[labnetwork] UV light bulbs for mask aligner

Owain Clark odc1n08 at soton.ac.uk
Thu Mar 31 04:16:30 EDT 2022


Something to consider is possibly a UV-LED upgrade for less total cost of ownership over time and the removal of lamp sourcing issues. I do not know the US situation so well but for UK-EU there are a couple of independent vendors I am aware of who may be able to assist:

https://www.lithosupport.com/
https://www.idonus.com/index.php?path=products&category=UV-EXP

It is something I am lightly looking into, I recall the last quote was approximately £8k per EVG aligner but like all things that was years ago and has probably gone up since


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Morrison, Richard H., Jr
Sent: 30 March 2022 22:10
To: na2661 at columbia.edu; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] UV light bulbs for mask aligner

CAUTION: This e-mail originated outside the University of Southampton.
HI Nava,

We use Bulbtronics they stock USHIO lamps

https://www.bulbtronics.com/<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.bulbtronics.com%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7C41d0bd41f09b46ec34ec08da12a8cd6f%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637842813455413720%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=6hDPYMkG5pRDYkZpUTVqaPqKmf1vHbJEGpgi8XK9VsQ%3D&reserved=0>


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Nava Ariel-Sternberg
Sent: Wednesday, March 30, 2022 1:48 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] UV light bulbs for mask aligner

Hi all,
After 6 months of waiting for Atlanta light bulbs (both 350W and 1000W) we are forced to look for alternative vendors.
If you have any recommended vendors with a reasonable lead time on UV bulbs for mask aligners please share your secret.
Thanks,
Nava

Dr. Nava Ariel-Sternberg
Senior Director of CNI Labs
Columbia University
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600


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