[labnetwork] 100kV EBL sustainability questions

[Michael Rooks]

We have a fairly small engineering program here, so the user fees from
e-beam lithography just barely cover the service contract on an ebpg.
Larger places (Cornell, MIT, etc) can cover most of their operating costs.
But in a small research university we always operate at a loss. That's not
a problem, if the university is willing to cover the balance.

Service contracts: you really want the contract to include the cost of tip
changes, and also the chillers. Some companies do not cover the chillers,
leading to some frustrating service issues. Read the fine print. (Raith
covers the water chillers, which is great.) Raith offers lower priced
contracts if you are willing to put a cap on the parts and labor. This is
usually a very good deal, unless your employer hits you with a spending
freeze. Keep in mind that you can negotiate for N years of service when you
buy the machine, so this can be included in the capital expense.

BTW 100 kV is not much better than 50 kV. It helps with thick resist > 1
um, but the resolution is about the same. What you really get at 100 kV is
better automation and better software, and maybe also a faster stage.

--------------------------------
Michael Rooks
nano.yale.edu


On Fri, Jul 29, 2022 at 1:25 PM Joseph Losby <joseph.losby at ucalgary.ca>
wrote:

> Hi Everyone,
>
> We have funding for a 50kV EBL system but are seeking additional funding
> for an upgrade to a 100kV system.
>
> At the forefront of our thoughts is the issue of tool sustainability.  The
> service contracts are approximately $115k USD, and there are additional
> costs for labor (EBL scientist), software licenses, utilities, and whatever
> could go wrong that's not covered under tool warranty.
>
> What are your experiences with running a 100kV system in your facility?
> Do revenues cover the service contracts? How long did it take to get
> utilization up to your current levels?  Do you have advice on how we can
> minimize headaches for the future?  What issues have you run into?
>
> I appreciate in advance your thoughts about these questions or anything
> else regarding the tool.  I was recently introduced to this mailing list
> and find it to be a valuable resource.
>
> Cheers,
> Joe
>
> Joseph Losby, PhD.
> Institute for Quantum Science and Technology
> University of Calgary
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