[labnetwork] Oxford Plasmalab 100 CM Gauge problem

Football yaofootball at gmail.com
Fri Jul 29 14:34:05 EDT 2022


Long,


It feels like your backing pump might have a problem if your backing pump
has worked for a big number of hours. Put a gauge close to the rough pump
inlet and check the pressure .  You might want to check the cooling water
for the turbo pump as well. As for the 14 years old penning gauge, I would
have it changed.


Thanks,



*Fubo Rao, Ph.D.,*

*Nanofabrication Cleanroom Manager,*

*Center for Nanoscale Materials,*

*Argonne National Laboratory*

*9700 S. Cass Ave, Lemont, IL 60439*

*Phone: 630-252-5708*

*Email: **frao at anl.gov* <frao at anl.gov>

On Thu, Jul 28, 2022 at 8:36 PM Chang, Long <lvchang at central.uh.edu> wrote:

> Hello,
>
> The CM gauge is readying a random value from 0 to 100 mTorr. I am able to
> get it to work by unplugging power, tap it with screw driver, and plug in
> power. This CM gauge is less than a year old. The old gauge was replaced
> because of the same problem. I have just contacted Oxford for their
> suggestions, but I also wanted to check if anyone has experienced this
> problem.
>
> While I’m at it, our penning gauge will read 1e-9 from time to time. This
> is easily fixed by replugging it. It’s been like this for many years.
> Anyone know what might be wrong here? This gauge is 14 years old, so
> perhaps it just needs to be cleaned?
>
> Thanks,
> Long
>
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