[labnetwork] Large-scale Nanopatterning

[Brian Thibeault]

UCSB  has an ASML DUV stepper as well.  I'll contact you directly.

Brian Thibeault

On Sat, Mar 5, 2022, 12:38 PM Michael Rooks <michael.rooks at yale.edu> wrote:

> Cornell CNF has an ASML stepper with 200 nm resolution.
> https://www.cnfusers.cornell.edu/node/3
>
> --------------------------------
>
>
> On Sat, Mar 5, 2022 at 8:15 AM Chang, Long <lvchang at central.uh.edu> wrote:
>
>> Hello,
>>
>> I need to print 300nm dots with center to center spacing of 500nm on a
>> hexagonal lattice. Currently doing it with EBL, but need to do it faster
>> and cheaper. What are my options? Can this be done with a Stepper somewhere?
>>
>> Thanks,
>> Long
>>
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