootball at gmail.com Fri Jul 29 14:34:05 2022 From: yaofootball at gmail.com (Football) Date: Fri, 29 Jul 2022 13:34:05 -0500 Subject: [labnetwork] Oxford Plasmalab 100 CM Gauge problem In-Reply-To: <4D97B36A-D45F-4076-99FC-E998E5AEC7E4@cougarnet.uh.edu> References: <4D97B36A-D45F-4076-99FC-E998E5AEC7E4@cougarnet.uh.edu> Message-ID: Long, It feels like your backing pump might have a problem if your backing pump has worked for a big number of hours. Put a gauge close to the rough pump inlet and check the pressure . You might want to check the cooling water for the turbo pump as well. As for the 14 years old penning gauge, I would have it changed. Thanks, *Fubo Rao, Ph.D.,* *Nanofabrication Cleanroom Manager,* *Center for Nanoscale Materials,* *Argonne National Laboratory* *9700 S. Cass Ave, Lemont, IL 60439* *Phone: 630-252-5708* *Email: **frao at anl.gov* On Thu, Jul 28, 2022 at 8:36 PM Chang, Long wrote: > Hello, > > The CM gauge is readying a random value from 0 to 100 mTorr. I am able to > get it to work by unplugging power, tap it with screw driver, and plug in > power. This CM gauge is less than a year old. The old gauge was replaced > because of the same problem. I have just contacted Oxford for their > suggestions, but I also wanted to check if anyone has experienced this > problem. > > While I?m at it, our penning gauge will read 1e-9 from time to time. This > is easily fixed by replugging it. It?s been like this for many years. > Anyone know what might be wrong here? This gauge is 14 years old, so > perhaps it just needs to be cleaned? > > Thanks, > Long > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hollingshead.19 at osu.edu Fri Jul 29 17:08:32 2022 From: hollingshead.19 at osu.edu (Hollingshead, Dave) Date: Fri, 29 Jul 2022 21:08:32 +0000 Subject: [labnetwork] Drytek Dry Pumps In-Reply-To: References: Message-ID: Thanks everyone for the quick and helpful input on this! Hope you all have a great weekend. -Dave From: labnetwork On Behalf Of Hollingshead, Dave Sent: Friday, July 29, 2022 10:40 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Drytek Dry Pumps Hi all, Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major Hi all, Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives. Thanks, -Dave Dave Hollingshead Manager of Research Operations ? Nanotech West Lab The Ohio State University Suite 100, 1381 Kinnear Road, Columbus, OH 43212 614.292.1355 Office hollingshead.19 at osu.edu osu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Fri Jul 29 17:12:23 2022 From: codreanu at udel.edu (Iulian Codreanu) Date: Fri, 29 Jul 2022 17:12:23 -0400 Subject: [labnetwork] 100kV EBL sustainability questions In-Reply-To: References: Message-ID: <3e7ab914-50f1-4800-b3b4-7acc1da82f72@udel.edu> Hi Joe, We've been open for six years and the fiscal year that ended at the end of June has been the best so far in terms of EBL usage/revenue and overall.? Things were ramping nicely for the first three years and COVID messed up the previous two fiscal years pretty badly. As in Mike's case, the revenue generated by the EGPG5200 at University of Delaware only covers the cost of the service contract. Mike already offered great advice on service contracts. Try to buy things like BEAMER upfront (from the tool vendor or software vendor, whichever makes sense) while your folks are excited about a new writer. Depending on your user base and your operating model, you may or may not need a dedicated EBL staff person. If I ignore the service contact and the labor costs, my e-beam writer does not cost much to run as most of the utilities are covered by Facilities here. Cheers, Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu On 7/29/2022 2:05 PM, Michael Rooks wrote: > We have a fairly small engineering program here, so the user fees from > e-beam lithography just barely cover the service contract on an ebpg. > Larger places (Cornell, MIT, etc) can cover most of their operating > costs. But in a small research university we always operate at a loss. > That's not a problem, if the university is willing to cover the balance. > > Service contracts: you really want the contract to include the cost of > tip changes, and also the chillers. Some companies do not cover the > chillers, leading to some frustrating service issues. Read the fine > print. (Raith covers the water chillers, which is great.) Raith offers > lower priced contracts if you are willing to put a cap on the parts > and labor. This is usually a very good deal, unless your employer hits > you with a spending freeze. Keep in mind that you can negotiate for N > years of service when you buy the machine, so this can be included in > the capital expense. > > BTW 100 kV is not much better than 50 kV. It helps with thick resist > > 1 um, but the resolution is about the same. What you really get at 100 > kV is better automation and better software, and maybe also a faster > stage. > > -------------------------------- > Michael Rooks > nano.yale.edu > > > On Fri, Jul 29, 2022 at 1:25 PM Joseph Losby > wrote: > > Hi Everyone, > > We have funding for a 50kV EBL system but are seeking additional > funding for an upgrade to a 100kV system. > > At the forefront of our thoughts is the issue of tool > sustainability.? The service contracts are approximately $115k > USD, and there are additional costs for labor (EBL scientist), > software licenses, utilities, and whatever could go wrong that's > not covered under tool warranty. > > What are your experiences with running a 100kV system in your > facility?? Do revenues cover the service contracts? How long did > it take to get utilization up to your current levels?? Do you have > advice on how we can minimize headaches for the future?? What > issues have you run into? > > I appreciate in advance your thoughts about these questions or > anything else regarding the tool.? I was recently introduced to > this mailing list and find it to be a valuable resource. > > Cheers, > Joe > > Joseph Losby, PhD. > Institute for Quantum Science and Technology > University of Calgary > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From shimonel at savion.huji.ac.il Sun Jul 31 01:15:30 2022 From: shimonel at savion.huji.ac.il (Shimon Eliav) Date: Sun, 31 Jul 2022 05:15:30 +0000 Subject: [labnetwork] Oxford Plasmalab 100 CM Gauge problem In-Reply-To: <4D97B36A-D45F-4076-99FC-E998E5AEC7E4@cougarnet.uh.edu> References: <4D97B36A-D45F-4076-99FC-E998E5AEC7E4@cougarnet.uh.edu> Message-ID: Hi Long, We keep spare parts for both gauges. Once the problem starts they are replaced and sent for repair/cleaning/calibration. Regards, Shimon Hebrew University of Jerusalem From: labnetwork On Behalf Of Chang, Long Sent: Thursday, 28 July 2022 22:44 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Oxford Plasmalab 100 CM Gauge problem Hello, The CM gauge is readying a random value from 0 to 100 mTorr. I am able to get it to work by unplugging power, tap it with screw driver, and plug in power. This CM gauge is less than a year old. The old gauge was replaced because of the same problem. I have just contacted Oxford for their suggestions, but I also wanted to check if anyone has experienced this problem. While I?m at it, our penning gauge will read 1e-9 from time to time. This is easily fixed by replugging it. It?s been like this for many years. Anyone know what might be wrong here? This gauge is 14 years old, so perhaps it just needs to be cleaned? Thanks, Long -------------- next part -------------- An HTML attachment was scrubbed... URL: