[labnetwork] Vacuum pump inlet trap for ALD tool

[Mitchell Roselius]

Hi Kevin,

We have used Mass Vac for several applications to protect our dry bed abatement canisters. I don't have experience using the Multi-Trap for ALD Vacuum pumps, but I have been very pleased with the Mass Vac systems.

I have worked with David Rolph when needing particle traps. I included his email and phone below in case you want to reach out to him.

Email: drolph at massvac.com<mailto:drolph at massvac.com>
Phone: 978-835-4666

Best Regards,

Mitchell Roselius
Eastern Regional Sales Engineer
Critical Systems, Inc.
Phone: 713.542.5436
Office: 877.572.5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>
[cid:image001.png at 01D89B6D.A7BC84C0]
Note: 7 days per week technical support
Phone: 1-888-218-6308
Email: Fieldservices at criticalsystemsinc.com

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Kevin M McPeak
Sent: Tuesday, July 19, 2022 11:48 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Vacuum pump inlet trap for ALD tool

Dear Colleagues,

First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool.

As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD. We plan on avoiding chlorinated metalorganic precursors, so a stainless steel trap should be ok.

What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts?

Regards,
Kevin
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